Abstract

Ru/B4C multilayer mirrors are used for hard X-ray monochromators with moderate spectral resolution and high integral flux. To overcome the problem of large compressive stress inherent in Ru/B4C multilayers, a reactive sputtering technique using a mixture working gas of argon and nitrogen with different partial pressures was tested, and the fabricated multilayers had a period of 3 nm. The intrinsic stress was essentially reduced after nitridation and relaxed to zero value at approximately 15% partial pressure of nitrogen in the working gas. Interface roughness was slightly increased which can be caused by the polycrystalline structure inside the nitridated samples. More importantly, the nitridated multilayers showed an enhanced reflectance (67% at 8.04 keV photon energy) as compared with the one fabricated with pure Ar (54%). The structure analysis with transmission electron microscopy and X-ray photoelectron spectroscopy demonstrated that nitrogen incorporated into a multilayer structure was mostly located in the B4C layers forming BN compounds, which suppressed the diffusion of boron, stabilized the interfaces and enhanced the reflectance.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Full Article  |  PDF Article
OSA Recommended Articles
Nitridated Pd/B4C multilayer mirrors for soft X-ray region: internal structure and aging effects

Yiwen Wang, Qiushi Huang, Qiang Yi, Igor V. Kozhevnikov, Runze Qi, Mingwu Wen, Philippe Jonnard, Jinshuai Zhang, Angelo Giglia, Zhong Zhang, and Zhanshan Wang
Opt. Express 25(7) 7749-7760 (2017)

Improvement of interface structure and polarization performance of Co/C multilayers by incorporation of nitrogen

Mingwu Wen, Qiushi Huang, Shuang Ma, Wenbin Li, Rui She, Jichang Peng, Angelo Giglia, Igor V. Kozhevnikov, Hua Feng, Zhong Zhang, and Zhanshan Wang
Opt. Express 24(24) 27166-27176 (2016)

Enhancement of soft X-ray reflectivity and interface stability in nitridated Pd/Y multilayer mirrors

Dechao Xu, Qiushi Huang, Yiwen Wang, Pin Li, Mingwu Wen, Philippe Jonnard, Angelo Giglia, Igor V. Kozhevnikov, Kun Wang, Zhong Zhang, and Zhanshan Wang
Opt. Express 23(26) 33018-33026 (2015)

References

  • View by:
  • |
  • |
  • |

  1. A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
    [Crossref] [PubMed]
  2. R. Barrett, R. Baker, P. Cloetens, C. Morawe, R. Tucoulou, and A. Vivo, “Reflective Optics for Hard X-ray Nanofocusing Applications at the ESRF,” Synchrotron Radiat. News 29(4), 10–15 (2016).
    [Crossref]
  3. A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
    [Crossref] [PubMed]
  4. R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
    [Crossref]
  5. H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
    [Crossref]
  6. E. Ziegler, J. Hoszowska, T. Bigault, L. Peverini, J. Y. Massonnat, and R. Hustache, “The ESRF BM05 Metrology Beamline: Instrumentation and Performance Upgrade,” AIP Conf. Proc. 705, 436–439 (2004).
    [Crossref]
  7. K. J. S. Sawhney, I. P. Dolbnya, S. M. Scott, M. K. Tiwari, G. M. Preece, S. G. Alcock, and A. W. Malandain, “A double multilayer monochromator for the B16 Test beamline at the Diamond Light Source,” Proc. SPIE 8139, 813908 (2011).
    [Crossref]
  8. T. Nguyen, R. Gronsky, and J. B. Kortright, “Microstructure-roughness interlation in Ru/C and Ru/B4C X-ray multilayers,” Proc. MRS 280, 161–166 (1993).
    [Crossref]
  9. C. Morawe, C. Borel, E. Ziegler, and J. C. Peffen, “Application of double gradient multilayers for focusing,” Proc. SPIE 5537, 115–126 (2004).
    [Crossref]
  10. D. L. Windt, “Reduction of stress and roughness by reactive sputtering in W/B4C X-ray multilayer films,” Proc. SPIE 6688, 66880R (2007).
    [Crossref]
  11. Y. Wang, Q. Huang, Q. Yi, I. V. Kozhevnikov, R. Qi, M. Wen, P. Jonnard, J. Zhang, A. Giglia, Z. Zhang, and Z. Wang, “Nitridated Pd/B4C multilayer mirrors for soft X-ray region: internal structure and aging effects,” Opt. Express 25(7), 7749–7760 (2017).
    [Crossref] [PubMed]
  12. C. Borel, C. Morawe, A. Rommeveaux, C. Huguenot, and J.-C. Peffen, “Reflectivity and stress responses of multilayers upon isothermal treatment,” Proc. SPIE 6317, 63170I (2006).
    [Crossref]
  13. M. Eriksson, J. F. van der Veen, and C. Quitmann, “Diffraction-limited storage rings - a window to the science of tomorrow,” J. Synchrotron Radiat. 21(5), 837–842 (2014).
    [Crossref] [PubMed]
  14. C. Morawe, J. C. Peffen, and K. Friedrich, “In-situ stress measurements of sputtered multilayers,” Proc. SPIE 7802, 78020B (2010).
    [Crossref]
  15. C. Borel, C. Morawe, E. Ziegler, T. Bigault, J. Y. Massonnat, J. C. Peffen, and E. Debourg, “In situ study of multilayer reflectivity upon heat treatment under synchrotron radiation,” Proc. SPIE 5918, 591801 (2005).
    [Crossref]
  16. I. V. Kozhevnikov, “Analysis of X-ray scattering from a rough multilayer mirror in the first-order perturbation theory,” Nucl. Instrum. Methods A 498(1-3), 482–495 (2003).
    [Crossref]
  17. Q. Huang, J. Zhang, R. Qi, Y. Yang, F. Wang, J. Zhu, Z. Zhang, and Z. Wang, “Structure and stress studies of low temperature annealed W/Si multilayers for the X-ray telescope,” Opt. Express 24(14), 15620–15630 (2016).
    [Crossref] [PubMed]
  18. L. B. Freund and S. Suresh, “Thin Film Materials-Stress, Defect Formation and Surface Evolution” (Cambridge University, 2003).
  19. E. Cattaruzzaa, G. Battaglina, P. Rielloa, D. Cristoforib, and M. Tamisari, “On the synthesis of a compound with positive enthalpy of formation:Zinc-blende-like RuN thin films obtained by rf-magnetron sputtering,” Appl. Surf. Sci. 320, 863–870 (2014).
    [Crossref]
  20. M. G. Moreno-Armentaa, J. Diaza, A. Martinez-Ruizb, and G. Sotoa, “Synthesis of cubic ruthenium nitride by reactive pulsed laser ablation,” J. Phys. Chem. Solids 68(10), 1989–1994 (2007).
    [Crossref]
  21. NIST X-ray Photoelectron Spectroscopy Database, https://srdata.nist.gov/xps/EngElmSrchQuery.aspx?EType=PE&CSOpt=Retri_ex_dat&Elm=Ru
  22. P. Li, Q. Huang, L. Jiang, W. Li, J. Fei, J. Zhu, Z. Zhang, and Z. Wang, “Structure and depth profile composition analysis of Cr/(B4C)/V/(B4C) multilayer for water window application,” Vacuum 128, 85–90 (2016).
    [Crossref]
  23. A. Prakash and K. B. Sundaram, “Optical and XPS studies of BCN thin films by co-sputtering of B4C and BN targets,” Appl. Surf. Sci. 396, 484–491 (2017).
    [Crossref]
  24. D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon Nitride Deposited Using Energetic Species: A Two-Phase System,” Phys. Rev. Lett. 73(1), 118–121 (1994).
    [Crossref] [PubMed]
  25. M. Wen, Q. Huang, S. Ma, W. Li, R. She, J. Peng, A. Giglia, I. V. Kozhevnikov, H. Feng, Z. Zhang, and Z. Wang, “Improvement of interface structure and polarization performance of Co/C multilayers by incorporation of nitrogen,” Opt. Express 24(24), 27166–27176 (2016).
    [Crossref] [PubMed]

