Abstract

A double-sided mask process is used to define the micro actuators on a silicon-on-insulator (SOI) wafer. Then, an InGaN/GaN multilayer film was deposited on the surface of the above patterned SOI substrate by employed MBE technology. Thus, the final device consisting of comb-drive actuators, springs and micro-mirror is implemented to obtain the two-dimensional (2D) tuning effect of the mirror. The displacement response is characterized by applying voltage to the micro actuators. It shows an approximation linear relationship between the displacement and the square of applied voltage. And the influences of the cross-axis coupling effect are also measured and evaluated. Moreover, the luminous performances of the InGaN/GaN multiquantum well films were also studied by analyzing temperature-dependent and laser intensity-dependent PL spectra. The authors observed the localized state effect and/or band-gap narrowing effect which results in an S-shaped behavior with increasing temperature. The PL intensity and wavelength are also significantly affected by the excitation energy of laser.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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  3. U. Sharma, S. Dutta, and E. Sharma, “Scattering Parameters of Broadband (18-40 GHz) RF MEMS Switch in [pi]-match Configuration,” Sensors & Transducers 196(1), 37 (2016).
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  9. J. Singh, J. Teo, Y. Xu, C. Premachandran, N. Chen, R. Kotlanka, M. Olivo, and C. Sheppard, “A two axes scanning SOI MEMS micro-mirror for endoscopic bioimaging,” J. Micromech. Microeng. 18(2), 1–9 (2008).
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    [Crossref]
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    [Crossref]
  25. M. Wakui, H. Samaishima, F. R. Hu, and K. Hane, “Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications,” Microsyst. Technol. 17(1), 109–114 (2011).
    [Crossref]
  26. A. Rosenberg, K. Bussmann, M. Kim, M. Carter, M. Mastro, R. Holm, R. Henry, J. Caldwell, and C. Eddy, “Fabrication of GaN suspended photonic crystal slabs and resonant nanocavities on Si(111),” J. Vac. Sci. Technol. B 25(3), 721 (2007).
    [Crossref]
  27. Y. Wang, T. Sasaki, T. Wu, F. Hu, and K. Hane, “Comb-drive GaN micro-mirror on a GaN-on-silicon platform,” J. Micromech. Microeng. 21(3), 035012 (2011).
    [Crossref]
  28. H. Tang, J. Bardwell, J. Webb, S. Moisa, J. Fraser, and S. Rolfe, “Selective growth of GaN on a SiC substrate patterned with an AlN seed layer by ammonia molecular-beam epitaxy,” Appl. Phys. Lett. 79(17), 2764–2766 (2001).
    [Crossref]
  29. Z. Yang, R. N. Wang, S. Jia, D. Wang, B. Zhang, K. Lau, and K. Chen, “Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique,” Appl. Phys. Lett. 88(4), 041913 (2006).
    [Crossref]
  30. W. Zhou, X. He, W. Su, L. Li, and L. Chen, “Error sensitivity analysis of folded beam stiffness,” J. Mach. Des. 27(2), 80–83 (2010).
  31. S. Timpe, D. Hook, M. Dugger, and K. Komvopoulos, “Levitation compensation method for dynamic electrostatic comb-drive actuators,” Sens. Actuators A Phys. 143(2), 383–389 (2008).
    [Crossref]
  32. J. Tsai, H. Chu, J. Hsieh, and W. Fang, “The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications,” J. Micromech. Microeng. 14(2), 235–241 (2004).
    [Crossref]
  33. S. Feng, Y. Cheng, Y. Chung, C. Yang, Y. Lin, C. Hsu, K. Ma, and J. Chyi, “Impact of localized states on the recombination dynamics in InGaN/GaN quantum well structures,” J. Appl. Phys. 92(8), 4441–4448 (2002).
    [Crossref]
  34. X. Zhang, W. Liu, and S. Chua, “Optical transitions in InGaN/GaN quantum wells: effects of the piezoelectric field,” J. Cryst. Growth 268(3–4), 521–526 (2004).
    [Crossref]
  35. L. Yang, J. Motohisa, K. Tomioka, J. Takeda, T. Fukui, M. M. Geng, L. X. Jia, L. Zhang, and Y. L. Liu, “Fabrication and excitation-power-density-dependent micro-photoluminescence of hexagonal nanopillars with a single InGaAs/GaAs quantum well,” Nanotechnology 19(27), 275304 (2008).
    [Crossref] [PubMed]
  36. S. Nakamura, “The roles of structural imperfections in InGaN-based blue light-emitting diodes and laser diodes,” Science 281(5379), 956–961 (1998).
    [Crossref] [PubMed]

2016 (2)

U. Sharma, S. Dutta, and E. Sharma, “Scattering Parameters of Broadband (18-40 GHz) RF MEMS Switch in [pi]-match Configuration,” Sensors & Transducers 196(1), 37 (2016).

N. Kavallaris, A. Lacey, and C. Nikolopoulos, “On the quenching of a nonlocal parabolic problem arising in electrostatic MEMS control,” Nonlinear Analysis: Theory, Methods & Applications 138, 189–206 (2016).
[Crossref]

2015 (2)

Y. Lu, F. Cottone, S. Boisseau, F. Marty, D. Galayko, and P. Basset, “A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices,” Appl. Phys. Lett. 107(25), 253902 (2015).
[Crossref]

A. Kainz, W. Hortschitz, J. Schalko, A. Jachimowicz, and F. Keplinger, “Air damping as design feature in lateral oscillators,” Sens. Actuators A Phys. 236, 357–363 (2015).
[Crossref]

2014 (3)

B. Yao, L. Feng, X. Wang, M. Liu, Z. Zhou, and W. Liu, “Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings,” IEEE Photonics Technol. Lett. 26(10), 1027–1030 (2014).
[Crossref]

M. Baranski, S. Bargiel, N. Passilly, B. Guichardaz, E. Herth, C. Gorecki, C. Jia, J. Fromel, and M. Wiemer, “Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate,” IEEE Photonics Technol. Lett. 26(1), 100–103 (2014).
[Crossref]

O. Solgaard, A. Godil, R. Howe, L. Lee, Y. Peter, and H. Zappe, “Optical MEMS: From micromirrors to complex systems,” J. Microelectromech. Syst. 23(3), 517–538 (2014).
[Crossref]

2013 (2)

N. Jackson, R. O’Keeffe, F. Waldron, M. O’Neill, and A. Mathewson, “Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance,” J. Micromech. Microeng. 23(7), 075014 (2013).
[Crossref]

U. Kaletta, P. Santos, D. Wolansky, A. Scheit, M. Fraschke, C. Wipf, P. Zaumseil, and C. Wenger, “Monolithic integrated SAW filter based on AlN for high-frequency applications,” Semicond. Sci. Technol. 28(6), 065013 (2013).
[Crossref]

2012 (3)

T. Tanae, H. Sameshima, and K. Hane, “Design and fabrication of GaN crystal ultra-small lateral comb-drive actuators,” J. Vac. Sci. Technol. B 30(1), 012001 (2012).
[Crossref]

K. Koh and C. Lee, “A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage,” J. Microelectromech. Syst. 21(5), 1124–1135 (2012).
[Crossref]

P. Li, T. Sasaki, L. F. Pan, and K. Hane, “Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer,” Opt. Express 20(1), 627–634 (2012).
[Crossref] [PubMed]

2011 (6)

S. Pal and H. Xie, “A curved multimorph based electrothermal micromirror with large scan range and low drive voltage,” Sens. Actuators A Phys. 170(1-2), 156–163 (2011).
[Crossref]

K. H. Koh, T. Kobayashi, and C. Lee, “2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator,” Opt. Express 19(15), 13812–13824 (2011).
[Crossref] [PubMed]

H. Liu, C. Tay, C. Quan, T. Kobayashi, and C. Lee, “Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power,” J. Microelectromech. Syst. 20(5), 1131–1142 (2011).
[Crossref]

H. Chu and K. Hane, “Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner,” Sens. Actuators A Phys. 165(2), 422–430 (2011).
[Crossref]

M. Wakui, H. Samaishima, F. R. Hu, and K. Hane, “Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications,” Microsyst. Technol. 17(1), 109–114 (2011).
[Crossref]

Y. Wang, T. Sasaki, T. Wu, F. Hu, and K. Hane, “Comb-drive GaN micro-mirror on a GaN-on-silicon platform,” J. Micromech. Microeng. 21(3), 035012 (2011).
[Crossref]

2010 (4)

W. Zhou, X. He, W. Su, L. Li, and L. Chen, “Error sensitivity analysis of folded beam stiffness,” J. Mach. Des. 27(2), 80–83 (2010).

