Abstract

This paper reports on the first hologram in transmission mode based on a c-Si metasurface in the visible range. The hologram shows high fidelity and high efficiency, with measured transmission and diffraction efficiencies of ~65% and ~40%, respectively. Although originally designed to achieve full phase control in the range [0-2π] at 532 nm, these holograms have also performed well at 444.9 nm and 635 nm. The high tolerance to both fabrication and wavelength variations demonstrate that holograms based on c-Si metasurfaces are quite attractive for diffractive optics applications, and particularly for full-color holograms.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2017 (4)

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
[Crossref]

G. Yoon, D. Lee, K. T. Nam, and J. Rho, “Pragmatic Metasurface Hologram at Visible Wavelength: The Balance between Diffraction Efficiency and Fabrication Compatibility,” ACS Photonics 4, 7b01044 (2017).
[Crossref]

J. P. Balthasar Mueller, N. A. Rubin, R. C. Devlin, B. Groever, and F. Capasso, “Metasurface Polarization Optics: Independent Phase Control of Arbitrary Orthogonal States of Polarization,” Phys. Rev. Lett. 118(11), 113901 (2017).
[Crossref] [PubMed]

2016 (11)

A. Zhan, S. Colburn, R. Trivedi, T. K. Fryett, C. M. Dodson, and A. Majumdar, “Low-contrast dielectric metasurface optics,” ACS Photonics 3(2), 209–214 (2016).
[Crossref]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
[Crossref]

Q.-T. Li, F. Dong, B. Wang, F. Gan, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Polarization-independent and high-efficiency dielectric metasurfaces for visible light,” Opt. Express 24(15), 16309–16319 (2016).
[Crossref] [PubMed]

B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
[Crossref] [PubMed]

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
[Crossref] [PubMed]

L. Wang, S. Kruk, H. Tang, T. Li, I. Kravchenko, D. N. Neshev, and Y. S. Kivshar, “Grayscale transparent metasurface holograms,” Optica 3(12), 1504–1505 (2016).
[Crossref]

S. Kruk, B. Hopkins, I. I. Kravchenko, A. Miroshnichenko, D. N. Neshev, and Y. S. Kivshar, “Invited Article: Broadband highly efficient dielectric metadevices for polarization control,” APL Photonics 1(3), 030801 (2016).
[Crossref]

W. Wan, J. Gao, and X. Yang, “Full-Color Plasmonic Metasurface Holograms,” ACS Nano 10(12), 10671–10680 (2016).
[Crossref] [PubMed]

W. Zhao, H. Jiang, B. Liu, J. Song, Y. Jiang, C. Tang, and J. Li, “Dielectric Huygens’ Metasurface for High-Efficiency Hologram Operating in Transmission Mode,” Sci. Rep. 6, 30613 (2016).

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

2015 (11)

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

G. Zheng, H. Mühlenbernd, M. Kenney, G. Li, T. Zentgraf, and S. Zhang, “Metasurface holograms reaching 80% efficiency,” Nat. Nanotechnol. 10(4), 308–312 (2015).
[Crossref] [PubMed]

Y.-W. Huang, W. T. Chen, W.-Y. Tsai, P. C. Wu, C.-M. Wang, G. Sun, and D. P. Tsai, “Aluminum plasmonic multicolor meta-hologram,” Nano Lett. 15(5), 3122–3127 (2015).
[Crossref] [PubMed]

P. Genevet and F. Capasso, “Holographic Optical metasurfaces: a review of current progress,” Rep. Prog. Phys. 78(2), 024401 (2015).
[Crossref] [PubMed]

M. I. Shalaev, J. Sun, A. Tsukernik, A. Pandey, K. Nikolskiy, and N. M. Litchinitser, “High-efficiency all-dielectric metasurfaces for ultracompact beam manipulation in transmission mode,” Nano Lett. 15(9), 6261–6266 (2015).
[Crossref] [PubMed]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

A. Arbabi, R. M. Briggs, Y. Horie, M. Bagheri, and A. Faraon, “Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers,” Opt. Express 23(26), 33310–33317 (2015).
[Crossref] [PubMed]

M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
[Crossref] [PubMed]

Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
[Crossref]

H. Pang, S. Yin, Q. Deng, Q. Qiu, and C. Du, “A novel method for the design of diffractive optical elements based on the Rayleigh–Sommerfeld integral,” Opt. Lasers Eng. 70, 38–44 (2015).
[Crossref]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High-efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
[Crossref]

2014 (2)

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

Y. Zhao, X.-X. Liu, and A. Alù, “Recent advances on optical metasurfaces,” J. Opt. 16(12), 123001 (2014).
[Crossref]

2013 (3)

A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar Photonics with Metasurfaces,” Science 339(6125), 1232009 (2013).
[Crossref] [PubMed]

X. Ni, A. V. Kildishev, and V. M. Shalaev, “Metasurface holograms for visible light,” Nat. Commun. 4, 2807 (2013).
[Crossref]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

