Abstract

This paper presents a new localized vibration-assisted magnetic abrasive polishing (VAMAP) method using loose abrasives for V-groove and Fresnel optics finishing. The purpose is to improve the surface quality while maintaining the form of the microfeatures. This method allows abrasives to access the corners of the microfeatures and remove materials locally and uniformly by effectively controlling the magnetic field and vibration which overcomes the limitations of previous research. By using loose abrasives, the method achieved nanometer level surface roughness and damage-free surface while maintaining the form of the microfeatures. The results show that the surface roughness was reduced to about 7 nm Ra from the initial value of over 10 nm Ra while the microfeatures of V-groove and Fresnel optics were well maintained. At the same time, the surface defects including voids, scratches as well as tool marks were clearly removed.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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2017 (2)

Y. Cai, K. Nakagawa, H. Kikuchi, N. Shimidzu, and T. Ishibashi, “Optimization of Aperture Antenna with V-groove Structures to Improve Intensity of Nanosized Circularly Polarized Light,” J. Nanosci. Nanotechnol. 17(3), 1970–1974 (2017).
[Crossref]

J. Guo, K. Liu, Z. Wang, and G. L. Tnay, “Magnetic field-assisted finishing of a mold insert with curved microstructures for injection molding of microfluidic chips,” Tribol. Int. 114, 306–314 (2017).
[Crossref]

2016 (2)

J. Guo, C. W. Kum, K. H. Au, Z. E. E. Tan, H. Wu, and K. Liu, “New vibration-assisted magnetic abrasive polishing (VAMAP) method for microstructured surface finishing,” Opt. Express 24(12), 13542–13554 (2016).
[Crossref] [PubMed]

Y. Wang, Y. Wu, and M. Nomura, “Feasibility study on surface finishing of miniature V-grooves with magnetic compound fluid slurry,” Precis. Eng. 45, 67–78 (2016).
[Crossref]

2015 (1)

2014 (2)

S. Wang, S. To, X. Chen, H. Wang, and H. Xia, “A study of the fabrication of v-groove structure in ultra-precision milling,” Int. J. Comput. Integrated Manuf. 27(11), 986–996 (2014).
[Crossref]

P. Li, J. Xie, J. Cheng, and K. Wu, “Anisotropic wetting properties on a precision-ground micro-V-grooved Si surface related to their micro-characterized variables,” J. Micromech. Microeng. 24(7), 075004 (2014).
[Crossref]

2013 (1)

F. Z. Fang, X. D. Zhang, A. Weckenmann, G. X. Zhang, and C. Evans, “Manufacturing and measurement of freeform optics,” CIRP Ann. 62(2), 823–846 (2013).
[Crossref]

2012 (1)

H. Suzuki, M. Okada, Y. Yamagata, S. Morita, and T. Higuchi, “Precision grinding of structured ceramic molds by diamond wheel trued with alloy metal,” CIRP Ann. 61(1), 283–286 (2012).
[Crossref]

2011 (2)

Y. Wang, Q. Zhao, Y. Shang, P. Lv, B. Guo, and L. Zhao, “Ultra-precision machining of Fresnel microstructure on die steel using single crystal diamond tool,” J. Mater. Process. Technol. 211(12), 2152–2159 (2011).
[Crossref]

W. T. Xie, Y. J. Dai, R. Z. Wang, and K. Sumathy, “Concentrated solar energy applications using Fresnel lenses: A review,” Renew. Sustain. Energy Rev. 15(6), 2588–2606 (2011).
[Crossref]

2010 (1)

2009 (2)

J. Yan, T. Oowada, T. Zhou, and T. Kuriyagawa, “Precision machining of microstructures on electroless-plated NiP surface for molding glass components,” J. Mater. Process. Technol. 209(10), 4802–4808 (2009).
[Crossref]

D. W. Kim, S. W. Kim, and J. H. Burge, “Non-sequential optimization technique for a computer controlled optical surfacing process using multiple tool influence functions,” Opt. Express 17(24), 21850–21866 (2009).
[Crossref] [PubMed]

2007 (1)

G. D. Kim and B. G. Loh, “An ultrasonic elliptical vibration cutting device for micro V-groove machining: Kinematical analysis and micro V-groove machining characteristics,” J. Mater. Process. Technol. 190(1–3), 181–188 (2007).

