Abstract

We demonstrate an approach of single-exposure holographic lithography for controllable fabrication of large-scale two-dimensional square and hexagonal compound photonic crystals. In the sublattices, both circular and elliptical micropores on a $100\mathrm{nm}$ scale can be achieved. Theoretical analysis reveals that the inverse structure of a sample possesses a unique complete photonic bandgap pair in high frequency regions. This method is very robust for the general fabrication of complex periodic microstructures on the optical scale.

© 2006 Optical Society of America

Formation principles of two-dimensional compound photonic lattices by one-step holographic lithography

W. D. Mao, J. W. Dong, Y. C. Zhong, G. Q. Liang, and H. Z. Wang
Opt. Express 13(8) 2994-2999 (2005)

Fabrication of three-dimensional photonic crystals with two-beam holographic lithography

Ying Liu, Shou Liu, and Xiangsu Zhang
Appl. Opt. 45(3) 480-483 (2006)

Flexible fabrication of three-dimensional optical-domain photonic crystals using a combination of single-laser-exposure diffractive-optics lithography and template inversion

Debashis Chanda, Nicole Zachari, Moez Haque, Mi Li Ng, and Peter R. Herman
Opt. Lett. 34(24) 3920-3922 (2009)

Larger bandgaps of two-dimensional triangular photonic crystals fabricated by holographic lithography can be realized by recording geometry design

X. L. Yang, L. Z. Cai, and Y. R. Wang
Opt. Express 12(24) 5850-5856 (2004)

Design and fabrication of two-dimensional holographic photonic quasi crystals with high-order symmetries

Weidong Mao, Guanquan Liang, Hui Zou, Rui Zhang, Hezhou Wang, and Zhaohua Zeng
J. Opt. Soc. Am. B 23(10) 2046-2050 (2006)