Abstract

We demonstrate a simple way of increasing the data acquisition and processing speed in a scanning white-light interferometer for surface topography measurement. The method consists of undersampling interference data and processing the resultant sub-Nyquist interferograms in the frequency domain to create complete three-dimensional images. Experimental results on a 20-μm step height standard show a measurement repeatability of 10 nm.

© 1993 Optical Society of America

Deep learning for sub-Nyquist sampling scanning white light interferometry

Hangang Liang, Honghai Shen, Penghui Liu, Mingyuan Dong, Chunhui Yan, Lingtong Meng, and Dong Yao
Opt. Lett. 48(22) 5976-5979 (2023)

Scanning white-light interferometry with a supercontinuum source

Ivan Kassamakov, Kalle Hanhijärvi, Imad Abbadi, Juha Aaltonen, Hanne Ludvigsen, and Edward Hæggström
Opt. Lett. 34(10) 1582-1584 (2009)

Fast surface profiling by spectral analysis of white-light interferograms with Fourier transform spectroscopy

Matthew Hart, David G. Vass, and Mark L. Begbie
Appl. Opt. 37(10) 1764-1769 (1998)

Synthesized source for white-light sensing systems

Y. J. Rao, Y. N. Ning, and D. A. Jackson
Opt. Lett. 18(6) 462-464 (1993)

Measurement of large discontinuities using single white light interferogram

Paul Kumar Upputuri, Li Gong, Haifeng Wang, Manojit Pramanik, Krishna Mohan Nandigana, and Mahendra Prasad Kothiyal
Opt. Express 22(22) 27373-27380 (2014)