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Characterization of nanoporous Al2O3 films at terahertz frequencies

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Abstract

Terahertz birefringence in nanoporous ${{\rm Al}_2}{{\rm O}_3}$ films grown on Al substrates is characterized nondestructively by polarization-resolved terahertz spectroscopy. Sparse deconvolution is used to find the film thicknesses from the data, showing good agreement with the values measured directly by destructive cross-sectional field-emission scanning electron microscopy.

© 2020 Optical Society of America

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