K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel, P. Dziuban, M. Kujawińska, D. Callet, and S. Frank, “A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications,” Sens. Actuators A Phys. 163(1), 255–265 (2010).
[Crossref]

R. Ito, M. Wakui, H. Sameshima, F. R. Hu, and K. Hane, “Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode,” Microsyst. Technol. 16(6), 1015–1020 (2010).
[Crossref]

T. Tang, C. Hsu, W. Chen, and W. Fang, “Design and implementation of a torque-enhancement 2-axis magnetostatic SOI optical scanner,” J. Micromech. Microeng. 20(2), 025020 (2010).
[Crossref]

2009 (1)

H. Huang, Z. Li, J. Lu, Z. Wang, C. Wang, K. Lau, K. Chen, and T. Zhang, “Microbridge tests on gallium nitride thin films,” J. Micromech. Microeng. 19(9), 095019 (2009).
[Crossref]

2008 (4)

S. Timpe, D. Hook, M. Dugger, and K. Komvopoulos, “Levitation compensation method for dynamic electrostatic comb-drive actuators,” Sens. Actuators A Phys. 143(2), 383–389 (2008).
[Crossref]

J. Singh, J. Teo, Y. Xu, C. Premachandran, N. Chen, R. Kotlanka, M. Olivo, and C. Sheppard, “A two axes scanning SOI MEMS micro-mirror for endoscopic bioimaging,” J. Micromech. Microeng. 18(2), 1–9 (2008).
[Crossref]

C. Lee and J. Yeh, “Development and evolution of MOEMS technology in variable optical attenuators,” J. Micro/Nanolithography, MEMS & MOEMS 7(2), 021003 (2008).
[Crossref]

L. Yang, J. Motohisa, K. Tomioka, J. Takeda, T. Fukui, M. M. Geng, L. X. Jia, L. Zhang, and Y. L. Liu, “Fabrication and excitation-power-density-dependent micro-photoluminescence of hexagonal nanopillars with a single InGaAs/GaAs quantum well,” Nanotechnology 19(27), 275304 (2008).
[Crossref] [PubMed]

2007 (1)

A. Rosenberg, K. Bussmann, M. Kim, M. Carter, M. Mastro, R. Holm, R. Henry, J. Caldwell, and C. Eddy, “Fabrication of GaN suspended photonic crystal slabs and resonant nanocavities on Si(111),” J. Vac. Sci. Technol. B 25(3), 721 (2007).
[Crossref]

2006 (1)

Z. Yang, R. N. Wang, S. Jia, D. Wang, B. Zhang, K. Lau, and K. Chen, “Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique,” Appl. Phys. Lett. 88(4), 041913 (2006).
[Crossref]

2004 (2)

X. Zhang, W. Liu, and S. Chua, “Optical transitions in InGaN/GaN quantum wells: effects of the piezoelectric field,” J. Cryst. Growth 268(3–4), 521–526 (2004).
[Crossref]

J. Tsai, H. Chu, J. Hsieh, and W. Fang, “The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications,” J. Micromech. Microeng. 14(2), 235–241 (2004).
[Crossref]

2002 (2)

S. Feng, Y. Cheng, Y. Chung, C. Yang, Y. Lin, C. Hsu, K. Ma, and J. Chyi, “Impact of localized states on the recombination dynamics in InGaN/GaN quantum well structures,” J. Appl. Phys. 92(8), 4441–4448 (2002).
[Crossref]

T. Bakke, C. Tigges, J. Lean, C. Sullivan, and O. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. sel. Top. Quant. Electron. 8(1), 64–72 (2002).
[Crossref]

2001 (1)

H. Tang, J. Bardwell, J. Webb, S. Moisa, J. Fraser, and S. Rolfe, “Selective growth of GaN on a SiC substrate patterned with an AlN seed layer by ammonia molecular-beam epitaxy,” Appl. Phys. Lett. 79(17), 2764–2766 (2001).
[Crossref]

1998 (1)

S. Nakamura, “The roles of structural imperfections in InGaN-based blue light-emitting diodes and laser diodes,” Science 281(5379), 956–961 (1998).
[Crossref] [PubMed]

Bakke, T.

T. Bakke, C. Tigges, J. Lean, C. Sullivan, and O. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. sel. Top. Quant. Electron. 8(1), 64–72 (2002).
[Crossref]

Baranski, M.

M. Baranski, S. Bargiel, N. Passilly, B. Guichardaz, E. Herth, C. Gorecki, C. Jia, J. Fromel, and M. Wiemer, “Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate,” IEEE Photonics Technol. Lett. 26(1), 100–103 (2014).
[Crossref]

Bardwell, J.

H. Tang, J. Bardwell, J. Webb, S. Moisa, J. Fraser, and S. Rolfe, “Selective growth of GaN on a SiC substrate patterned with an AlN seed layer by ammonia molecular-beam epitaxy,” Appl. Phys. Lett. 79(17), 2764–2766 (2001).
[Crossref]

Bargiel, S.

M. Baranski, S. Bargiel, N. Passilly, B. Guichardaz, E. Herth, C. Gorecki, C. Jia, J. Fromel, and M. Wiemer, “Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate,” IEEE Photonics Technol. Lett. 26(1), 100–103 (2014).
[Crossref]

K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel, P. Dziuban, M. Kujawińska, D. Callet, and S. Frank, “A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications,” Sens. Actuators A Phys. 163(1), 255–265 (2010).
[Crossref]

Basset, P.

Y. Lu, F. Cottone, S. Boisseau, F. Marty, D. Galayko, and P. Basset, “A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices,” Appl. Phys. Lett. 107(25), 253902 (2015).
[Crossref]

Boisseau, S.

Y. Lu, F. Cottone, S. Boisseau, F. Marty, D. Galayko, and P. Basset, “A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices,” Appl. Phys. Lett. 107(25), 253902 (2015).
[Crossref]

Bussmann, K.

A. Rosenberg, K. Bussmann, M. Kim, M. Carter, M. Mastro, R. Holm, R. Henry, J. Caldwell, and C. Eddy, “Fabrication of GaN suspended photonic crystal slabs and resonant nanocavities on Si(111),” J. Vac. Sci. Technol. B 25(3), 721 (2007).
[Crossref]

Caldwell, J.

A. Rosenberg, K. Bussmann, M. Kim, M. Carter, M. Mastro, R. Holm, R. Henry, J. Caldwell, and C. Eddy, “Fabrication of GaN suspended photonic crystal slabs and resonant nanocavities on Si(111),” J. Vac. Sci. Technol. B 25(3), 721 (2007).
[Crossref]

Callet, D.

K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel, P. Dziuban, M. Kujawińska, D. Callet, and S. Frank, “A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications,” Sens. Actuators A Phys. 163(1), 255–265 (2010).
[Crossref]

Carter, M.

A. Rosenberg, K. Bussmann, M. Kim, M. Carter, M. Mastro, R. Holm, R. Henry, J. Caldwell, and C. Eddy, “Fabrication of GaN suspended photonic crystal slabs and resonant nanocavities on Si(111),” J. Vac. Sci. Technol. B 25(3), 721 (2007).
[Crossref]

Chen, K.

H. Huang, Z. Li, J. Lu, Z. Wang, C. Wang, K. Lau, K. Chen, and T. Zhang, “Microbridge tests on gallium nitride thin films,” J. Micromech. Microeng. 19(9), 095019 (2009).
[Crossref]

Z. Yang, R. N. Wang, S. Jia, D. Wang, B. Zhang, K. Lau, and K. Chen, “Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique,” Appl. Phys. Lett. 88(4), 041913 (2006).
[Crossref]

Chen, L.

W. Zhou, X. He, W. Su, L. Li, and L. Chen, “Error sensitivity analysis of folded beam stiffness,” J. Mach. Des. 27(2), 80–83 (2010).

Chen, N.

J. Singh, J. Teo, Y. Xu, C. Premachandran, N. Chen, R. Kotlanka, M. Olivo, and C. Sheppard, “A two axes scanning SOI MEMS micro-mirror for endoscopic bioimaging,” J. Micromech. Microeng. 18(2), 1–9 (2008).
[Crossref]

Chen, W.

T. Tang, C. Hsu, W. Chen, and W. Fang, “Design and implementation of a torque-enhancement 2-axis magnetostatic SOI optical scanner,” J. Micromech. Microeng. 20(2), 025020 (2010).
[Crossref]

Cheng, Y.

S. Feng, Y. Cheng, Y. Chung, C. Yang, Y. Lin, C. Hsu, K. Ma, and J. Chyi, “Impact of localized states on the recombination dynamics in InGaN/GaN quantum well structures,” J. Appl. Phys. 92(8), 4441–4448 (2002).
[Crossref]

Chu, H.