2012 (4)

M. W. Knight, L. Liu, Y. Wang, L. Brown, S. Mukherjee, N. S. King, H. O. Everitt, P. Nordlander, and N. J. Halas, “Aluminum Plasmonic Nanoantennas,” Nano Lett. 12(11), 6000–6004 (2012).
[Crossref] [PubMed]

C. L. Holloway, E. F. Kuester, J. A. Gordon, J. O’Hara, J. Booth, and D. R. Smith, “An Overview of the Theory and Applications of Metasurfaces: The Two-Dimensional Equivalents of Metamaterials,” IEEE Antennas Propag. 54(2), 10–35 (2012).
[Crossref]

F. Aieta, P. Genevet, N. Yu, M. A. Kats, Z. Gaburro, and F. Capasso, “Out-of-Plane Reflection and Refraction of Light by Anisotropic Optical Antenna Metasurfaces with Phase Discontinuities,” Nano Lett. 12(3), 1702–1706 (2012).
[Crossref] [PubMed]

F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-Free Ultrathin Flat Lenses and Axicons at Telecom Wavelengths Based on Plasmonic Metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
[Crossref] [PubMed]

2011 (1)

A. B. Evlyukhin, C. Reinhardt, and B. N. Chichkov, “Multipole light scattering by nonspherical nanoparticles in the discrete dipole approximation,” Phys. Rev. B 84(23), 235429 (2011).
[Crossref]

1999 (1)

D. M. Whittaker and I. S. Culshaw, “Scattering-matrix treatment of patterned multilayer photonic structures,” Phys. Rev. B 60(4), 2610–2618 (1999).
[Crossref]

1998 (1)

1990 (1)

1983 (1)

D. E. Aspnes and A. Studna, “Dielectric functions and optical parameters of si, ge, gap, gaas, gasb, inp, inas, and insb from 1.5 to 6.0 ev,” Phys. Rev. B 27(2), 985–1009 (1983).
[Crossref]

1972 (1)

R. W. Gerchberg and W. O. Saxton, “A practical algorithm for the determination of phase from image and diffraction plane pictures,” Optik (Stuttg.) 35, 237–246 (1972).

1962 (1)

Aieta, F.

P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
[Crossref]

M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
[Crossref] [PubMed]

F. Aieta, P. Genevet, N. Yu, M. A. Kats, Z. Gaburro, and F. Capasso, “Out-of-Plane Reflection and Refraction of Light by Anisotropic Optical Antenna Metasurfaces with Phase Discontinuities,” Nano Lett. 12(3), 1702–1706 (2012).
[Crossref] [PubMed]

F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-Free Ultrathin Flat Lenses and Axicons at Telecom Wavelengths Based on Plasmonic Metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
[Crossref] [PubMed]

Alù, A.

Y. Zhao, X.-X. Liu, and A. Alù, “Recent advances on optical metasurfaces,” J. Opt. 16(12), 123001 (2014).
[Crossref]

Arbabi, A.

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

A. Arbabi, R. M. Briggs, Y. Horie, M. Bagheri, and A. Faraon, “Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers,” Opt. Express 23(26), 33310–33317 (2015).
[Crossref] [PubMed]

Aspnes, D. E.

D. E. Aspnes and A. Studna, “Dielectric functions and optical parameters of si, ge, gap, gaas, gasb, inp, inas, and insb from 1.5 to 6.0 ev,” Phys. Rev. B 27(2), 985–1009 (1983).
[Crossref]

Astilean, S.

Bagheri, M.

A. Arbabi, R. M. Briggs, Y. Horie, M. Bagheri, and A. Faraon, “Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers,” Opt. Express 23(26), 33310–33317 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

Balthasar Mueller, J. P.

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Chen, J.

