Abstract

We report optical constants of e-beam evaporated yttrium oxide Y2O3 thin films as determined from angle-dependent reflectance measurements at wavelengths from 5 to 50 nm. Samples were measured using synchrotron radiation at the Advanced Light Source. The experimental reflectance data were fit to obtain values for the index of refraction and thin film roughness. We compare our computed constants with those of previous researchers and those computed using the independent atom approximation from the CXRO website. We found that the index of refraction near 36 nm is much lower than previous data from Tomiki as reported by Palik. The real part of the optical constants is about 10% to 15% below CXRO values for wavelengths between 17 nm and 30 nm. Films were also characterized chemically, structurally, and optically by ellipsometry and atomic force microscopy.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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2016 (1)

2013 (3)

L. R. de Marcos, J. I. Larruquert, J. A. Aznárez, M. Fernández-Perea, R. Soufli, J. A. Méndez, S. L. Baker, and E. M. Gullikson, “Optical constants of SrF2 thin films in the 25–780 eV spectral range,” J. Appl. Phys. 113, 143501 (2013).
[Crossref]

D. Martínez-Garlarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. C. Robinson, S. Baker, and E. Prast, “Multisegmented, multilayer-coated mirrors for the Solar Ultraviolet Imager,” Opt. Eng. 52, 095102 (2013).

P. Lei, J. Zhu, Y. Zhu, C. Jiang, and X. Yin, “Evolution of composition microstructure and optical properties of yttrium oxide thin films with substrate temperature,” Surf. Coatings Technol. 229, 226–230 (2013).
[Crossref]

2012 (3)

V. H. Mudavakkat, V. V. Atuchin, V. N. Kruchinin, A. Kayani, and C. V. Ramana, “Structure, morphology and optical properties of nanocrystalline yttrium oxide (Y2O3) thin films,” Opt. Mater. 34, 893–900 (2012).
[Crossref]

M. Fernández-Perea, R. Soufli, J. C. Robinson, R.-D.L. Marcos, J. A. Méndez, J. I. Larruquert, and E. M. Gullikson, “Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25–80 nm wavelength region,” Opt. Express 20, 24018 (2012).
[Crossref]

J. I. Larruquert, A. P. Párez-Marín, L. R. d. M. S. García-Cortés, J. A. Aznárez, and J. A. Méndez, “Self-consistent optical constants of sputter-deposited B4C thin films,” J. Opt. Soc. Am. A 29, 010117 (2012).
[Crossref]

2011 (2)

J.I. Larruquert, A.P. Pérez-Marín, S. García-Cortés, L.R. deMarcos, and J.A. Aznárez, andJ.A.Méndez,“Self-consistent optical constants of SiC thin films,” J. Opt. Soc. Am. A 28, 2340–2345 (2011).
[Crossref]

C. Ramana, V. H. Mudavakkat, K. K. Bharathi, V. V. Atuchin, and L. D. Pokrovsky, “Enhanced optical constants of nanocrystalline yttrium oxide thin films,” Appl. Phys. Lett. 98, 031905 (2011).
[Crossref]

2010 (1)

J. Leng, Z. Yu, Y. Li, D. Zhang, X. Liao, and W. Xue, “Optical and electrical properties of Y2O3 thin films prepared by ion beam assisted deposition,” Appl. Surf. Sci. 256, 5832–5836 (2010).
[Crossref]

2009 (2)

M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, E. Gullikson, A. Aquila, and R. Soufli, “Optical constants of evaporation-deposited silicon monoxide films in the 7.1–800 eVphoton energy range,” J. Appl. Phys. 105, 113505 (2009).
[Crossref]

M. Fernández-Perea, J. A. Méndez, J. A. Aznárez, and J. I. Larruquert, “In situ reflectance and optical constants of ion-beam-sputtered SiC films in the 58.4 to 149.2 nm region,” Appl. Opt. 48, 4698–4702 (2009).
[Crossref] [PubMed]

2008 (2)

R. Soufli, A. L. Aquila, F. Salmassi, M. Fernández-Perea, and E. M. Gullikson, “Optical constants of magnetron-sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV,” Appl. Opt. 47, 4633–4639 (2008).
[Crossref] [PubMed]

X. J. Wang, L. D. Zhang, J. P. Zhang, G. He, M. Liu, and L. Q. Zhu, “Effects of post-deposition annealing on the structure and optical properties of Y2O3 thin films,” Mater. Lett. 62, 4235–4237 (2008).
[Crossref]

2006 (2)

G. Monaco, D. Garoli, R. Frison, V. Mattarello, P. Nicolosi, M. G. Pelizzo, V. Rigato, L. Armelao, A. Giglia, and S. Nannarone, “Optical constants in the EUV Soft x-ray (5–152 nm) spectral range of B4C thin films deposited by different deposition techniques,” Proc. SPIE 6317, 631712 (2006).
[Crossref]

D. Garoli, F. Frassetto, G. Monaco, P. Nicolosi, M.-G. Pelizzo, F. Rigato, V. Rigato, A. Giglia, and S. Nannarone, “Reflectance measurements and optical constants in the extreme ultraviolet-vacuum ultraviolet regions for SiC with a different C/Si ratio,” Appl. Opt. 45, 5642 (2006).
[Crossref] [PubMed]

2005 (2)

G. L. Tan, M. F. Lemon, D. J. Jones, and R. H. French, “Optical properties and London dispersion interaction of amorphous and crystalline SiO2 determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry,” Phys. Rev. B 72, 2051171–10 (2005).
[Crossref]

T. Ejima, A. Yamazaki, T. Banse, K. Saito, Y. Kondo, S. Ichimaru, and H. Takenaka, “Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25–35 nm region,” Appl. Opt. 44, 5446–5453 (2005).
[Crossref] [PubMed]

2003 (1)

J. Oliver and D. Talbot, “Optimization of deposition uniformity for large-aperture NIF substrates in a planetary rotation system,” LLE Rev. 94, 67–75 (2003). Doe/SF/19460-485.