2006 (3)

F. Z. Fang, Z. Xiong, and X. T. Hu, “An experimental study of micromachining step-mirrors for laser-diode beam shaping,” J. Micromech. Microeng. 16(2), 214–218 (2006).
[Crossref]

A. Priyadarshi, L. Fen, S. Mhaisalkar, V. Kripesh, and A. Asundi, “Fiber misalignment in silicon V-groove based optical modules,” Opt. Fiber Technol. 12(2), 170–184 (2006).
[Crossref]

E. Brinksmeier, O. Riemer, and A. Gessenharter, “Finishing of structured surfaces by abrasive polishing,” Precis. Eng. 30(3), 325–336 (2006).
[Crossref]

2005 (1)

J. Yan, K. Maekawa, J. Tamaki, and T. Kuriyagawa, “Micro grooving on single-crystal germanium for infrared Fresnel lenses,” J. Micromech. Microeng. 15(10), 1925–1931 (2005).
[Crossref]

2004 (4)

F. Z. Fang and Y. C. Liu, “On minimum exit-burr in micro cutting,” J. Micromech. Microeng. 14(7), 984–988 (2004).
[Crossref]

J. H. Lee, S. R. Park, S. H. Yang, and Y. S. Kim, “Fabrication of a V-groove on the optical fiber connector using a miniaturized machine tool,” J. Mater. Process. Technol. 155, 1716–1722 (2004).
[Crossref]

W. B. Kim, S. H. Lee, and B. K. Min, “Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid,” J. Manuf. Sci. Eng. 126(4), 772–778 (2004).
[Crossref]

S. Yin and T. Shinmura, “A comparative study: polishing characteristics and its mechanisms of three vibration modes in vibration-assisted magnetic abrasive polishing,” Int. J. Mach. Tools Manuf. 44(4), 383–390 (2004).
[Crossref]

2002 (1)

Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of Multiple-focus Micro Fresnel Lenses by Means of Nonrotational Diamond Grooving,” CIRP Ann. 51(1), 343–346 (2002).
[Crossref]

2001 (1)

H. Ohmori, N. Ebizuka, S. Morita, Y. Yamagata, and H. Kudo, “Ultraprecision micro-grinding of germanium immersion grating element for mid-infrared super dispersion spectrograph,” CIRP Ann. 50(1), 221–224 (2001).
[Crossref]

1996 (1)

W. I. Kordonski and S. D. Jacobs, “Magnetorheological finishing,” Int. J. Mod. Phys. B 10(24), 2837–2848 (1996).
[Crossref]

1995 (1)

Asundi, A.

A. Priyadarshi, L. Fen, S. Mhaisalkar, V. Kripesh, and A. Asundi, “Fiber misalignment in silicon V-groove based optical modules,” Opt. Fiber Technol. 12(2), 170–184 (2006).
[Crossref]

Au, K. H.

Benítez, P.

Brinksmeier, E.

E. Brinksmeier, O. Riemer, and A. Gessenharter, “Finishing of structured surfaces by abrasive polishing,” Precis. Eng. 30(3), 325–336 (2006).
[Crossref]

Buljan, M.

Burge, J. H.

Cai, Y.

Y. Cai, K. Nakagawa, H. Kikuchi, N. Shimidzu, and T. Ishibashi, “Optimization of Aperture Antenna with V-groove Structures to Improve Intensity of Nanosized Circularly Polarized Light,” J. Nanosci. Nanotechnol. 17(3), 1970–1974 (2017).
[Crossref]

Chaves, J.

Chen, X.

S. Wang, S. To, X. Chen, H. Wang, and H. Xia, “A study of the fabrication of v-groove structure in ultra-precision milling,” Int. J. Comput. Integrated Manuf. 27(11), 986–996 (2014).
[Crossref]

Cheng, J.

P. Li, J. Xie, J. Cheng, and K. Wu, “Anisotropic wetting properties on a precision-ground micro-V-grooved Si surface related to their micro-characterized variables,” J. Micromech. Microeng. 24(7), 075004 (2014).
[Crossref]

Cvetkovic, A.

Dai, Y. J.

W. T. Xie, Y. J. Dai, R. Z. Wang, and K. Sumathy, “Concentrated solar energy applications using Fresnel lenses: A review,” Renew. Sustain. Energy Rev. 15(6), 2588–2606 (2011).
[Crossref]

Ebizuka, N.

H. Ohmori, N. Ebizuka, S. Morita, Y. Yamagata, and H. Kudo, “Ultraprecision micro-grinding of germanium immersion grating element for mid-infrared super dispersion spectrograph,” CIRP Ann. 50(1), 221–224 (2001).
[Crossref]

Evans, C.

F. Z. Fang, X. D. Zhang, A. Weckenmann, G. X. Zhang, and C. Evans, “Manufacturing and measurement of freeform optics,” CIRP Ann. 62(2), 823–846 (2013).
[Crossref]

Fang, F.

Fang, F. Z.

F. Z. Fang, X. D. Zhang, A. Weckenmann, G. X. Zhang, and C. Evans, “Manufacturing and measurement of freeform optics,” CIRP Ann. 62(2), 823–846 (2013).
[Crossref]

F. Z. Fang, Z. Xiong, and X. T. Hu, “An experimental study of micromachining step-mirrors for laser-diode beam shaping,” J. Micromech. Microeng. 16(2), 214–218 (2006).
[Crossref]

F. Z. Fang and Y. C. Liu, “On minimum exit-burr in micro cutting,” J. Micromech. Microeng. 14(7), 984–988 (2004).
[Crossref]

Fen, L.