2017 (2)

2016 (4)

Q. Huang, J. Zhang, R. Qi, Y. Yang, F. Wang, J. Zhu, Z. Zhang, and Z. Wang, “Structure and stress studies of low temperature annealed W/Si multilayers for the X-ray telescope,” Opt. Express 24(14), 15620–15630 (2016).
[Crossref] [PubMed]

P. Li, Q. Huang, L. Jiang, W. Li, J. Fei, J. Zhu, Z. Zhang, and Z. Wang, “Structure and depth profile composition analysis of Cr/(B4C)/V/(B4C) multilayer for water window application,” Vacuum 128, 85–90 (2016).
[Crossref]

M. Wen, Q. Huang, S. Ma, W. Li, R. She, J. Peng, A. Giglia, I. V. Kozhevnikov, H. Feng, Z. Zhang, and Z. Wang, “Improvement of interface structure and polarization performance of Co/C multilayers by incorporation of nitrogen,” Opt. Express 24(24), 27166–27176 (2016).
[Crossref] [PubMed]

R. Barrett, R. Baker, P. Cloetens, C. Morawe, R. Tucoulou, and A. Vivo, “Reflective Optics for Hard X-ray Nanofocusing Applications at the ESRF,” Synchrotron Radiat. News 29(4), 10–15 (2016).
[Crossref]

2014 (2)

M. Eriksson, J. F. van der Veen, and C. Quitmann, “Diffraction-limited storage rings - a window to the science of tomorrow,” J. Synchrotron Radiat. 21(5), 837–842 (2014).
[Crossref] [PubMed]

E. Cattaruzzaa, G. Battaglina, P. Rielloa, D. Cristoforib, and M. Tamisari, “On the synthesis of a compound with positive enthalpy of formation:Zinc-blende-like RuN thin films obtained by rf-magnetron sputtering,” Appl. Surf. Sci. 320, 863–870 (2014).
[Crossref]

2013 (1)

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

2011 (1)

K. J. S. Sawhney, I. P. Dolbnya, S. M. Scott, M. K. Tiwari, G. M. Preece, S. G. Alcock, and A. W. Malandain, “A double multilayer monochromator for the B16 Test beamline at the Diamond Light Source,” Proc. SPIE 8139, 813908 (2011).
[Crossref]

2010 (2)

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

C. Morawe, J. C. Peffen, and K. Friedrich, “In-situ stress measurements of sputtered multilayers,” Proc. SPIE 7802, 78020B (2010).
[Crossref]

2009 (1)

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

2007 (2)

D. L. Windt, “Reduction of stress and roughness by reactive sputtering in W/B4C X-ray multilayer films,” Proc. SPIE 6688, 66880R (2007).
[Crossref]

