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Manufacture of a 10 - km -scale radius-of-curvature surface by use of a thin-film coating technique

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Abstract

We tried a method of making a 10-km-class large-radius-of-curvature surface that would satisfy both low microroughness (0.1nmrms) and low waviness (λ100) by forming a spherically curved film with a low-loss coating technique on a flat surface produced by mechanical (chemical) polishing. We obtained a SiO2 surface with a 10255±250-m radius of spherical curvature that had less than λ30 waviness and 0.4-nm microroughness over a 9-cm-diameter area.

© 2005 Optical Society of America

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