Abstract

We demonstrate an optical system that splits one laser beam into an array of N × N equal-intensity beams. It consists of a grating and a diffractive lens, which are integrated on one side of a single planar quartz-glass substrate. The grating and the lens are fabricated with multiple discrete phase levels by using photolithography and thin-film deposition.

© 1990 Optical Society of America

Two-dimensional array of diffractive microlenses fabricated by thin film deposition

Jürgen Jahns and Susan J. Walker
Appl. Opt. 29(7) 931-936 (1990)

Photorefractive integrated-optical switch arrays in LiNbO₃

Lewis B. Aronson and Lambertus Hesselink
Opt. Lett. 15(1) 30-32 (1990)

Integrated optical imaging system

Jurgen Jahns
Appl. Opt. 29(14) 1998-1998 (1990)

Array generation with multilevel phase gratings

Susan J. Walker and Jürgen Jahns
J. Opt. Soc. Am. A 7(8) 1509-1513 (1990)

Planar-integrated Talbot array illuminators

Markus Testorf and Jürgen Jahns
Appl. Opt. 37(23) 5399-5407 (1998)