Abstract

In this paper, we fabricate a freestanding plasmonic cascade grating and investigate the extraordinary optical behaviors associated with it. The structure consists of two identical metallic gratings with nearly perfect alignment on the lateral direction supported by a Si3N4 membrane. Two types of optical transmission resonances emerge in the fabricated sample at visible frequencies, corresponding to the electric and magnetic resonances in the cascaded structure. These resonances respectively originate from the near-field coupling of plasmonic symmetric and antisymmetric modes in the metal-dielectric-metal waveguide. Moreover, the influence of the incident angle and structure parameters on two resonant peaks are investigated. We envision that this type of plasmonic free-standing cascaded nanostructure holds promise for a series of spectrum-dependent applications for the visible light.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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    [Crossref]

2017 (2)

J. Wang, Q. Fan, S. Zhang, Z. Zhang, H. Zhang, Y. Liang, X. Cao, and T. Xu, “Ultra-thin plasmonic color filters incorporating free-standing resonant membrane waveguides with high transmission efficiency,” Appl. Phys. Lett. 110(3), 031110 (2017).
[Crossref]

L. Huang, C. C. Chang, B. Zeng, J. Nogan, S. N. Luo, A. J. Taylor, A. K. Azad, and H. T. Chen, “Bilayer Metasurfaces for Dual-and Broadband Optical Antireflection,” ACS Photonics 4(9), 2111–2116 (2017).
[Crossref]

2015 (1)

2014 (2)

T. Xu and H. J. Lezec, “Visible-frequency asymmetric transmission devices incorporating a hyperbolic metamaterial,” Nat. Commun. 5, 4141 (2014).
[Crossref] [PubMed]

Y. Liang, W. Peng, R. Hu, and M. Lu, “Symmetry-reduced double layer metallic grating structure for dual-wavelength spectral filtering,” Opt. Express 22(10), 11633–11645 (2014).
[Crossref] [PubMed]

2013 (5)

2012 (1)

Y. T. Yoon, C. H. Park, and S. S. Lee, “Highly efficient color filter incorporating a thin metal-dielectric resonant structure,” Appl. Phys. Express 5(2), 022501 (2012).
[Crossref]

2011 (5)

2010 (4)

Z. Marcet, Z. H. Hang, C. T. Chan, I. Kravchenko, J. E. Bower, R. A. Cirelli, F. Klemens, W. M. Mansfield, J. F. Miner, C. S. Pai, and H. B. Chan, “Optical transmission through double-layer, laterally shifted metallic subwavelength hole arrays,” Opt. Lett. 35(13), 2124–2126 (2010).
[Crossref] [PubMed]

S. Collin, G. Vincent, R. Haïdar, N. Bardou, S. Rommeluère, and J. L. Pelouard, “Nearly perfect Fano transmission resonances through nanoslits drilled in a metallic membrane,” Phys. Rev. Lett. 104(2), 027401 (2010).
[Crossref] [PubMed]

R. Haïdar, G. Vincent, S. Collin, N. Bardou, N. Guérineau, J. Deschamps, and J. L. Pelouard, “Free-standing subwavelength metallic gratings for snapshot multispectral imaging,” Appl. Phys. Lett. 96(22), 221104 (2010).
[Crossref]

B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater. 9(9), 707–715 (2010).
[Crossref] [PubMed]

2009 (2)

H. T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
[Crossref]

L. Verslegers, P. B. Catrysse, Z. Yu, J. S. White, E. S. Barnard, M. L. Brongersma, and S. Fan, “Planar lenses based on nanoscale slit arrays in a metallic film,” Nano Lett. 9(1), 235–238 (2009).
[Crossref] [PubMed]

2008 (3)

C. Cheng, J. Chen, D. J. Shi, Q. Y. Wu, F. F. Ren, J. Xu, Y. X. Fan, J. P. Ding, and H. T. Wang, “Physical mechanism of extraordinary electromagnetic transmission in dual-metallic grating structures,” Phys. Rev. B 78(7), 075406 (2008).
[Crossref]

