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Micro-cantilever-based fiber optic hydrophone fabricated by a femtosecond laser

Jie Liu, Lei Yuan, Jincheng Lei, Wenge Zhu, Baokai Cheng, Qi Zhang, Yang Song, Chuan Chen, and Hai Xiao

Abstract

We report an open cavity, cantilever-based fiber optic Fabry–Perot interferometer hydrophone. The hydrophone is made of fused silica material, and its micro-cantilever beam is directly fabricated by femtosecond (fs) laser micromachining. The theoretical analyses and experimental verifications of the frequency response of the sensor are presented.

© 2017 Optical Society of America

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