2002 (1)

2000 (4)

J. I. Larruquert and R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb and of evaporated Cr,” Appl. Opt. 39, 2772–2781 (2000).
[Crossref]

B. Sandel, A. Broadfoot, C. Curtis, R. King, T. Stone, R. Hill, J. Chen, O. Siegmund, R. Raffanti, D. Allred, R. Turley, and D. Gallagher, “The extreme ultraviolet imager investigation for the IMAGE mission,” Space Sci. Rev. 91, 197–242 (2000).
[Crossref]

S. Lunt, R. S. Turley, and D. D. Allred, “Design of bifunctional XUV multilayer mirrors using a genetic algorithm,” J. X-Ray Sci. Technol. 9, 1–11 (2000).

S. Kimura, F. Arai, and M. Ikezawa, “Optical study on electronic structure of rare-earth sesquioxides,” J. Phys. Soc. Jpn. 69, 3451–3457 (2000).
[Crossref]

1999 (2)

D. J. Jones, R. H. French, H. Müllejans, S. Loughin, A. D. Dorneich, and P. F. Carcia, “Optical properties of AlN determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry data,” J. Mater. Res. 14, 4337–4344 (1999).
[Crossref]

D. D. Allred, R. S. Turley, and M. B. Squires, “Dual-function EUV multilayer mirrors for the IMAGE mission,” Proc. SPIE 3767, 280–287 (1999).
[Crossref]

1993 (2)

B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E=50–30000 ev, Z=1–92,” At. Data Nucl. Data Tables 54, 181–342 (1993).
[Crossref]

G. Atanassov, R. Thielsch, and D. Popov, “Optical properties of TiO2, Y2O3 and CeO2 thin films deposited by electron beam evaporation,” Thin Solid Films 223, 288–292 (1993).
[Crossref]

1992 (1)

T. Tomiki, T. Shikenbaru, Y. Ganaha, T. Futemma, H. Kato, M. Yuri, H. Fukutani, T. Miyahara, S. Shin, M. Ishigame, and J. Tamashiro, “Optical spectra of Y2O3 single crystals in the vacuum ultraviolet region. II,” J. Phys. Soc. Jpn. 61, 2951–2963 (1992).
[Crossref]

1986 (2)

D. Bezuidenhout and R. Pretorius, “The optical properties of evaporated Y2O3-films,” Thin Solid Films 139, 121–132 (1986).
[Crossref]

T. Tomiki, J. Tamashiro, Y. Tanhara, A. Yamada, H. Fukutani, T. Miayahara, H. Kato, S. Shin, and M. Ishigame, “Optical spectra of Y2O3 single crystals in VUV,” J. Phys. Soc. Jpn. 55, 4543–4549 (1986).
[Crossref]

1968 (1)

Y. Nigara, “Measurement of the optical constants of yttrium oxide,” Jpn. J. Appl. Phys. 7, 404 (1968).
[Crossref]

1954 (1)

L. G. Parratt, “Surface studies of solids by total reflection of x-rays,” Phys. Rev. 95, 359 (1954).
[Crossref]

1913 (1)

P. Debye, “Interferenz von röntgenstrahlen und wärmebewegung,” Annalen der Physik 348, 49–92 (1913).
[Crossref]

Acosta, G.

G. Acosta, “Scandium oxide thin films and their optical properties in the extreme ultraviole,” Ph.D. Thesis, Brigham Young University (2007).

Allred, D.

B. Sandel, A. Broadfoot, C. Curtis, R. King, T. Stone, R. Hill, J. Chen, O. Siegmund, R. Raffanti, D. Allred, R. Turley, and D. Gallagher, “The extreme ultraviolet imager investigation for the IMAGE mission,” Space Sci. Rev. 91, 197–242 (2000).
[Crossref]

Allred, D. D.

S. Lunt, R. S. Turley, and D. D. Allred, “Design of bifunctional XUV multilayer mirrors using a genetic algorithm,” J. X-Ray Sci. Technol. 9, 1–11 (2000).

D. D. Allred, R. S. Turley, and M. B. Squires, “Dual-function EUV multilayer mirrors for the IMAGE mission,” Proc. SPIE 3767, 280–287 (1999).
[Crossref]

M. B. Squires, R. S. Turley, and D. D. Allred, “Will the real optical constants please stand up: The problem in obtaing optical constants for materials in the VUV,” in Proccedings of the Conference of Physics of X-Ray Multilayer Structures,(1998).

Aquila, A.

M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, E. Gullikson, A. Aquila, and R. Soufli, “Optical constants of evaporation-deposited silicon monoxide films in the 7.1–800 eVphoton energy range,” J. Appl. Phys. 105, 113505 (2009).
[Crossref]

Aquila, A. L.

R. Soufli, A. L. Aquila, F. Salmassi, M. Fernández-Perea, and E. M. Gullikson, “Optical constants of magnetron-sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV,” Appl. Opt. 47, 4633–4639 (2008).
[Crossref] [PubMed]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. R. de Marcos, M. Fernandez-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” in Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, T. Takahashi, S. S. Murray, and J.-W. A. den Herder, eds. (SPIE, 2012), p. 8443C.

Arai, F.