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A. Zhan, S. Colburn, R. Trivedi, T. K. Fryett, C. M. Dodson, and A. Majumdar, “Low-contrast dielectric metasurface optics,” ACS Photonics 3(2), 209–214 (2016).
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K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
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A. B. Evlyukhin, C. Reinhardt, and B. N. Chichkov, “Multipole light scattering by nonspherical nanoparticles in the discrete dipole approximation,” Phys. Rev. B 84(23), 235429 (2011).
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M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High-efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
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A. Arbabi, R. M. Briggs, Y. Horie, M. Bagheri, and A. Faraon, “Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers,” Opt. Express 23(26), 33310–33317 (2015).
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I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
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A. Zhan, S. Colburn, R. Trivedi, T. K. Fryett, C. M. Dodson, and A. Majumdar, “Low-contrast dielectric metasurface optics,” ACS Photonics 3(2), 209–214 (2016).
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F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-Free Ultrathin Flat Lenses and Axicons at Telecom Wavelengths Based on Plasmonic Metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
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F. Aieta, P. Genevet, N. Yu, M. A. Kats, Z. Gaburro, and F. Capasso, “Out-of-Plane Reflection and Refraction of Light by Anisotropic Optical Antenna Metasurfaces with Phase Discontinuities,” Nano Lett. 12(3), 1702–1706 (2012).
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B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
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J. P. Balthasar Mueller, N. A. Rubin, R. C. Devlin, B. Groever, and F. Capasso, “Metasurface Polarization Optics: Independent Phase Control of Arbitrary Orthogonal States of Polarization,” Phys. Rev. Lett. 118(11), 113901 (2017).
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M. W. Knight, L. Liu, Y. Wang, L. Brown, S. Mukherjee, N. S. King, H. O. Everitt, P. Nordlander, and N. J. Halas, “Aluminum Plasmonic Nanoantennas,” Nano Lett. 12(11), 6000–6004 (2012).
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A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
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K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
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K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
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M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
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M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
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G. Zheng, H. Mühlenbernd, M. Kenney, G. Li, T. Zentgraf, and S. Zhang, “Metasurface holograms reaching 80% efficiency,” Nat. Nanotechnol. 10(4), 308–312 (2015).
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P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, “Recent advances in planar optics: from plasmonic to dielectric metasurfaces,” Optica 4(1), 139–152 (2017).
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R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
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M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
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M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
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A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar Photonics with Metasurfaces,” Science 339(6125), 1232009 (2013).
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X. Ni, A. V. Kildishev, and V. M. Shalaev, “Metasurface holograms for visible light,” Nat. Commun. 4, 2807 (2013).
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M. W. Knight, L. Liu, Y. Wang, L. Brown, S. Mukherjee, N. S. King, H. O. Everitt, P. Nordlander, and N. J. Halas, “Aluminum Plasmonic Nanoantennas,” Nano Lett. 12(11), 6000–6004 (2012).
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Kivshar, Y.

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
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Kivshar, Y. S.

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
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S. Kruk, B. Hopkins, I. I. Kravchenko, A. Miroshnichenko, D. N. Neshev, and Y. S. Kivshar, “Invited Article: Broadband highly efficient dielectric metadevices for polarization control,” APL Photonics 1(3), 030801 (2016).
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L. Wang, S. Kruk, H. Tang, T. Li, I. Kravchenko, D. N. Neshev, and Y. S. Kivshar, “Grayscale transparent metasurface holograms,” Optica 3(12), 1504–1505 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High-efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
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M. W. Knight, L. Liu, Y. Wang, L. Brown, S. Mukherjee, N. S. King, H. O. Everitt, P. Nordlander, and N. J. Halas, “Aluminum Plasmonic Nanoantennas,” Nano Lett. 12(11), 6000–6004 (2012).
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Krauss, T. F.

Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
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Kravchenko, I.

Kravchenko, I. I.

S. Kruk, B. Hopkins, I. I. Kravchenko, A. Miroshnichenko, D. N. Neshev, and Y. S. Kivshar, “Invited Article: Broadband highly efficient dielectric metadevices for polarization control,” APL Photonics 1(3), 030801 (2016).
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S. Kruk, B. Hopkins, I. I. Kravchenko, A. Miroshnichenko, D. N. Neshev, and Y. S. Kivshar, “Invited Article: Broadband highly efficient dielectric metadevices for polarization control,” APL Photonics 1(3), 030801 (2016).
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L. Wang, S. Kruk, H. Tang, T. Li, I. Kravchenko, D. N. Neshev, and Y. S. Kivshar, “Grayscale transparent metasurface holograms,” Optica 3(12), 1504–1505 (2016).
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Kuester, E. F.

C. L. Holloway, E. F. Kuester, J. A. Gordon, J. O’Hara, J. Booth, and D. R. Smith, “An Overview of the Theory and Applications of Metasurfaces: The Two-Dimensional Equivalents of Metamaterials,” IEEE Antennas Propag. 54(2), 10–35 (2012).
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Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
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Lalanne, P.

Launois, H.

Lee, D.

G. Yoon, D. Lee, K. T. Nam, and J. Rho, “Pragmatic Metasurface Hologram at Visible Wavelength: The Balance between Diffraction Efficiency and Fabrication Compatibility,” ACS Photonics 4, 7b01044 (2017).
[Crossref]

Li, G.

G. Zheng, H. Mühlenbernd, M. Kenney, G. Li, T. Zentgraf, and S. Zhang, “Metasurface holograms reaching 80% efficiency,” Nat. Nanotechnol. 10(4), 308–312 (2015).
[Crossref] [PubMed]

Li, J.

Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
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W. Zhao, H. Jiang, B. Liu, J. Song, Y. Jiang, C. Tang, and J. Li, “Dielectric Huygens’ Metasurface for High-Efficiency Hologram Operating in Transmission Mode,” Sci. Rep. 6, 30613 (2016).

Li, K.

Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
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B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
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Q.-T. Li, F. Dong, B. Wang, F. Gan, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Polarization-independent and high-efficiency dielectric metasurfaces for visible light,” Opt. Express 24(15), 16309–16319 (2016).
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Li, T.

