Abstract

We propose and analyze a new photonic crystal cavity design that supports a dipole mode with a quality factor greater than 20,000. Such a high quality factor is obtained by precise tuning of the cavity length with minimal disruption of the surrounding photonic crystal. A fabrication procedure based on dry etching of InGaAsP material in $\mathrm{HI}/{\mathrm{H}}_2/\mathrm{Ar}$ is used to demonstrate photonic crystal lasers with smooth and straight sidewalls. These room-temperature lasers concentrate optical energy in air and are suitable for use as tunable lasers and chemical sensors.

© 2004 Optical Society of America

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