A. Priyadarshi, L. Fen, S. Mhaisalkar, V. Kripesh, and A. Asundi, “Fiber misalignment in silicon V-groove based optical modules,” Opt. Fiber Technol. 12(2), 170–184 (2006).
[Crossref]

Gessenharter, A.

E. Brinksmeier, O. Riemer, and A. Gessenharter, “Finishing of structured surfaces by abrasive polishing,” Precis. Eng. 30(3), 325–336 (2006).
[Crossref]

Guo, B.

Y. Wang, Q. Zhao, Y. Shang, P. Lv, B. Guo, and L. Zhao, “Ultra-precision machining of Fresnel microstructure on die steel using single crystal diamond tool,” J. Mater. Process. Technol. 211(12), 2152–2159 (2011).
[Crossref]

Guo, J.

J. Guo, K. Liu, Z. Wang, and G. L. Tnay, “Magnetic field-assisted finishing of a mold insert with curved microstructures for injection molding of microfluidic chips,” Tribol. Int. 114, 306–314 (2017).
[Crossref]

J. Guo, C. W. Kum, K. H. Au, Z. E. E. Tan, H. Wu, and K. Liu, “New vibration-assisted magnetic abrasive polishing (VAMAP) method for microstructured surface finishing,” Opt. Express 24(12), 13542–13554 (2016).
[Crossref] [PubMed]

Hernández, M.

Higuchi, T.

H. Suzuki, M. Okada, Y. Yamagata, S. Morita, and T. Higuchi, “Precision grinding of structured ceramic molds by diamond wheel trued with alloy metal,” CIRP Ann. 61(1), 283–286 (2012).
[Crossref]

Hu, X. T.

F. Z. Fang, Z. Xiong, and X. T. Hu, “An experimental study of micromachining step-mirrors for laser-diode beam shaping,” J. Micromech. Microeng. 16(2), 214–218 (2006).
[Crossref]

Ishibashi, T.

Y. Cai, K. Nakagawa, H. Kikuchi, N. Shimidzu, and T. Ishibashi, “Optimization of Aperture Antenna with V-groove Structures to Improve Intensity of Nanosized Circularly Polarized Light,” J. Nanosci. Nanotechnol. 17(3), 1970–1974 (2017).
[Crossref]

Jacobs, S. D.

W. I. Kordonski and S. D. Jacobs, “Magnetorheological finishing,” Int. J. Mod. Phys. B 10(24), 2837–2848 (1996).
[Crossref]

Jiang, L.

Kawai, T.

Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of Multiple-focus Micro Fresnel Lenses by Means of Nonrotational Diamond Grooving,” CIRP Ann. 51(1), 343–346 (2002).
[Crossref]

Kikuchi, H.

Y. Cai, K. Nakagawa, H. Kikuchi, N. Shimidzu, and T. Ishibashi, “Optimization of Aperture Antenna with V-groove Structures to Improve Intensity of Nanosized Circularly Polarized Light,” J. Nanosci. Nanotechnol. 17(3), 1970–1974 (2017).
[Crossref]

Kim, D. W.

Kim, G. D.

G. D. Kim and B. G. Loh, “An ultrasonic elliptical vibration cutting device for micro V-groove machining: Kinematical analysis and micro V-groove machining characteristics,” J. Mater. Process. Technol. 190(1–3), 181–188 (2007).

Kim, S. W.

Kim, W. B.

W. B. Kim, S. H. Lee, and B. K. Min, “Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid,” J. Manuf. Sci. Eng. 126(4), 772–778 (2004).
[Crossref]

Kim, Y. S.

J. H. Lee, S. R. Park, S. H. Yang, and Y. S. Kim, “Fabrication of a V-groove on the optical fiber connector using a miniaturized machine tool,” J. Mater. Process. Technol. 155, 1716–1722 (2004).
[Crossref]

Kordonski, W. I.

W. I. Kordonski and S. D. Jacobs, “Magnetorheological finishing,” Int. J. Mod. Phys. B 10(24), 2837–2848 (1996).
[Crossref]

Kripesh, V.

A. Priyadarshi, L. Fen, S. Mhaisalkar, V. Kripesh, and A. Asundi, “Fiber misalignment in silicon V-groove based optical modules,” Opt. Fiber Technol. 12(2), 170–184 (2006).
[Crossref]

Kudo, H.

H. Ohmori, N. Ebizuka, S. Morita, Y. Yamagata, and H. Kudo, “Ultraprecision micro-grinding of germanium immersion grating element for mid-infrared super dispersion spectrograph,” CIRP Ann. 50(1), 221–224 (2001).
[Crossref]

Kum, C. W.

