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Compact integration of GaN-based photonic chip with microfluidics system

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Abstract

This Letter reports a demonstration of integrating a tiny GaN-based photonic chip with a PDMS microfluidics system. The photonic chip containing InGaN/GaN quantum wells is responsible for light emission and photodetection and fabricated through standard microfabrication techniques. The PDMS-enclosed chip is formed adjacent to the fluidic channel and operates in reflection mode, enabling the optical signals coupled into and out of the fluidic channel without the aid of external optics. The luminescence and photo-detecting properties are thoroughly characterized, confirming that the chip is capable of tracking the continuously flowing microdroplets with the changes of absorbance, length, and flow rate. The novel, to the best of our knowledge, photonic integration presented in this Letter is a significant step forward in the development of compact, miniature, and self-contained on-chip sensing systems, which are of great value in portable lab-on-a-chip applications.

© 2021 Optical Society of America

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