Abstract

Transmission resonant filters in a waveguide with vertical gratings have been realized in silicon on insulator wafers. Experimental studies of fabricated devices show a broad stopband of $\sim 19\mathrm{nm}$ in the center of which exists a narrow transmission band of $\sim 0.5\mathrm{nm}$ with a quality factor of $\sim 3000$. These resonant cavities are useful for laser cavities, switches, modulators, detectors, and tunable filters.

© 2007 Optical Society of America