S. Kimura, F. Arai, and M. Ikezawa, “Optical study on electronic structure of rare-earth sesquioxides,” J. Phys. Soc. Jpn. 69, 3451–3457 (2000).
[Crossref]

Armelao, L.

G. Monaco, D. Garoli, R. Frison, V. Mattarello, P. Nicolosi, M. G. Pelizzo, V. Rigato, L. Armelao, A. Giglia, and S. Nannarone, “Optical constants in the EUV Soft x-ray (5–152 nm) spectral range of B4C thin films deposited by different deposition techniques,” Proc. SPIE 6317, 631712 (2006).
[Crossref]

Atanassov, G.

G. Atanassov, R. Thielsch, and D. Popov, “Optical properties of TiO2, Y2O3 and CeO2 thin films deposited by electron beam evaporation,” Thin Solid Films 223, 288–292 (1993).
[Crossref]

Atuchin, V. V.

V. H. Mudavakkat, V. V. Atuchin, V. N. Kruchinin, A. Kayani, and C. V. Ramana, “Structure, morphology and optical properties of nanocrystalline yttrium oxide (Y2O3) thin films,” Opt. Mater. 34, 893–900 (2012).
[Crossref]

C. Ramana, V. H. Mudavakkat, K. K. Bharathi, V. V. Atuchin, and L. D. Pokrovsky, “Enhanced optical constants of nanocrystalline yttrium oxide thin films,” Appl. Phys. Lett. 98, 031905 (2011).
[Crossref]

Aznárez, J. A.

L. R. de Marcos, J. I. Larruquert, J. A. Aznárez, M. Fernández-Perea, R. Soufli, J. A. Méndez, S. L. Baker, and E. M. Gullikson, “Optical constants of SrF2 thin films in the 25–780 eV spectral range,” J. Appl. Phys. 113, 143501 (2013).
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J. I. Larruquert, A. P. Párez-Marín, L. R. d. M. S. García-Cortés, J. A. Aznárez, and J. A. Méndez, “Self-consistent optical constants of sputter-deposited B4C thin films,” J. Opt. Soc. Am. A 29, 010117 (2012).
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M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, E. Gullikson, A. Aquila, and R. Soufli, “Optical constants of evaporation-deposited silicon monoxide films in the 7.1–800 eVphoton energy range,” J. Appl. Phys. 105, 113505 (2009).
[Crossref]

M. Fernández-Perea, J. A. Méndez, J. A. Aznárez, and J. I. Larruquert, “In situ reflectance and optical constants of ion-beam-sputtered SiC films in the 58.4 to 149.2 nm region,” Appl. Opt. 48, 4698–4702 (2009).
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Baker, S.

D. Martínez-Garlarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. C. Robinson, S. Baker, and E. Prast, “Multisegmented, multilayer-coated mirrors for the Solar Ultraviolet Imager,” Opt. Eng. 52, 095102 (2013).

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L. R. de Marcos, J. I. Larruquert, J. A. Aznárez, M. Fernández-Perea, R. Soufli, J. A. Méndez, S. L. Baker, and E. M. Gullikson, “Optical constants of SrF2 thin films in the 25–780 eV spectral range,” J. Appl. Phys. 113, 143501 (2013).
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B. Sandel, A. Broadfoot, C. Curtis, R. King, T. Stone, R. Hill, J. Chen, O. Siegmund, R. Raffanti, D. Allred, R. Turley, and D. Gallagher, “The extreme ultraviolet imager investigation for the IMAGE mission,” Space Sci. Rev. 91, 197–242 (2000).
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D. J. Jones, R. H. French, H. Müllejans, S. Loughin, A. D. Dorneich, and P. F. Carcia, “Optical properties of AlN determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry data,” J. Mater. Res. 14, 4337–4344 (1999).
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B. Sandel, A. Broadfoot, C. Curtis, R. King, T. Stone, R. Hill, J. Chen, O. Siegmund, R. Raffanti, D. Allred, R. Turley, and D. Gallagher, “The extreme ultraviolet imager investigation for the IMAGE mission,” Space Sci. Rev. 91, 197–242 (2000).
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L. R. de Marcos, J. I. Larruquert, J. A. Aznárez, M. Fernández-Perea, R. Soufli, J. A. Méndez, S. L. Baker, and E. M. Gullikson, “Optical constants of SrF2 thin films in the 25–780 eV spectral range,” J. Appl. Phys. 113, 143501 (2013).
[Crossref]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. R. de Marcos, M. Fernandez-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” in Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, T. Takahashi, S. S. Murray, and J.-W. A. den Herder, eds. (SPIE, 2012), p. 8443C.

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D. J. Jones, R. H. French, H. Müllejans, S. Loughin, A. D. Dorneich, and P. F. Carcia, “Optical properties of AlN determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry data,” J. Mater. Res. 14, 4337–4344 (1999).
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Fernandez-Perea, M.

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. R. de Marcos, M. Fernandez-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” in Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, T. Takahashi, S. S. Murray, and J.-W. A. den Herder, eds. (SPIE, 2012), p. 8443C.