Kuriyagawa, T.

J. Yan, T. Oowada, T. Zhou, and T. Kuriyagawa, “Precision machining of microstructures on electroless-plated NiP surface for molding glass components,” J. Mater. Process. Technol. 209(10), 4802–4808 (2009).
[Crossref]

J. Yan, K. Maekawa, J. Tamaki, and T. Kuriyagawa, “Micro grooving on single-crystal germanium for infrared Fresnel lenses,” J. Micromech. Microeng. 15(10), 1925–1931 (2005).
[Crossref]

Lee, J. H.

J. H. Lee, S. R. Park, S. H. Yang, and Y. S. Kim, “Fabrication of a V-groove on the optical fiber connector using a miniaturized machine tool,” J. Mater. Process. Technol. 155, 1716–1722 (2004).
[Crossref]

Lee, S. H.

W. B. Kim, S. H. Lee, and B. K. Min, “Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid,” J. Manuf. Sci. Eng. 126(4), 772–778 (2004).
[Crossref]

Li, P.

P. Li, J. Xie, J. Cheng, and K. Wu, “Anisotropic wetting properties on a precision-ground micro-V-grooved Si surface related to their micro-characterized variables,” J. Micromech. Microeng. 24(7), 075004 (2014).
[Crossref]

Liu, K.

J. Guo, K. Liu, Z. Wang, and G. L. Tnay, “Magnetic field-assisted finishing of a mold insert with curved microstructures for injection molding of microfluidic chips,” Tribol. Int. 114, 306–314 (2017).
[Crossref]

J. Guo, C. W. Kum, K. H. Au, Z. E. E. Tan, H. Wu, and K. Liu, “New vibration-assisted magnetic abrasive polishing (VAMAP) method for microstructured surface finishing,” Opt. Express 24(12), 13542–13554 (2016).
[Crossref] [PubMed]

Liu, X.

Liu, Y. C.

F. Z. Fang and Y. C. Liu, “On minimum exit-burr in micro cutting,” J. Micromech. Microeng. 14(7), 984–988 (2004).
[Crossref]

Loh, B. G.

G. D. Kim and B. G. Loh, “An ultrasonic elliptical vibration cutting device for micro V-groove machining: Kinematical analysis and micro V-groove machining characteristics,” J. Mater. Process. Technol. 190(1–3), 181–188 (2007).

Lv, P.

Y. Wang, Q. Zhao, Y. Shang, P. Lv, B. Guo, and L. Zhao, “Ultra-precision machining of Fresnel microstructure on die steel using single crystal diamond tool,” J. Mater. Process. Technol. 211(12), 2152–2159 (2011).
[Crossref]

Maeda, S.

Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of Multiple-focus Micro Fresnel Lenses by Means of Nonrotational Diamond Grooving,” CIRP Ann. 51(1), 343–346 (2002).
[Crossref]

Maekawa, K.

J. Yan, K. Maekawa, J. Tamaki, and T. Kuriyagawa, “Micro grooving on single-crystal germanium for infrared Fresnel lenses,” J. Micromech. Microeng. 15(10), 1925–1931 (2005).
[Crossref]

McMullin, J. N.

Mhaisalkar, S.

A. Priyadarshi, L. Fen, S. Mhaisalkar, V. Kripesh, and A. Asundi, “Fiber misalignment in silicon V-groove based optical modules,” Opt. Fiber Technol. 12(2), 170–184 (2006).
[Crossref]

Min, B. K.

W. B. Kim, S. H. Lee, and B. K. Min, “Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid,” J. Manuf. Sci. Eng. 126(4), 772–778 (2004).
[Crossref]

Miñano, J. C.

Mohedano, R.

Morita, S.

H. Suzuki, M. Okada, Y. Yamagata, S. Morita, and T. Higuchi, “Precision grinding of structured ceramic molds by diamond wheel trued with alloy metal,” CIRP Ann. 61(1), 283–286 (2012).
[Crossref]

H. Ohmori, N. Ebizuka, S. Morita, Y. Yamagata, and H. Kudo, “Ultraprecision micro-grinding of germanium immersion grating element for mid-infrared super dispersion spectrograph,” CIRP Ann. 50(1), 221–224 (2001).
[Crossref]

Nakagawa, K.

Y. Cai, K. Nakagawa, H. Kikuchi, N. Shimidzu, and T. Ishibashi, “Optimization of Aperture Antenna with V-groove Structures to Improve Intensity of Nanosized Circularly Polarized Light,” J. Nanosci. Nanotechnol. 17(3), 1970–1974 (2017).
[Crossref]

Nomura, M.

