Abstract

We report generation of tunable VUV radiation in the range 117–150 nm by four-wave difference-frequency mixing of a tunable ArF excimer laser with an Nd:YAG-pumped dye laser. The four-wave mixing occurs through two-photon resonant enhancement of χ(3) through the E,F1g+(E,υ=2,J=03) state(s) of H2 or the 4p 56p(3/2)2 state of Kr in the process (2ω193ωdye = ωVUV). An estimate of energy efficiency yields 3 × 10−5 near 133 nm for both H2 and Kr. Even though several rotational resonances fall within the natural 193-nm bandwidth, mixing with broadband ArF output in H2 yields single-line VUV output with a FWHM of 3.5 cm−1 at half the efficiency compared with that of line-narrowed operation.

© 1991 Optical Society of America

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