Li, Y.

Q.-T. Li, F. Dong, B. Wang, F. Gan, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Polarization-independent and high-efficiency dielectric metasurfaces for visible light,” Opt. Express 24(15), 16309–16319 (2016).
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B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
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M. I. Shalaev, J. Sun, A. Tsukernik, A. Pandey, K. Nikolskiy, and N. M. Litchinitser, “High-efficiency all-dielectric metasurfaces for ultracompact beam manipulation in transmission mode,” Nano Lett. 15(9), 6261–6266 (2015).
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W. Zhao, H. Jiang, B. Liu, J. Song, Y. Jiang, C. Tang, and J. Li, “Dielectric Huygens’ Metasurface for High-Efficiency Hologram Operating in Transmission Mode,” Sci. Rep. 6, 30613 (2016).

Liu, H.

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
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Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
[Crossref]

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M. W. Knight, L. Liu, Y. Wang, L. Brown, S. Mukherjee, N. S. King, H. O. Everitt, P. Nordlander, and N. J. Halas, “Aluminum Plasmonic Nanoantennas,” Nano Lett. 12(11), 6000–6004 (2012).
[Crossref] [PubMed]

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K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
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K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
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K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
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I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
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Luk’yanchuk, B.

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
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Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
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Mei, S.

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
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S. Kruk, B. Hopkins, I. I. Kravchenko, A. Miroshnichenko, D. N. Neshev, and Y. S. Kivshar, “Invited Article: Broadband highly efficient dielectric metadevices for polarization control,” APL Photonics 1(3), 030801 (2016).
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I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
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Mühlenbernd, H.

G. Zheng, H. Mühlenbernd, M. Kenney, G. Li, T. Zentgraf, and S. Zhang, “Metasurface holograms reaching 80% efficiency,” Nat. Nanotechnol. 10(4), 308–312 (2015).
[Crossref] [PubMed]

Mukherjee, S.

M. W. Knight, L. Liu, Y. Wang, L. Brown, S. Mukherjee, N. S. King, H. O. Everitt, P. Nordlander, and N. J. Halas, “Aluminum Plasmonic Nanoantennas,” Nano Lett. 12(11), 6000–6004 (2012).
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G. Yoon, D. Lee, K. T. Nam, and J. Rho, “Pragmatic Metasurface Hologram at Visible Wavelength: The Balance between Diffraction Efficiency and Fabrication Compatibility,” ACS Photonics 4, 7b01044 (2017).
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K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
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S. Kruk, B. Hopkins, I. I. Kravchenko, A. Miroshnichenko, D. N. Neshev, and Y. S. Kivshar, “Invited Article: Broadband highly efficient dielectric metadevices for polarization control,” APL Photonics 1(3), 030801 (2016).
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L. Wang, S. Kruk, H. Tang, T. Li, I. Kravchenko, D. N. Neshev, and Y. S. Kivshar, “Grayscale transparent metasurface holograms,” Optica 3(12), 1504–1505 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
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M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High-efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
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I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
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X. Ni, A. V. Kildishev, and V. M. Shalaev, “Metasurface holograms for visible light,” Nat. Commun. 4, 2807 (2013).
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M. I. Shalaev, J. Sun, A. Tsukernik, A. Pandey, K. Nikolskiy, and N. M. Litchinitser, “High-efficiency all-dielectric metasurfaces for ultracompact beam manipulation in transmission mode,” Nano Lett. 15(9), 6261–6266 (2015).
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M. W. Knight, L. Liu, Y. Wang, L. Brown, S. Mukherjee, N. S. King, H. O. Everitt, P. Nordlander, and N. J. Halas, “Aluminum Plasmonic Nanoantennas,” Nano Lett. 12(11), 6000–6004 (2012).
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O’Hara, J.

C. L. Holloway, E. F. Kuester, J. A. Gordon, J. O’Hara, J. Booth, and D. R. Smith, “An Overview of the Theory and Applications of Metasurfaces: The Two-Dimensional Equivalents of Metamaterials,” IEEE Antennas Propag. 54(2), 10–35 (2012).
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Oh, J.

R. C. Devlin, M. Khorasaninejad, W. T. Chen, J. Oh, and F. Capasso, “Broadband high-efficiency dielectric metasurfaces for the visible spectrum,” Proc. Natl. Acad. Sci. U.S.A. 113(38), 10473–10478 (2016).
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M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
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Pandey, A.

