Abstract
Measuring rough surfaces is challenging because the proven topographic methods are impaired by the adverse effects of diffuse light. In our method, the measured surface is marked by fluorescent nanobeads allowing a complete suppression of diffuse light by bandpass filtering. Light emitted by each fluorescent bead is shaped to a double-helix point spread function used for three-dimensional bead localization on the surface. This non-interferometric measurement of rough surface topography is implemented in a vibration resistant setup. The comparison of our method with vertical scanning interferometry shows that a commercial profiler is surpassed when ground glass surfaces with steep slopes are measured.
© 2020 Optical Society of America
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