M. G. Moreno-Armentaa, J. Diaza, A. Martinez-Ruizb, and G. Sotoa, “Synthesis of cubic ruthenium nitride by reactive pulsed laser ablation,” J. Phys. Chem. Solids 68(10), 1989–1994 (2007).
[Crossref]

2006 (2)

C. Borel, C. Morawe, A. Rommeveaux, C. Huguenot, and J.-C. Peffen, “Reflectivity and stress responses of multilayers upon isothermal treatment,” Proc. SPIE 6317, 63170I (2006).
[Crossref]

A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
[Crossref] [PubMed]

2005 (1)

C. Borel, C. Morawe, E. Ziegler, T. Bigault, J. Y. Massonnat, J. C. Peffen, and E. Debourg, “In situ study of multilayer reflectivity upon heat treatment under synchrotron radiation,” Proc. SPIE 5918, 591801 (2005).
[Crossref]

2004 (2)

C. Morawe, C. Borel, E. Ziegler, and J. C. Peffen, “Application of double gradient multilayers for focusing,” Proc. SPIE 5537, 115–126 (2004).
[Crossref]

E. Ziegler, J. Hoszowska, T. Bigault, L. Peverini, J. Y. Massonnat, and R. Hustache, “The ESRF BM05 Metrology Beamline: Instrumentation and Performance Upgrade,” AIP Conf. Proc. 705, 436–439 (2004).
[Crossref]

2003 (1)

I. V. Kozhevnikov, “Analysis of X-ray scattering from a rough multilayer mirror in the first-order perturbation theory,” Nucl. Instrum. Methods A 498(1-3), 482–495 (2003).
[Crossref]

1994 (1)

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon Nitride Deposited Using Energetic Species: A Two-Phase System,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

1993 (1)

T. Nguyen, R. Gronsky, and J. B. Kortright, “Microstructure-roughness interlation in Ru/C and Ru/B4C X-ray multilayers,” Proc. MRS 280, 161–166 (1993).
[Crossref]

Al-Bayati, A. H.

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon Nitride Deposited Using Energetic Species: A Two-Phase System,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

Alcock, S. G.

K. J. S. Sawhney, I. P. Dolbnya, S. M. Scott, M. K. Tiwari, G. M. Preece, S. G. Alcock, and A. W. Malandain, “A double multilayer monochromator for the B16 Test beamline at the Diamond Light Source,” Proc. SPIE 8139, 813908 (2011).
[Crossref]

Bajt, S.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Baker, R.

R. Barrett, R. Baker, P. Cloetens, C. Morawe, R. Tucoulou, and A. Vivo, “Reflective Optics for Hard X-ray Nanofocusing Applications at the ESRF,” Synchrotron Radiat. News 29(4), 10–15 (2016).
[Crossref]

Barrett, R.

R. Barrett, R. Baker, P. Cloetens, C. Morawe, R. Tucoulou, and A. Vivo, “Reflective Optics for Hard X-ray Nanofocusing Applications at the ESRF,” Synchrotron Radiat. News 29(4), 10–15 (2016).
[Crossref]

Battaglina, G.

E. Cattaruzzaa, G. Battaglina, P. Rielloa, D. Cristoforib, and M. Tamisari, “On the synthesis of a compound with positive enthalpy of formation:Zinc-blende-like RuN thin films obtained by rf-magnetron sputtering,” Appl. Surf. Sci. 320, 863–870 (2014).
[Crossref]

Baumbach, T.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Bigault, T.

C. Borel, C. Morawe, E. Ziegler, T. Bigault, J. Y. Massonnat, J. C. Peffen, and E. Debourg, “In situ study of multilayer reflectivity upon heat treatment under synchrotron radiation,” Proc. SPIE 5918, 591801 (2005).
[Crossref]

E. Ziegler, J. Hoszowska, T. Bigault, L. Peverini, J. Y. Massonnat, and R. Hustache, “The ESRF BM05 Metrology Beamline: Instrumentation and Performance Upgrade,” AIP Conf. Proc. 705, 436–439 (2004).
[Crossref]

Bilderback, D. H.

A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
[Crossref] [PubMed]

Borel, C.

C. Borel, C. Morawe, A. Rommeveaux, C. Huguenot, and J.-C. Peffen, “Reflectivity and stress responses of multilayers upon isothermal treatment,” Proc. SPIE 6317, 63170I (2006).
[Crossref]

C. Borel, C. Morawe, E. Ziegler, T. Bigault, J. Y. Massonnat, J. C. Peffen, and E. Debourg, “In situ study of multilayer reflectivity upon heat treatment under synchrotron radiation,” Proc. SPIE 5918, 591801 (2005).
[Crossref]

C. Morawe, C. Borel, E. Ziegler, and J. C. Peffen, “Application of double gradient multilayers for focusing,” Proc. SPIE 5537, 115–126 (2004).
[Crossref]

Bornath, T.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Boyd, K. J.

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon Nitride Deposited Using Energetic Species: A Two-Phase System,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

Budil, K.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Burian, T.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Cattaruzzaa, E.

E. Cattaruzzaa, G. Battaglina, P. Rielloa, D. Cristoforib, and M. Tamisari, “On the synthesis of a compound with positive enthalpy of formation:Zinc-blende-like RuN thin films obtained by rf-magnetron sputtering,” Appl. Surf. Sci. 320, 863–870 (2014).
[Crossref]

Cauble, R. C.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Chalupsky, J.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Chapman, H.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Cihelka, J.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Cloetens, P.

