Abstract

Aspheric astigmatic polymer micro-lenses were fabricated directly onto photonic integrated circuits using two-photon lithography. We observed a 12.6 dB improvement in the free space coupling efficiency between integrated ridge laser pairs with micro-lenses to those without.

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    [Crossref] [PubMed]

2018 (3)

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
[Crossref]

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

G. Williams, M. Hunt, B. Boehm, A. May, M. Taverne, D. Ho, S. Giblin, D. E. Read, J. Rarity, R. Allenspach, and S. Ladak, “Two-photon lithography for 3D magnetic nanostructure fabrication,” Nano Res. 11(2), 845–854 (2018).
[Crossref]

2017 (4)

P. I. Dietrich, R. J. Harris, M. Blaicher, M. K. Corrigan, T. M. Morris, W. Freude, A. Quirrenbach, and C. Koos, “Printed freeform lens arrays on multi-core fibers for highly efficient coupling in astrophotonic systems,” Opt. Express 25(15), 18288–18295 (2017).
[Crossref] [PubMed]

R. Thomas, A. Harrison, D. Barrow, and P. M. Smowton, “Photonic integration platform with pump free microfluidics,” Opt. Express 25(20), 23634–23644 (2017).
[Crossref] [PubMed]

M. Sartison, S. L. Portalupi, T. Gissibl, M. Jetter, H. Giessen, and P. Michler, “Combining in-situ lithography with 3D printed solid immersion lenses for single quantum dot spectroscopy,” Sci. Rep. 7, 39916 (2017).
[Crossref] [PubMed]

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
[Crossref] [PubMed]

2016 (2)

S. J. B. Yoo, B. Guan, and R. P. Scott, “Heterogeneous 2D/3D photonic integrated Microsystems,” Microsystems Nanoengineering 2(1), 16030 (2016).
[Crossref]

T. Gissibl, S. Thiele, A. Herkommer, and H. Giessen, “Two-photon direct laser writing of ultracompact multi-lens objectives,” Nat. Photonics 10(8), 554–560 (2016).
[Crossref]

2015 (1)

A. Marino, J. Barsotti, G. de Vito, C. Filippeschi, B. Mazzolai, V. Piazza, M. Labardi, V. Mattoli, and G. Ciofani, “Two-Photon Lithography of 3D Nanocomposite Piezoelectric Scaffolds for Cell Stimulation,” ACS Appl. Mater. Interfaces 7(46), 25574–25579 (2015).
[Crossref] [PubMed]

2013 (2)

M. Malinauskas, M. Farsari, A. Piskarskas, and S. Juodkazis, “Ultrafast laser nanostructuring of photopolymers: A decade of advances,” Phys. Rep. 533(1), 1–31 (2013).
[Crossref]

Z. N. Tian, L.-J. Wang, Q. D. Chen, T. Jiang, L. Qin, L.-J. Wang, and H. B. Sun, “Beam shaping of edge-emitting diode lasers using a single double-axial hyperboloidal micro-lens,” Opt. Lett. 38(24), 5414–5417 (2013).
[Crossref] [PubMed]

2012 (2)

N. Lindenmann, G. Balthasar, D. Hillerkuss, R. Schmogrow, M. Jordan, J. Leuthold, W. Freude, and C. Koos, “Photonic wire bonding: a novel concept for chip-scale interconnects,” Opt. Express 20(16), 17667–17677 (2012).
[Crossref] [PubMed]

S. W. Kettlitz, S. Valouch, W. Sittel, and U. Lemmer, “Flexible planar microfluidic chip employing a light emitting diode and a PIN-photodiode for portable flow cytometers,” Lab Chip 12(1), 197–203 (2012).
[Crossref] [PubMed]

2007 (1)

X. J. Liang, A. Q. Liu, C. S. Lim, T. C. Ayi, and P. H. Yap, “Determining refractive index of single living cell using an integrated microchip,” Sens. Actuators A Phys. 133(2), 349–354 (2007).
[Crossref]

2006 (1)

S. Cran-McGreehin, T. F. Krauss, and K. Dholakia, “Integrated monolithic optical manipulation,” Lab Chip 6(9), 1122–1124 (2006).
[Crossref] [PubMed]

1969 (1)

S. E. Miller, “Integrated optics – an introduction,” Bell Syst. Tech. J. 48(7), 2059–2069 (1969).
[Crossref]

Allenspach, R.