Z. Marcet, J. W. Paster, D. W. Carr, J. E. Bower, R. A. Cirelli, F. Klemens, W. M. Mansfield, J. F. Miner, C. S. Pai, and H. B. Chan, “Controlling the phase delay of light transmitted through double-layer metallic subwavelength slit arrays,” Opt. Lett. 33(13), 1410–1412 (2008).
[Crossref] [PubMed]

A. Christ, O. J. Martin, Y. Ekinci, N. A. Gippius, and S. G. Tikhodeev, “Symmetry breaking in a plasmonic metamaterial at optical wavelength,” Nano Lett. 8(8), 2171–2175 (2008).
[Crossref] [PubMed]

2007 (2)

W. Cai, U. K. Chettiar, H. K. Yuan, V. C. de Silva, A. V. Kildishev, V. P. Drachev, and V. M. Shalaev, “Metamagnetics with rainbow colors,” Opt. Express 15(6), 3333–3341 (2007).
[Crossref] [PubMed]

C. Cheng, J. Chen, Q. Y. Wu, F. F. Ren, J. Xu, Y. X. Fan, and H. T. Wang, “Controllable electromagnetic transmission based on dual-metallic grating structures composed of subwavelength slits,” Appl. Phys. Lett. 91(11), 111111 (2007).
[Crossref]

2006 (3)

J. A. Dionne, L. A. Sweatlock, H. A. Atwater, and A. Polman, “Plasmon slot waveguides: Towards chip-scale propagation with subwavelength-scale localization,” Phys. Rev. B 73(3), 035407 (2006).
[Crossref]

H. T. Chen, W. J. Padilla, J. M. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

H. B. Chan, Z. Marcet, K. Woo, D. B. Tanner, D. W. Carr, J. E. Bower, R. A. Cirelli, E. Ferry, F. Klemens, J. Miner, C. S. Pai, and J. A. Taylor, “Optical transmission through double-layer metallic subwavelength slit arrays,” Opt. Lett. 31(4), 516–518 (2006).
[Crossref] [PubMed]

2003 (1)

W. L. Barnes, A. Dereux, and T. W. Ebbesen, “Surface plasmon subwavelength optics,” Nature 424(6950), 824–830 (2003).
[Crossref] [PubMed]

1998 (1)

T. W. Ebbesen, H. Lezec, H. Ghaemi, T. Thio, and P. Wolff, “Extraordinary optical transmission through sub-wavelength hole arrays,” Nature 391(6668), 667–669 (1998).
[Crossref]

Atwater, H. A.

J. A. Dionne, L. A. Sweatlock, H. A. Atwater, and A. Polman, “Plasmon slot waveguides: Towards chip-scale propagation with subwavelength-scale localization,” Phys. Rev. B 73(3), 035407 (2006).
[Crossref]

Averitt, R. D.

H. T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
[Crossref]

H. T. Chen, W. J. Padilla, J. M. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

Azad, A. K.

L. Huang, C. C. Chang, B. Zeng, J. Nogan, S. N. Luo, A. J. Taylor, A. K. Azad, and H. T. Chen, “Bilayer Metasurfaces for Dual-and Broadband Optical Antireflection,” ACS Photonics 4(9), 2111–2116 (2017).
[Crossref]

N. K. Grady, J. E. Heyes, D. R. Chowdhury, Y. Zeng, M. T. Reiten, A. K. Azad, A. J. Taylor, D. A. R. Dalvit, and H. T. Chen, “Terahertz metamaterials for linear polarization conversion and anomalous refraction,” Science 340(6138), 1304–1307 (2013).
[Crossref] [PubMed]

H. T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
[Crossref]

Bardou, N.

C. Tardieu, T. Estruch, G. Vincent, J. Jaeck, N. Bardou, S. Collin, and R. Haïdar, “Extraordinary optical extinctions through dual metallic gratings,” Opt. Lett. 40(4), 661–664 (2015).
[Crossref] [PubMed]

S. Collin, G. Vincent, R. Haïdar, N. Bardou, S. Rommeluère, and J. L. Pelouard, “Nearly perfect Fano transmission resonances through nanoslits drilled in a metallic membrane,” Phys. Rev. Lett. 104(2), 027401 (2010).
[Crossref] [PubMed]

R. Haïdar, G. Vincent, S. Collin, N. Bardou, N. Guérineau, J. Deschamps, and J. L. Pelouard, “Free-standing subwavelength metallic gratings for snapshot multispectral imaging,” Appl. Phys. Lett. 96(22), 221104 (2010).
[Crossref]

Barnard, E. S.