R. Barrett, R. Baker, P. Cloetens, C. Morawe, R. Tucoulou, and A. Vivo, “Reflective Optics for Hard X-ray Nanofocusing Applications at the ESRF,” Synchrotron Radiat. News 29(4), 10–15 (2016).
[Crossref]

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Cristoforib, D.

E. Cattaruzzaa, G. Battaglina, P. Rielloa, D. Cristoforib, and M. Tamisari, “On the synthesis of a compound with positive enthalpy of formation:Zinc-blende-like RuN thin films obtained by rf-magnetron sputtering,” Appl. Surf. Sci. 320, 863–870 (2014).
[Crossref]

Debourg, E.

C. Borel, C. Morawe, E. Ziegler, T. Bigault, J. Y. Massonnat, J. C. Peffen, and E. Debourg, “In situ study of multilayer reflectivity upon heat treatment under synchrotron radiation,” Proc. SPIE 5918, 591801 (2005).
[Crossref]

Diaza, J.

M. G. Moreno-Armentaa, J. Diaza, A. Martinez-Ruizb, and G. Sotoa, “Synthesis of cubic ruthenium nitride by reactive pulsed laser ablation,” J. Phys. Chem. Solids 68(10), 1989–1994 (2007).
[Crossref]

Dietsch, R.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Dolbnya, I. P.

K. J. S. Sawhney, I. P. Dolbnya, S. M. Scott, M. K. Tiwari, G. M. Preece, S. G. Alcock, and A. W. Malandain, “A double multilayer monochromator for the B16 Test beamline at the Diamond Light Source,” Proc. SPIE 8139, 813908 (2011).
[Crossref]

Döppner, T.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Düsterer, S.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Dzelzainis, T.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Eriksson, M.

M. Eriksson, J. F. van der Veen, and C. Quitmann, “Diffraction-limited storage rings - a window to the science of tomorrow,” J. Synchrotron Radiat. 21(5), 837–842 (2014).
[Crossref] [PubMed]

Fajardo, M.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Falcone, R. W.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Fäustlin, R.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Fei, J.

P. Li, Q. Huang, L. Jiang, W. Li, J. Fei, J. Zhu, Z. Zhang, and Z. Wang, “Structure and depth profile composition analysis of Cr/(B4C)/V/(B4C) multilayer for water window application,” Vacuum 128, 85–90 (2016).
[Crossref]

Feng, H.

Fontes, E.

A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
[Crossref] [PubMed]

Förster, E.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Fortmann, C.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Friedrich, K.

C. Morawe, J. C. Peffen, and K. Friedrich, “In-situ stress measurements of sputtered multilayers,” Proc. SPIE 7802, 78020B (2010).
[Crossref]

Giglia, A.

Glenzer, S. H.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Göde, S.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Gregori, G.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Grigoriev, D.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Gronsky, R.

T. Nguyen, R. Gronsky, and J. B. Kortright, “Microstructure-roughness interlation in Ru/C and Ru/B4C X-ray multilayers,” Proc. MRS 280, 161–166 (1993).
[Crossref]

Gruner, S. M.

A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
[Crossref] [PubMed]

Hachisu, Y.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Hajkova, V.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Hao, Q.

A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
[Crossref] [PubMed]

Hastings, J. B.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Heimann, P.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Helfen, L.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Holz, T.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Hoszowska, J.

E. Ziegler, J. Hoszowska, T. Bigault, L. Peverini, J. Y. Massonnat, and R. Hustache, “The ESRF BM05 Metrology Beamline: Instrumentation and Performance Upgrade,” AIP Conf. Proc. 705, 436–439 (2004).
[Crossref]

Huang, Q.

Huguenot, C.

C. Borel, C. Morawe, A. Rommeveaux, C. Huguenot, and J.-C. Peffen, “Reflectivity and stress responses of multilayers upon isothermal treatment,” Proc. SPIE 6317, 63170I (2006).
[Crossref]

Hustache, R.

E. Ziegler, J. Hoszowska, T. Bigault, L. Peverini, J. Y. Massonnat, and R. Hustache, “The ESRF BM05 Metrology Beamline: Instrumentation and Performance Upgrade,” AIP Conf. Proc. 705, 436–439 (2004).
[Crossref]

Inubushi, Y.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Ishikawa, T.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Jiang, L.

P. Li, Q. Huang, L. Jiang, W. Li, J. Fei, J. Zhu, Z. Zhang, and Z. Wang, “Structure and depth profile composition analysis of Cr/(B4C)/V/(B4C) multilayer for water window application,” Vacuum 128, 85–90 (2016).
[Crossref]

Jonnard, P.

Juha, L.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Jurek, M.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Kazimirov, A.

A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
[Crossref] [PubMed]

Khattak, F. Y.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Khorsand, A. R.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Kim, J.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Kimura, T.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Klinger, D.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Kortright, J. B.

T. Nguyen, R. Gronsky, and J. B. Kortright, “Microstructure-roughness interlation in Ru/C and Ru/B4C X-ray multilayers,” Proc. MRS 280, 161–166 (1993).
[Crossref]

Koyama, T.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Kozhevnikov, I. V.

Kozlova, M.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Krämer, M.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Krzywinski, J.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Laarmann, T.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Lee, H.-J.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Lee, R. W.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Li, P.

