High Q-factor near infrared and visible Al<sub>2</sub>O<sub>3</sub>-based parallel-plate capacitor kinetic inductance detectors

Samir Beldi; Faouzi Boussaha; Jie Hu; Alessandro Monfardini; Alessandro Traini; Florence Levy-Bertrand; Christine Chaumont; Manuel Gonzales; Josiane Firminy; Florent Reix; Michael Rosticher; Shan Mignot; Michel Piat; Piercarlo Bonifacio

doi:10.1364/OE.27.013319

High Q-factor near infrared and visible Al₂O₃-based parallel-plate capacitor kinetic inductance detectors

Samir Beldi, Faouzi Boussaha, Jie Hu, Alessandro Monfardini, Alessandro Traini, Florence Levy-Bertrand, Christine Chaumont, Manuel Gonzales, Josiane Firminy, Florent Reix, Michael Rosticher, Shan Mignot, Michel Piat, and Piercarlo Bonifacio

Optics Express
Vol. 27,
Issue 9,
pp. 13319-13328
(2019)
•https://doi.org/10.1364/OE.27.013319

Get Citation
Copy Citation Text
Samir Beldi, Faouzi Boussaha, Jie Hu, Alessandro Monfardini, Alessandro Traini, Florence Levy-Bertrand, Christine Chaumont, Manuel Gonzales, Josiane Firminy, Florent Reix, Michael Rosticher, Shan Mignot, Michel Piat, and Piercarlo Bonifacio, "High Q-factor near infrared and visible Al₂O₃-based parallel-plate capacitor kinetic inductance detectors," Opt. Express 27, 13319-13328 (2019)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Get PDF (2548 KB)
Set citation alerts
Save article

Related Topics
Table of Contents Category
- Optical Devices and Detectors
Optics & Photonics Topics
?

The topics in this list come from the OSA Optics and Photonics Topics applied to this article.

About this Article
History
- Original Manuscript: February 20, 2019
- Revised Manuscript: April 4, 2019
- Manuscript Accepted: April 6, 2019
- Published: April 25, 2019

Accessible

Open Access

Abstract

We designed, fabricated and characterized parallel-plate capacitor lumped-element kinetic inductance detectors (LEKIDs) to operate at near-infrared and optical wavelengths (0.3 −1 μm). The widely used interdigitated capacitor is replaced by a parallel-plate capacitor which, for a given resonance frequency, has a larger capacitance value within a much smaller space allowing to strongly reduce the size of the pixels. The parallel-plate capacitor LEKID array comprises 10 × 10 pixels. The inductive meander is patterned from stoichiometric 52 nm-thick TiN film (T_c ≈4.6 K). The parallel-plate capacitor is made of a TiN base electrode, Al₂O₃ dielectric and Nb upper electrode. More than 90 resonances out of 100 within the 0.994-1.278 GHz band were identified. The resonances exhibit internal Q-factors up to ∼370 000 at 72 mK. The array was illuminated using a white light and 890 nm monochromatic near infrared LEDs. The estimated quasiparticle lifetime is τ_qp≈13 µs.

Full Article | PDF Article

OSA Recommended Articles

Large-format platinum silicide microwave kinetic inductance detectors for optical to near-IR astronomy

P. Szypryt, S. R. Meeker, G. Coiffard, N. Fruitwala, B. Bumble, G. Ulbricht, A. B. Walter, M. Daal, C. Bockstiegel, G. Collura, N. Zobrist, I. Lipartito, and B. A. Mazin
Opt. Express 25(21) 25894-25909 (2017)

A superconducting focal plane array for ultraviolet, optical, and near-infrared astrophysics

Benjamin A. Mazin, Bruce Bumble, Seth R. Meeker, Kieran O’Brien, Sean McHugh, and Eric Langman
Opt. Express 20(2) 1503-1511 (2012)

Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity

Alessandro Pitanti, Johannes M. Fink, Amir H. Safavi-Naeini, Jeff T. Hill, Chan U. Lei, Alessandro Tredicucci, and Oskar Painter
Opt. Express 23(3) 3196-3208 (2015)