L. Verslegers, P. B. Catrysse, Z. Yu, J. S. White, E. S. Barnard, M. L. Brongersma, and S. Fan, “Planar lenses based on nanoscale slit arrays in a metallic film,” Nano Lett. 9(1), 235–238 (2009).
[Crossref] [PubMed]

Barnes, W. L.

W. L. Barnes, A. Dereux, and T. W. Ebbesen, “Surface plasmon subwavelength optics,” Nature 424(6950), 824–830 (2003).
[Crossref] [PubMed]

Bouchon, P.

Bower, J. E.

Brongersma, M. L.

L. Verslegers, P. B. Catrysse, Z. Yu, J. S. White, E. S. Barnard, M. L. Brongersma, and S. Fan, “Planar lenses based on nanoscale slit arrays in a metallic film,” Nano Lett. 9(1), 235–238 (2009).
[Crossref] [PubMed]

Cai, W.

Cao, X.

J. Wang, Q. Fan, S. Zhang, Z. Zhang, H. Zhang, Y. Liang, X. Cao, and T. Xu, “Ultra-thin plasmonic color filters incorporating free-standing resonant membrane waveguides with high transmission efficiency,” Appl. Phys. Lett. 110(3), 031110 (2017).
[Crossref]

Cao, X. W.

Carr, D. W.

Catrysse, P. B.

L. Verslegers, P. B. Catrysse, Z. Yu, J. S. White, E. S. Barnard, M. L. Brongersma, and S. Fan, “Planar lenses based on nanoscale slit arrays in a metallic film,” Nano Lett. 9(1), 235–238 (2009).
[Crossref] [PubMed]

Chan, C. T.

Chan, H. B.

Chang, C. C.

L. Huang, C. C. Chang, B. Zeng, J. Nogan, S. N. Luo, A. J. Taylor, A. K. Azad, and H. T. Chen, “Bilayer Metasurfaces for Dual-and Broadband Optical Antireflection,” ACS Photonics 4(9), 2111–2116 (2017).
[Crossref]

Chen, H.

W. Gao, H. M. Leung, Y. Li, H. Chen, and W. Y. Tam, “Circular dichroism in double-layer metallic crossed-gratings,” J. Opt. 13(11), 115101 (2011).
[Crossref]

Chen, H. T.

L. Huang, C. C. Chang, B. Zeng, J. Nogan, S. N. Luo, A. J. Taylor, A. K. Azad, and H. T. Chen, “Bilayer Metasurfaces for Dual-and Broadband Optical Antireflection,” ACS Photonics 4(9), 2111–2116 (2017).
[Crossref]

N. K. Grady, J. E. Heyes, D. R. Chowdhury, Y. Zeng, M. T. Reiten, A. K. Azad, A. J. Taylor, D. A. R. Dalvit, and H. T. Chen, “Terahertz metamaterials for linear polarization conversion and anomalous refraction,” Science 340(6138), 1304–1307 (2013).
[Crossref] [PubMed]

H. T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
[Crossref]

H. T. Chen, W. J. Padilla, J. M. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

Chen, J.

H. X. Cui, X. W. Cao, M. Kang, T. F. Li, M. Yang, T. J. Guo, Q. H. Guo, and J. Chen, “Exceptional points in extraordinary optical transmission through dual subwavelength metallic gratings,” Opt. Express 21(11), 13368–13379 (2013).
[Crossref] [PubMed]

J. Xu, C. Cheng, M. Kang, J. Chen, Z. Zheng, Y. X. Fan, and H. T. Wang, “Unidirectional optical transmission in dual-metal gratings in the absence of anisotropic and nonlinear materials,” Opt. Lett. 36(10), 1905–1907 (2011).
[Crossref] [PubMed]