H. Chu and K. Hane, “Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner,” Sens. Actuators A Phys. 165(2), 422–430 (2011).
[Crossref]

J. Tsai, H. Chu, J. Hsieh, and W. Fang, “The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications,” J. Micromech. Microeng. 14(2), 235–241 (2004).
[Crossref]

Chua, S.

X. Zhang, W. Liu, and S. Chua, “Optical transitions in InGaN/GaN quantum wells: effects of the piezoelectric field,” J. Cryst. Growth 268(3–4), 521–526 (2004).
[Crossref]

Chung, Y.

S. Feng, Y. Cheng, Y. Chung, C. Yang, Y. Lin, C. Hsu, K. Ma, and J. Chyi, “Impact of localized states on the recombination dynamics in InGaN/GaN quantum well structures,” J. Appl. Phys. 92(8), 4441–4448 (2002).
[Crossref]

Chyi, J.

S. Feng, Y. Cheng, Y. Chung, C. Yang, Y. Lin, C. Hsu, K. Ma, and J. Chyi, “Impact of localized states on the recombination dynamics in InGaN/GaN quantum well structures,” J. Appl. Phys. 92(8), 4441–4448 (2002).
[Crossref]

Cottone, F.

Y. Lu, F. Cottone, S. Boisseau, F. Marty, D. Galayko, and P. Basset, “A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices,” Appl. Phys. Lett. 107(25), 253902 (2015).
[Crossref]

Dugger, M.

S. Timpe, D. Hook, M. Dugger, and K. Komvopoulos, “Levitation compensation method for dynamic electrostatic comb-drive actuators,” Sens. Actuators A Phys. 143(2), 383–389 (2008).
[Crossref]

Dutta, S.

U. Sharma, S. Dutta, and E. Sharma, “Scattering Parameters of Broadband (18-40 GHz) RF MEMS Switch in [pi]-match Configuration,” Sensors & Transducers 196(1), 37 (2016).

Dziuban, P.

K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel, P. Dziuban, M. Kujawińska, D. Callet, and S. Frank, “A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications,” Sens. Actuators A Phys. 163(1), 255–265 (2010).
[Crossref]

Eddy, C.

A. Rosenberg, K. Bussmann, M. Kim, M. Carter, M. Mastro, R. Holm, R. Henry, J. Caldwell, and C. Eddy, “Fabrication of GaN suspended photonic crystal slabs and resonant nanocavities on Si(111),” J. Vac. Sci. Technol. B 25(3), 721 (2007).
[Crossref]

Fang, W.

T. Tang, C. Hsu, W. Chen, and W. Fang, “Design and implementation of a torque-enhancement 2-axis magnetostatic SOI optical scanner,” J. Micromech. Microeng. 20(2), 025020 (2010).
[Crossref]

J. Tsai, H. Chu, J. Hsieh, and W. Fang, “The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications,” J. Micromech. Microeng. 14(2), 235–241 (2004).
[Crossref]

Feng, L.

B. Yao, L. Feng, X. Wang, M. Liu, Z. Zhou, and W. Liu, “Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings,” IEEE Photonics Technol. Lett. 26(10), 1027–1030 (2014).
[Crossref]

Feng, S.

S. Feng, Y. Cheng, Y. Chung, C. Yang, Y. Lin, C. Hsu, K. Ma, and J. Chyi, “Impact of localized states on the recombination dynamics in InGaN/GaN quantum well structures,” J. Appl. Phys. 92(8), 4441–4448 (2002).
[Crossref]

Frank, S.

K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel, P. Dziuban, M. Kujawińska, D. Callet, and S. Frank, “A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications,” Sens. Actuators A Phys. 163(1), 255–265 (2010).
[Crossref]

Fraschke, M.

U. Kaletta, P. Santos, D. Wolansky, A. Scheit, M. Fraschke, C. Wipf, P. Zaumseil, and C. Wenger, “Monolithic integrated SAW filter based on AlN for high-frequency applications,” Semicond. Sci. Technol. 28(6), 065013 (2013).
[Crossref]

Fraser, J.

H. Tang, J. Bardwell, J. Webb, S. Moisa, J. Fraser, and S. Rolfe, “Selective growth of GaN on a SiC substrate patterned with an AlN seed layer by ammonia molecular-beam epitaxy,” Appl. Phys. Lett. 79(17), 2764–2766 (2001).
[Crossref]

Fromel, J.

M. Baranski, S. Bargiel, N. Passilly, B. Guichardaz, E. Herth, C. Gorecki, C. Jia, J. Fromel, and M. Wiemer, “Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate,” IEEE Photonics Technol. Lett. 26(1), 100–103 (2014).
[Crossref]

Fukui, T.

L. Yang, J. Motohisa, K. Tomioka, J. Takeda, T. Fukui, M. M. Geng, L. X. Jia, L. Zhang, and Y. L. Liu, “Fabrication and excitation-power-density-dependent micro-photoluminescence of hexagonal nanopillars with a single InGaAs/GaAs quantum well,” Nanotechnology 19(27), 275304 (2008).
[Crossref] [PubMed]

Galayko, D.

Y. Lu, F. Cottone, S. Boisseau, F. Marty, D. Galayko, and P. Basset, “A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices,” Appl. Phys. Lett. 107(25), 253902 (2015).
[Crossref]

Geng, M. M.

L. Yang, J. Motohisa, K. Tomioka, J. Takeda, T. Fukui, M. M. Geng, L. X. Jia, L. Zhang, and Y. L. Liu, “Fabrication and excitation-power-density-dependent micro-photoluminescence of hexagonal nanopillars with a single InGaAs/GaAs quantum well,” Nanotechnology 19(27), 275304 (2008).
[Crossref] [PubMed]

Godil, A.

O. Solgaard, A. Godil, R. Howe, L. Lee, Y. Peter, and H. Zappe, “Optical MEMS: From micromirrors to complex systems,” J. Microelectromech. Syst. 23(3), 517–538 (2014).
[Crossref]

Gorecki, C.

M. Baranski, S. Bargiel, N. Passilly, B. Guichardaz, E. Herth, C. Gorecki, C. Jia, J. Fromel, and M. Wiemer, “Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate,” IEEE Photonics Technol. Lett. 26(1), 100–103 (2014).
[Crossref]

K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel, P. Dziuban, M. Kujawińska, D. Callet, and S. Frank, “A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications,” Sens. Actuators A Phys. 163(1), 255–265 (2010).
[Crossref]

Guichardaz, B.

M. Baranski, S. Bargiel, N. Passilly, B. Guichardaz, E. Herth, C. Gorecki, C. Jia, J. Fromel, and M. Wiemer, “Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate,” IEEE Photonics Technol. Lett. 26(1), 100–103 (2014).
[Crossref]

Hane, K.

P. Li, T. Sasaki, L. F. Pan, and K. Hane, “Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer,” Opt. Express 20(1), 627–634 (2012).
[Crossref] [PubMed]

T. Tanae, H. Sameshima, and K. Hane, “Design and fabrication of GaN crystal ultra-small lateral comb-drive actuators,” J. Vac. Sci. Technol. B 30(1), 012001 (2012).
[Crossref]

M. Wakui, H. Samaishima, F. R. Hu, and K. Hane, “Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications,” Microsyst. Technol. 17(1), 109–114 (2011).
[Crossref]

Y. Wang, T. Sasaki, T. Wu, F. Hu, and K. Hane, “Comb-drive GaN micro-mirror on a GaN-on-silicon platform,” J. Micromech. Microeng. 21(3), 035012 (2011).
[Crossref]

H. Chu and K. Hane, “Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner,” Sens. Actuators A Phys. 165(2), 422–430 (2011).
[Crossref]

R. Ito, M. Wakui, H. Sameshima, F. R. Hu, and K. Hane, “Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode,” Microsyst. Technol. 16(6), 1015–1020 (2010).
[Crossref]

He, X.

W. Zhou, X. He, W. Su, L. Li, and L. Chen, “Error sensitivity analysis of folded beam stiffness,” J. Mach. Des. 27(2), 80–83 (2010).

Henry, R.

A. Rosenberg, K. Bussmann, M. Kim, M. Carter, M. Mastro, R. Holm, R. Henry, J. Caldwell, and C. Eddy, “Fabrication of GaN suspended photonic crystal slabs and resonant nanocavities on Si(111),” J. Vac. Sci. Technol. B 25(3), 721 (2007).
[Crossref]

Herth, E.

M. Baranski, S. Bargiel, N. Passilly, B. Guichardaz, E. Herth, C. Gorecki, C. Jia, J. Fromel, and M. Wiemer, “Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate,” IEEE Photonics Technol. Lett. 26(1), 100–103 (2014).
[Crossref]

Holm, R.