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G. L. Tan, M. F. Lemon, D. J. Jones, and R. H. French, “Optical properties and London dispersion interaction of amorphous and crystalline SiO2 determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry,” Phys. Rev. B 72, 2051171–10 (2005).
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D. J. Jones, R. H. French, H. Müllejans, S. Loughin, A. D. Dorneich, and P. F. Carcia, “Optical properties of AlN determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry data,” J. Mater. Res. 14, 4337–4344 (1999).
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T. Tomiki, T. Shikenbaru, Y. Ganaha, T. Futemma, H. Kato, M. Yuri, H. Fukutani, T. Miyahara, S. Shin, M. Ishigame, and J. Tamashiro, “Optical spectra of Y2O3 single crystals in the vacuum ultraviolet region. II,” J. Phys. Soc. Jpn. 61, 2951–2963 (1992).
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B. Sandel, A. Broadfoot, C. Curtis, R. King, T. Stone, R. Hill, J. Chen, O. Siegmund, R. Raffanti, D. Allred, R. Turley, and D. Gallagher, “The extreme ultraviolet imager investigation for the IMAGE mission,” Space Sci. Rev. 91, 197–242 (2000).
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T. Tomiki, T. Shikenbaru, Y. Ganaha, T. Futemma, H. Kato, M. Yuri, H. Fukutani, T. Miyahara, S. Shin, M. Ishigame, and J. Tamashiro, “Optical spectra of Y2O3 single crystals in the vacuum ultraviolet region. II,” J. Phys. Soc. Jpn. 61, 2951–2963 (1992).
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J. I. Larruquert, A. P. Párez-Marín, L. R. d. M. S. García-Cortés, J. A. Aznárez, and J. A. Méndez, “Self-consistent optical constants of sputter-deposited B4C thin films,” J. Opt. Soc. Am. A 29, 010117 (2012).
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G. Monaco, D. Garoli, R. Frison, V. Mattarello, P. Nicolosi, M. G. Pelizzo, V. Rigato, L. Armelao, A. Giglia, and S. Nannarone, “Optical constants in the EUV Soft x-ray (5–152 nm) spectral range of B4C thin films deposited by different deposition techniques,” Proc. SPIE 6317, 631712 (2006).
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D. Garoli, F. Frassetto, G. Monaco, P. Nicolosi, M.-G. Pelizzo, F. Rigato, V. Rigato, A. Giglia, and S. Nannarone, “Reflectance measurements and optical constants in the extreme ultraviolet-vacuum ultraviolet regions for SiC with a different C/Si ratio,” Appl. Opt. 45, 5642 (2006).
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R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. R. de Marcos, M. Fernandez-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” in Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, T. Takahashi, S. S. Murray, and J.-W. A. den Herder, eds. (SPIE, 2012), p. 8443C.

Gullikson, E.

D. Martínez-Garlarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. C. Robinson, S. Baker, and E. Prast, “Multisegmented, multilayer-coated mirrors for the Solar Ultraviolet Imager,” Opt. Eng. 52, 095102 (2013).

M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, E. Gullikson, A. Aquila, and R. Soufli, “Optical constants of evaporation-deposited silicon monoxide films in the 7.1–800 eVphoton energy range,” J. Appl. Phys. 105, 113505 (2009).
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Gullikson, E. M.

L. R. de Marcos, J. I. Larruquert, J. A. Aznárez, M. Fernández-Perea, R. Soufli, J. A. Méndez, S. L. Baker, and E. M. Gullikson, “Optical constants of SrF2 thin films in the 25–780 eV spectral range,” J. Appl. Phys. 113, 143501 (2013).
[Crossref]

M. Fernández-Perea, R. Soufli, J. C. Robinson, R.-D.L. Marcos, J. A. Méndez, J. I. Larruquert, and E. M. Gullikson, “Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25–80 nm wavelength region,” Opt. Express 20, 24018 (2012).
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R. Soufli, A. L. Aquila, F. Salmassi, M. Fernández-Perea, and E. M. Gullikson, “Optical constants of magnetron-sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV,” Appl. Opt. 47, 4633–4639 (2008).
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[Crossref]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. R. de Marcos, M. Fernandez-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” in Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, T. Takahashi, S. S. Murray, and J.-W. A. den Herder, eds. (SPIE, 2012), p. 8443C.

Gupta, R. K.

He, G.

X. J. Wang, L. D. Zhang, J. P. Zhang, G. He, M. Liu, and L. Q. Zhu, “Effects of post-deposition annealing on the structure and optical properties of Y2O3 thin films,” Mater. Lett. 62, 4235–4237 (2008).
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B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E=50–30000 ev, Z=1–92,” At. Data Nucl. Data Tables 54, 181–342 (1993).
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Hill, R.

B. Sandel, A. Broadfoot, C. Curtis, R. King, T. Stone, R. Hill, J. Chen, O. Siegmund, R. Raffanti, D. Allred, R. Turley, and D. Gallagher, “The extreme ultraviolet imager investigation for the IMAGE mission,” Space Sci. Rev. 91, 197–242 (2000).
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Ikezawa, M.

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T. Tomiki, T. Shikenbaru, Y. Ganaha, T. Futemma, H. Kato, M. Yuri, H. Fukutani, T. Miyahara, S. Shin, M. Ishigame, and J. Tamashiro, “Optical spectra of Y2O3 single crystals in the vacuum ultraviolet region. II,” J. Phys. Soc. Jpn. 61, 2951–2963 (1992).
[Crossref]

T. Tomiki, J. Tamashiro, Y. Tanhara, A. Yamada, H. Fukutani, T. Miayahara, H. Kato, S. Shin, and M. Ishigame, “Optical spectra of Y2O3 single crystals in VUV,” J. Phys. Soc. Jpn. 55, 4543–4549 (1986).
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P. Lei, J. Zhu, Y. Zhu, C. Jiang, and X. Yin, “Evolution of composition microstructure and optical properties of yttrium oxide thin films with substrate temperature,” Surf. Coatings Technol. 229, 226–230 (2013).
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G. L. Tan, M. F. Lemon, D. J. Jones, and R. H. French, “Optical properties and London dispersion interaction of amorphous and crystalline SiO2 determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry,” Phys. Rev. B 72, 2051171–10 (2005).
[Crossref]

