Abstract
Arrays as large as of microdischarge devices having inverted pyramidal silicon cathodes and composite dielectrics have been fabricated and characterized with Ne gas. The lifetimes, reliability, and ignition characteristics of the arrays are superior to those of earlier designs having a single polymer dielectric. Operating voltages as low as 150 V for a pixel array and 1000 Torr of Ne have been measured. Single pyramidal cathode devices operate at voltages as low as 113 V when the Ne pressure is 900 Torr.
© 2001 Optical Society of America
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