Abstract

The feasibility of using Raman spectroscopy to monitor the process of crystallization and structural transformation of thin films in real time has been demonstrated experimentally. Although only amorphous titania films are investigated, the technique can be applied to other optical films and to probe the deposition of such films as well.

© 1985 Optical Society of America

Thickness-dependent crystallization on thermal anneal for titania/silica nm-layer composites deposited by ion beam sputter method

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