Abstract

The technique of scanning tunneling microscopy has been applied to topographic mapping of two optical surfaces: a ruled grating replica and a diamond-turned gold mirror. We have demonstrated the ability of the scanning tunneling microscope to measure surface topography of a ruled-grating replica over an area of 2 μm × 2 μm. Furthermore, surface structure on a diamond-turned gold mirror was observed that could not be detected by any other type of surface-sensitive microscope. These measurements yield information necessary for gaining a complete understanding of the diamond-turning process.

© 1986 Optical Society of America

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