Abstract
We demonstrate rapid fabrication of submicrometer-diameter pores in borosilicate glass using femtosecond laser machining and subsequent wet-etch techniques. This approach allows direct and repeatable fabrication of high-quality pores with diameters of . Such small pores coupled with the desirable electrical and chemical properties of glass enable sensitive resistive-pulse analysis to determine the size and concentration of macromolecules and nanoparticles. Plasma-enhanced chemical vapor deposition allows further reduction of pore diameters to below .
© 2008 Optical Society of America
Full Article | PDF ArticleMore Like This
Minrui Yu, Hyun-Seok Kim, and Robert H. Blick
Opt. Express 17(12) 10044-10049 (2009)
Ganapathy Senthil Murugan, Michalis N. Zervas, Yuwapat Panitchob, and James S. Wilkinson
Opt. Lett. 36(1) 73-75 (2011)
R. S. Taylor, C. Hnatovsky, E. Simova, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum
Opt. Lett. 28(12) 1043-1045 (2003)