A. Rosenberg, K. Bussmann, M. Kim, M. Carter, M. Mastro, R. Holm, R. Henry, J. Caldwell, and C. Eddy, “Fabrication of GaN suspended photonic crystal slabs and resonant nanocavities on Si(111),” J. Vac. Sci. Technol. B 25(3), 721 (2007).
[Crossref]

Hook, D.

S. Timpe, D. Hook, M. Dugger, and K. Komvopoulos, “Levitation compensation method for dynamic electrostatic comb-drive actuators,” Sens. Actuators A Phys. 143(2), 383–389 (2008).
[Crossref]

Hortschitz, W.

A. Kainz, W. Hortschitz, J. Schalko, A. Jachimowicz, and F. Keplinger, “Air damping as design feature in lateral oscillators,” Sens. Actuators A Phys. 236, 357–363 (2015).
[Crossref]

Howe, R.

O. Solgaard, A. Godil, R. Howe, L. Lee, Y. Peter, and H. Zappe, “Optical MEMS: From micromirrors to complex systems,” J. Microelectromech. Syst. 23(3), 517–538 (2014).
[Crossref]

Hsieh, J.

J. Tsai, H. Chu, J. Hsieh, and W. Fang, “The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications,” J. Micromech. Microeng. 14(2), 235–241 (2004).
[Crossref]

Hsu, C.

T. Tang, C. Hsu, W. Chen, and W. Fang, “Design and implementation of a torque-enhancement 2-axis magnetostatic SOI optical scanner,” J. Micromech. Microeng. 20(2), 025020 (2010).
[Crossref]

S. Feng, Y. Cheng, Y. Chung, C. Yang, Y. Lin, C. Hsu, K. Ma, and J. Chyi, “Impact of localized states on the recombination dynamics in InGaN/GaN quantum well structures,” J. Appl. Phys. 92(8), 4441–4448 (2002).
[Crossref]

Hu, F.

Y. Wang, T. Sasaki, T. Wu, F. Hu, and K. Hane, “Comb-drive GaN micro-mirror on a GaN-on-silicon platform,” J. Micromech. Microeng. 21(3), 035012 (2011).
[Crossref]

Hu, F. R.

M. Wakui, H. Samaishima, F. R. Hu, and K. Hane, “Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications,” Microsyst. Technol. 17(1), 109–114 (2011).
[Crossref]

R. Ito, M. Wakui, H. Sameshima, F. R. Hu, and K. Hane, “Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode,” Microsyst. Technol. 16(6), 1015–1020 (2010).
[Crossref]

Huang, H.

H. Huang, Z. Li, J. Lu, Z. Wang, C. Wang, K. Lau, K. Chen, and T. Zhang, “Microbridge tests on gallium nitride thin films,” J. Micromech. Microeng. 19(9), 095019 (2009).
[Crossref]

Ito, R.

R. Ito, M. Wakui, H. Sameshima, F. R. Hu, and K. Hane, “Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode,” Microsyst. Technol. 16(6), 1015–1020 (2010).
[Crossref]

Jachimowicz, A.

A. Kainz, W. Hortschitz, J. Schalko, A. Jachimowicz, and F. Keplinger, “Air damping as design feature in lateral oscillators,” Sens. Actuators A Phys. 236, 357–363 (2015).
[Crossref]

Jackson, N.

N. Jackson, R. O’Keeffe, F. Waldron, M. O’Neill, and A. Mathewson, “Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance,” J. Micromech. Microeng. 23(7), 075014 (2013).
[Crossref]

Jia, C.

M. Baranski, S. Bargiel, N. Passilly, B. Guichardaz, E. Herth, C. Gorecki, C. Jia, J. Fromel, and M. Wiemer, “Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate,” IEEE Photonics Technol. Lett. 26(1), 100–103 (2014).
[Crossref]

Jia, L. X.

L. Yang, J. Motohisa, K. Tomioka, J. Takeda, T. Fukui, M. M. Geng, L. X. Jia, L. Zhang, and Y. L. Liu, “Fabrication and excitation-power-density-dependent micro-photoluminescence of hexagonal nanopillars with a single InGaAs/GaAs quantum well,” Nanotechnology 19(27), 275304 (2008).
[Crossref] [PubMed]

Jia, S.

Z. Yang, R. N. Wang, S. Jia, D. Wang, B. Zhang, K. Lau, and K. Chen, “Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique,” Appl. Phys. Lett. 88(4), 041913 (2006).
[Crossref]

Kainz, A.

A. Kainz, W. Hortschitz, J. Schalko, A. Jachimowicz, and F. Keplinger, “Air damping as design feature in lateral oscillators,” Sens. Actuators A Phys. 236, 357–363 (2015).
[Crossref]

Kaletta, U.

U. Kaletta, P. Santos, D. Wolansky, A. Scheit, M. Fraschke, C. Wipf, P. Zaumseil, and C. Wenger, “Monolithic integrated SAW filter based on AlN for high-frequency applications,” Semicond. Sci. Technol. 28(6), 065013 (2013).
[Crossref]

Kavallaris, N.

N. Kavallaris, A. Lacey, and C. Nikolopoulos, “On the quenching of a nonlocal parabolic problem arising in electrostatic MEMS control,” Nonlinear Analysis: Theory, Methods & Applications 138, 189–206 (2016).
[Crossref]

Keplinger, F.

A. Kainz, W. Hortschitz, J. Schalko, A. Jachimowicz, and F. Keplinger, “Air damping as design feature in lateral oscillators,” Sens. Actuators A Phys. 236, 357–363 (2015).
[Crossref]

Kim, M.

A. Rosenberg, K. Bussmann, M. Kim, M. Carter, M. Mastro, R. Holm, R. Henry, J. Caldwell, and C. Eddy, “Fabrication of GaN suspended photonic crystal slabs and resonant nanocavities on Si(111),” J. Vac. Sci. Technol. B 25(3), 721 (2007).
[Crossref]

Kobayashi, T.

H. Liu, C. Tay, C. Quan, T. Kobayashi, and C. Lee, “Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power,” J. Microelectromech. Syst. 20(5), 1131–1142 (2011).
[Crossref]

K. H. Koh, T. Kobayashi, and C. Lee, “2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator,” Opt. Express 19(15), 13812–13824 (2011).
[Crossref] [PubMed]

Koh, K.

K. Koh and C. Lee, “A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage,” J. Microelectromech. Syst. 21(5), 1124–1135 (2012).
[Crossref]

Koh, K. H.

Komvopoulos, K.

S. Timpe, D. Hook, M. Dugger, and K. Komvopoulos, “Levitation compensation method for dynamic electrostatic comb-drive actuators,” Sens. Actuators A Phys. 143(2), 383–389 (2008).
[Crossref]

Kotlanka, R.

J. Singh, J. Teo, Y. Xu, C. Premachandran, N. Chen, R. Kotlanka, M. Olivo, and C. Sheppard, “A two axes scanning SOI MEMS micro-mirror for endoscopic bioimaging,” J. Micromech. Microeng. 18(2), 1–9 (2008).
[Crossref]

Krezel, J.

K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel, P. Dziuban, M. Kujawińska, D. Callet, and S. Frank, “A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications,” Sens. Actuators A Phys. 163(1), 255–265 (2010).
[Crossref]

Kujawinska, M.

K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel, P. Dziuban, M. Kujawińska, D. Callet, and S. Frank, “A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications,” Sens. Actuators A Phys. 163(1), 255–265 (2010).
[Crossref]

Lacey, A.

N. Kavallaris, A. Lacey, and C. Nikolopoulos, “On the quenching of a nonlocal parabolic problem arising in electrostatic MEMS control,” Nonlinear Analysis: Theory, Methods & Applications 138, 189–206 (2016).
[Crossref]

Laszczyk, K.

K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel, P. Dziuban, M. Kujawińska, D. Callet, and S. Frank, “A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications,” Sens. Actuators A Phys. 163(1), 255–265 (2010).
[Crossref]

Lau, K.

H. Huang, Z. Li, J. Lu, Z. Wang, C. Wang, K. Lau, K. Chen, and T. Zhang, “Microbridge tests on gallium nitride thin films,” J. Micromech. Microeng. 19(9), 095019 (2009).
[Crossref]

Z. Yang, R. N. Wang, S. Jia, D. Wang, B. Zhang, K. Lau, and K. Chen, “Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique,” Appl. Phys. Lett. 88(4), 041913 (2006).
[Crossref]

Lean, J.

