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Passive fluidic micro-sensor with all-optical readout realized using a direct laser writing technique

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Abstract

In this Letter, we report on design and realization of solvent-sensitive microstructures based on three-dimensional periodic lattices fabricated in a polymeric photoresist. Sensing is based on reversible size change in polymeric microstructures upon immersion in wetting and non-wetting solvents. Its readout is achieved purely optically by observing modification of a Moiré pattern formed by grating-like deformable and rigid polymeric structures. A compact micro-sensor using these principles was realized using a direct laser writing technique in the photoresist. High sensitivity and easy optical readout of the sensor were demonstrated. In the future, sensors based on similar principles may find applications in microfluidic systems, such as lab-on-a-chip.

© 2019 Optical Society of America

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