C. Cheng, J. Chen, D. J. Shi, Q. Y. Wu, F. F. Ren, J. Xu, Y. X. Fan, J. P. Ding, and H. T. Wang, “Physical mechanism of extraordinary electromagnetic transmission in dual-metallic grating structures,” Phys. Rev. B 78(7), 075406 (2008).
[Crossref]

C. Cheng, J. Chen, Q. Y. Wu, F. F. Ren, J. Xu, Y. X. Fan, and H. T. Wang, “Controllable electromagnetic transmission based on dual-metallic grating structures composed of subwavelength slits,” Appl. Phys. Lett. 91(11), 111111 (2007).
[Crossref]

Cheng, C.

J. Xu, C. Cheng, M. Kang, J. Chen, Z. Zheng, Y. X. Fan, and H. T. Wang, “Unidirectional optical transmission in dual-metal gratings in the absence of anisotropic and nonlinear materials,” Opt. Lett. 36(10), 1905–1907 (2011).
[Crossref] [PubMed]

C. Cheng, J. Chen, D. J. Shi, Q. Y. Wu, F. F. Ren, J. Xu, Y. X. Fan, J. P. Ding, and H. T. Wang, “Physical mechanism of extraordinary electromagnetic transmission in dual-metallic grating structures,” Phys. Rev. B 78(7), 075406 (2008).
[Crossref]

C. Cheng, J. Chen, Q. Y. Wu, F. F. Ren, J. Xu, Y. X. Fan, and H. T. Wang, “Controllable electromagnetic transmission based on dual-metallic grating structures composed of subwavelength slits,” Appl. Phys. Lett. 91(11), 111111 (2007).
[Crossref]

Chettiar, U. K.

Chong, C. T.

B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater. 9(9), 707–715 (2010).
[Crossref] [PubMed]

Chowdhury, D. R.

N. K. Grady, J. E. Heyes, D. R. Chowdhury, Y. Zeng, M. T. Reiten, A. K. Azad, A. J. Taylor, D. A. R. Dalvit, and H. T. Chen, “Terahertz metamaterials for linear polarization conversion and anomalous refraction,” Science 340(6138), 1304–1307 (2013).
[Crossref] [PubMed]

Christ, A.

A. Christ, O. J. Martin, Y. Ekinci, N. A. Gippius, and S. G. Tikhodeev, “Symmetry breaking in a plasmonic metamaterial at optical wavelength,” Nano Lett. 8(8), 2171–2175 (2008).
[Crossref] [PubMed]

Cich, M. J.

H. T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
[Crossref]

Cirelli, R. A.

Collin, S.

C. Tardieu, T. Estruch, G. Vincent, J. Jaeck, N. Bardou, S. Collin, and R. Haïdar, “Extraordinary optical extinctions through dual metallic gratings,” Opt. Lett. 40(4), 661–664 (2015).
[Crossref] [PubMed]

E. Sakat, S. Héron, P. Bouchon, G. Vincent, F. Pardo, S. Collin, J.-L. Pelouard, and R. Haïdar, “Metal-dielectric bi-atomic structure for angular-tolerant spectral filtering,” Opt. Lett. 38(4), 425–427 (2013).
[Crossref] [PubMed]

R. Haïdar, G. Vincent, S. Collin, N. Bardou, N. Guérineau, J. Deschamps, and J. L. Pelouard, “Free-standing subwavelength metallic gratings for snapshot multispectral imaging,” Appl. Phys. Lett. 96(22), 221104 (2010).
[Crossref]

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Pardo, F.

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[Crossref] [PubMed]

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[Crossref]

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[Crossref] [PubMed]

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Thio, T.