M. I. Shalaev, J. Sun, A. Tsukernik, A. Pandey, K. Nikolskiy, and N. M. Litchinitser, “High-efficiency all-dielectric metasurfaces for ultracompact beam manipulation in transmission mode,” Nano Lett. 15(9), 6261–6266 (2015).
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M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High-efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
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K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
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H. Pang, S. Yin, Q. Deng, Q. Qiu, and C. Du, “A novel method for the design of diffractive optical elements based on the Rayleigh–Sommerfeld integral,” Opt. Lasers Eng. 70, 38–44 (2015).
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Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
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G. Yoon, D. Lee, K. T. Nam, and J. Rho, “Pragmatic Metasurface Hologram at Visible Wavelength: The Balance between Diffraction Efficiency and Fabrication Compatibility,” ACS Photonics 4, 7b01044 (2017).
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M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
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M. I. Shalaev, J. Sun, A. Tsukernik, A. Pandey, K. Nikolskiy, and N. M. Litchinitser, “High-efficiency all-dielectric metasurfaces for ultracompact beam manipulation in transmission mode,” Nano Lett. 15(9), 6261–6266 (2015).
[Crossref] [PubMed]

Shalaev, V. M.

X. Ni, A. V. Kildishev, and V. M. Shalaev, “Metasurface holograms for visible light,” Nat. Commun. 4, 2807 (2013).
[Crossref]

A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar Photonics with Metasurfaces,” Science 339(6125), 1232009 (2013).
[Crossref] [PubMed]

Smith, D. R.

C. L. Holloway, E. F. Kuester, J. A. Gordon, J. O’Hara, J. Booth, and D. R. Smith, “An Overview of the Theory and Applications of Metasurfaces: The Two-Dimensional Equivalents of Metamaterials,” IEEE Antennas Propag. 54(2), 10–35 (2012).
[Crossref]

Song, J.

W. Zhao, H. Jiang, B. Liu, J. Song, Y. Jiang, C. Tang, and J. Li, “Dielectric Huygens’ Metasurface for High-Efficiency Hologram Operating in Transmission Mode,” Sci. Rep. 6, 30613 (2016).

Song, Z.

B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
[Crossref] [PubMed]

Q.-T. Li, F. Dong, B. Wang, F. Gan, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Polarization-independent and high-efficiency dielectric metasurfaces for visible light,” Opt. Express 24(15), 16309–16319 (2016).
[Crossref] [PubMed]

Staude, I.

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High-efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
[Crossref] [PubMed]

Stellinga, D.

Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
[Crossref]

Studna, A.

D. E. Aspnes and A. Studna, “Dielectric functions and optical parameters of si, ge, gap, gaas, gasb, inp, inas, and insb from 1.5 to 6.0 ev,” Phys. Rev. B 27(2), 985–1009 (1983).
[Crossref]

Su, R.

Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
[Crossref]

Subramania, G. S.

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

Sun, C.

B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
[Crossref] [PubMed]

Sun, G.

Y.-W. Huang, W. T. Chen, W.-Y. Tsai, P. C. Wu, C.-M. Wang, G. Sun, and D. P. Tsai, “Aluminum plasmonic multicolor meta-hologram,” Nano Lett. 15(5), 3122–3127 (2015).
[Crossref] [PubMed]

Sun, J.

M. I. Shalaev, J. Sun, A. Tsukernik, A. Pandey, K. Nikolskiy, and N. M. Litchinitser, “High-efficiency all-dielectric metasurfaces for ultracompact beam manipulation in transmission mode,” Nano Lett. 15(9), 6261–6266 (2015).
[Crossref] [PubMed]

Tang, C.

W. Zhao, H. Jiang, B. Liu, J. Song, Y. Jiang, C. Tang, and J. Li, “Dielectric Huygens’ Metasurface for High-Efficiency Hologram Operating in Transmission Mode,” Sci. Rep. 6, 30613 (2016).

Tang, H.

Teng, J.

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
[Crossref]

Trivedi, R.

A. Zhan, S. Colburn, R. Trivedi, T. K. Fryett, C. M. Dodson, and A. Majumdar, “Low-contrast dielectric metasurface optics,” ACS Photonics 3(2), 209–214 (2016).
[Crossref]

Tsai, D. P.

Y.-W. Huang, W. T. Chen, W.-Y. Tsai, P. C. Wu, C.-M. Wang, G. Sun, and D. P. Tsai, “Aluminum plasmonic multicolor meta-hologram,” Nano Lett. 15(5), 3122–3127 (2015).
[Crossref] [PubMed]

Tsai, W.-Y.

Y.-W. Huang, W. T. Chen, W.-Y. Tsai, P. C. Wu, C.-M. Wang, G. Sun, and D. P. Tsai, “Aluminum plasmonic multicolor meta-hologram,” Nano Lett. 15(5), 3122–3127 (2015).
[Crossref] [PubMed]

Tsukernik, A.

M. I. Shalaev, J. Sun, A. Tsukernik, A. Pandey, K. Nikolskiy, and N. M. Litchinitser, “High-efficiency all-dielectric metasurfaces for ultracompact beam manipulation in transmission mode,” Nano Lett. 15(9), 6261–6266 (2015).
[Crossref] [PubMed]

Wan, W.

