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Interferometric quasi-absolute tests for aspherics using a radial shear position

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Abstract

Increasing accuracy requirements in aspheric metrology make the development of absolute testing procedures for aspheric surfaces important. One strategy is transferring the standard practice three-position test for spheres to aspherics. The three-position test, however, involves a cat’s eye position and therefore has certain drawbacks. We propose an absolute testing method for rotationally symmetric aspherics where the cat’s eye position is replaced with a radially sheared position. Together with rotational movements of the specimen, the surface deviations can be obtained in an absolute manner. To demonstrate the validity of the procedure, we present a measurement result for a sphere and compare it with a result obtained by the standard three-position test.

© 2009 Optical Society of America

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