D. J. Jones, R. H. French, H. Müllejans, S. Loughin, A. D. Dorneich, and P. F. Carcia, “Optical properties of AlN determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry data,” J. Mater. Res. 14, 4337–4344 (1999).
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T. Tomiki, T. Shikenbaru, Y. Ganaha, T. Futemma, H. Kato, M. Yuri, H. Fukutani, T. Miyahara, S. Shin, M. Ishigame, and J. Tamashiro, “Optical spectra of Y2O3 single crystals in the vacuum ultraviolet region. II,” J. Phys. Soc. Jpn. 61, 2951–2963 (1992).
[Crossref]

T. Tomiki, J. Tamashiro, Y. Tanhara, A. Yamada, H. Fukutani, T. Miayahara, H. Kato, S. Shin, and M. Ishigame, “Optical spectra of Y2O3 single crystals in VUV,” J. Phys. Soc. Jpn. 55, 4543–4549 (1986).
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V. H. Mudavakkat, V. V. Atuchin, V. N. Kruchinin, A. Kayani, and C. V. Ramana, “Structure, morphology and optical properties of nanocrystalline yttrium oxide (Y2O3) thin films,” Opt. Mater. 34, 893–900 (2012).
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Keski-Kuha, R. A. M.

Khatri, S.

D. Martínez-Garlarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. C. Robinson, S. Baker, and E. Prast, “Multisegmented, multilayer-coated mirrors for the Solar Ultraviolet Imager,” Opt. Eng. 52, 095102 (2013).

Kimura, S.

S. Kimura, F. Arai, and M. Ikezawa, “Optical study on electronic structure of rare-earth sesquioxides,” J. Phys. Soc. Jpn. 69, 3451–3457 (2000).
[Crossref]

King, R.

B. Sandel, A. Broadfoot, C. Curtis, R. King, T. Stone, R. Hill, J. Chen, O. Siegmund, R. Raffanti, D. Allred, R. Turley, and D. Gallagher, “The extreme ultraviolet imager investigation for the IMAGE mission,” Space Sci. Rev. 91, 197–242 (2000).
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Kruchinin, V. N.

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L. R. de Marcos, J. I. Larruquert, J. A. Aznárez, M. Fernández-Perea, R. Soufli, J. A. Méndez, S. L. Baker, and E. M. Gullikson, “Optical constants of SrF2 thin films in the 25–780 eV spectral range,” J. Appl. Phys. 113, 143501 (2013).
[Crossref]

J. I. Larruquert, A. P. Párez-Marín, L. R. d. M. S. García-Cortés, J. A. Aznárez, and J. A. Méndez, “Self-consistent optical constants of sputter-deposited B4C thin films,” J. Opt. Soc. Am. A 29, 010117 (2012).
[Crossref]

M. Fernández-Perea, R. Soufli, J. C. Robinson, R.-D.L. Marcos, J. A. Méndez, J. I. Larruquert, and E. M. Gullikson, “Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25–80 nm wavelength region,” Opt. Express 20, 24018 (2012).
[Crossref]

M. Fernández-Perea, J. A. Méndez, J. A. Aznárez, and J. I. Larruquert, “In situ reflectance and optical constants of ion-beam-sputtered SiC films in the 58.4 to 149.2 nm region,” Appl. Opt. 48, 4698–4702 (2009).
[Crossref] [PubMed]

M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, E. Gullikson, A. Aquila, and R. Soufli, “Optical constants of evaporation-deposited silicon monoxide films in the 7.1–800 eVphoton energy range,” J. Appl. Phys. 105, 113505 (2009).
[Crossref]

J. I. Larruquert and R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb and of evaporated Cr,” Appl. Opt. 39, 2772–2781 (2000).
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R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. R. de Marcos, M. Fernandez-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” in Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, T. Takahashi, S. S. Murray, and J.-W. A. den Herder, eds. (SPIE, 2012), p. 8443C.

Larruquert, J.I.

Lei, P.

P. Lei, J. Zhu, Y. Zhu, C. Jiang, and X. Yin, “Evolution of composition microstructure and optical properties of yttrium oxide thin films with substrate temperature,” Surf. Coatings Technol. 229, 226–230 (2013).
[Crossref]

Lemon, M. F.

G. L. Tan, M. F. Lemon, D. J. Jones, and R. H. French, “Optical properties and London dispersion interaction of amorphous and crystalline SiO2 determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry,” Phys. Rev. B 72, 2051171–10 (2005).
[Crossref]

Leng, J.

J. Leng, Z. Yu, Y. Li, D. Zhang, X. Liao, and W. Xue, “Optical and electrical properties of Y2O3 thin films prepared by ion beam assisted deposition,” Appl. Surf. Sci. 256, 5832–5836 (2010).
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J. Leng, Z. Yu, Y. Li, D. Zhang, X. Liao, and W. Xue, “Optical and electrical properties of Y2O3 thin films prepared by ion beam assisted deposition,” Appl. Surf. Sci. 256, 5832–5836 (2010).
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J. Leng, Z. Yu, Y. Li, D. Zhang, X. Liao, and W. Xue, “Optical and electrical properties of Y2O3 thin films prepared by ion beam assisted deposition,” Appl. Surf. Sci. 256, 5832–5836 (2010).
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Liu, M.

X. J. Wang, L. D. Zhang, J. P. Zhang, G. He, M. Liu, and L. Q. Zhu, “Effects of post-deposition annealing on the structure and optical properties of Y2O3 thin films,” Mater. Lett. 62, 4235–4237 (2008).
[Crossref]

Loughin, S.