W. Wan, J. Gao, and X. Yang, “Full-Color Plasmonic Metasurface Holograms,” ACS Nano 10(12), 10671–10680 (2016).
[Crossref] [PubMed]

Wang, B.

B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
[Crossref] [PubMed]

Q.-T. Li, F. Dong, B. Wang, F. Gan, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Polarization-independent and high-efficiency dielectric metasurfaces for visible light,” Opt. Express 24(15), 16309–16319 (2016).
[Crossref] [PubMed]

Wang, C.-M.

Y.-W. Huang, W. T. Chen, W.-Y. Tsai, P. C. Wu, C.-M. Wang, G. Sun, and D. P. Tsai, “Aluminum plasmonic multicolor meta-hologram,” Nano Lett. 15(5), 3122–3127 (2015).
[Crossref] [PubMed]

Wang, L.

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
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L. Wang, S. Kruk, H. Tang, T. Li, I. Kravchenko, D. N. Neshev, and Y. S. Kivshar, “Grayscale transparent metasurface holograms,” Optica 3(12), 1504–1505 (2016).
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Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
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M. W. Knight, L. Liu, Y. Wang, L. Brown, S. Mukherjee, N. S. King, H. O. Everitt, P. Nordlander, and N. J. Halas, “Aluminum Plasmonic Nanoantennas,” Nano Lett. 12(11), 6000–6004 (2012).
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D. M. Whittaker and I. S. Culshaw, “Scattering-matrix treatment of patterned multilayer photonic structures,” Phys. Rev. B 60(4), 2610–2618 (1999).
[Crossref]

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Y.-W. Huang, W. T. Chen, W.-Y. Tsai, P. C. Wu, C.-M. Wang, G. Sun, and D. P. Tsai, “Aluminum plasmonic multicolor meta-hologram,” Nano Lett. 15(5), 3122–3127 (2015).
[Crossref] [PubMed]

Wyrowski, F.

Xiao, Y.-F.

B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
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Q.-T. Li, F. Dong, B. Wang, F. Gan, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Polarization-independent and high-efficiency dielectric metasurfaces for visible light,” Opt. Express 24(15), 16309–16319 (2016).
[Crossref] [PubMed]

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Q.-T. Li, F. Dong, B. Wang, F. Gan, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Polarization-independent and high-efficiency dielectric metasurfaces for visible light,” Opt. Express 24(15), 16309–16319 (2016).
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B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
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B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
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K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
[Crossref]

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W. Wan, J. Gao, and X. Yang, “Full-Color Plasmonic Metasurface Holograms,” ACS Nano 10(12), 10671–10680 (2016).
[Crossref] [PubMed]

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Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
[Crossref]

Yin, S.

H. Pang, S. Yin, Q. Deng, Q. Qiu, and C. Du, “A novel method for the design of diffractive optical elements based on the Rayleigh–Sommerfeld integral,” Opt. Lasers Eng. 70, 38–44 (2015).
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G. Yoon, D. Lee, K. T. Nam, and J. Rho, “Pragmatic Metasurface Hologram at Visible Wavelength: The Balance between Diffraction Efficiency and Fabrication Compatibility,” ACS Photonics 4, 7b01044 (2017).
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Yu, N.

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
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F. Aieta, P. Genevet, N. Yu, M. A. Kats, Z. Gaburro, and F. Capasso, “Out-of-Plane Reflection and Refraction of Light by Anisotropic Optical Antenna Metasurfaces with Phase Discontinuities,” Nano Lett. 12(3), 1702–1706 (2012).
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F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-Free Ultrathin Flat Lenses and Axicons at Telecom Wavelengths Based on Plasmonic Metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
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Yu, Y. F.

Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
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Zentgraf, T.

G. Zheng, H. Mühlenbernd, M. Kenney, G. Li, T. Zentgraf, and S. Zhang, “Metasurface holograms reaching 80% efficiency,” Nat. Nanotechnol. 10(4), 308–312 (2015).
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Zhan, A.

A. Zhan, S. Colburn, R. Trivedi, T. K. Fryett, C. M. Dodson, and A. Majumdar, “Low-contrast dielectric metasurface optics,” ACS Photonics 3(2), 209–214 (2016).
[Crossref]

Zhang, L.

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
[Crossref]

Zhang, S.

G. Zheng, H. Mühlenbernd, M. Kenney, G. Li, T. Zentgraf, and S. Zhang, “Metasurface holograms reaching 80% efficiency,” Nat. Nanotechnol. 10(4), 308–312 (2015).
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Zhao, W.

W. Zhao, H. Jiang, B. Liu, J. Song, Y. Jiang, C. Tang, and J. Li, “Dielectric Huygens’ Metasurface for High-Efficiency Hologram Operating in Transmission Mode,” Sci. Rep. 6, 30613 (2016).

Zhao, Y.