Y. Wang, Y. Wu, and M. Nomura, “Feasibility study on surface finishing of miniature V-grooves with magnetic compound fluid slurry,” Precis. Eng. 45, 67–78 (2016).
[Crossref]

Ohmori, H.

H. Ohmori, N. Ebizuka, S. Morita, Y. Yamagata, and H. Kudo, “Ultraprecision micro-grinding of germanium immersion grating element for mid-infrared super dispersion spectrograph,” CIRP Ann. 50(1), 221–224 (2001).
[Crossref]

Okada, M.

H. Suzuki, M. Okada, Y. Yamagata, S. Morita, and T. Higuchi, “Precision grinding of structured ceramic molds by diamond wheel trued with alloy metal,” CIRP Ann. 61(1), 283–286 (2012).
[Crossref]

Oowada, T.

J. Yan, T. Oowada, T. Zhou, and T. Kuriyagawa, “Precision machining of microstructures on electroless-plated NiP surface for molding glass components,” J. Mater. Process. Technol. 209(10), 4802–4808 (2009).
[Crossref]

Park, S. R.

J. H. Lee, S. R. Park, S. H. Yang, and Y. S. Kim, “Fabrication of a V-groove on the optical fiber connector using a miniaturized machine tool,” J. Mater. Process. Technol. 155, 1716–1722 (2004).
[Crossref]

Priyadarshi, A.

A. Priyadarshi, L. Fen, S. Mhaisalkar, V. Kripesh, and A. Asundi, “Fiber misalignment in silicon V-groove based optical modules,” Opt. Fiber Technol. 12(2), 170–184 (2006).
[Crossref]

Rajkumar, N.

Riemer, O.

E. Brinksmeier, O. Riemer, and A. Gessenharter, “Finishing of structured surfaces by abrasive polishing,” Precis. Eng. 30(3), 325–336 (2006).
[Crossref]

Sawada, K.

Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of Multiple-focus Micro Fresnel Lenses by Means of Nonrotational Diamond Grooving,” CIRP Ann. 51(1), 343–346 (2002).
[Crossref]

Shang, Y.

Y. Wang, Q. Zhao, Y. Shang, P. Lv, B. Guo, and L. Zhao, “Ultra-precision machining of Fresnel microstructure on die steel using single crystal diamond tool,” J. Mater. Process. Technol. 211(12), 2152–2159 (2011).
[Crossref]

Shimidzu, N.

Y. Cai, K. Nakagawa, H. Kikuchi, N. Shimidzu, and T. Ishibashi, “Optimization of Aperture Antenna with V-groove Structures to Improve Intensity of Nanosized Circularly Polarized Light,” J. Nanosci. Nanotechnol. 17(3), 1970–1974 (2017).
[Crossref]

Shinmura, T.

S. Yin and T. Shinmura, “A comparative study: polishing characteristics and its mechanisms of three vibration modes in vibration-assisted magnetic abrasive polishing,” Int. J. Mach. Tools Manuf. 44(4), 383–390 (2004).
[Crossref]

Sumathy, K.

W. T. Xie, Y. J. Dai, R. Z. Wang, and K. Sumathy, “Concentrated solar energy applications using Fresnel lenses: A review,” Renew. Sustain. Energy Rev. 15(6), 2588–2606 (2011).
[Crossref]

Suzuki, H.

H. Suzuki, M. Okada, Y. Yamagata, S. Morita, and T. Higuchi, “Precision grinding of structured ceramic molds by diamond wheel trued with alloy metal,” CIRP Ann. 61(1), 283–286 (2012).
[Crossref]

Takeuchi, Y.

Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of Multiple-focus Micro Fresnel Lenses by Means of Nonrotational Diamond Grooving,” CIRP Ann. 51(1), 343–346 (2002).
[Crossref]

Tamaki, J.

J. Yan, K. Maekawa, J. Tamaki, and T. Kuriyagawa, “Micro grooving on single-crystal germanium for infrared Fresnel lenses,” J. Micromech. Microeng. 15(10), 1925–1931 (2005).
[Crossref]

Tan, Z. E. E.

Tnay, G. L.

J. Guo, K. Liu, Z. Wang, and G. L. Tnay, “Magnetic field-assisted finishing of a mold insert with curved microstructures for injection molding of microfluidic chips,” Tribol. Int. 114, 306–314 (2017).
[Crossref]

To, S.

S. Wang, S. To, X. Chen, H. Wang, and H. Xia, “A study of the fabrication of v-groove structure in ultra-precision milling,” Int. J. Comput. Integrated Manuf. 27(11), 986–996 (2014).
[Crossref]

Wang, H.

S. Wang, S. To, X. Chen, H. Wang, and H. Xia, “A study of the fabrication of v-groove structure in ultra-precision milling,” Int. J. Comput. Integrated Manuf. 27(11), 986–996 (2014).
[Crossref]

Wang, R. Z.