References

View by:
Article Order
|
Year
|
Author
|
Publication

B. A. Mazin, B. Bumble, S. R. Meeker, K. O’Brien, S. McHugh, and E. Langman, “A superconducting focal plane array for ultraviolet, optical, and near-infrared astrophysics,” Opt. Express 20(2), 1503–1511 (2012).
[Crossref] [PubMed]
P. Szypryt, S. R. Meeker, G. Coiffard, N. Fruitwala, B. Bumble, G. Ulbricht, A. B. Walter, M. Daal, C. Bockstiegel, G. Collura, N. Zobrist, I. Lipartito, and B. A. Mazin, “Large-format platinum silicide microwave kinetic inductance detectors for optical to near-IR astronomy,” Opt. Express 25(21), 25894–25909 (2017).
[Crossref] [PubMed]
P. Szypryt, B. A. Mazin, G. Ulbricht, B. Bumble, S. R. Meeker, C. Bockstiegel, and A. B. Walter, “High quality factor platinum silicide microwave kinetic inductance detectors,” Appl. Phys. Lett. 109(15), 151102 (2016).
[Crossref]
B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. V. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, and M. Johnson, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub Astronomical Soc. Pacific 125, 1348–1361 (2013).
S. R. Meeker, B. A. Mazin, A. B. Walter, P. Strader, N. Fruitwala, C. Bockstiegel, P. Szypryt, G. Ulbricht, G. Coiffard, B. Bumble, G. Cancelo, T. Zmuda, K. Treptow, N. Wilcer, G. Collura, R. Dodkins, I. Lipartito, N. Zobrist, M. Bottom, J. C. Shelton, D. Mawet, J. C. van Eyken, G. Vasisht, and E. Serabyn, “DARKNESS: a microwave kinetic inductance detector integral field spectrograph for high-contrast astronomy,” Astronomical Soc. Pacific 130(988), 065001 (2018).
[Crossref]
S. Doyle, P. Mauskopf, J. Naylon, A. Porch, and C. Duncombe, “Lumped element kinetic inductance detectors,” J. Low Temp. Phys. 151(1-2), 530–536 (2008).
[Crossref]
T. R. Lauer, “The photometry of undersampled point-spread functions,” Astronomical Soc. Pacific. 111(765), 1434–1443 (1999).
[Crossref]
S. Beldi, F. Boussaha, C. Chaumont, S. Mignot, F. Reix, A. Tartari, T. Vacelet, A. Traini, M. Piat, and P. Bonifacio, “Design of near infrared and visible kinetic inductance detectors using MIM capacitors,” J. Low Temp. Phys. 193(3-4), 184–188 (2018).
[Crossref]
J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92(15), 152505 (2008).
[Crossref]
G. Coiffard, B.Mazin, Paul Szypryt, G. Ulbricht, M. Daaland, and N. Zobris, “Parallel plate microwave kinetic inductance detectors,” Low Temperature Detectors (LTD) workshop, Japan, July (2017).
O. Noroozian, J. Gao, J. Zmuidzinas, H. G. LeDuc, B. A Mazin, B. Young, B. Cabrera, and A. Miller, “Two‐level system noise reduction for microwave kinetic inductance detectors,” AIP Conf. Proc.1185, 148–151 (2009).
P. Szypryt, “Development of Microwave Kinetic Inductance Detectors for Applications in Optical to Near-IR Astronomy,” PhD dissertation, University of California - Santa Barbara (2017).
S. Doyle, “Lumped Element Kinetic Inductance Detectors,” PhD dissertation, Cardiff University (2008).
[Crossref]
G. Coiffard, K. F. Schuster, E. F. C. Driessen, S. Pignard, M. Calvo, A. Catalano, J. Goupy, and A. Monfardini, “Uniform non-stoichiometric titanium nitride thin films for improved kinetic inductance detector arrays,” J. Low Temp. Phys. 184(3-4), 654–660 (2016).
[Crossref]
M. R. Vissers, J. Gao, J. S. Kline, M. Sandberg, M. P. Weides, D. S. Wisbey, and D. P. Pappas, “Characterization and in-situ monitoring of sub-stoichiometric adjustable superconducting critical temperature titanium nitride growth,” Thin Solid Films 548, 485–488 (2013).
[Crossref]
http://www.sonnetsoftware.com/
S. J. Weber, K. W. Murch, D. H. Slichter, R. Vijay, and I. Siddiqi, “Single crystal silicon capacitors with low microwave loss in the single photon regime,” Appl. Phys. Lett. 98(17), 172510 (2011).
[Crossref]
H. Paik and K. D. Osborn, “Reducing quantum-regime dielectric loss of silicon nitride for superconducting quantum circuits,” Appl. Phys. Lett. 96(7), 072505 (2010).
[Crossref]
K. Cicak, D. Li, J. A. Strong, M. S. Allman, F. Altomare, A. J. Sirois, J. D. Whittaker, J. D. Teufel, and R. W. Simmonds, “Low-loss superconducting resonant circuits using vacuum-gap-based microwave components,” Appl. Phys. Lett. 96(9), 093502 (2010).
[Crossref]
P. K. Day, H. G. LeDuc, B. A. Mazin, A. Vayonakis, and J. Zmuidzinas, “A broadband superconducting detector suitable for use in large arrays,” Nature 425(6960), 817–821 (2003).
[Crossref] [PubMed]
H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Tianium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97(10), 102509 (2010).
[Crossref]
J. M. Martinis, K. B. Cooper, R. McDermott, M. Steffen, M. Ansmann, K. D. Osborn, K. Cicak, S. Oh, D. P. Pappas, R. W. Simmonds, and C. C. Yu, “Decoherence in Josephson qubits from dielectric loss,” Phys. Rev. Lett. 95(21), 210503 (2005).
[Crossref] [PubMed]