D. J. Jones, R. H. French, H. Müllejans, S. Loughin, A. D. Dorneich, and P. F. Carcia, “Optical properties of AlN determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry data,” J. Mater. Res. 14, 4337–4344 (1999).
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D. Martínez-Garlarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. C. Robinson, S. Baker, and E. Prast, “Multisegmented, multilayer-coated mirrors for the Solar Ultraviolet Imager,” Opt. Eng. 52, 095102 (2013).

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G. Monaco, D. Garoli, R. Frison, V. Mattarello, P. Nicolosi, M. G. Pelizzo, V. Rigato, L. Armelao, A. Giglia, and S. Nannarone, “Optical constants in the EUV Soft x-ray (5–152 nm) spectral range of B4C thin films deposited by different deposition techniques,” Proc. SPIE 6317, 631712 (2006).
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L. R. de Marcos, J. I. Larruquert, J. A. Aznárez, M. Fernández-Perea, R. Soufli, J. A. Méndez, S. L. Baker, and E. M. Gullikson, “Optical constants of SrF2 thin films in the 25–780 eV spectral range,” J. Appl. Phys. 113, 143501 (2013).
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M. Fernández-Perea, R. Soufli, J. C. Robinson, R.-D.L. Marcos, J. A. Méndez, J. I. Larruquert, and E. M. Gullikson, “Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25–80 nm wavelength region,” Opt. Express 20, 24018 (2012).
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J. I. Larruquert, A. P. Párez-Marín, L. R. d. M. S. García-Cortés, J. A. Aznárez, and J. A. Méndez, “Self-consistent optical constants of sputter-deposited B4C thin films,” J. Opt. Soc. Am. A 29, 010117 (2012).
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M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, E. Gullikson, A. Aquila, and R. Soufli, “Optical constants of evaporation-deposited silicon monoxide films in the 7.1–800 eVphoton energy range,” J. Appl. Phys. 105, 113505 (2009).
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M. Fernández-Perea, J. A. Méndez, J. A. Aznárez, and J. I. Larruquert, “In situ reflectance and optical constants of ion-beam-sputtered SiC films in the 58.4 to 149.2 nm region,” Appl. Opt. 48, 4698–4702 (2009).
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T. Tomiki, J. Tamashiro, Y. Tanhara, A. Yamada, H. Fukutani, T. Miayahara, H. Kato, S. Shin, and M. Ishigame, “Optical spectra of Y2O3 single crystals in VUV,” J. Phys. Soc. Jpn. 55, 4543–4549 (1986).
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T. Tomiki, T. Shikenbaru, Y. Ganaha, T. Futemma, H. Kato, M. Yuri, H. Fukutani, T. Miyahara, S. Shin, M. Ishigame, and J. Tamashiro, “Optical spectra of Y2O3 single crystals in the vacuum ultraviolet region. II,” J. Phys. Soc. Jpn. 61, 2951–2963 (1992).
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D. Garoli, F. Frassetto, G. Monaco, P. Nicolosi, M.-G. Pelizzo, F. Rigato, V. Rigato, A. Giglia, and S. Nannarone, “Reflectance measurements and optical constants in the extreme ultraviolet-vacuum ultraviolet regions for SiC with a different C/Si ratio,” Appl. Opt. 45, 5642 (2006).
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J. I. Larruquert, A. P. Párez-Marín, L. R. d. M. S. García-Cortés, J. A. Aznárez, and J. A. Méndez, “Self-consistent optical constants of sputter-deposited B4C thin films,” J. Opt. Soc. Am. A 29, 010117 (2012).
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Pérez-Marín, A.P.

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C. Ramana, V. H. Mudavakkat, K. K. Bharathi, V. V. Atuchin, and L. D. Pokrovsky, “Enhanced optical constants of nanocrystalline yttrium oxide thin films,” Appl. Phys. Lett. 98, 031905 (2011).
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C. Ramana, V. H. Mudavakkat, K. K. Bharathi, V. V. Atuchin, and L. D. Pokrovsky, “Enhanced optical constants of nanocrystalline yttrium oxide thin films,” Appl. Phys. Lett. 98, 031905 (2011).
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V. H. Mudavakkat, V. V. Atuchin, V. N. Kruchinin, A. Kayani, and C. V. Ramana, “Structure, morphology and optical properties of nanocrystalline yttrium oxide (Y2O3) thin films,” Opt. Mater. 34, 893–900 (2012).
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Rigato, V.

D. Garoli, F. Frassetto, G. Monaco, P. Nicolosi, M.-G. Pelizzo, F. Rigato, V. Rigato, A. Giglia, and S. Nannarone, “Reflectance measurements and optical constants in the extreme ultraviolet-vacuum ultraviolet regions for SiC with a different C/Si ratio,” Appl. Opt. 45, 5642 (2006).
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G. Monaco, D. Garoli, R. Frison, V. Mattarello, P. Nicolosi, M. G. Pelizzo, V. Rigato, L. Armelao, A. Giglia, and S. Nannarone, “Optical constants in the EUV Soft x-ray (5–152 nm) spectral range of B4C thin films deposited by different deposition techniques,” Proc. SPIE 6317, 631712 (2006).
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D. Martínez-Garlarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. C. Robinson, S. Baker, and E. Prast, “Multisegmented, multilayer-coated mirrors for the Solar Ultraviolet Imager,” Opt. Eng. 52, 095102 (2013).