W. T. Xie, Y. J. Dai, R. Z. Wang, and K. Sumathy, “Concentrated solar energy applications using Fresnel lenses: A review,” Renew. Sustain. Energy Rev. 15(6), 2588–2606 (2011).
[Crossref]

Wang, S.

S. Wang, S. To, X. Chen, H. Wang, and H. Xia, “A study of the fabrication of v-groove structure in ultra-precision milling,” Int. J. Comput. Integrated Manuf. 27(11), 986–996 (2014).
[Crossref]

Wang, Y.

Y. Wang, Y. Wu, and M. Nomura, “Feasibility study on surface finishing of miniature V-grooves with magnetic compound fluid slurry,” Precis. Eng. 45, 67–78 (2016).
[Crossref]

Y. Wang, Q. Zhao, Y. Shang, P. Lv, B. Guo, and L. Zhao, “Ultra-precision machining of Fresnel microstructure on die steel using single crystal diamond tool,” J. Mater. Process. Technol. 211(12), 2152–2159 (2011).
[Crossref]

Wang, Z.

J. Guo, K. Liu, Z. Wang, and G. L. Tnay, “Magnetic field-assisted finishing of a mold insert with curved microstructures for injection molding of microfluidic chips,” Tribol. Int. 114, 306–314 (2017).
[Crossref]

Weckenmann, A.

F. Z. Fang, X. D. Zhang, A. Weckenmann, G. X. Zhang, and C. Evans, “Manufacturing and measurement of freeform optics,” CIRP Ann. 62(2), 823–846 (2013).
[Crossref]

Wu, H.

Wu, K.

P. Li, J. Xie, J. Cheng, and K. Wu, “Anisotropic wetting properties on a precision-ground micro-V-grooved Si surface related to their micro-characterized variables,” J. Micromech. Microeng. 24(7), 075004 (2014).
[Crossref]

Wu, Y.

Y. Wang, Y. Wu, and M. Nomura, “Feasibility study on surface finishing of miniature V-grooves with magnetic compound fluid slurry,” Precis. Eng. 45, 67–78 (2016).
[Crossref]

Xia, H.

S. Wang, S. To, X. Chen, H. Wang, and H. Xia, “A study of the fabrication of v-groove structure in ultra-precision milling,” Int. J. Comput. Integrated Manuf. 27(11), 986–996 (2014).
[Crossref]

Xie, J.

P. Li, J. Xie, J. Cheng, and K. Wu, “Anisotropic wetting properties on a precision-ground micro-V-grooved Si surface related to their micro-characterized variables,” J. Micromech. Microeng. 24(7), 075004 (2014).
[Crossref]

Xie, W. T.

W. T. Xie, Y. J. Dai, R. Z. Wang, and K. Sumathy, “Concentrated solar energy applications using Fresnel lenses: A review,” Renew. Sustain. Energy Rev. 15(6), 2588–2606 (2011).
[Crossref]

Xiong, Z.

F. Z. Fang, Z. Xiong, and X. T. Hu, “An experimental study of micromachining step-mirrors for laser-diode beam shaping,” J. Micromech. Microeng. 16(2), 214–218 (2006).
[Crossref]

Yamagata, Y.

H. Suzuki, M. Okada, Y. Yamagata, S. Morita, and T. Higuchi, “Precision grinding of structured ceramic molds by diamond wheel trued with alloy metal,” CIRP Ann. 61(1), 283–286 (2012).
[Crossref]

H. Ohmori, N. Ebizuka, S. Morita, Y. Yamagata, and H. Kudo, “Ultraprecision micro-grinding of germanium immersion grating element for mid-infrared super dispersion spectrograph,” CIRP Ann. 50(1), 221–224 (2001).
[Crossref]

Yan, J.

J. Yan, T. Oowada, T. Zhou, and T. Kuriyagawa, “Precision machining of microstructures on electroless-plated NiP surface for molding glass components,” J. Mater. Process. Technol. 209(10), 4802–4808 (2009).
[Crossref]

J. Yan, K. Maekawa, J. Tamaki, and T. Kuriyagawa, “Micro grooving on single-crystal germanium for infrared Fresnel lenses,” J. Micromech. Microeng. 15(10), 1925–1931 (2005).
[Crossref]

Yang, S. H.

J. H. Lee, S. R. Park, S. H. Yang, and Y. S. Kim, “Fabrication of a V-groove on the optical fiber connector using a miniaturized machine tool,” J. Mater. Process. Technol. 155, 1716–1722 (2004).
[Crossref]

Yin, S.

S. Yin and T. Shinmura, “A comparative study: polishing characteristics and its mechanisms of three vibration modes in vibration-assisted magnetic abrasive polishing,” Int. J. Mach. Tools Manuf. 44(4), 383–390 (2004).
[Crossref]

Zamora, P.

Zeng, Z.

Zhang, G. X.

