Abstract

A technique is described for calculating the roughness and probability density function of a surface based on the decorrelation of imaged speckle with wavelength. The decorrelation provides information about the first-order statistical properties of the imaged surface. Surfaces with rms roughnesses of greater than ~1 μm. can be scanned over the 80-nm range of the dye-laser system.

© 1993 Optical Society of America

Speckle decorrelation in surface profilometry by wavelength scanning interferometry

Ichirou Yamaguchi, Akihiro Yamamoto, and Susumu Kuwamura
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Speckle: statistics and interferometric decorrelation effects in complex ABCD optical systems

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