M. Fernández-Perea, R. Soufli, J. C. Robinson, R.-D.L. Marcos, J. A. Méndez, J. I. Larruquert, and E. M. Gullikson, “Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25–80 nm wavelength region,” Opt. Express 20, 24018 (2012).
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R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. R. de Marcos, M. Fernandez-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” in Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, T. Takahashi, S. S. Murray, and J.-W. A. den Herder, eds. (SPIE, 2012), p. 8443C.

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Saito, K.

Salmassi, F.

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B. Sandel, A. Broadfoot, C. Curtis, R. King, T. Stone, R. Hill, J. Chen, O. Siegmund, R. Raffanti, D. Allred, R. Turley, and D. Gallagher, “The extreme ultraviolet imager investigation for the IMAGE mission,” Space Sci. Rev. 91, 197–242 (2000).
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T. Tomiki, J. Tamashiro, Y. Tanhara, A. Yamada, H. Fukutani, T. Miayahara, H. Kato, S. Shin, and M. Ishigame, “Optical spectra of Y2O3 single crystals in VUV,” J. Phys. Soc. Jpn. 55, 4543–4549 (1986).
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B. Sandel, A. Broadfoot, C. Curtis, R. King, T. Stone, R. Hill, J. Chen, O. Siegmund, R. Raffanti, D. Allred, R. Turley, and D. Gallagher, “The extreme ultraviolet imager investigation for the IMAGE mission,” Space Sci. Rev. 91, 197–242 (2000).
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D. Martínez-Garlarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. C. Robinson, S. Baker, and E. Prast, “Multisegmented, multilayer-coated mirrors for the Solar Ultraviolet Imager,” Opt. Eng. 52, 095102 (2013).

L. R. de Marcos, J. I. Larruquert, J. A. Aznárez, M. Fernández-Perea, R. Soufli, J. A. Méndez, S. L. Baker, and E. M. Gullikson, “Optical constants of SrF2 thin films in the 25–780 eV spectral range,” J. Appl. Phys. 113, 143501 (2013).
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M. Fernández-Perea, R. Soufli, J. C. Robinson, R.-D.L. Marcos, J. A. Méndez, J. I. Larruquert, and E. M. Gullikson, “Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25–80 nm wavelength region,” Opt. Express 20, 24018 (2012).
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M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, E. Gullikson, A. Aquila, and R. Soufli, “Optical constants of evaporation-deposited silicon monoxide films in the 7.1–800 eVphoton energy range,” J. Appl. Phys. 105, 113505 (2009).
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R. Soufli, A. L. Aquila, F. Salmassi, M. Fernández-Perea, and E. M. Gullikson, “Optical constants of magnetron-sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV,” Appl. Opt. 47, 4633–4639 (2008).
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Spiller, E.

D. Martínez-Garlarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. C. Robinson, S. Baker, and E. Prast, “Multisegmented, multilayer-coated mirrors for the Solar Ultraviolet Imager,” Opt. Eng. 52, 095102 (2013).

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. R. de Marcos, M. Fernandez-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” in Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, T. Takahashi, S. S. Murray, and J.-W. A. den Herder, eds. (SPIE, 2012), p. 8443C.

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D. D. Allred, R. S. Turley, and M. B. Squires, “Dual-function EUV multilayer mirrors for the IMAGE mission,” Proc. SPIE 3767, 280–287 (1999).
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B. Sandel, A. Broadfoot, C. Curtis, R. King, T. Stone, R. Hill, J. Chen, O. Siegmund, R. Raffanti, D. Allred, R. Turley, and D. Gallagher, “The extreme ultraviolet imager investigation for the IMAGE mission,” Space Sci. Rev. 91, 197–242 (2000).
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T. Tomiki, T. Shikenbaru, Y. Ganaha, T. Futemma, H. Kato, M. Yuri, H. Fukutani, T. Miyahara, S. Shin, M. Ishigame, and J. Tamashiro, “Optical spectra of Y2O3 single crystals in the vacuum ultraviolet region. II,” J. Phys. Soc. Jpn. 61, 2951–2963 (1992).
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T. Tomiki, T. Shikenbaru, Y. Ganaha, T. Futemma, H. Kato, M. Yuri, H. Fukutani, T. Miyahara, S. Shin, M. Ishigame, and J. Tamashiro, “Optical spectra of Y2O3 single crystals in the vacuum ultraviolet region. II,” J. Phys. Soc. Jpn. 61, 2951–2963 (1992).
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T. Tomiki, J. Tamashiro, Y. Tanhara, A. Yamada, H. Fukutani, T. Miayahara, H. Kato, S. Shin, and M. Ishigame, “Optical spectra of Y2O3 single crystals in VUV,” J. Phys. Soc. Jpn. 55, 4543–4549 (1986).
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B. Sandel, A. Broadfoot, C. Curtis, R. King, T. Stone, R. Hill, J. Chen, O. Siegmund, R. Raffanti, D. Allred, R. Turley, and D. Gallagher, “The extreme ultraviolet imager investigation for the IMAGE mission,” Space Sci. Rev. 91, 197–242 (2000).
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S. Lunt, R. S. Turley, and D. D. Allred, “Design of bifunctional XUV multilayer mirrors using a genetic algorithm,” J. X-Ray Sci. Technol. 9, 1–11 (2000).

D. D. Allred, R. S. Turley, and M. B. Squires, “Dual-function EUV multilayer mirrors for the IMAGE mission,” Proc. SPIE 3767, 280–287 (1999).
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M. B. Squires, R. S. Turley, and D. D. Allred, “Will the real optical constants please stand up: The problem in obtaing optical constants for materials in the VUV,” in Proccedings of the Conference of Physics of X-Ray Multilayer Structures,(1998).

