Abstract

An IR imaging system based on a microelectromechanical system (MEMS) microcantilever is uncooled, low-cost, and more reliable than traditional systems. However, it is difficult to avoid unwanted shape distortions in fabrication, which can degrade image quality in many ways, so we use holography to compensate for these shape distortions in an optical readout focal plane array (FPA) IR imaging system. The experiment shows that it is a feasible way to improve system performance, especially when it is too difficult to perfect the techniques of an FPA fabrication.

© 2009 Optical Society of America

Image quality improvement by the structured light illumination method in an optical readout cantilever array infrared imaging system

Yun Feng, Yuejin Zhao, Ming Liu, Liquan Dong, Xiaomei Yu, Lingqin Kong, Wei Ma, and Xiaohua Liu
Opt. Lett. 40(7) 1390-1393 (2015)

Optical readout method based on a narrow-strip filter for microcantilever array sensing

Cheng Gong, Mei Hui, Liquan Dong, Yuejin Zhao, Xiaomei Yu, and Xiaohua Liu
Opt. Lett. 37(7) 1187-1189 (2012)

High-speed infrared imaging by an uncooled optomechanical focal plane array

Yun Feng, Yuejin Zhao, Liquan Dong, Ming Liu, Xueyan Li, Wei Ma, Xiaomei Yu, Lingqin Kong, and Xiaohua Liu
Appl. Opt. 54(34) 10189-10195 (2015)

A novel optical readout infrared FPA imaging system with fiber reference channel

Xuhong Chu, Yuejin Zhao, Liquan Dong, Qian Jia, Lingqin Kong, Xiaomei Yu, Xiaohua Liu, Cheng Gong, and Yufeng Jin
Opt. Express 20(9) 9516-9522 (2012)

Optical readout sensitivity of deformed microreflector for uncooled infrared detector: theoretical model and experimental validation

Teng Cheng, Qingchuan Zhang, Binbin Jiao, Dapeng Chen, and Xiaoping Wu
J. Opt. Soc. Am. A 26(11) 2353-2361 (2009)