Integration of planar Fresnel microlenses with vertical-cavity surface-emitting laser arrays

Abstract

We report a technique of integrating planar Fresnel microlenses with InGaAs/GaAs-based vertical-cavity surface-emitting laser arrays by selectively ion-beam milling the substrate. Depending on the application, one can focus, collimate, and bend the individual laser beams using such microlenses. An example is presented where a 32 × 32 array of microlenses, each with an aperture of 80 μm and a focal length of 108 μm is integrated with a laser array. As expected, arrays of focused beams, each with a 2-μm spot size, are generated at a distance of approximately 110 μm.

© 1991 Optical Society of America

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