T. W. Ebbesen, H. Lezec, H. Ghaemi, T. Thio, and P. Wolff, “Extraordinary optical transmission through sub-wavelength hole arrays,” Nature 391(6668), 667–669 (1998).
[Crossref]

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A. Christ, O. J. Martin, Y. Ekinci, N. A. Gippius, and S. G. Tikhodeev, “Symmetry breaking in a plasmonic metamaterial at optical wavelength,” Nano Lett. 8(8), 2171–2175 (2008).
[Crossref] [PubMed]

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L. Verslegers, P. B. Catrysse, Z. Yu, J. S. White, E. S. Barnard, M. L. Brongersma, and S. Fan, “Planar lenses based on nanoscale slit arrays in a metallic film,” Nano Lett. 9(1), 235–238 (2009).
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C. Tardieu, T. Estruch, G. Vincent, J. Jaeck, N. Bardou, S. Collin, and R. Haïdar, “Extraordinary optical extinctions through dual metallic gratings,” Opt. Lett. 40(4), 661–664 (2015).
[Crossref] [PubMed]

E. Sakat, S. Héron, P. Bouchon, G. Vincent, F. Pardo, S. Collin, J.-L. Pelouard, and R. Haïdar, “Metal-dielectric bi-atomic structure for angular-tolerant spectral filtering,” Opt. Lett. 38(4), 425–427 (2013).
[Crossref] [PubMed]

S. Collin, G. Vincent, R. Haïdar, N. Bardou, S. Rommeluère, and J. L. Pelouard, “Nearly perfect Fano transmission resonances through nanoslits drilled in a metallic membrane,” Phys. Rev. Lett. 104(2), 027401 (2010).
[Crossref] [PubMed]

R. Haïdar, G. Vincent, S. Collin, N. Bardou, N. Guérineau, J. Deschamps, and J. L. Pelouard, “Free-standing subwavelength metallic gratings for snapshot multispectral imaging,” Appl. Phys. Lett. 96(22), 221104 (2010).
[Crossref]

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J. Xu, C. Cheng, M. Kang, J. Chen, Z. Zheng, Y. X. Fan, and H. T. Wang, “Unidirectional optical transmission in dual-metal gratings in the absence of anisotropic and nonlinear materials,” Opt. Lett. 36(10), 1905–1907 (2011).
[Crossref] [PubMed]

C. Cheng, J. Chen, D. J. Shi, Q. Y. Wu, F. F. Ren, J. Xu, Y. X. Fan, J. P. Ding, and H. T. Wang, “Physical mechanism of extraordinary electromagnetic transmission in dual-metallic grating structures,” Phys. Rev. B 78(7), 075406 (2008).
[Crossref]

C. Cheng, J. Chen, Q. Y. Wu, F. F. Ren, J. Xu, Y. X. Fan, and H. T. Wang, “Controllable electromagnetic transmission based on dual-metallic grating structures composed of subwavelength slits,” Appl. Phys. Lett. 91(11), 111111 (2007).
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J. Wang, Q. Fan, S. Zhang, Z. Zhang, H. Zhang, Y. Liang, X. Cao, and T. Xu, “Ultra-thin plasmonic color filters incorporating free-standing resonant membrane waveguides with high transmission efficiency,” Appl. Phys. Lett. 110(3), 031110 (2017).
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White, J. S.

L. Verslegers, P. B. Catrysse, Z. Yu, J. S. White, E. S. Barnard, M. L. Brongersma, and S. Fan, “Planar lenses based on nanoscale slit arrays in a metallic film,” Nano Lett. 9(1), 235–238 (2009).
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T. W. Ebbesen, H. Lezec, H. Ghaemi, T. Thio, and P. Wolff, “Extraordinary optical transmission through sub-wavelength hole arrays,” Nature 391(6668), 667–669 (1998).
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Wu, Q. Y.

C. Cheng, J. Chen, D. J. Shi, Q. Y. Wu, F. F. Ren, J. Xu, Y. X. Fan, J. P. Ding, and H. T. Wang, “Physical mechanism of extraordinary electromagnetic transmission in dual-metallic grating structures,” Phys. Rev. B 78(7), 075406 (2008).
[Crossref]

C. Cheng, J. Chen, Q. Y. Wu, F. F. Ren, J. Xu, Y. X. Fan, and H. T. Wang, “Controllable electromagnetic transmission based on dual-metallic grating structures composed of subwavelength slits,” Appl. Phys. Lett. 91(11), 111111 (2007).
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Xu, J.

