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High-precision 3D surface topography measurement using high-stable multi-wavelength digital holography referenced by an optical frequency comb

Dahi Ghareab Abdelsalam Ibrahim and Takeshi Yasui

Abstract

High-stable, two-wavelength, digital holography referenced by an optical frequency comb is presented. The technique is demonstrated by using optical waves from an external cavity laser diode phase-locked to a mode-locked Er-doped fiber comb laser light. The mixed beat signal is stabilized at 30 MHz by a sensitive proportional integral derivative controller. The tunable continuous-waves stabilized with frequency uncertainty of 5×10−11 are employed to investigate large stepped structures.

© 2018 Optical Society of America

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