P. Li, Q. Huang, L. Jiang, W. Li, J. Fei, J. Zhu, Z. Zhang, and Z. Wang, “Structure and depth profile composition analysis of Cr/(B4C)/V/(B4C) multilayer for water window application,” Vacuum 128, 85–90 (2016).
[Crossref]

Li, W.

P. Li, Q. Huang, L. Jiang, W. Li, J. Fei, J. Zhu, Z. Zhang, and Z. Wang, “Structure and depth profile composition analysis of Cr/(B4C)/V/(B4C) multilayer for water window application,” Vacuum 128, 85–90 (2016).
[Crossref]

M. Wen, Q. Huang, S. Ma, W. Li, R. She, J. Peng, A. Giglia, I. V. Kozhevnikov, H. Feng, Z. Zhang, and Z. Wang, “Improvement of interface structure and polarization performance of Co/C multilayers by incorporation of nitrogen,” Opt. Express 24(24), 27166–27176 (2016).
[Crossref] [PubMed]

Ma, S.

Malandain, A. W.

K. J. S. Sawhney, I. P. Dolbnya, S. M. Scott, M. K. Tiwari, G. M. Preece, S. G. Alcock, and A. W. Malandain, “A double multilayer monochromator for the B16 Test beamline at the Diamond Light Source,” Proc. SPIE 8139, 813908 (2011).
[Crossref]

Martinez-Ruizb, A.

M. G. Moreno-Armentaa, J. Diaza, A. Martinez-Ruizb, and G. Sotoa, “Synthesis of cubic ruthenium nitride by reactive pulsed laser ablation,” J. Phys. Chem. Solids 68(10), 1989–1994 (2007).
[Crossref]

Marton, D.

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon Nitride Deposited Using Energetic Species: A Two-Phase System,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

Martynov, V. V.

A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
[Crossref] [PubMed]

Massonnat, J. Y.

C. Borel, C. Morawe, E. Ziegler, T. Bigault, J. Y. Massonnat, J. C. Peffen, and E. Debourg, “In situ study of multilayer reflectivity upon heat treatment under synchrotron radiation,” Proc. SPIE 5918, 591801 (2005).
[Crossref]

E. Ziegler, J. Hoszowska, T. Bigault, L. Peverini, J. Y. Massonnat, and R. Hustache, “The ESRF BM05 Metrology Beamline: Instrumentation and Performance Upgrade,” AIP Conf. Proc. 705, 436–439 (2004).
[Crossref]

Matsuyama, S.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Meduna, M.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Meiwes-Broer, K.-H.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Mercere, P.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Mimura, H.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Morawe, C.

R. Barrett, R. Baker, P. Cloetens, C. Morawe, R. Tucoulou, and A. Vivo, “Reflective Optics for Hard X-ray Nanofocusing Applications at the ESRF,” Synchrotron Radiat. News 29(4), 10–15 (2016).
[Crossref]

C. Morawe, J. C. Peffen, and K. Friedrich, “In-situ stress measurements of sputtered multilayers,” Proc. SPIE 7802, 78020B (2010).
[Crossref]

C. Borel, C. Morawe, A. Rommeveaux, C. Huguenot, and J.-C. Peffen, “Reflectivity and stress responses of multilayers upon isothermal treatment,” Proc. SPIE 6317, 63170I (2006).
[Crossref]

C. Borel, C. Morawe, E. Ziegler, T. Bigault, J. Y. Massonnat, J. C. Peffen, and E. Debourg, “In situ study of multilayer reflectivity upon heat treatment under synchrotron radiation,” Proc. SPIE 5918, 591801 (2005).
[Crossref]

C. Morawe, C. Borel, E. Ziegler, and J. C. Peffen, “Application of double gradient multilayers for focusing,” Proc. SPIE 5537, 115–126 (2004).
[Crossref]

Moreno-Armentaa, M. G.

M. G. Moreno-Armentaa, J. Diaza, A. Martinez-Ruizb, and G. Sotoa, “Synthesis of cubic ruthenium nitride by reactive pulsed laser ablation,” J. Phys. Chem. Solids 68(10), 1989–1994 (2007).
[Crossref]

Murphy, W. J.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Nagler, B.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Nelson, A. J.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Nguyen, T.

T. Nguyen, R. Gronsky, and J. B. Kortright, “Microstructure-roughness interlation in Ru/C and Ru/B4C X-ray multilayers,” Proc. MRS 280, 161–166 (1993).
[Crossref]

Ohashi, H.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Ohmori, H.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Peffen, J. C.

C. Morawe, J. C. Peffen, and K. Friedrich, “In-situ stress measurements of sputtered multilayers,” Proc. SPIE 7802, 78020B (2010).
[Crossref]

C. Borel, C. Morawe, E. Ziegler, T. Bigault, J. Y. Massonnat, J. C. Peffen, and E. Debourg, “In situ study of multilayer reflectivity upon heat treatment under synchrotron radiation,” Proc. SPIE 5918, 591801 (2005).
[Crossref]

C. Morawe, C. Borel, E. Ziegler, and J. C. Peffen, “Application of double gradient multilayers for focusing,” Proc. SPIE 5537, 115–126 (2004).
[Crossref]

Peffen, J.-C.