T. Bakke, C. Tigges, J. Lean, C. Sullivan, and O. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. sel. Top. Quant. Electron. 8(1), 64–72 (2002).
[Crossref]

Lee, C.

K. Koh and C. Lee, “A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage,” J. Microelectromech. Syst. 21(5), 1124–1135 (2012).
[Crossref]

H. Liu, C. Tay, C. Quan, T. Kobayashi, and C. Lee, “Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power,” J. Microelectromech. Syst. 20(5), 1131–1142 (2011).
[Crossref]

K. H. Koh, T. Kobayashi, and C. Lee, “2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator,” Opt. Express 19(15), 13812–13824 (2011).
[Crossref] [PubMed]

C. Lee and J. Yeh, “Development and evolution of MOEMS technology in variable optical attenuators,” J. Micro/Nanolithography, MEMS & MOEMS 7(2), 021003 (2008).
[Crossref]

Lee, L.

O. Solgaard, A. Godil, R. Howe, L. Lee, Y. Peter, and H. Zappe, “Optical MEMS: From micromirrors to complex systems,” J. Microelectromech. Syst. 23(3), 517–538 (2014).
[Crossref]

Li, L.

W. Zhou, X. He, W. Su, L. Li, and L. Chen, “Error sensitivity analysis of folded beam stiffness,” J. Mach. Des. 27(2), 80–83 (2010).

Li, P.

Li, Z.

H. Huang, Z. Li, J. Lu, Z. Wang, C. Wang, K. Lau, K. Chen, and T. Zhang, “Microbridge tests on gallium nitride thin films,” J. Micromech. Microeng. 19(9), 095019 (2009).
[Crossref]

Lin, Y.

S. Feng, Y. Cheng, Y. Chung, C. Yang, Y. Lin, C. Hsu, K. Ma, and J. Chyi, “Impact of localized states on the recombination dynamics in InGaN/GaN quantum well structures,” J. Appl. Phys. 92(8), 4441–4448 (2002).
[Crossref]

Liu, H.

H. Liu, C. Tay, C. Quan, T. Kobayashi, and C. Lee, “Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power,” J. Microelectromech. Syst. 20(5), 1131–1142 (2011).
[Crossref]

Liu, M.

B. Yao, L. Feng, X. Wang, M. Liu, Z. Zhou, and W. Liu, “Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings,” IEEE Photonics Technol. Lett. 26(10), 1027–1030 (2014).
[Crossref]

Liu, W.

B. Yao, L. Feng, X. Wang, M. Liu, Z. Zhou, and W. Liu, “Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings,” IEEE Photonics Technol. Lett. 26(10), 1027–1030 (2014).
[Crossref]

X. Zhang, W. Liu, and S. Chua, “Optical transitions in InGaN/GaN quantum wells: effects of the piezoelectric field,” J. Cryst. Growth 268(3–4), 521–526 (2004).
[Crossref]

Liu, Y. L.

L. Yang, J. Motohisa, K. Tomioka, J. Takeda, T. Fukui, M. M. Geng, L. X. Jia, L. Zhang, and Y. L. Liu, “Fabrication and excitation-power-density-dependent micro-photoluminescence of hexagonal nanopillars with a single InGaAs/GaAs quantum well,” Nanotechnology 19(27), 275304 (2008).
[Crossref] [PubMed]

Lu, J.

H. Huang, Z. Li, J. Lu, Z. Wang, C. Wang, K. Lau, K. Chen, and T. Zhang, “Microbridge tests on gallium nitride thin films,” J. Micromech. Microeng. 19(9), 095019 (2009).
[Crossref]

Lu, Y.

Y. Lu, F. Cottone, S. Boisseau, F. Marty, D. Galayko, and P. Basset, “A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices,” Appl. Phys. Lett. 107(25), 253902 (2015).
[Crossref]

Ma, K.

S. Feng, Y. Cheng, Y. Chung, C. Yang, Y. Lin, C. Hsu, K. Ma, and J. Chyi, “Impact of localized states on the recombination dynamics in InGaN/GaN quantum well structures,” J. Appl. Phys. 92(8), 4441–4448 (2002).
[Crossref]

Marty, F.

Y. Lu, F. Cottone, S. Boisseau, F. Marty, D. Galayko, and P. Basset, “A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices,” Appl. Phys. Lett. 107(25), 253902 (2015).
[Crossref]

Mastro, M.

A. Rosenberg, K. Bussmann, M. Kim, M. Carter, M. Mastro, R. Holm, R. Henry, J. Caldwell, and C. Eddy, “Fabrication of GaN suspended photonic crystal slabs and resonant nanocavities on Si(111),” J. Vac. Sci. Technol. B 25(3), 721 (2007).
[Crossref]

Mathewson, A.

N. Jackson, R. O’Keeffe, F. Waldron, M. O’Neill, and A. Mathewson, “Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance,” J. Micromech. Microeng. 23(7), 075014 (2013).
[Crossref]

Moisa, S.

H. Tang, J. Bardwell, J. Webb, S. Moisa, J. Fraser, and S. Rolfe, “Selective growth of GaN on a SiC substrate patterned with an AlN seed layer by ammonia molecular-beam epitaxy,” Appl. Phys. Lett. 79(17), 2764–2766 (2001).
[Crossref]

Motohisa, J.

L. Yang, J. Motohisa, K. Tomioka, J. Takeda, T. Fukui, M. M. Geng, L. X. Jia, L. Zhang, and Y. L. Liu, “Fabrication and excitation-power-density-dependent micro-photoluminescence of hexagonal nanopillars with a single InGaAs/GaAs quantum well,” Nanotechnology 19(27), 275304 (2008).
[Crossref] [PubMed]

Nakamura, S.

S. Nakamura, “The roles of structural imperfections in InGaN-based blue light-emitting diodes and laser diodes,” Science 281(5379), 956–961 (1998).
[Crossref] [PubMed]

Nikolopoulos, C.

N. Kavallaris, A. Lacey, and C. Nikolopoulos, “On the quenching of a nonlocal parabolic problem arising in electrostatic MEMS control,” Nonlinear Analysis: Theory, Methods & Applications 138, 189–206 (2016).
[Crossref]

O’Keeffe, R.

N. Jackson, R. O’Keeffe, F. Waldron, M. O’Neill, and A. Mathewson, “Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance,” J. Micromech. Microeng. 23(7), 075014 (2013).
[Crossref]

O’Neill, M.

N. Jackson, R. O’Keeffe, F. Waldron, M. O’Neill, and A. Mathewson, “Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance,” J. Micromech. Microeng. 23(7), 075014 (2013).
[Crossref]

Olivo, M.

J. Singh, J. Teo, Y. Xu, C. Premachandran, N. Chen, R. Kotlanka, M. Olivo, and C. Sheppard, “A two axes scanning SOI MEMS micro-mirror for endoscopic bioimaging,” J. Micromech. Microeng. 18(2), 1–9 (2008).
[Crossref]

Pal, S.

S. Pal and H. Xie, “A curved multimorph based electrothermal micromirror with large scan range and low drive voltage,” Sens. Actuators A Phys. 170(1-2), 156–163 (2011).
[Crossref]

Pan, L. F.

Passilly, N.

M. Baranski, S. Bargiel, N. Passilly, B. Guichardaz, E. Herth, C. Gorecki, C. Jia, J. Fromel, and M. Wiemer, “Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate,” IEEE Photonics Technol. Lett. 26(1), 100–103 (2014).
[Crossref]

Peter, Y.

O. Solgaard, A. Godil, R. Howe, L. Lee, Y. Peter, and H. Zappe, “Optical MEMS: From micromirrors to complex systems,” J. Microelectromech. Syst. 23(3), 517–538 (2014).
[Crossref]

Premachandran, C.

J. Singh, J. Teo, Y. Xu, C. Premachandran, N. Chen, R. Kotlanka, M. Olivo, and C. Sheppard, “A two axes scanning SOI MEMS micro-mirror for endoscopic bioimaging,” J. Micromech. Microeng. 18(2), 1–9 (2008).
[Crossref]

Quan, C.

H. Liu, C. Tay, C. Quan, T. Kobayashi, and C. Lee, “Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power,” J. Microelectromech. Syst. 20(5), 1131–1142 (2011).
[Crossref]

Rolfe, S.

H. Tang, J. Bardwell, J. Webb, S. Moisa, J. Fraser, and S. Rolfe, “Selective growth of GaN on a SiC substrate patterned with an AlN seed layer by ammonia molecular-beam epitaxy,” Appl. Phys. Lett. 79(17), 2764–2766 (2001).
[Crossref]

Rosenberg, A.