G. Williams, M. Hunt, B. Boehm, A. May, M. Taverne, D. Ho, S. Giblin, D. E. Read, J. Rarity, R. Allenspach, and S. Ladak, “Two-photon lithography for 3D magnetic nanostructure fabrication,” Nano Res. 11(2), 845–854 (2018).
[Crossref]

Ambrosius, H.

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
[Crossref]

Augustin, L. M.

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
[Crossref]

Ayi, T. C.

X. J. Liang, A. Q. Liu, C. S. Lim, T. C. Ayi, and P. H. Yap, “Determining refractive index of single living cell using an integrated microchip,” Sens. Actuators A Phys. 133(2), 349–354 (2007).
[Crossref]

Bakker, A.

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
[Crossref]

Balthasar, G.

Barrow, D.

Barsotti, J.

A. Marino, J. Barsotti, G. de Vito, C. Filippeschi, B. Mazzolai, V. Piazza, M. Labardi, V. Mattoli, and G. Ciofani, “Two-Photon Lithography of 3D Nanocomposite Piezoelectric Scaffolds for Cell Stimulation,” ACS Appl. Mater. Interfaces 7(46), 25574–25579 (2015).
[Crossref] [PubMed]

Behnia, B.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

Blaicher, M.

Boehm, B.

G. Williams, M. Hunt, B. Boehm, A. May, M. Taverne, D. Ho, S. Giblin, D. E. Read, J. Rarity, R. Allenspach, and S. Ladak, “Two-photon lithography for 3D magnetic nanostructure fabrication,” Nano Res. 11(2), 845–854 (2018).
[Crossref]

Bolk, J.

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
[Crossref]

Bostak, J.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

Butrie, T.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

Chen, Q. D.

Chitgarha, M. R.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

Ciofani, G.

A. Marino, J. Barsotti, G. de Vito, C. Filippeschi, B. Mazzolai, V. Piazza, M. Labardi, V. Mattoli, and G. Ciofani, “Two-Photon Lithography of 3D Nanocomposite Piezoelectric Scaffolds for Cell Stimulation,” ACS Appl. Mater. Interfaces 7(46), 25574–25579 (2015).
[Crossref] [PubMed]

Corrigan, M. K.

Corzine, S. W.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

Cran-McGreehin, S.

S. Cran-McGreehin, T. F. Krauss, and K. Dholakia, “Integrated monolithic optical manipulation,” Lab Chip 6(9), 1122–1124 (2006).
[Crossref] [PubMed]

de Vito, G.

A. Marino, J. Barsotti, G. de Vito, C. Filippeschi, B. Mazzolai, V. Piazza, M. Labardi, V. Mattoli, and G. Ciofani, “Two-Photon Lithography of 3D Nanocomposite Piezoelectric Scaffolds for Cell Stimulation,” ACS Appl. Mater. Interfaces 7(46), 25574–25579 (2015).
[Crossref] [PubMed]

Demars, S.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

den Haan, E.

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
[Crossref]

Dentai, A.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

Dholakia, K.

S. Cran-McGreehin, T. F. Krauss, and K. Dholakia, “Integrated monolithic optical manipulation,” Lab Chip 6(9), 1122–1124 (2006).
[Crossref] [PubMed]

Dietrich, P. I.

Engel, D.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

Evans, P.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

Farsari, M.

M. Malinauskas, M. Farsari, A. Piskarskas, and S. Juodkazis, “Ultrafast laser nanostructuring of photopolymers: A decade of advances,” Phys. Rep. 533(1), 1–31 (2013).
[Crossref]

Filippeschi, C.