C. Borel, C. Morawe, A. Rommeveaux, C. Huguenot, and J.-C. Peffen, “Reflectivity and stress responses of multilayers upon isothermal treatment,” Proc. SPIE 6317, 63170I (2006).
[Crossref]

Peng, J.

Peverini, L.

E. Ziegler, J. Hoszowska, T. Bigault, L. Peverini, J. Y. Massonnat, and R. Hustache, “The ESRF BM05 Metrology Beamline: Instrumentation and Performance Upgrade,” AIP Conf. Proc. 705, 436–439 (2004).
[Crossref]

Platonov, Y.

A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
[Crossref] [PubMed]

Prakash, A.

A. Prakash and K. B. Sundaram, “Optical and XPS studies of BCN thin films by co-sputtering of B4C and BN targets,” Appl. Surf. Sci. 396, 484–491 (2017).
[Crossref]

Preece, G. M.

K. J. S. Sawhney, I. P. Dolbnya, S. M. Scott, M. K. Tiwari, G. M. Preece, S. G. Alcock, and A. W. Malandain, “A double multilayer monochromator for the B16 Test beamline at the Diamond Light Source,” Proc. SPIE 8139, 813908 (2011).
[Crossref]

Przystawik, A.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Qi, R.

Quitmann, C.

M. Eriksson, J. F. van der Veen, and C. Quitmann, “Diffraction-limited storage rings - a window to the science of tomorrow,” J. Synchrotron Radiat. 21(5), 837–842 (2014).
[Crossref] [PubMed]

Rabalais, J. W.

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon Nitride Deposited Using Energetic Species: A Two-Phase System,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

Rack, A.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Rack, T.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Redmer, R.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Reinholz, H.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Rielloa, P.

E. Cattaruzzaa, G. Battaglina, P. Rielloa, D. Cristoforib, and M. Tamisari, “On the synthesis of a compound with positive enthalpy of formation:Zinc-blende-like RuN thin films obtained by rf-magnetron sputtering,” Appl. Surf. Sci. 320, 863–870 (2014).
[Crossref]

Riley, D.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Riotte, M.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Rommeveaux, A.

C. Borel, C. Morawe, A. Rommeveaux, C. Huguenot, and J.-C. Peffen, “Reflectivity and stress responses of multilayers upon isothermal treatment,” Proc. SPIE 6317, 63170I (2006).
[Crossref]

Röpke, G.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Saksl, K.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Sano, Y.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Sato, T.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Sawhney, K. J. S.

K. J. S. Sawhney, I. P. Dolbnya, S. M. Scott, M. K. Tiwari, G. M. Preece, S. G. Alcock, and A. W. Malandain, “A double multilayer monochromator for the B16 Test beamline at the Diamond Light Source,” Proc. SPIE 8139, 813908 (2011).
[Crossref]

Scott, S. M.

K. J. S. Sawhney, I. P. Dolbnya, S. M. Scott, M. K. Tiwari, G. M. Preece, S. G. Alcock, and A. W. Malandain, “A double multilayer monochromator for the B16 Test beamline at the Diamond Light Source,” Proc. SPIE 8139, 813908 (2011).
[Crossref]

She, R.

Shen, Q.

A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
[Crossref] [PubMed]

Shepherd, R.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Siewert, F.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Smilgies, D. M.

A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
[Crossref] [PubMed]

Sobierajski, R.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Sotoa, G.

M. G. Moreno-Armentaa, J. Diaza, A. Martinez-Ruizb, and G. Sotoa, “Synthesis of cubic ruthenium nitride by reactive pulsed laser ablation,” J. Phys. Chem. Solids 68(10), 1989–1994 (2007).
[Crossref]

Sundaram, K. B.

A. Prakash and K. B. Sundaram, “Optical and XPS studies of BCN thin films by co-sputtering of B4C and BN targets,” Appl. Surf. Sci. 396, 484–491 (2017).
[Crossref]

Tamisari, M.

E. Cattaruzzaa, G. Battaglina, P. Rielloa, D. Cristoforib, and M. Tamisari, “On the synthesis of a compound with positive enthalpy of formation:Zinc-blende-like RuN thin films obtained by rf-magnetron sputtering,” Appl. Surf. Sci. 320, 863–870 (2014).
[Crossref]

Tanaka, T.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Thiele, R.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Tiggesbäumker, J.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Tiwari, M. K.

K. J. S. Sawhney, I. P. Dolbnya, S. M. Scott, M. K. Tiwari, G. M. Preece, S. G. Alcock, and A. W. Malandain, “A double multilayer monochromator for the B16 Test beamline at the Diamond Light Source,” Proc. SPIE 8139, 813908 (2011).
[Crossref]

Todorov, S. S.

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon Nitride Deposited Using Energetic Species: A Two-Phase System,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

Togashi, T.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Toleikis, S.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Tono, K.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Tschentscher, T.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Tucoulou, R.

R. Barrett, R. Baker, P. Cloetens, C. Morawe, R. Tucoulou, and A. Vivo, “Reflective Optics for Hard X-ray Nanofocusing Applications at the ESRF,” Synchrotron Radiat. News 29(4), 10–15 (2016).
[Crossref]

Uschmann, I.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

van der Veen, J. F.

M. Eriksson, J. F. van der Veen, and C. Quitmann, “Diffraction-limited storage rings - a window to the science of tomorrow,” J. Synchrotron Radiat. 21(5), 837–842 (2014).
[Crossref] [PubMed]

Vinko, S. M.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Vivo, A.