J. Xu, C. Cheng, M. Kang, J. Chen, Z. Zheng, Y. X. Fan, and H. T. Wang, “Unidirectional optical transmission in dual-metal gratings in the absence of anisotropic and nonlinear materials,” Opt. Lett. 36(10), 1905–1907 (2011).
[Crossref] [PubMed]

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[Crossref]

C. Cheng, J. Chen, Q. Y. Wu, F. F. Ren, J. Xu, Y. X. Fan, and H. T. Wang, “Controllable electromagnetic transmission based on dual-metallic grating structures composed of subwavelength slits,” Appl. Phys. Lett. 91(11), 111111 (2007).
[Crossref]

Xu, T.

J. Wang, Q. Fan, S. Zhang, Z. Zhang, H. Zhang, Y. Liang, X. Cao, and T. Xu, “Ultra-thin plasmonic color filters incorporating free-standing resonant membrane waveguides with high transmission efficiency,” Appl. Phys. Lett. 110(3), 031110 (2017).
[Crossref]

T. Xu and H. J. Lezec, “Visible-frequency asymmetric transmission devices incorporating a hyperbolic metamaterial,” Nat. Commun. 5, 4141 (2014).
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Yavorskiy, D.

Yoon, Y. T.

Y. T. Yoon, C. H. Park, and S. S. Lee, “Highly efficient color filter incorporating a thin metal-dielectric resonant structure,” Appl. Phys. Express 5(2), 022501 (2012).
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L. Verslegers, P. B. Catrysse, Z. Yu, J. S. White, E. S. Barnard, M. L. Brongersma, and S. Fan, “Planar lenses based on nanoscale slit arrays in a metallic film,” Nano Lett. 9(1), 235–238 (2009).
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Zapata Rodríguez, C. J.

Zeng, B.

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N. K. Grady, J. E. Heyes, D. R. Chowdhury, Y. Zeng, M. T. Reiten, A. K. Azad, A. J. Taylor, D. A. R. Dalvit, and H. T. Chen, “Terahertz metamaterials for linear polarization conversion and anomalous refraction,” Science 340(6138), 1304–1307 (2013).
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J. Wang, Q. Fan, S. Zhang, Z. Zhang, H. Zhang, Y. Liang, X. Cao, and T. Xu, “Ultra-thin plasmonic color filters incorporating free-standing resonant membrane waveguides with high transmission efficiency,” Appl. Phys. Lett. 110(3), 031110 (2017).
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J. Wang, Q. Fan, S. Zhang, Z. Zhang, H. Zhang, Y. Liang, X. Cao, and T. Xu, “Ultra-thin plasmonic color filters incorporating free-standing resonant membrane waveguides with high transmission efficiency,” Appl. Phys. Lett. 110(3), 031110 (2017).
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J. Wang, Q. Fan, S. Zhang, Z. Zhang, H. Zhang, Y. Liang, X. Cao, and T. Xu, “Ultra-thin plasmonic color filters incorporating free-standing resonant membrane waveguides with high transmission efficiency,” Appl. Phys. Lett. 110(3), 031110 (2017).
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Zheludev, N. I.

B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater. 9(9), 707–715 (2010).
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H. T. Chen, W. J. Padilla, J. M. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
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ACS Photonics (1)

L. Huang, C. C. Chang, B. Zeng, J. Nogan, S. N. Luo, A. J. Taylor, A. K. Azad, and H. T. Chen, “Bilayer Metasurfaces for Dual-and Broadband Optical Antireflection,” ACS Photonics 4(9), 2111–2116 (2017).
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Y. T. Yoon, C. H. Park, and S. S. Lee, “Highly efficient color filter incorporating a thin metal-dielectric resonant structure,” Appl. Phys. Express 5(2), 022501 (2012).
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J. Wang, Q. Fan, S. Zhang, Z. Zhang, H. Zhang, Y. Liang, X. Cao, and T. Xu, “Ultra-thin plasmonic color filters incorporating free-standing resonant membrane waveguides with high transmission efficiency,” Appl. Phys. Lett. 110(3), 031110 (2017).
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R. Haïdar, G. Vincent, S. Collin, N. Bardou, N. Guérineau, J. Deschamps, and J. L. Pelouard, “Free-standing subwavelength metallic gratings for snapshot multispectral imaging,” Appl. Phys. Lett. 96(22), 221104 (2010).
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Z. Marcet, H. B. Chan, D. W. Carr, J. E. Bower, R. A. Cirelli, F. Klemens, W. M. Mansfield, J. F. Miner, C. S. Pai, and I. I. Kravchenko, “A half wave retarder made of bilayer subwavelength metallic apertures,” Appl. Phys. Lett. 98(15), 151107 (2011).
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W. Gao, H. M. Leung, Y. Li, H. Chen, and W. Y. Tam, “Circular dichroism in double-layer metallic crossed-gratings,” J. Opt. 13(11), 115101 (2011).
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Nano Lett. (2)