F. Z. Fang, X. D. Zhang, A. Weckenmann, G. X. Zhang, and C. Evans, “Manufacturing and measurement of freeform optics,” CIRP Ann. 62(2), 823–846 (2013).
[Crossref]

Zhang, X.

Zhang, X. D.

F. Z. Fang, X. D. Zhang, A. Weckenmann, G. X. Zhang, and C. Evans, “Manufacturing and measurement of freeform optics,” CIRP Ann. 62(2), 823–846 (2013).
[Crossref]

Zhao, L.

Y. Wang, Q. Zhao, Y. Shang, P. Lv, B. Guo, and L. Zhao, “Ultra-precision machining of Fresnel microstructure on die steel using single crystal diamond tool,” J. Mater. Process. Technol. 211(12), 2152–2159 (2011).
[Crossref]

Zhao, Q.

Y. Wang, Q. Zhao, Y. Shang, P. Lv, B. Guo, and L. Zhao, “Ultra-precision machining of Fresnel microstructure on die steel using single crystal diamond tool,” J. Mater. Process. Technol. 211(12), 2152–2159 (2011).
[Crossref]

Zhou, T.

J. Yan, T. Oowada, T. Zhou, and T. Kuriyagawa, “Precision machining of microstructures on electroless-plated NiP surface for molding glass components,” J. Mater. Process. Technol. 209(10), 4802–4808 (2009).
[Crossref]

Appl. Opt. (1)

CIRP Ann. (4)

Y. Takeuchi, S. Maeda, T. Kawai, and K. Sawada, “Manufacture of Multiple-focus Micro Fresnel Lenses by Means of Nonrotational Diamond Grooving,” CIRP Ann. 51(1), 343–346 (2002).
[Crossref]

H. Ohmori, N. Ebizuka, S. Morita, Y. Yamagata, and H. Kudo, “Ultraprecision micro-grinding of germanium immersion grating element for mid-infrared super dispersion spectrograph,” CIRP Ann. 50(1), 221–224 (2001).
[Crossref]

H. Suzuki, M. Okada, Y. Yamagata, S. Morita, and T. Higuchi, “Precision grinding of structured ceramic molds by diamond wheel trued with alloy metal,” CIRP Ann. 61(1), 283–286 (2012).
[Crossref]

F. Z. Fang, X. D. Zhang, A. Weckenmann, G. X. Zhang, and C. Evans, “Manufacturing and measurement of freeform optics,” CIRP Ann. 62(2), 823–846 (2013).
[Crossref]

Int. J. Comput. Integrated Manuf. (1)

S. Wang, S. To, X. Chen, H. Wang, and H. Xia, “A study of the fabrication of v-groove structure in ultra-precision milling,” Int. J. Comput. Integrated Manuf. 27(11), 986–996 (2014).
[Crossref]

Int. J. Mach. Tools Manuf. (1)

S. Yin and T. Shinmura, “A comparative study: polishing characteristics and its mechanisms of three vibration modes in vibration-assisted magnetic abrasive polishing,” Int. J. Mach. Tools Manuf. 44(4), 383–390 (2004).
[Crossref]

Int. J. Mod. Phys. B (1)

W. I. Kordonski and S. D. Jacobs, “Magnetorheological finishing,” Int. J. Mod. Phys. B 10(24), 2837–2848 (1996).
[Crossref]

J. Manuf. Sci. Eng. (1)

W. B. Kim, S. H. Lee, and B. K. Min, “Surface finishing and evaluation of three-dimensional silicon microchannel using magnetorheological fluid,” J. Manuf. Sci. Eng. 126(4), 772–778 (2004).
[Crossref]

J. Mater. Process. Technol. (4)

G. D. Kim and B. G. Loh, “An ultrasonic elliptical vibration cutting device for micro V-groove machining: Kinematical analysis and micro V-groove machining characteristics,” J. Mater. Process. Technol. 190(1–3), 181–188 (2007).

J. Yan, T. Oowada, T. Zhou, and T. Kuriyagawa, “Precision machining of microstructures on electroless-plated NiP surface for molding glass components,” J. Mater. Process. Technol. 209(10), 4802–4808 (2009).
[Crossref]

J. H. Lee, S. R. Park, S. H. Yang, and Y. S. Kim, “Fabrication of a V-groove on the optical fiber connector using a miniaturized machine tool,” J. Mater. Process. Technol. 155, 1716–1722 (2004).
[Crossref]

Y. Wang, Q. Zhao, Y. Shang, P. Lv, B. Guo, and L. Zhao, “Ultra-precision machining of Fresnel microstructure on die steel using single crystal diamond tool,” J. Mater. Process. Technol. 211(12), 2152–2159 (2011).
[Crossref]

