Abstract

Mass-transport smoothing has been used to reduce the surface roughness of a gallium phosphide (GaP) microlens from 50.0 nm (rms) to 6.5 nm (rms) while preserving the original surface figure. The initial GaP surface was fabricated by dry-etch transfer of a polymer microlens into a GaP substrate. This result demonstrates that mass transport can significantly improve the performance of economically feasible high-refractive-index micro-optical elements having arbitrary surface profiles.

© 2000 Optical Society of America

Mass-transport fabrication of off-axis and prismatic gallium phosphide optics

Todd A. Ballen and James R. Leger
Appl. Opt. 38(14) 2979-2985 (1999)

Off-axis refractive mass-transported gallium-phosphide microlens array for the reduction of distortion in an optical interconnect system

Todd A. Ballen and James R. Leger
Appl. Opt. 39(32) 6028-6033 (2000)

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Daniel M. Hartmann, Osman Kibar, and Sadik C. Esener
Opt. Lett. 25(13) 975-977 (2000)

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Akira Saitoh, Tamihiro Gotoh, and Keiji Tanaka
Opt. Lett. 25(24) 1759-1761 (2000)

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Hongwen Ren, Yun-Hsing Fan, and Shin-Tson Wu
Opt. Lett. 29(14) 1608-1610 (2004)