2018 (2)

S. R. Meeker, B. A. Mazin, A. B. Walter, P. Strader, N. Fruitwala, C. Bockstiegel, P. Szypryt, G. Ulbricht, G. Coiffard, B. Bumble, G. Cancelo, T. Zmuda, K. Treptow, N. Wilcer, G. Collura, R. Dodkins, I. Lipartito, N. Zobrist, M. Bottom, J. C. Shelton, D. Mawet, J. C. van Eyken, G. Vasisht, and E. Serabyn, “DARKNESS: a microwave kinetic inductance detector integral field spectrograph for high-contrast astronomy,” Astronomical Soc. Pacific 130(988), 065001 (2018).
[Crossref]

S. Beldi, F. Boussaha, C. Chaumont, S. Mignot, F. Reix, A. Tartari, T. Vacelet, A. Traini, M. Piat, and P. Bonifacio, “Design of near infrared and visible kinetic inductance detectors using MIM capacitors,” J. Low Temp. Phys. 193(3-4), 184–188 (2018).
[Crossref]

2017 (1)

P. Szypryt, S. R. Meeker, G. Coiffard, N. Fruitwala, B. Bumble, G. Ulbricht, A. B. Walter, M. Daal, C. Bockstiegel, G. Collura, N. Zobrist, I. Lipartito, and B. A. Mazin, “Large-format platinum silicide microwave kinetic inductance detectors for optical to near-IR astronomy,” Opt. Express 25(21), 25894–25909 (2017).
[Crossref] [PubMed]

2016 (2)

P. Szypryt, B. A. Mazin, G. Ulbricht, B. Bumble, S. R. Meeker, C. Bockstiegel, and A. B. Walter, “High quality factor platinum silicide microwave kinetic inductance detectors,” Appl. Phys. Lett. 109(15), 151102 (2016).
[Crossref]

G. Coiffard, K. F. Schuster, E. F. C. Driessen, S. Pignard, M. Calvo, A. Catalano, J. Goupy, and A. Monfardini, “Uniform non-stoichiometric titanium nitride thin films for improved kinetic inductance detector arrays,” J. Low Temp. Phys. 184(3-4), 654–660 (2016).
[Crossref]

2013 (2)

M. R. Vissers, J. Gao, J. S. Kline, M. Sandberg, M. P. Weides, D. S. Wisbey, and D. P. Pappas, “Characterization and in-situ monitoring of sub-stoichiometric adjustable superconducting critical temperature titanium nitride growth,” Thin Solid Films 548, 485–488 (2013).
[Crossref]

B. A. Mazin, S. R. Meeker, M. J. Strader, P. Szypryt, D. Marsden, J. C. V. Eyken, G. E. Duggan, A. B. Walter, G. Ulbricht, and M. Johnson, “ARCONS: A 2024 pixel optical through near-IR cryogenic imaging spectrophotometer,” Pub Astronomical Soc. Pacific 125, 1348–1361 (2013).