Y. Zhao, X.-X. Liu, and A. Alù, “Recent advances on optical metasurfaces,” J. Opt. 16(12), 123001 (2014).
[Crossref]

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G. Zheng, H. Mühlenbernd, M. Kenney, G. Li, T. Zentgraf, and S. Zhang, “Metasurface holograms reaching 80% efficiency,” Nat. Nanotechnol. 10(4), 308–312 (2015).
[Crossref] [PubMed]

Zhou, L.

Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
[Crossref]

Zhou, Z.

Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
[Crossref]

Zhu, A. Y.

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
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Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
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Zhu, H.

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
[Crossref]

ACS Nano (2)

W. Wan, J. Gao, and X. Yang, “Full-Color Plasmonic Metasurface Holograms,” ACS Nano 10(12), 10671–10680 (2016).
[Crossref] [PubMed]

I. Staude, A. E. Miroshnichenko, M. Decker, N. T. Fofang, S. Liu, E. Gonzales, J. Dominguez, T. S. Luk, D. N. Neshev, I. Brener, and Y. Kivshar, “Tailoring Directional Scattering through Magnetic and Electric Resonances in Subwavelength Silicon Nanodisks,” ACS Nano 7(9), 7824–7832 (2013).
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ACS Photonics (4)

Z. Zhou, J. Li, R. Su, B. Yao, H. Fang, K. Li, L. Zhou, J. Liu, D. Stellinga, C. P. Reardon, T. F. Krauss, and X. Wang, “Efficient Silicon Metasurfaces for Visible Light,” ACS Photonics 4(3), 544–551 (2017).
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A. Zhan, S. Colburn, R. Trivedi, T. K. Fryett, C. M. Dodson, and A. Majumdar, “Low-contrast dielectric metasurface optics,” ACS Photonics 3(2), 209–214 (2016).
[Crossref]

G. Yoon, D. Lee, K. T. Nam, and J. Rho, “Pragmatic Metasurface Hologram at Visible Wavelength: The Balance between Diffraction Efficiency and Fabrication Compatibility,” ACS Photonics 4, 7b01044 (2017).
[Crossref]

K. E. Chong, L. Wang, I. Staude, A. R. James, J. Dominguez, S. Liu, G. S. Subramania, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Efficient polarization-insensitive complex wavefront control using Huygens’ metasurfaces based on dielectric resonant meta-atoms,” ACS Photonics 3(4), 514–519 (2016).
[Crossref]

Adv. Opt. Mater. (1)

M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, “High-efficiency dielectric Huygens’ surfaces,” Adv. Opt. Mater. 3(6), 813–820 (2015).
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APL Photonics (1)

S. Kruk, B. Hopkins, I. I. Kravchenko, A. Miroshnichenko, D. N. Neshev, and Y. S. Kivshar, “Invited Article: Broadband highly efficient dielectric metadevices for polarization control,” APL Photonics 1(3), 030801 (2016).
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IEEE Antennas Propag. (1)

C. L. Holloway, E. F. Kuester, J. A. Gordon, J. O’Hara, J. Booth, and D. R. Smith, “An Overview of the Theory and Applications of Metasurfaces: The Two-Dimensional Equivalents of Metamaterials,” IEEE Antennas Propag. 54(2), 10–35 (2012).
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Y. Zhao, X.-X. Liu, and A. Alù, “Recent advances on optical metasurfaces,” J. Opt. 16(12), 123001 (2014).
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J. Opt. Soc. Am. A (1)

Laser Photonics Rev. (2)

Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
[Crossref]

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
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Nano Lett. (8)

B. Wang, F. Dong, Q.-T. Li, D. Yang, C. Sun, J. Chen, Z. Song, L. Xu, W. Chu, Y.-F. Xiao, Q. Gong, and Y. Li, “Visible-frequency dielectric metasurfaces for multiwavelength achromatic and highly dispersive holograms,” Nano Lett. 16(8), 5235–5240 (2016).
[Crossref] [PubMed]

M. I. Shalaev, J. Sun, A. Tsukernik, A. Pandey, K. Nikolskiy, and N. M. Litchinitser, “High-efficiency all-dielectric metasurfaces for ultracompact beam manipulation in transmission mode,” Nano Lett. 15(9), 6261–6266 (2015).
[Crossref] [PubMed]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-independent silicon metadevices for efficient optical wavefront control,” Nano Lett. 15(8), 5369–5374 (2015).
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M. Khorasaninejad, F. Aieta, P. Kanhaiya, M. A. Kats, P. Genevet, D. Rousso, and F. Capasso, “Achromatic metasurface lens at telecommunication wavelengths,” Nano Lett. 15(8), 5358–5362 (2015).
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F. Aieta, P. Genevet, N. Yu, M. A. Kats, Z. Gaburro, and F. Capasso, “Out-of-Plane Reflection and Refraction of Light by Anisotropic Optical Antenna Metasurfaces with Phase Discontinuities,” Nano Lett. 12(3), 1702–1706 (2012).
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F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-Free Ultrathin Flat Lenses and Axicons at Telecom Wavelengths Based on Plasmonic Metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
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M. W. Knight, L. Liu, Y. Wang, L. Brown, S. Mukherjee, N. S. King, H. O. Everitt, P. Nordlander, and N. J. Halas, “Aluminum Plasmonic Nanoantennas,” Nano Lett. 12(11), 6000–6004 (2012).
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Y.-W. Huang, W. T. Chen, W.-Y. Tsai, P. C. Wu, C.-M. Wang, G. Sun, and D. P. Tsai, “Aluminum plasmonic multicolor meta-hologram,” Nano Lett. 15(5), 3122–3127 (2015).
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Nat. Commun. (1)