A. Rosenberg, K. Bussmann, M. Kim, M. Carter, M. Mastro, R. Holm, R. Henry, J. Caldwell, and C. Eddy, “Fabrication of GaN suspended photonic crystal slabs and resonant nanocavities on Si(111),” J. Vac. Sci. Technol. B 25(3), 721 (2007).
[Crossref]

Samaishima, H.

M. Wakui, H. Samaishima, F. R. Hu, and K. Hane, “Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications,” Microsyst. Technol. 17(1), 109–114 (2011).
[Crossref]

Sameshima, H.

T. Tanae, H. Sameshima, and K. Hane, “Design and fabrication of GaN crystal ultra-small lateral comb-drive actuators,” J. Vac. Sci. Technol. B 30(1), 012001 (2012).
[Crossref]

R. Ito, M. Wakui, H. Sameshima, F. R. Hu, and K. Hane, “Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode,” Microsyst. Technol. 16(6), 1015–1020 (2010).
[Crossref]

Santos, P.

U. Kaletta, P. Santos, D. Wolansky, A. Scheit, M. Fraschke, C. Wipf, P. Zaumseil, and C. Wenger, “Monolithic integrated SAW filter based on AlN for high-frequency applications,” Semicond. Sci. Technol. 28(6), 065013 (2013).
[Crossref]

Sasaki, T.

P. Li, T. Sasaki, L. F. Pan, and K. Hane, “Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer,” Opt. Express 20(1), 627–634 (2012).
[Crossref] [PubMed]

Y. Wang, T. Sasaki, T. Wu, F. Hu, and K. Hane, “Comb-drive GaN micro-mirror on a GaN-on-silicon platform,” J. Micromech. Microeng. 21(3), 035012 (2011).
[Crossref]

Schalko, J.

A. Kainz, W. Hortschitz, J. Schalko, A. Jachimowicz, and F. Keplinger, “Air damping as design feature in lateral oscillators,” Sens. Actuators A Phys. 236, 357–363 (2015).
[Crossref]

Scheit, A.

U. Kaletta, P. Santos, D. Wolansky, A. Scheit, M. Fraschke, C. Wipf, P. Zaumseil, and C. Wenger, “Monolithic integrated SAW filter based on AlN for high-frequency applications,” Semicond. Sci. Technol. 28(6), 065013 (2013).
[Crossref]

Sharma, E.

U. Sharma, S. Dutta, and E. Sharma, “Scattering Parameters of Broadband (18-40 GHz) RF MEMS Switch in [pi]-match Configuration,” Sensors & Transducers 196(1), 37 (2016).

Sharma, U.

U. Sharma, S. Dutta, and E. Sharma, “Scattering Parameters of Broadband (18-40 GHz) RF MEMS Switch in [pi]-match Configuration,” Sensors & Transducers 196(1), 37 (2016).

Sheppard, C.

J. Singh, J. Teo, Y. Xu, C. Premachandran, N. Chen, R. Kotlanka, M. Olivo, and C. Sheppard, “A two axes scanning SOI MEMS micro-mirror for endoscopic bioimaging,” J. Micromech. Microeng. 18(2), 1–9 (2008).
[Crossref]

Singh, J.

J. Singh, J. Teo, Y. Xu, C. Premachandran, N. Chen, R. Kotlanka, M. Olivo, and C. Sheppard, “A two axes scanning SOI MEMS micro-mirror for endoscopic bioimaging,” J. Micromech. Microeng. 18(2), 1–9 (2008).
[Crossref]

Solgaard, O.

O. Solgaard, A. Godil, R. Howe, L. Lee, Y. Peter, and H. Zappe, “Optical MEMS: From micromirrors to complex systems,” J. Microelectromech. Syst. 23(3), 517–538 (2014).
[Crossref]

Spahn, O.

T. Bakke, C. Tigges, J. Lean, C. Sullivan, and O. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. sel. Top. Quant. Electron. 8(1), 64–72 (2002).
[Crossref]

Su, W.

W. Zhou, X. He, W. Su, L. Li, and L. Chen, “Error sensitivity analysis of folded beam stiffness,” J. Mach. Des. 27(2), 80–83 (2010).

Sullivan, C.

T. Bakke, C. Tigges, J. Lean, C. Sullivan, and O. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. sel. Top. Quant. Electron. 8(1), 64–72 (2002).
[Crossref]

Takeda, J.

L. Yang, J. Motohisa, K. Tomioka, J. Takeda, T. Fukui, M. M. Geng, L. X. Jia, L. Zhang, and Y. L. Liu, “Fabrication and excitation-power-density-dependent micro-photoluminescence of hexagonal nanopillars with a single InGaAs/GaAs quantum well,” Nanotechnology 19(27), 275304 (2008).
[Crossref] [PubMed]

Tanae, T.

T. Tanae, H. Sameshima, and K. Hane, “Design and fabrication of GaN crystal ultra-small lateral comb-drive actuators,” J. Vac. Sci. Technol. B 30(1), 012001 (2012).
[Crossref]

Tang, H.

H. Tang, J. Bardwell, J. Webb, S. Moisa, J. Fraser, and S. Rolfe, “Selective growth of GaN on a SiC substrate patterned with an AlN seed layer by ammonia molecular-beam epitaxy,” Appl. Phys. Lett. 79(17), 2764–2766 (2001).
[Crossref]

Tang, T.

T. Tang, C. Hsu, W. Chen, and W. Fang, “Design and implementation of a torque-enhancement 2-axis magnetostatic SOI optical scanner,” J. Micromech. Microeng. 20(2), 025020 (2010).
[Crossref]

Tay, C.

H. Liu, C. Tay, C. Quan, T. Kobayashi, and C. Lee, “Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power,” J. Microelectromech. Syst. 20(5), 1131–1142 (2011).
[Crossref]

Teo, J.

J. Singh, J. Teo, Y. Xu, C. Premachandran, N. Chen, R. Kotlanka, M. Olivo, and C. Sheppard, “A two axes scanning SOI MEMS micro-mirror for endoscopic bioimaging,” J. Micromech. Microeng. 18(2), 1–9 (2008).
[Crossref]

Tigges, C.

T. Bakke, C. Tigges, J. Lean, C. Sullivan, and O. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. sel. Top. Quant. Electron. 8(1), 64–72 (2002).
[Crossref]

Timpe, S.

S. Timpe, D. Hook, M. Dugger, and K. Komvopoulos, “Levitation compensation method for dynamic electrostatic comb-drive actuators,” Sens. Actuators A Phys. 143(2), 383–389 (2008).
[Crossref]

Tomioka, K.

L. Yang, J. Motohisa, K. Tomioka, J. Takeda, T. Fukui, M. M. Geng, L. X. Jia, L. Zhang, and Y. L. Liu, “Fabrication and excitation-power-density-dependent micro-photoluminescence of hexagonal nanopillars with a single InGaAs/GaAs quantum well,” Nanotechnology 19(27), 275304 (2008).
[Crossref] [PubMed]

Tsai, J.

J. Tsai, H. Chu, J. Hsieh, and W. Fang, “The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications,” J. Micromech. Microeng. 14(2), 235–241 (2004).
[Crossref]

Wakui, M.

M. Wakui, H. Samaishima, F. R. Hu, and K. Hane, “Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications,” Microsyst. Technol. 17(1), 109–114 (2011).
[Crossref]

R. Ito, M. Wakui, H. Sameshima, F. R. Hu, and K. Hane, “Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode,” Microsyst. Technol. 16(6), 1015–1020 (2010).
[Crossref]

Waldron, F.

N. Jackson, R. O’Keeffe, F. Waldron, M. O’Neill, and A. Mathewson, “Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance,” J. Micromech. Microeng. 23(7), 075014 (2013).
[Crossref]

Wang, C.

H. Huang, Z. Li, J. Lu, Z. Wang, C. Wang, K. Lau, K. Chen, and T. Zhang, “Microbridge tests on gallium nitride thin films,” J. Micromech. Microeng. 19(9), 095019 (2009).
[Crossref]

Wang, D.

Z. Yang, R. N. Wang, S. Jia, D. Wang, B. Zhang, K. Lau, and K. Chen, “Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique,” Appl. Phys. Lett. 88(4), 041913 (2006).
[Crossref]

Wang, R. N.

Z. Yang, R. N. Wang, S. Jia, D. Wang, B. Zhang, K. Lau, and K. Chen, “Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique,” Appl. Phys. Lett. 88(4), 041913 (2006).
[Crossref]

Wang, X.

B. Yao, L. Feng, X. Wang, M. Liu, Z. Zhou, and W. Liu, “Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings,” IEEE Photonics Technol. Lett. 26(10), 1027–1030 (2014).
[Crossref]

Wang, Y.

