Abstract

Cyclic errors that are due to optical leakage limit the precision of displacement measurements made with optical interferometers. A method for real-time estimation of leakage components is introduced and is used to implement a novel passive technique for suppression of cyclic nonlinearities that uses only adjustments of existing polarizers and quarter-wave plates. This approach is used to reduce the cyclic error from 3 nm to 300 pm for an interferometer operating at a wavelength of 1320 nm.

© 2002 Optical Society of America

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