Abstract
We proposed an ultra-thin Si-padded ${{\rm Si}_3}{{\rm N}_4}$ waveguide consisting of a very thin Si slab underneath a ${{\rm Si}_3}{{\rm N}_4}$ strip separated by a ${{\rm SiO}_2}$ layer. The Si slab and the ${{\rm Si}_3}{{\rm N}_4}$ strip form a hybrid waveguide mode, where the mode field is confined in these two structures. The measured waveguide propagation loss is 0.055 dB/cm, and the bending loss is 0.09 dB per 90° bend, depending on the bending radius. Because part of the waveguide mode is distributed in the Si slab, this waveguide structure has potential for implementing low-loss and high-speed photonic integrated circuits.
© 2021 Optical Society of America
Full Article | PDF ArticleMore Like This
Jinfeng Mu, Meindert Dijkstra, Yean-Sheng Yong, Frans B. Segerink, Kerstin Wörhoff, Marcel Hoekman, Arne Leinse, and Sonia M. García-Blanco
Opt. Lett. 42(19) 3812-3815 (2017)
Henry C. Frankis, Khadijeh Miarabbas Kiani, Dawson B. Bonneville, Chenglin Zhang, Samuel Norris, Richard Mateman, Arne Leinse, Nabil D. Bassim, Andrew P. Knights, and Jonathan D. B. Bradley
Opt. Express 27(9) 12529-12540 (2019)
Xiao Hu, Dingyi Wu, Daigao Chen, Lei Wang, Xi Xiao, and Shaohua Yu
Opt. Lett. 46(24) 6019-6022 (2021)