Abstract

Shapes from the diffuse polarization method effectively realize the three-dimensional (3D) reconstruction of the object surface by using the polarization information of the diffuse reflection light. However, due to the nonconvexity of the particle surface, the reconstruction often falls into a local optimal solution. Indeed, the depth image obtained by the scanning electron microscope has serious stripe noise, which distorts the surface texture of the particle. In this Letter, a variable exponential function regularization method is proposed to realize 3D reconstruction for the nonconvexity of the surface and inclination of the particles. We focus on the gradient unintegrability caused by the skew and surface undulation of the specimen. An adaptive 3D reconstruction method is proposed based on variable exponential function regularization to fit the surface function of the particle. Experimental results of finite-difference time-domain simulations and actual imaging demonstrate the effectiveness of the method.

© 2021 Optical Society of America

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