A. Marino, J. Barsotti, G. de Vito, C. Filippeschi, B. Mazzolai, V. Piazza, M. Labardi, V. Mattoli, and G. Ciofani, “Two-Photon Lithography of 3D Nanocomposite Piezoelectric Scaffolds for Cell Stimulation,” ACS Appl. Mater. Interfaces 7(46), 25574–25579 (2015).
[Crossref] [PubMed]

Fischbach, S.

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
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Fisher, M.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Freude, W.

Giblin, S.

G. Williams, M. Hunt, B. Boehm, A. May, M. Taverne, D. Ho, S. Giblin, D. E. Read, J. Rarity, R. Allenspach, and S. Ladak, “Two-photon lithography for 3D magnetic nanostructure fabrication,” Nano Res. 11(2), 845–854 (2018).
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Giessen, H.

M. Sartison, S. L. Portalupi, T. Gissibl, M. Jetter, H. Giessen, and P. Michler, “Combining in-situ lithography with 3D printed solid immersion lenses for single quantum dot spectroscopy,” Sci. Rep. 7, 39916 (2017).
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S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
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T. Gissibl, S. Thiele, A. Herkommer, and H. Giessen, “Two-photon direct laser writing of ultracompact multi-lens objectives,” Nat. Photonics 10(8), 554–560 (2016).
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Gissibl, T.

M. Sartison, S. L. Portalupi, T. Gissibl, M. Jetter, H. Giessen, and P. Michler, “Combining in-situ lithography with 3D printed solid immersion lenses for single quantum dot spectroscopy,” Sci. Rep. 7, 39916 (2017).
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S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
[Crossref] [PubMed]

T. Gissibl, S. Thiele, A. Herkommer, and H. Giessen, “Two-photon direct laser writing of ultracompact multi-lens objectives,” Nat. Photonics 10(8), 554–560 (2016).
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Going, R.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Guan, B.

S. J. B. Yoo, B. Guan, and R. P. Scott, “Heterogeneous 2D/3D photonic integrated Microsystems,” Microsystems Nanoengineering 2(1), 16030 (2016).
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Harris, R. J.

Harrison, A.

Heindel, T.

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
[Crossref] [PubMed]

Herkommer, A.

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
[Crossref] [PubMed]

T. Gissibl, S. Thiele, A. Herkommer, and H. Giessen, “Two-photon direct laser writing of ultracompact multi-lens objectives,” Nat. Photonics 10(8), 554–560 (2016).
[Crossref]

Hillerkuss, D.

Ho, D.

G. Williams, M. Hunt, B. Boehm, A. May, M. Taverne, D. Ho, S. Giblin, D. E. Read, J. Rarity, R. Allenspach, and S. Ladak, “Two-photon lithography for 3D magnetic nanostructure fabrication,” Nano Res. 11(2), 845–854 (2018).
[Crossref]

Hosseini, A.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

Hunt, M.

G. Williams, M. Hunt, B. Boehm, A. May, M. Taverne, D. Ho, S. Giblin, D. E. Read, J. Rarity, R. Allenspach, and S. Ladak, “Two-photon lithography for 3D magnetic nanostructure fabrication,” Nano Res. 11(2), 845–854 (2018).
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James, A.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

Jetter, M.

M. Sartison, S. L. Portalupi, T. Gissibl, M. Jetter, H. Giessen, and P. Michler, “Combining in-situ lithography with 3D printed solid immersion lenses for single quantum dot spectroscopy,” Sci. Rep. 7, 39916 (2017).
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Jiang, T.

Jordan, M.

Juodkazis, S.

M. Malinauskas, M. Farsari, A. Piskarskas, and S. Juodkazis, “Ultrafast laser nanostructuring of photopolymers: A decade of advances,” Phys. Rep. 533(1), 1–31 (2013).
[Crossref]

Kaganskiy, A.

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
[Crossref] [PubMed]

Karanicolas, A.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

Kettlitz, S. W.