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M. Fernández-Perea, M. Vidal-Dasilva, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, E. Gullikson, A. Aquila, and R. Soufli, “Optical constants of evaporation-deposited silicon monoxide films in the 7.1–800 eVphoton energy range,” J. Appl. Phys. 105, 113505 (2009).
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R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. R. de Marcos, M. Fernandez-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” in Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray, T. Takahashi, S. S. Murray, and J.-W. A. den Herder, eds. (SPIE, 2012), p. 8443C.

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J. Leng, Z. Yu, Y. Li, D. Zhang, X. Liao, and W. Xue, “Optical and electrical properties of Y2O3 thin films prepared by ion beam assisted deposition,” Appl. Surf. Sci. 256, 5832–5836 (2010).
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T. Tomiki, J. Tamashiro, Y. Tanhara, A. Yamada, H. Fukutani, T. Miayahara, H. Kato, S. Shin, and M. Ishigame, “Optical spectra of Y2O3 single crystals in VUV,” J. Phys. Soc. Jpn. 55, 4543–4549 (1986).
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T. Tomiki, T. Shikenbaru, Y. Ganaha, T. Futemma, H. Kato, M. Yuri, H. Fukutani, T. Miyahara, S. Shin, M. Ishigame, and J. Tamashiro, “Optical spectra of Y2O3 single crystals in the vacuum ultraviolet region. II,” J. Phys. Soc. Jpn. 61, 2951–2963 (1992).
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Zhang, D.

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Supplementary Material (4)

NameDescription
» Data File 1       Data for measurements in fig. 3
» Data File 2       Data for delta and beta of Sample #1 behind fig. 5 and 6
» Data File 3       Data for delta and beta of Sample #2 measurements behind Fig. 6
» Data File 4       f1 data is proportional to Sample 1 and 2 delta of Fig. 5

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Figures (7)

Fig. 1
Fig. 1 Polarization of the light in beamline 6.3.2 as a function of wavelength.
Fig. 2
Fig. 2 Measured reflectance data (red circles) and fits (solid blue line) for Sample 1 at four wavelengths.
Fig. 3
Fig. 3 Near-normal reflectance of a Y2O3 surface from various sources. The red dashed line is the measured reflectance of Sample 1. The black diamonds (near top) and the blue dotted line, respectively, mark data extracted from Tomiki’s [14] and from Kimura’s [47] near-normal reflectance measurements of polished yttria crystals. The large green circles mark the reflectance for 8° from normal incidence calculated for a “bulk-like” sampled, also termed “thick film” via the IAA using Henke’s δ and β data for Y and O with no roughness. Kimura’s near-normal reflectance measurements of a polished yttria crystal [47] closely matches Sample 1 (of this study). See Data File 1 for underlying values for the reflectance of Sample 1.
Fig. 4
Fig. 4 Measured and calculated, near-normal reflectance of Y2O3. The top three entries in the legend are calculated from δ and β. The bottom is measured. The bottom curve (dotted line) marks the reflectance data extracted from Fig. 1 of Kimura’s [47] near-normal reflectance measurements of a polished yttria crystal. The large open green circles mark the reflectance calculated via IAA using the web tool at the CXRO websites for 8° from normal incidence. The filled red triangles and filled purple circles (solid line) respectively correspond to reflectances calculated for a thick mirror at normal incidence based on measurements of δ and β obtained for Sample 1 and Sample 2 in this report.
Fig. 5
Fig. 5 δ for yttria. The large open circles mark values calculated using the IAA with Henke data archived at CXRO [10]. The solid triangles and circles are the measurements in this study. The filled brown squares are adapted from Tropf and Thomas [31]. As in Figure 3, diamonds denote data from Tomiki et al [14]. See Data File 2 for underlying values of δ for Sample 1 and Data File 3 for underlying values of δ for Sample 2.
Fig. 6
Fig. 6 The imaginary component of the scattering factor β for yttria. The large open circles mark values calculated using the IAA with Y and O data archived at CXRO from [10]. The solid triangles and circles are the measured values in this report for Sample 1 and Sample 2. The blue solid diamonds are derived from Tomiki [14]. The solid brown squares are adapted from Tropf and Thomas [31]. See Data File 2 for underlying values of β for Sample 1 and Data File 3 for underlying values of β for Sample 2.
Fig. 7
Fig. 7 Real component of the scattering factor, f1 for yttria. (f1 is proportional to δ). See Data File 4 for underlying values.

Tables (1)

Tables Icon

Table 1 Thickness and roughness of Sample 1 and Sample 2.

Equations (19)

Equations on this page are rendered with MathJax. Learn more.

n = 1 δ + i β
R E = [ ( I R I B R ) G R ] [ G 0 ( I 0 I B 0 ) ]
r m + 1 = C m 4 r m + f m , σ r m f m , σ + 1
r m = C m 2 E m R E m ,
f m , p = n m 2 q m + 1 n m + 1 2 q m n m 2 q m + 1 + n m + 1 2 q m
f m , s = q m + 1 q m q m + 1 q m
q m = n m 2 cos 2 θ
C m = e i k m d m / 2
k m = 2 π n m λ
R s = | r s | 2
R p = | r p | 2
R T = R s u s + R p ( 1 u s )
s = e 2 q z 2 σ 2
i = 1 N [ R E R T ( θ i , P i ) w i ] 2
n = 1 δ + i β = 1 r 0 N 2 π λ 2 ( f 1 i f 2 )
r 0 = α c m e c 2 = 2.818 × 10 15 m .
n = 1 δ + i β = 1 r 0 2 π λ 2 q N q f q
f q = f 1 i f 2
n = 1 δ + i β = 1 r 0 2 π λ 2 ( N Y f Y + N O f O )

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