Y. Wang, T. Sasaki, T. Wu, F. Hu, and K. Hane, “Comb-drive GaN micro-mirror on a GaN-on-silicon platform,” J. Micromech. Microeng. 21(3), 035012 (2011).
[Crossref]

Wang, Z.

H. Huang, Z. Li, J. Lu, Z. Wang, C. Wang, K. Lau, K. Chen, and T. Zhang, “Microbridge tests on gallium nitride thin films,” J. Micromech. Microeng. 19(9), 095019 (2009).
[Crossref]

Webb, J.

H. Tang, J. Bardwell, J. Webb, S. Moisa, J. Fraser, and S. Rolfe, “Selective growth of GaN on a SiC substrate patterned with an AlN seed layer by ammonia molecular-beam epitaxy,” Appl. Phys. Lett. 79(17), 2764–2766 (2001).
[Crossref]

Wenger, C.

U. Kaletta, P. Santos, D. Wolansky, A. Scheit, M. Fraschke, C. Wipf, P. Zaumseil, and C. Wenger, “Monolithic integrated SAW filter based on AlN for high-frequency applications,” Semicond. Sci. Technol. 28(6), 065013 (2013).
[Crossref]

Wiemer, M.

M. Baranski, S. Bargiel, N. Passilly, B. Guichardaz, E. Herth, C. Gorecki, C. Jia, J. Fromel, and M. Wiemer, “Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate,” IEEE Photonics Technol. Lett. 26(1), 100–103 (2014).
[Crossref]

Wipf, C.

U. Kaletta, P. Santos, D. Wolansky, A. Scheit, M. Fraschke, C. Wipf, P. Zaumseil, and C. Wenger, “Monolithic integrated SAW filter based on AlN for high-frequency applications,” Semicond. Sci. Technol. 28(6), 065013 (2013).
[Crossref]

Wolansky, D.

U. Kaletta, P. Santos, D. Wolansky, A. Scheit, M. Fraschke, C. Wipf, P. Zaumseil, and C. Wenger, “Monolithic integrated SAW filter based on AlN for high-frequency applications,” Semicond. Sci. Technol. 28(6), 065013 (2013).
[Crossref]

Wu, T.

Y. Wang, T. Sasaki, T. Wu, F. Hu, and K. Hane, “Comb-drive GaN micro-mirror on a GaN-on-silicon platform,” J. Micromech. Microeng. 21(3), 035012 (2011).
[Crossref]

Xie, H.

S. Pal and H. Xie, “A curved multimorph based electrothermal micromirror with large scan range and low drive voltage,” Sens. Actuators A Phys. 170(1-2), 156–163 (2011).
[Crossref]

Xu, Y.

J. Singh, J. Teo, Y. Xu, C. Premachandran, N. Chen, R. Kotlanka, M. Olivo, and C. Sheppard, “A two axes scanning SOI MEMS micro-mirror for endoscopic bioimaging,” J. Micromech. Microeng. 18(2), 1–9 (2008).
[Crossref]

Yang, C.

S. Feng, Y. Cheng, Y. Chung, C. Yang, Y. Lin, C. Hsu, K. Ma, and J. Chyi, “Impact of localized states on the recombination dynamics in InGaN/GaN quantum well structures,” J. Appl. Phys. 92(8), 4441–4448 (2002).
[Crossref]

Yang, L.

L. Yang, J. Motohisa, K. Tomioka, J. Takeda, T. Fukui, M. M. Geng, L. X. Jia, L. Zhang, and Y. L. Liu, “Fabrication and excitation-power-density-dependent micro-photoluminescence of hexagonal nanopillars with a single InGaAs/GaAs quantum well,” Nanotechnology 19(27), 275304 (2008).
[Crossref] [PubMed]

Yang, Z.

Z. Yang, R. N. Wang, S. Jia, D. Wang, B. Zhang, K. Lau, and K. Chen, “Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique,” Appl. Phys. Lett. 88(4), 041913 (2006).
[Crossref]

Yao, B.

B. Yao, L. Feng, X. Wang, M. Liu, Z. Zhou, and W. Liu, “Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings,” IEEE Photonics Technol. Lett. 26(10), 1027–1030 (2014).
[Crossref]

Yeh, J.

C. Lee and J. Yeh, “Development and evolution of MOEMS technology in variable optical attenuators,” J. Micro/Nanolithography, MEMS & MOEMS 7(2), 021003 (2008).
[Crossref]

Zappe, H.

O. Solgaard, A. Godil, R. Howe, L. Lee, Y. Peter, and H. Zappe, “Optical MEMS: From micromirrors to complex systems,” J. Microelectromech. Syst. 23(3), 517–538 (2014).
[Crossref]

Zaumseil, P.

U. Kaletta, P. Santos, D. Wolansky, A. Scheit, M. Fraschke, C. Wipf, P. Zaumseil, and C. Wenger, “Monolithic integrated SAW filter based on AlN for high-frequency applications,” Semicond. Sci. Technol. 28(6), 065013 (2013).
[Crossref]

Zhang, B.

Z. Yang, R. N. Wang, S. Jia, D. Wang, B. Zhang, K. Lau, and K. Chen, “Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique,” Appl. Phys. Lett. 88(4), 041913 (2006).
[Crossref]

Zhang, L.

L. Yang, J. Motohisa, K. Tomioka, J. Takeda, T. Fukui, M. M. Geng, L. X. Jia, L. Zhang, and Y. L. Liu, “Fabrication and excitation-power-density-dependent micro-photoluminescence of hexagonal nanopillars with a single InGaAs/GaAs quantum well,” Nanotechnology 19(27), 275304 (2008).
[Crossref] [PubMed]

Zhang, T.

H. Huang, Z. Li, J. Lu, Z. Wang, C. Wang, K. Lau, K. Chen, and T. Zhang, “Microbridge tests on gallium nitride thin films,” J. Micromech. Microeng. 19(9), 095019 (2009).
[Crossref]

Zhang, X.

X. Zhang, W. Liu, and S. Chua, “Optical transitions in InGaN/GaN quantum wells: effects of the piezoelectric field,” J. Cryst. Growth 268(3–4), 521–526 (2004).
[Crossref]

Zhou, W.

W. Zhou, X. He, W. Su, L. Li, and L. Chen, “Error sensitivity analysis of folded beam stiffness,” J. Mach. Des. 27(2), 80–83 (2010).

Zhou, Z.

B. Yao, L. Feng, X. Wang, M. Liu, Z. Zhou, and W. Liu, “Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings,” IEEE Photonics Technol. Lett. 26(10), 1027–1030 (2014).
[Crossref]

Appl. Phys. Lett. (3)

Y. Lu, F. Cottone, S. Boisseau, F. Marty, D. Galayko, and P. Basset, “A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices,” Appl. Phys. Lett. 107(25), 253902 (2015).
[Crossref]

H. Tang, J. Bardwell, J. Webb, S. Moisa, J. Fraser, and S. Rolfe, “Selective growth of GaN on a SiC substrate patterned with an AlN seed layer by ammonia molecular-beam epitaxy,” Appl. Phys. Lett. 79(17), 2764–2766 (2001).
[Crossref]

Z. Yang, R. N. Wang, S. Jia, D. Wang, B. Zhang, K. Lau, and K. Chen, “Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique,” Appl. Phys. Lett. 88(4), 041913 (2006).
[Crossref]

IEEE J. sel. Top. Quant. Electron. (1)

T. Bakke, C. Tigges, J. Lean, C. Sullivan, and O. Spahn, “Planar microoptomechanical waveguide switches,” IEEE J. sel. Top. Quant. Electron. 8(1), 64–72 (2002).
[Crossref]

IEEE Photonics Technol. Lett. (2)

B. Yao, L. Feng, X. Wang, M. Liu, Z. Zhou, and W. Liu, “Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings,” IEEE Photonics Technol. Lett. 26(10), 1027–1030 (2014).
[Crossref]

M. Baranski, S. Bargiel, N. Passilly, B. Guichardaz, E. Herth, C. Gorecki, C. Jia, J. Fromel, and M. Wiemer, “Wafer-level fabrication of microcube-typed beam-splitters by saw-dicing of glass substrate,” IEEE Photonics Technol. Lett. 26(1), 100–103 (2014).
[Crossref]

J. Appl. Phys. (1)

S. Feng, Y. Cheng, Y. Chung, C. Yang, Y. Lin, C. Hsu, K. Ma, and J. Chyi, “Impact of localized states on the recombination dynamics in InGaN/GaN quantum well structures,” J. Appl. Phys. 92(8), 4441–4448 (2002).
[Crossref]

J. Cryst. Growth (1)

X. Zhang, W. Liu, and S. Chua, “Optical transitions in InGaN/GaN quantum wells: effects of the piezoelectric field,” J. Cryst. Growth 268(3–4), 521–526 (2004).
[Crossref]

J. Mach. Des. (1)

W. Zhou, X. He, W. Su, L. Li, and L. Chen, “Error sensitivity analysis of folded beam stiffness,” J. Mach. Des. 27(2), 80–83 (2010).

