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Highly coherent injection-seeded 13.2 nm tabletop soft x-ray laser

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Abstract

We report a dramatic improvement of the spatial coherence and beam divergence (0.66mrad) of a 13.2nm wavelength Ni-like Cd tabletop laser by injection seeding the soft x-ray laser amplifier with high-harmonics pulses generated in a Ne gas jet. This phase coherent laser is an attractive light source for at-wavelength interferometry of extreme ultraviolet lithography optics and other applications.

© 2008 Optical Society of America

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