2012 (1)

B. A. Mazin, B. Bumble, S. R. Meeker, K. O’Brien, S. McHugh, and E. Langman, “A superconducting focal plane array for ultraviolet, optical, and near-infrared astrophysics,” Opt. Express 20(2), 1503–1511 (2012).
[Crossref] [PubMed]

2011 (1)

S. J. Weber, K. W. Murch, D. H. Slichter, R. Vijay, and I. Siddiqi, “Single crystal silicon capacitors with low microwave loss in the single photon regime,” Appl. Phys. Lett. 98(17), 172510 (2011).
[Crossref]

2010 (3)

H. Paik and K. D. Osborn, “Reducing quantum-regime dielectric loss of silicon nitride for superconducting quantum circuits,” Appl. Phys. Lett. 96(7), 072505 (2010).
[Crossref]

K. Cicak, D. Li, J. A. Strong, M. S. Allman, F. Altomare, A. J. Sirois, J. D. Whittaker, J. D. Teufel, and R. W. Simmonds, “Low-loss superconducting resonant circuits using vacuum-gap-based microwave components,” Appl. Phys. Lett. 96(9), 093502 (2010).
[Crossref]

H. G. Leduc, B. Bumble, P. K. Day, B. H. Eom, J. Gao, S. Golwala, B. A. Mazin, S. McHugh, A. Merrill, D. C. Moore, O. Noroozian, A. D. Turner, and J. Zmuidzinas, “Tianium nitride films for ultrasensitive microresonator detectors,” Appl. Phys. Lett. 97(10), 102509 (2010).
[Crossref]

2008 (2)

J. Gao, M. Daal, A. Vayonakis, S. Kumar, J. Zmuidzinas, B. Sadoulet, B. A. Mazin, P. K. Day, and H. G. Leduc, “Experimental evidence for a surface distribution of two-level systems in superconducting lithographed microwave resonators,” Appl. Phys. Lett. 92(15), 152505 (2008).
[Crossref]

S. Doyle, P. Mauskopf, J. Naylon, A. Porch, and C. Duncombe, “Lumped element kinetic inductance detectors,” J. Low Temp. Phys. 151(1-2), 530–536 (2008).
[Crossref]

2005 (1)

J. M. Martinis, K. B. Cooper, R. McDermott, M. Steffen, M. Ansmann, K. D. Osborn, K. Cicak, S. Oh, D. P. Pappas, R. W. Simmonds, and C. C. Yu, “Decoherence in Josephson qubits from dielectric loss,” Phys. Rev. Lett. 95(21), 210503 (2005).
[Crossref] [PubMed]

2003 (1)

P. K. Day, H. G. LeDuc, B. A. Mazin, A. Vayonakis, and J. Zmuidzinas, “A broadband superconducting detector suitable for use in large arrays,” Nature 425(6960), 817–821 (2003).
[Crossref] [PubMed]

1999 (1)

T. R. Lauer, “The photometry of undersampled point-spread functions,” Astronomical Soc. Pacific. 111(765), 1434–1443 (1999).
[Crossref]

Allman, M. S.

Altomare, F.

Ansmann, M.

Beldi, S.

Bockstiegel, C.

Bonifacio, P.

Bottom, M.

Boussaha, F.

Bumble, B.

Cabrera, B.

O. Noroozian, J. Gao, J. Zmuidzinas, H. G. LeDuc, B. A Mazin, B. Young, B. Cabrera, and A. Miller, “Two‐level system noise reduction for microwave kinetic inductance detectors,” AIP Conf. Proc.1185, 148–151 (2009).

Calvo, M.

Cancelo, G.

Catalano, A.

Chaumont, C.

Cicak, K.

Coiffard, G.

Collura, G.

Cooper, K. B.

Daal, M.

Day, P. K.

Dodkins, R.

Doyle, S.

S. Doyle, P. Mauskopf, J. Naylon, A. Porch, and C. Duncombe, “Lumped element kinetic inductance detectors,” J. Low Temp. Phys. 151(1-2), 530–536 (2008).
[Crossref]

Driessen, E. F. C.

Duggan, G. E.

Duncombe, C.

S. Doyle, P. Mauskopf, J. Naylon, A. Porch, and C. Duncombe, “Lumped element kinetic inductance detectors,” J. Low Temp. Phys. 151(1-2), 530–536 (2008).
[Crossref]

Eom, B. H.

Eyken, J. C. V.

Fruitwala, N.

Gao, J.

Golwala, S.

Goupy, J.

Johnson, M.

Kline, J. S.

Kumar, S.

Langman, E.

Lauer, T. R.

T. R. Lauer, “The photometry of undersampled point-spread functions,” Astronomical Soc. Pacific. 111(765), 1434–1443 (1999).
[Crossref]

Leduc, H. G.

Li, D.