J. Micro/Nanolithography, MEMS & MOEMS (1)

C. Lee and J. Yeh, “Development and evolution of MOEMS technology in variable optical attenuators,” J. Micro/Nanolithography, MEMS & MOEMS 7(2), 021003 (2008).
[Crossref]

J. Microelectromech. Syst. (3)

H. Liu, C. Tay, C. Quan, T. Kobayashi, and C. Lee, “Piezoelectric MEMS energy harvester for low-frequency vibrations with wideband operation range and steadily increased output power,” J. Microelectromech. Syst. 20(5), 1131–1142 (2011).
[Crossref]

K. Koh and C. Lee, “A two-dimensional MEMS scanning mirror using hybrid actuation mechanisms with low operation voltage,” J. Microelectromech. Syst. 21(5), 1124–1135 (2012).
[Crossref]

O. Solgaard, A. Godil, R. Howe, L. Lee, Y. Peter, and H. Zappe, “Optical MEMS: From micromirrors to complex systems,” J. Microelectromech. Syst. 23(3), 517–538 (2014).
[Crossref]

J. Micromech. Microeng. (6)

N. Jackson, R. O’Keeffe, F. Waldron, M. O’Neill, and A. Mathewson, “Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance,” J. Micromech. Microeng. 23(7), 075014 (2013).
[Crossref]

H. Huang, Z. Li, J. Lu, Z. Wang, C. Wang, K. Lau, K. Chen, and T. Zhang, “Microbridge tests on gallium nitride thin films,” J. Micromech. Microeng. 19(9), 095019 (2009).
[Crossref]

Y. Wang, T. Sasaki, T. Wu, F. Hu, and K. Hane, “Comb-drive GaN micro-mirror on a GaN-on-silicon platform,” J. Micromech. Microeng. 21(3), 035012 (2011).
[Crossref]

J. Tsai, H. Chu, J. Hsieh, and W. Fang, “The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications,” J. Micromech. Microeng. 14(2), 235–241 (2004).
[Crossref]

J. Singh, J. Teo, Y. Xu, C. Premachandran, N. Chen, R. Kotlanka, M. Olivo, and C. Sheppard, “A two axes scanning SOI MEMS micro-mirror for endoscopic bioimaging,” J. Micromech. Microeng. 18(2), 1–9 (2008).
[Crossref]

T. Tang, C. Hsu, W. Chen, and W. Fang, “Design and implementation of a torque-enhancement 2-axis magnetostatic SOI optical scanner,” J. Micromech. Microeng. 20(2), 025020 (2010).
[Crossref]

J. Vac. Sci. Technol. B (2)

A. Rosenberg, K. Bussmann, M. Kim, M. Carter, M. Mastro, R. Holm, R. Henry, J. Caldwell, and C. Eddy, “Fabrication of GaN suspended photonic crystal slabs and resonant nanocavities on Si(111),” J. Vac. Sci. Technol. B 25(3), 721 (2007).
[Crossref]

T. Tanae, H. Sameshima, and K. Hane, “Design and fabrication of GaN crystal ultra-small lateral comb-drive actuators,” J. Vac. Sci. Technol. B 30(1), 012001 (2012).
[Crossref]

Microsyst. Technol. (2)

R. Ito, M. Wakui, H. Sameshima, F. R. Hu, and K. Hane, “Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode,” Microsyst. Technol. 16(6), 1015–1020 (2010).
[Crossref]

M. Wakui, H. Samaishima, F. R. Hu, and K. Hane, “Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications,” Microsyst. Technol. 17(1), 109–114 (2011).
[Crossref]

Nanotechnology (1)

L. Yang, J. Motohisa, K. Tomioka, J. Takeda, T. Fukui, M. M. Geng, L. X. Jia, L. Zhang, and Y. L. Liu, “Fabrication and excitation-power-density-dependent micro-photoluminescence of hexagonal nanopillars with a single InGaAs/GaAs quantum well,” Nanotechnology 19(27), 275304 (2008).
[Crossref] [PubMed]

Nonlinear Analysis: Theory, Methods & Applications (1)

N. Kavallaris, A. Lacey, and C. Nikolopoulos, “On the quenching of a nonlocal parabolic problem arising in electrostatic MEMS control,” Nonlinear Analysis: Theory, Methods & Applications 138, 189–206 (2016).
[Crossref]

Opt. Express (2)

Science (1)

S. Nakamura, “The roles of structural imperfections in InGaN-based blue light-emitting diodes and laser diodes,” Science 281(5379), 956–961 (1998).
[Crossref] [PubMed]

Semicond. Sci. Technol. (1)

U. Kaletta, P. Santos, D. Wolansky, A. Scheit, M. Fraschke, C. Wipf, P. Zaumseil, and C. Wenger, “Monolithic integrated SAW filter based on AlN for high-frequency applications,” Semicond. Sci. Technol. 28(6), 065013 (2013).
[Crossref]

Sens. Actuators A Phys. (5)

H. Chu and K. Hane, “Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner,” Sens. Actuators A Phys. 165(2), 422–430 (2011).
[Crossref]

K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel, P. Dziuban, M. Kujawińska, D. Callet, and S. Frank, “A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications,” Sens. Actuators A Phys. 163(1), 255–265 (2010).
[Crossref]

S. Pal and H. Xie, “A curved multimorph based electrothermal micromirror with large scan range and low drive voltage,” Sens. Actuators A Phys. 170(1-2), 156–163 (2011).
[Crossref]

A. Kainz, W. Hortschitz, J. Schalko, A. Jachimowicz, and F. Keplinger, “Air damping as design feature in lateral oscillators,” Sens. Actuators A Phys. 236, 357–363 (2015).
[Crossref]

S. Timpe, D. Hook, M. Dugger, and K. Komvopoulos, “Levitation compensation method for dynamic electrostatic comb-drive actuators,” Sens. Actuators A Phys. 143(2), 383–389 (2008).
[Crossref]

Sensors & Transducers (1)

U. Sharma, S. Dutta, and E. Sharma, “Scattering Parameters of Broadband (18-40 GHz) RF MEMS Switch in [pi]-match Configuration,” Sensors & Transducers 196(1), 37 (2016).

Other (1)

D. Ciubotariu, C. Clévy, I. Ivan, and P. Lutz, “Shape Behavior analysis of a PMN-PT [001] actuated MOEMS micro-mirror,” in Proceedings of IEEE Conference on International Conference on Advanced Intelligent Mechatronics (AIM) (IEEE, 2015), pp.453–458.
[Crossref]

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Figures (6)

Fig. 1
Fig. 1 (a) Schematic structure of the micro-mirror actuator; (b) Layered structure of the micro-mirror actuator; (c) Magnified view of the integrated comb-drive actuator.
Fig. 2
Fig. 2 The fabrication process of the InGaN/GaN multilayer film covered micro-mirror actuator.
Fig. 3
Fig. 3 Schematic diagrams of two-axis motion for the integrated comb structures: (a) initial position at X-Y plane; (b) actuated position at X-Y plane; (a) initial position at X-Z plane; (a) actuated position at X-Z plane.
Fig. 4
Fig. 4 SEM image of the fabricated the InGaN/GaN multilayer film covered micro-mirror actuator: (a) overall structure of the device; (b) micro-mirror; (c) front side of the comb-drive structures; (d) back side of the comb-drive structures.
Fig. 5
Fig. 5 Simulated and measured displacements of (a) (c) the horizontal comb actuator and (b) (d) the vertical comb actuator, the superscripts m and s denote the measurement and simulation, respectively.
Fig. 6
Fig. 6 Temperature-dependent PL from the InGaN/GaN multiquantum well structure on the patterned SOI substrate; the inset shows the laser intensity dependent PL from the InGaN/GaN multiquantum well structure.

Tables (1)

Tables Icon

Table 1 The design parameters of the device

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

W= n 2 W x +n W z = n 4 ε D x (h- D z ) g V 1 2 + n 2 ε l( D z h 2 ) g V 2 2
{ D x = 2nε V 1 2 (nεl V 2 2 2gh k z ) n 2 ε 2 V 1 4 16 g 2 k x k z D z = nε(nεh V 1 4 8gl k x V 2 2 ) n 2 ε 2 V 1 4 16 g 2 k x k z
{ k x = 2Eh w 3 / b 3 k z = 2Ew h 3 / b 3

Metrics