Abstract

A self-mixing (SM) laser displacement sensor coupled with a microelectromechanical system (MEMS) accelerometer is presented that enables reliable displacement measurements even in the case of a nonstationary laser head. The proposed technique allows the use of SM-based sensors for embedded applications. The system resolution is currently limited to approximately $300\mathrm{nm}$ due to the noise characteristics of the currently used accelerometer. It is shown that this resolution can be greatly improved by the use of a low noise accelerometer.

© 2011 Optical Society of America

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