Abstract
We present a convenient, low-cost, and mass-production-compatible technique for the fabrication of strip-loaded waveguides. The technique is based on the atomic layer deposition of a slab waveguide, nanoimprinting of a strip, and integration of two structures by lamination. The guiding layer is chosen to be a 200 nm thick titanium dioxide film. The waveguide characteristics are determined by the use of ring resonators. The technique is demonstrated for titanium dioxide thin films, but it is applicable to any other material that meets the refractive index difference condition between the loading strip and the slab waveguide.
© 2017 Optical Society of America
Full Article | PDF ArticleMore Like This
Matthieu Roussey, Leila Ahmadi, Ségolène Pélisset, Markus Häyrinen, Arijit Bera, Ville Kontturi, Janne Laukkanen, Ismo Vartiainen, Seppo Honkanen, and Markku Kuittinen
Opt. Lett. 42(2) 211-214 (2017)
Yiwen Wang, Zhihua Chen, Lutong Cai, Yunpeng Jiang, Houbin Zhu, and Hui Hu
Opt. Mater. Express 7(11) 4018-4028 (2017)
Manon Lamy, Kamal Hammani, Juan Arocas, Christophe Finot, and Jean-Claude Weeber
Opt. Lett. 42(14) 2778-2781 (2017)