X. Ni, A. V. Kildishev, and V. M. Shalaev, “Metasurface holograms for visible light,” Nat. Commun. 4, 2807 (2013).
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Nat. Mater. (1)

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
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Nat. Nanotechnol. (2)

G. Zheng, H. Mühlenbernd, M. Kenney, G. Li, T. Zentgraf, and S. Zhang, “Metasurface holograms reaching 80% efficiency,” Nat. Nanotechnol. 10(4), 308–312 (2015).
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Opt. Express (2)

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H. Pang, S. Yin, Q. Deng, Q. Qiu, and C. Du, “A novel method for the design of diffractive optical elements based on the Rayleigh–Sommerfeld integral,” Opt. Lasers Eng. 70, 38–44 (2015).
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Opt. Lett. (1)

Optica (2)

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Phys. Rev. B (3)

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Proc. Natl. Acad. Sci. U.S.A. (1)

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Sci. Rep. (1)

W. Zhao, H. Jiang, B. Liu, J. Song, Y. Jiang, C. Tang, and J. Li, “Dielectric Huygens’ Metasurface for High-Efficiency Hologram Operating in Transmission Mode,” Sci. Rep. 6, 30613 (2016).

Science (2)

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[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

Other (2)

L. G. Neto, “Optical real-time holograms using liquid crystal television and computer interative design,” Doctoral Thesis (Université Laval, Canada, 1995).

J. W. Goodman, Introduction to Fourier Optics (Roberts & Company Publishers, 2005), Vol. 2.

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Figures (4)

Fig. 1
Fig. 1 (a) Schematic of the unit cell for the high contrast grating (not to scale). Transmission (black continuous), reflection (black dashed), absorption (black dotted) and relative phase (colored continuous) of the periodic c-Si posts shown as function of the post diameter at (b) 532 nm, (c) 444.9 nm and (d) 635 nm. Note that the post arrays are designed to operate at 532 nm (note the high transmission with full phase coverage in (b)). The dots show the eight selected phases and transmission values for each wavelength.
Fig. 2
Fig. 2 (a) and (b) show the measurement setup used for the holograms’s image reconstruction and power measurements, respectively. Note that in (a) the lenses L1 and L2 are arranged as a Keplerian telescope. (c) Schematic of a metasurface hologram and (d) SEM micrographs of a metasurface structure.
Fig. 3
Fig. 3 (a) and (e) show the pictorial representation of the fabricated metasurface holograms M1 and M2, respectively. The insets in these figures show a representation of one individual pixel. All metasurfaces have dimensions of 389.12 μm × 389.12 μm. M1 encodes the hologram with 512 × 512 pixels, whose target image is shown in (b) and has 123 × 159 pixels. M1 is a 2 × 2 hologram array with pixel dimension of 380 nm × 380 nm consisting of 2 × 2 nanopost subarray. M2 encodes the hologram with 1024 × 1024 pixels whose target image is shown in (j) with 257 × 213 pixels. It consists of a 2 × 2 hologram array with one nanopost per pixel with dimension 190 nm × 190 nm. (c) and (g) ((d) and (h)) show the numerical (experimental) image reconstructions from metasurfaces M1 and M2, respectively, taken 20 cm away from the hologram plane. The operating wavelength in all reconstructions is 532 nm. These figures are not to scale.
Fig. 4
Fig. 4 Numerical and experimental image reconstructions from samples M1 (top row) and M2 (second row) taken 20 cm away from the hologram plane. The following wavelengths are used in these reconstructions: 444.9 nm (first two columns) and 635 nm (third and fourth columns). These figures are not to scale.

Tables (3)

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Table 1 Phase and transmission efficiencies of each pixel for the operating wavelength (532 nm) and two additional wavelengths, namely 444.9 nm and 632.8 nm.

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Table 2 Measured and calculated efficiencies at the holograms’ reconstruction plane at different wavelengths. Note that the transmissions efficiencies of the Ideal Metasurfaces are all 100% and thus omitted from the table. The total efficiency is calculated integrating the field intensity radiated by each pixel.

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Table 3 Signal-to-noise ratio (SNR) of the four metasurfaces investigated in this work at different wavelengths.

Equations (1)

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SNR=10 log 10 ( Ω | M | 2 Ω ( | I || M | ) 2 )=10 log 10 ( 1 Ω ( | I || M | ) 2 )

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