Abstract

We report a technique of integrating planar Fresnel microlenses with InGaAs/GaAs-based vertical-cavity surface-emitting laser arrays by selectively ion-beam milling the substrate. Depending on the application, one can focus, collimate, and bend the individual laser beams using such microlenses. An example is presented where a 32 × 32 array of microlenses, each with an aperture of 80 μm and a focal length of 108 μm is integrated with a laser array. As expected, arrays of focused beams, each with a 2-μm spot size, are generated at a distance of approximately 110 μm.

© 1991 Optical Society of America

Binary phase Fresnel lenses for generation of two-dimensional beam arrays

Kasra Rastani, Abdellatif Marrakchi, Sarry F. Habiby, William M. Hubbard, Harold Gilchrist, and Robert E. Nahory
Appl. Opt. 30(11) 1347-1354 (1991)

Investigation of hybrid microlens integration with vertical-cavity surface-emitting lasers for free-space optical links

Yongqi Fu and Ngoi Kok Ann Bryan
Opt. Express 10(9) 413-418 (2002)

Light flowers from coherent vertical-cavity surface-emitting laser arrays

Y. Yadin, J. Scheuer, Y. Gross, and M. Orenstein
Opt. Lett. 27(21) 1908-1910 (2002)

Optical characteristics of two-dimensional coherently coupled vertical-cavity surface-emitting laser arrays

Robert A. Morgan and Keisuke Kojima
Opt. Lett. 18(5) 352-354 (1993)

Parallel free-space optical interconnect based on arrays of vertical-cavity lasers and detectors with monolithic microlenses

Eva M. Strzelecka, Duane A. Louderback, Brian J. Thibeault, Geoff B. Thompson, Kent Bertilsson, and Larry A. Coldren
Appl. Opt. 37(14) 2811-2821 (1998)