Lipartito, I.

Marsden, D.

Martinis, J. M.

Mauskopf, P.

S. Doyle, P. Mauskopf, J. Naylon, A. Porch, and C. Duncombe, “Lumped element kinetic inductance detectors,” J. Low Temp. Phys. 151(1-2), 530–536 (2008).
[Crossref]

Mawet, D.

Mazin, B. A

Mazin, B. A.

McDermott, R.

McHugh, S.

Meeker, S. R.

Merrill, A.

Mignot, S.

Miller, A.

Monfardini, A.

Moore, D. C.

Murch, K. W.

Naylon, J.

S. Doyle, P. Mauskopf, J. Naylon, A. Porch, and C. Duncombe, “Lumped element kinetic inductance detectors,” J. Low Temp. Phys. 151(1-2), 530–536 (2008).
[Crossref]

Noroozian, O.

O’Brien, K.

Oh, S.

Osborn, K. D.

H. Paik and K. D. Osborn, “Reducing quantum-regime dielectric loss of silicon nitride for superconducting quantum circuits,” Appl. Phys. Lett. 96(7), 072505 (2010).
[Crossref]

Paik, H.

H. Paik and K. D. Osborn, “Reducing quantum-regime dielectric loss of silicon nitride for superconducting quantum circuits,” Appl. Phys. Lett. 96(7), 072505 (2010).
[Crossref]

Pappas, D. P.

Piat, M.

Pignard, S.

Porch, A.

S. Doyle, P. Mauskopf, J. Naylon, A. Porch, and C. Duncombe, “Lumped element kinetic inductance detectors,” J. Low Temp. Phys. 151(1-2), 530–536 (2008).
[Crossref]

Reix, F.

Sadoulet, B.

Sandberg, M.

Schuster, K. F.

Serabyn, E.

Shelton, J. C.

Siddiqi, I.

Simmonds, R. W.

Sirois, A. J.

Slichter, D. H.

Steffen, M.

Strader, M. J.

Strader, P.

Strong, J. A.

Szypryt, P.

Tartari, A.

Teufel, J. D.

Traini, A.

Treptow, K.

Turner, A. D.

Ulbricht, G.

Vacelet, T.

van Eyken, J. C.

Vasisht, G.

Vayonakis, A.

Vijay, R.

Vissers, M. R.

Walter, A. B.

Weber, S. J.

Weides, M. P.

Whittaker, J. D.

Wilcer, N.

Wisbey, D. S.

Young, B.

Yu, C. C.

Zmuda, T.

Zmuidzinas, J.

Zobrist, N.

Appl. Phys. Lett. (6)

H. Paik and K. D. Osborn, “Reducing quantum-regime dielectric loss of silicon nitride for superconducting quantum circuits,” Appl. Phys. Lett. 96(7), 072505 (2010).
[Crossref]

Astronomical Soc. Pacific (1)

Astronomical Soc. Pacific. (1)

T. R. Lauer, “The photometry of undersampled point-spread functions,” Astronomical Soc. Pacific. 111(765), 1434–1443 (1999).
[Crossref]

J. Low Temp. Phys. (3)

S. Doyle, P. Mauskopf, J. Naylon, A. Porch, and C. Duncombe, “Lumped element kinetic inductance detectors,” J. Low Temp. Phys. 151(1-2), 530–536 (2008).
[Crossref]

Nature (1)

Opt. Express (2)

Phys. Rev. Lett. (1)

Pub Astronomical Soc. Pacific (1)

Thin Solid Films (1)

Other (5)

http://www.sonnetsoftware.com/

G. Coiffard, B.Mazin, Paul Szypryt, G. Ulbricht, M. Daaland, and N. Zobris, “Parallel plate microwave kinetic inductance detectors,” Low Temperature Detectors (LTD) workshop, Japan, July (2017).

P. Szypryt, “Development of Microwave Kinetic Inductance Detectors for Applications in Optical to Near-IR Astronomy,” PhD dissertation, University of California - Santa Barbara (2017).

S. Doyle, “Lumped Element Kinetic Inductance Detectors,” PhD dissertation, Cardiff University (2008).
[Crossref]

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.

Click here to see a list of articles that cite this paper

Fig. 1 (Left) Sketch of a classical interdigitated capacitor-based LEKID and (right) our parallel-plate capacitor based LEKID. For comparison, both use the same meander and are designed to resonate at the same frequency of 0.942 GHz. At this frequency, a parallel-plate capacitor LEKID using a 25 nm-thick Al₂O₃ dielectric allows to strongly reduce the size of pixels by a factor 26.