R. Barrett, R. Baker, P. Cloetens, C. Morawe, R. Tucoulou, and A. Vivo, “Reflective Optics for Hard X-ray Nanofocusing Applications at the ESRF,” Synchrotron Radiat. News 29(4), 10–15 (2016).
[Crossref]

Wang, F.

Wang, Y.

Wang, Z.

Wark, J. S.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Weitkamp, T.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

Wen, M.

Whitcher, T.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

White, W. E.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Windt, D. L.

D. L. Windt, “Reduction of stress and roughness by reactive sputtering in W/B4C X-ray multilayer films,” Proc. SPIE 6688, 66880R (2007).
[Crossref]

Xiao, X.

A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
[Crossref] [PubMed]

Yabashi, M.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Yamauchi, K.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Yang, Y.

Yi, Q.

Yokoyama, H.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Yumoto, H.

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Zastrau, U.

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

Zhang, J.

Zhang, Z.

Zhu, J.

P. Li, Q. Huang, L. Jiang, W. Li, J. Fei, J. Zhu, Z. Zhang, and Z. Wang, “Structure and depth profile composition analysis of Cr/(B4C)/V/(B4C) multilayer for water window application,” Vacuum 128, 85–90 (2016).
[Crossref]

Q. Huang, J. Zhang, R. Qi, Y. Yang, F. Wang, J. Zhu, Z. Zhang, and Z. Wang, “Structure and stress studies of low temperature annealed W/Si multilayers for the X-ray telescope,” Opt. Express 24(14), 15620–15630 (2016).
[Crossref] [PubMed]

Ziegler, E.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

C. Borel, C. Morawe, E. Ziegler, T. Bigault, J. Y. Massonnat, J. C. Peffen, and E. Debourg, “In situ study of multilayer reflectivity upon heat treatment under synchrotron radiation,” Proc. SPIE 5918, 591801 (2005).
[Crossref]

E. Ziegler, J. Hoszowska, T. Bigault, L. Peverini, J. Y. Massonnat, and R. Hustache, “The ESRF BM05 Metrology Beamline: Instrumentation and Performance Upgrade,” AIP Conf. Proc. 705, 436–439 (2004).
[Crossref]

C. Morawe, C. Borel, E. Ziegler, and J. C. Peffen, “Application of double gradient multilayers for focusing,” Proc. SPIE 5537, 115–126 (2004).
[Crossref]

AIP Conf. Proc. (1)

E. Ziegler, J. Hoszowska, T. Bigault, L. Peverini, J. Y. Massonnat, and R. Hustache, “The ESRF BM05 Metrology Beamline: Instrumentation and Performance Upgrade,” AIP Conf. Proc. 705, 436–439 (2004).
[Crossref]

Appl. Surf. Sci. (2)

E. Cattaruzzaa, G. Battaglina, P. Rielloa, D. Cristoforib, and M. Tamisari, “On the synthesis of a compound with positive enthalpy of formation:Zinc-blende-like RuN thin films obtained by rf-magnetron sputtering,” Appl. Surf. Sci. 320, 863–870 (2014).
[Crossref]

A. Prakash and K. B. Sundaram, “Optical and XPS studies of BCN thin films by co-sputtering of B4C and BN targets,” Appl. Surf. Sci. 396, 484–491 (2017).
[Crossref]

J. Phys. Chem. Solids (1)

M. G. Moreno-Armentaa, J. Diaza, A. Martinez-Ruizb, and G. Sotoa, “Synthesis of cubic ruthenium nitride by reactive pulsed laser ablation,” J. Phys. Chem. Solids 68(10), 1989–1994 (2007).
[Crossref]

J. Synchrotron Radiat. (3)

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduňa, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[Crossref] [PubMed]

A. Kazimirov, D. M. Smilgies, Q. Shen, X. Xiao, Q. Hao, E. Fontes, D. H. Bilderback, S. M. Gruner, Y. Platonov, and V. V. Martynov, “Multilayer X-ray optics at CHESS,” J. Synchrotron Radiat. 13(2), 204–210 (2006).
[Crossref] [PubMed]

M. Eriksson, J. F. van der Veen, and C. Quitmann, “Diffraction-limited storage rings - a window to the science of tomorrow,” J. Synchrotron Radiat. 21(5), 837–842 (2014).
[Crossref] [PubMed]

Nat. Photonics (1)

H. Yumoto, H. Mimura, T. Koyama, S. Matsuyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Tanaka, T. Kimura, H. Yokoyama, J. Kim, Y. Sano, Y. Hachisu, M. Yabashi, H. Ohashi, H. Ohmori, T. Ishikawa, and K. Yamauchi, “Focusing of X-ray free-electron laser pulses with reflective optics,” Nat. Photonics 7(1), 43–47 (2013).
[Crossref]

Nucl. Instrum. Methods A (1)

I. V. Kozhevnikov, “Analysis of X-ray scattering from a rough multilayer mirror in the first-order perturbation theory,” Nucl. Instrum. Methods A 498(1-3), 482–495 (2003).
[Crossref]

Opt. Express (3)

Phys. Rev. Lett. (1)

D. Marton, K. J. Boyd, A. H. Al-Bayati, S. S. Todorov, and J. W. Rabalais, “Carbon Nitride Deposited Using Energetic Species: A Two-Phase System,” Phys. Rev. Lett. 73(1), 118–121 (1994).
[Crossref] [PubMed]