J. Micromech. Microeng. (4)

P. Li, J. Xie, J. Cheng, and K. Wu, “Anisotropic wetting properties on a precision-ground micro-V-grooved Si surface related to their micro-characterized variables,” J. Micromech. Microeng. 24(7), 075004 (2014).
[Crossref]

J. Yan, K. Maekawa, J. Tamaki, and T. Kuriyagawa, “Micro grooving on single-crystal germanium for infrared Fresnel lenses,” J. Micromech. Microeng. 15(10), 1925–1931 (2005).
[Crossref]

F. Z. Fang and Y. C. Liu, “On minimum exit-burr in micro cutting,” J. Micromech. Microeng. 14(7), 984–988 (2004).
[Crossref]

F. Z. Fang, Z. Xiong, and X. T. Hu, “An experimental study of micromachining step-mirrors for laser-diode beam shaping,” J. Micromech. Microeng. 16(2), 214–218 (2006).
[Crossref]

J. Nanosci. Nanotechnol. (1)

Y. Cai, K. Nakagawa, H. Kikuchi, N. Shimidzu, and T. Ishibashi, “Optimization of Aperture Antenna with V-groove Structures to Improve Intensity of Nanosized Circularly Polarized Light,” J. Nanosci. Nanotechnol. 17(3), 1970–1974 (2017).
[Crossref]

Opt. Express (4)

Opt. Fiber Technol. (1)

A. Priyadarshi, L. Fen, S. Mhaisalkar, V. Kripesh, and A. Asundi, “Fiber misalignment in silicon V-groove based optical modules,” Opt. Fiber Technol. 12(2), 170–184 (2006).
[Crossref]

Precis. Eng. (2)

Y. Wang, Y. Wu, and M. Nomura, “Feasibility study on surface finishing of miniature V-grooves with magnetic compound fluid slurry,” Precis. Eng. 45, 67–78 (2016).
[Crossref]

E. Brinksmeier, O. Riemer, and A. Gessenharter, “Finishing of structured surfaces by abrasive polishing,” Precis. Eng. 30(3), 325–336 (2006).
[Crossref]

Renew. Sustain. Energy Rev. (1)

W. T. Xie, Y. J. Dai, R. Z. Wang, and K. Sumathy, “Concentrated solar energy applications using Fresnel lenses: A review,” Renew. Sustain. Energy Rev. 15(6), 2588–2606 (2011).
[Crossref]

Tribol. Int. (1)

J. Guo, K. Liu, Z. Wang, and G. L. Tnay, “Magnetic field-assisted finishing of a mold insert with curved microstructures for injection molding of microfluidic chips,” Tribol. Int. 114, 306–314 (2017).
[Crossref]

Other (3)

R. S. P. Technology, “RSP Technology - Home”, http://www.rsp-technology.com/ .

J. Guo, J. Zhang, H. Wang, K. Liu, and A. S. Kumar,“Surface quality characterisation of diamond cut V-groove structures made of rapidly solidified aluminium RSA-905,” Precis. Eng. https://doi.org/10.1016/j.precisioneng.2018.03.004.

M. Brass, J. M. Enoch, E. W. Van Stryland, and W. L. Wolfe, Handbook of Optics (Volume III): Vision and Vision Optics (McGraw-Hill Education, 2010).

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Figures (12)

Fig. 1
Fig. 1 Schematic illustration of the VAMAP method. The magnetic particles conform to the form of the microfeatures and access the corners of microfeatures by the magnetic field while a relative movement is generated by vibration between the magnetic particles and microstructured surface, causing materials to be removed.
Fig. 2
Fig. 2 Experimental setups for (a) pole-magnet positioning, (b) V-groove and (c) Fresnel optics polishing.
Fig. 3
Fig. 3 Geometries of (a) V-groove and (b) Fresnel optics structures.
Fig. 4
Fig. 4 Secondary electron images of (a) magnetic particles and (b) colloidal silica particles.
Fig. 5
Fig. 5 Simulation results of magnetic flux density distribution for (a) V-grooves and (b) Fresnel-type structures.
Fig. 6
Fig. 6 Surface roughness achieved at different conditions.
Fig. 7
Fig. 7 Surface roughness variation as a function of polishing time.
Fig. 8
Fig. 8 Surface roughness of V-groove structures (a) before and (b) after polishing.
Fig. 9
Fig. 9 Surface roughness of Fresnel-type structures (a) before and (b) after polishing.
Fig. 10
Fig. 10 Form change of (a) V-groove and (b) Fresnel-type structures before and after polishing.
Fig. 11
Fig. 11 Secondary electron images of surface morphologies on top, side and bottom of V-groove structures (a) before and (b) after polishing.
Fig. 12
Fig. 12 Secondary electron images of surface morphologies on side and edge of Fresnel-type structures (a) before and (b) after polishing.

Tables (1)

Tables Icon

Table 1 Experimental conditions.

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