Download Full Size | PPT Slide | PDF

Fig. 2 SONNET simulation of a parallel-plate capacitor based LEKID with a full upper electrode. The left panel presents the forward transmission (S21) signal of the 50 Ω feedline showing the LEKID resonance at 0.947 GHz. The right panel shows the current density within the meander along with the parallel-plate capacitor. The current is almost entirely confined in the meander.

Download Full Size | PPT Slide | PDF

Fig. 3 LEKID fabrication sequence which consists in (a) TiN meander and bottom electrode deposition. The TiN layer is deposited at a rate ~1 nm/s using Ar and N₂ flow rates of respectively 50 sccm and 6 sccm at a total pressure of 0.6 Pa with a 700 W DC power. These deposition conditions lead to a desired T_c of ∼4.6 K. (b) Nb feedline and ground plane deposition. The Nb layer is deposited using a 50 sccm Ar flow rate, 1.1 Pa total pressure and 500 W DC power. (c) Al₂O₃ dielectric deposition using an atomic layer deposition technique. (d) Nb top electrode deposition using the same parameters as for the CPW feedline. Before each deposition, the substrate is cleaned for 2 min with a 50 sccm Ar flow rate, 1.1 Pa total pressure and 50 W RF power. TiN and Nb are deposited in a sputtering system equipped with a high vacuum load-lock and 6-inch (Ti, Nb) targets. A base pressure of ∼2.8 × 10⁻⁸ mbar is reached before deposition. The substrate is positioned at 80 mm from the target.

Download Full Size | PPT Slide | PDF

Fig. 4 (a) Optical microscope picture of the 10 × 10 pixel array and zoom-in picture of four pixels. Upper electrodes feature different window sizes to tune the resonance frequency. (b) Parallel-plate capacitor array mounted in a gold-plated copper box and wire-bonded to two 50 Ω SMA connectors.

Download Full Size | PPT Slide | PDF

Fig. 5 (a) Forward transmission S₂₁ of the CPW feedline showing 96 resonances out of 100 at 72 mK measured with a power on the feedline of P_f = 105 dBm. (b) Isolated resonance at f₀ ≈1.009 GHz with Q_{i_max} ≈378 000 when a feedline power of P_f = −90 dBm is applied.

Download Full Size | PPT Slide | PDF

Fig. 6 Histograms of internal Q_i (top) and coupling Q_c (bottom) quality factors for 91 resonators out of 100. Q_i and Q_c are obtained by fitting the resonance plots. The power on the feedline is P_f = −100 dBm.

Download Full Size | PPT Slide | PDF

Fig. 7 (a) Layout of the cryogenic test bench used to estimate the quasiparticule lifetime with our parallel-plate capacitor LEKIDs. It operates as follows: a 17 dBm signal generated by a local oscillator (LO) is attenuated to −80 dBm using a voltage-controlled attenuator and a −20 dB attenuator before reaching the LEKIDs into the 300 mK fridge. The signal modified by the resonators is then amplified by a 30 dB-gain cryogenic low noise amplifier (a Narda-MITEQ amplifier) and two room temperature amplifiers that feature a total gain of 35 dB. The amplified signal is then mixed with the reference signal (the LO signal) and down converted to a DC signal by an IQ Mixer in order to extract the amplitude and phase. These two components are amplified then digitalized by an oscilloscope at a 2.5 GSPS/s sample rate. (b) All resonances illuminated with a 890 nm monochromatic LED at 320 mK when a feedline power of around −80 dBm is applied. At this temperature, the average internal quality factors decrease to ~8.7 × 10⁴ with a maximum of ∼1 × 10⁵. The slope is due to the readout system. (c) Quasiparticle lifetime estimate. The inset shows one of the resonances (f₀ = 1.0152GHz, Q_i ≈50 000, Q_c ≈17 400) when the array is illuminated by the 890 nm monochromatic LED leading to a frequency shift up to Δf₀ ≈100 kHz. The low Q_i compared to the average value at 320 mK is due to the high power (around −80 dBm) on the feedline.

Download Full Size | PPT Slide | PDF

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

C_{N} = ε_{0} ε_{r} (S_{F} - S_{N}) / d

f_{N} = 1 / 2 π \sqrt{C_{N} (L_{k} + L_{g e o})}