Proc. MRS (1)

T. Nguyen, R. Gronsky, and J. B. Kortright, “Microstructure-roughness interlation in Ru/C and Ru/B4C X-ray multilayers,” Proc. MRS 280, 161–166 (1993).
[Crossref]

Proc. SPIE (7)

C. Morawe, C. Borel, E. Ziegler, and J. C. Peffen, “Application of double gradient multilayers for focusing,” Proc. SPIE 5537, 115–126 (2004).
[Crossref]

D. L. Windt, “Reduction of stress and roughness by reactive sputtering in W/B4C X-ray multilayer films,” Proc. SPIE 6688, 66880R (2007).
[Crossref]

R. W. Lee, B. Nagler, U. Zastrau, R. Fäustlin, S. M. Vinko, T. Whitcher, R. Sobierajski, J. Krzywinski, L. Juha, A. J. Nelson, S. Bajt, K. Budil, R. C. Cauble, T. Bornath, T. Burian, J. Chalupsky, H. Chapman, J. Cihelka, T. Döppner, T. Dzelzainis, S. Düsterer, M. Fajardo, E. Förster, C. Fortmann, S. H. Glenzer, S. Göde, G. Gregori, V. Hajkova, P. Heimann, M. Jurek, F. Y. Khattak, A. R. Khorsand, D. Klinger, M. Kozlova, T. Laarmann, H.-J. Lee, K.-H. Meiwes-Broer, P. Mercere, W. J. Murphy, A. Przystawik, R. Redmer, H. Reinholz, D. Riley, G. Röpke, K. Saksl, R. Thiele, J. Tiggesbäumker, S. Toleikis, T. Tschentscher, I. Uschmann, R. W. Falcone, R. Shepherd, J. B. Hastings, W. E. White, and J. S. Wark, “Perspective for High Energy Density Studies on X-ray FELs,” Proc. SPIE 7451, 74510E (2009).
[Crossref]

C. Borel, C. Morawe, A. Rommeveaux, C. Huguenot, and J.-C. Peffen, “Reflectivity and stress responses of multilayers upon isothermal treatment,” Proc. SPIE 6317, 63170I (2006).
[Crossref]

K. J. S. Sawhney, I. P. Dolbnya, S. M. Scott, M. K. Tiwari, G. M. Preece, S. G. Alcock, and A. W. Malandain, “A double multilayer monochromator for the B16 Test beamline at the Diamond Light Source,” Proc. SPIE 8139, 813908 (2011).
[Crossref]

C. Morawe, J. C. Peffen, and K. Friedrich, “In-situ stress measurements of sputtered multilayers,” Proc. SPIE 7802, 78020B (2010).
[Crossref]

C. Borel, C. Morawe, E. Ziegler, T. Bigault, J. Y. Massonnat, J. C. Peffen, and E. Debourg, “In situ study of multilayer reflectivity upon heat treatment under synchrotron radiation,” Proc. SPIE 5918, 591801 (2005).
[Crossref]

Synchrotron Radiat. News (1)

R. Barrett, R. Baker, P. Cloetens, C. Morawe, R. Tucoulou, and A. Vivo, “Reflective Optics for Hard X-ray Nanofocusing Applications at the ESRF,” Synchrotron Radiat. News 29(4), 10–15 (2016).
[Crossref]

Vacuum (1)

P. Li, Q. Huang, L. Jiang, W. Li, J. Fei, J. Zhu, Z. Zhang, and Z. Wang, “Structure and depth profile composition analysis of Cr/(B4C)/V/(B4C) multilayer for water window application,” Vacuum 128, 85–90 (2016).
[Crossref]

Other (2)

NIST X-ray Photoelectron Spectroscopy Database, https://srdata.nist.gov/xps/EngElmSrchQuery.aspx?EType=PE&CSOpt=Retri_ex_dat&Elm=Ru

L. B. Freund and S. Suresh, “Thin Film Materials-Stress, Defect Formation and Surface Evolution” (Cambridge University, 2003).

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1
Fig. 1 Grazing incident reflectivity curves at E = 8.04 keV of the Ru/B4C multilayers fabricated with pure Ar (a), 8% N2 (b), 15% N2 (c), 25% N2 (d). The measured first-order Bragg peaks at a larger scale as well as the theoretical reflectivity curve of the ideal structure are shown in (e). The fitted result of the pure-Ar sample is also shown in (a) and (e).
Fig. 2
Fig. 2 X-ray scattering intensity from Ru/B4C multilayers fabricated with pure Ar and different partial pressures of argon and nitrogen.
Fig. 3
Fig. 3 The measured intrinsic stress of the fabricated Ru/B4C multilayers versus the partial pressure of nitrogen in the sputtering gas.
Fig. 4
Fig. 4 Cross-section TEM images and the electron diffraction patterns, respectively, of the multilayers M0 (a, b) and M15 (c, d). The line profiles throughout the TEM images are compared in (e).
Fig. 5
Fig. 5 EDX and EELS line-scan measurements of depth-distribution of chemical elements in the multilayers M0 and M15 deposited with pure Ar (a, c) and with nitrogen adding into the sputtering gas (b, d).
Fig. 6
Fig. 6 Measured (symbols) and fitted (solid red curves) of B 1s (a, b) and N 1s (c) photoelectron spectra from the sample M0 deposited with pure Ar (a) and the nitridated sample M15 (b, c).

Metrics