High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

Jennifer Rebellato; Regina Soufli; Evgueni Meltchakov; Eric Gullikson; Sébastien de Rossi; Franck Delmotte

doi:10.1364/OL.384734

Optics Letters
Vol. 45,
Issue 4,
pp. 869-872
(2020)
•https://doi.org/10.1364/OL.384734

High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

Jennifer Rebellato, Regina Soufli, Evgueni Meltchakov, Eric Gullikson, Sébastien de Rossi, and Franck Delmotte

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Jennifer Rebellato, Regina Soufli, Evgueni Meltchakov, Eric Gullikson, Sébastien de Rossi, and Franck Delmotte, "High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers," Opt. Lett. 45, 869-872 (2020)

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- Thin Films and Other Optical Design and Fabrication
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About this Article
History
- Original Manuscript: November 29, 2019
- Revised Manuscript: January 10, 2020
- Manuscript Accepted: January 10, 2020
- Published: February 10, 2020

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Abstract

In this Letter, we have developed new and highly efficient periodic multilayer mirrors Al/Sc, Al/Sc/SiC, and Mo/Al/Sc with optimized reflectance at wavelengths between 40 and 65 nm. We have reached record values in measured peak reflectance: 57.5% at 44.7 nm and 46.5% at 51 nm, with Al/Sc/SiC at near-normal incidence. Furthermore, to the best of our knowledge, we have achieved the largest reported bandwidth with Mo/Al/Sc at 57 nm and the narrowest bandwidth with Al/Sc at a 60 nm wavelength. These new and promising results demonstrate that Al/Sc-based multilayer coatings are excellent candidates for future generations of extreme ultraviolet (EUV) instruments for solar physics, EUV lasers, and attosecond science, in a wavelength range that has not been fully explored.

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#	Structure	$d_{A l}$ (nm)	$d_{S c}$ (nm)	$d_{S i C (M o)}$ (nm)	$d_{T o p}$ (nm)	$D_{M L}$ (nm)
9055	$[A l / S c]_{25}$	14.3	9.7	—	5.23	23.9
9049	$[A l / S c / S i C]_{20}$	10.18	9.71	4.17	—	24.06
9051	$[M o / A l / S c]_{20}$	7.92	11.40	4.56	5.05	23.87
9056	$[A l / S c]_{25}$	16	13.5	—	5	29.51
9060	$[A l / S c / S i C]_{20}$	11.97	12.11	5.68	—	30.02
8030	$[A l / S c]_{10}$	20.04	19.88	—	3.02	39.92
9052	$[M o / A l / S c]_{7}$	11.32	16.72	8.13	9.73	36.17

Angle	#	$R_{s i m u}$ (%)	$λ_{s i m u}$ (nm)	$R_{\exp}$ (%)	$λ_{\exp}$ (nm)	${B W}_{\exp}$ (nm)
$θ = {2.5}^{\circ}$	9055	58.0	44.8	56.0	44.7	3.5
$θ = {2.5}^{\circ}$	9049	59.5	44.6	57.5	44.7	4.1
$θ = 5^{\circ}$	9051	55.9	45	48.1	45.2	4.6
	9056	48.8	51.5	42.4	51.0	4.1
	9060	52.4	50.8	46.5	51.0	5.6
	8030	37.2	62.8	27.2	60.6	5.2
	9052	40.7	58.8	37.4	57.3	11.2

Al/Sc-Based Multilayer Values
$R_{\exp}$	57.5%	46.5%	37.4%	27.2%
$λ_{\exp}$	44.7 nm	51 nm	57.3 nm	60.6 nm
${B W}_{\exp}$	4.1 nm	5.6 nm	11.2 nm	5.2 nm
Structure	Al/Sc/SiC	Al/Sc/SiC	Mo/Al/Sc	Al/Sc
Literature Values
$R_{\exp}$	56.6%	46.7%	38.8%	23%
$λ_{\exp}$	44.7 nm	49 nm	55.7 nm	60 nm
${B W}_{\exp}$	4.8 nm	4.9 nm	5.6 nm	6.5 nm
Structure Ref.	Sc/Cr/Si [20]	Sc/Cr/Si [20]	AlMg/SiC [4]	Si/Tb [8]

#	Structure	$d_{A l}$ (nm)	$d_{S c}$ (nm)	$d_{S i C (M o)}$ (nm)	$d_{T o p}$ (nm)	$D_{M L}$ (nm)
9055	$[A l / S c]_{25}$	14.3	9.7	—	5.23	23.9
9049	$[A l / S c / S i C]_{20}$	10.18	9.71	4.17	—	24.06
9051	$[M o / A l / S c]_{20}$	7.92	11.40	4.56	5.05	23.87
9056	$[A l / S c]_{25}$	16	13.5	—	5	29.51
9060	$[A l / S c / S i C]_{20}$	11.97	12.11	5.68	—	30.02
8030	$[A l / S c]_{10}$	20.04	19.88	—	3.02	39.92
9052	$[M o / A l / S c]_{7}$	11.32	16.72	8.13	9.73	36.17

Angle	#	$R_{s i m u}$ (%)	$λ_{s i m u}$ (nm)	$R_{\exp}$ (%)	$λ_{\exp}$ (nm)	${B W}_{\exp}$ (nm)
$θ = {2.5}^{\circ}$	9055	58.0	44.8	56.0	44.7	3.5
$θ = {2.5}^{\circ}$	9049	59.5	44.6	57.5	44.7	4.1
$θ = 5^{\circ}$	9051	55.9	45	48.1	45.2	4.6
	9056	48.8	51.5	42.4	51.0	4.1
	9060	52.4	50.8	46.5	51.0	5.6
	8030	37.2	62.8	27.2	60.6	5.2
	9052	40.7	58.8	37.4	57.3	11.2

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