A. Christ, O. J. Martin, Y. Ekinci, N. A. Gippius, and S. G. Tikhodeev, “Symmetry breaking in a plasmonic metamaterial at optical wavelength,” Nano Lett. 8(8), 2171–2175 (2008).
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T. Xu and H. J. Lezec, “Visible-frequency asymmetric transmission devices incorporating a hyperbolic metamaterial,” Nat. Commun. 5, 4141 (2014).
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Nat. Mater. (1)

B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater. 9(9), 707–715 (2010).
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H. T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
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Opt. Express (4)

Opt. Lett. (8)

J. Xu, C. Cheng, M. Kang, J. Chen, Z. Zheng, Y. X. Fan, and H. T. Wang, “Unidirectional optical transmission in dual-metal gratings in the absence of anisotropic and nonlinear materials,” Opt. Lett. 36(10), 1905–1907 (2011).
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Z. Marcet, Z. H. Hang, C. T. Chan, I. Kravchenko, J. E. Bower, R. A. Cirelli, F. Klemens, W. M. Mansfield, J. F. Miner, C. S. Pai, and H. B. Chan, “Optical transmission through double-layer, laterally shifted metallic subwavelength hole arrays,” Opt. Lett. 35(13), 2124–2126 (2010).
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C. Cheng, J. Chen, D. J. Shi, Q. Y. Wu, F. F. Ren, J. Xu, Y. X. Fan, J. P. Ding, and H. T. Wang, “Physical mechanism of extraordinary electromagnetic transmission in dual-metallic grating structures,” Phys. Rev. B 78(7), 075406 (2008).
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S. Collin, G. Vincent, R. Haïdar, N. Bardou, S. Rommeluère, and J. L. Pelouard, “Nearly perfect Fano transmission resonances through nanoslits drilled in a metallic membrane,” Phys. Rev. Lett. 104(2), 027401 (2010).
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Science (1)

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Figures (5)

Fig. 1
Fig. 1 (a) Schematic representation of the free-standing plasmonic cascade grating. The top and bottom gratings are cascaded by the middle Si3N4 thin layer. (b) The cross-sectional SEM image of the fabricated freestanding membrane revealing good alignment between top and bottom gratings. Scale bar: 400 nm.
Fig. 2
Fig. 2 (a) The fabricated flow diagram of the free-standing plasmonic cascade grating structure. (b) The photos of front and back sides of Si3N4 membrane coated with Al layer. The Si3N4 membrane is supported by a Si substrate. (c) The SEM images of front and back sides of plasmonic cascade grating. The alignment markers are indicated in SEM images. (d) A back-view optical micrograph of the fabricated chip with front side illumination.
Fig. 3
Fig. 3 (a) Experimentally measured and (b) numerical simulated transmission and reflection spectra of the plasmonic cascade grating.
Fig. 4
Fig. 4 Calculated magnetic field amplitude (|H|/|H0|) profiles at the wavelengths of (a) 475 nm and (b) 650 nm corresponding two transmission peaks. The grey arrows indicate the electric displacement.
Fig. 5
Fig. 5 Calculated transmission diagrams as a function of incident angle and wavelength for the free-standing (a) double-layer cascade grating and (b) single-layer grating. The influence of (c) the lateral displacement d between top and bottom metallic gratings and (d) the thickness of Si3N4 membrane H on two resonant peaks.

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