Abstract

Arrays as large as 15×15 of microdischarge devices having inverted pyramidal silicon cathodes 50 μm×50 μm and SiO2Si3N4polymer composite dielectrics have been fabricated and characterized with Ne gas. The lifetimes, reliability, and ignition characteristics of the arrays are superior to those of earlier designs having a single polymer dielectric. Operating voltages as low as 150   V for a 10×10 pixel array and 1000  Torr of Ne have been measured. Single 50 μm×50 μm pyramidal cathode devices operate at voltages as low as 113  V when the Ne pressure is 900 Torr.

© 2001 Optical Society of America

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