S. W. Kettlitz, S. Valouch, W. Sittel, and U. Lemmer, “Flexible planar microfluidic chip employing a light emitting diode and a PIN-photodiode for portable flow cytometers,” Lab Chip 12(1), 197–203 (2012).
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Khayam, O.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Kim, N.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Kish, F.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Kleijn, S.

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
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Ko, W.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Koos, C.

Korthorst, T.

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
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Krauss, T. F.

S. Cran-McGreehin, T. F. Krauss, and K. Dholakia, “Integrated monolithic optical manipulation,” Lab Chip 6(9), 1122–1124 (2006).
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Kuntz, M.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Labardi, M.

A. Marino, J. Barsotti, G. de Vito, C. Filippeschi, B. Mazzolai, V. Piazza, M. Labardi, V. Mattoli, and G. Ciofani, “Two-Photon Lithography of 3D Nanocomposite Piezoelectric Scaffolds for Cell Stimulation,” ACS Appl. Mater. Interfaces 7(46), 25574–25579 (2015).
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Ladak, S.

G. Williams, M. Hunt, B. Boehm, A. May, M. Taverne, D. Ho, S. Giblin, D. E. Read, J. Rarity, R. Allenspach, and S. Ladak, “Two-photon lithography for 3D magnetic nanostructure fabrication,” Nano Res. 11(2), 845–854 (2018).
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Lal, V.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Latkowski, S.

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
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Lauermann, M.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Lemmer, U.

S. W. Kettlitz, S. Valouch, W. Sittel, and U. Lemmer, “Flexible planar microfluidic chip employing a light emitting diode and a PIN-photodiode for portable flow cytometers,” Lab Chip 12(1), 197–203 (2012).
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Leuthold, J.

Liang, X. J.

X. J. Liang, A. Q. Liu, C. S. Lim, T. C. Ayi, and P. H. Yap, “Determining refractive index of single living cell using an integrated microchip,” Sens. Actuators A Phys. 133(2), 349–354 (2007).
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Lim, C. S.

X. J. Liang, A. Q. Liu, C. S. Lim, T. C. Ayi, and P. H. Yap, “Determining refractive index of single living cell using an integrated microchip,” Sens. Actuators A Phys. 133(2), 349–354 (2007).
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Lindenmann, N.

Liu, A. Q.

X. J. Liang, A. Q. Liu, C. S. Lim, T. C. Ayi, and P. H. Yap, “Determining refractive index of single living cell using an integrated microchip,” Sens. Actuators A Phys. 133(2), 349–354 (2007).
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Lu, M.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Maher, R.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Malinauskas, M.

M. Malinauskas, M. Farsari, A. Piskarskas, and S. Juodkazis, “Ultrafast laser nanostructuring of photopolymers: A decade of advances,” Phys. Rep. 533(1), 1–31 (2013).
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Marino, A.

A. Marino, J. Barsotti, G. de Vito, C. Filippeschi, B. Mazzolai, V. Piazza, M. Labardi, V. Mattoli, and G. Ciofani, “Two-Photon Lithography of 3D Nanocomposite Piezoelectric Scaffolds for Cell Stimulation,” ACS Appl. Mater. Interfaces 7(46), 25574–25579 (2015).
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Mattoli, V.

A. Marino, J. Barsotti, G. de Vito, C. Filippeschi, B. Mazzolai, V. Piazza, M. Labardi, V. Mattoli, and G. Ciofani, “Two-Photon Lithography of 3D Nanocomposite Piezoelectric Scaffolds for Cell Stimulation,” ACS Appl. Mater. Interfaces 7(46), 25574–25579 (2015).
[Crossref] [PubMed]

May, A.

G. Williams, M. Hunt, B. Boehm, A. May, M. Taverne, D. Ho, S. Giblin, D. E. Read, J. Rarity, R. Allenspach, and S. Ladak, “Two-photon lithography for 3D magnetic nanostructure fabrication,” Nano Res. 11(2), 845–854 (2018).
[Crossref]

Mazzolai, B.

A. Marino, J. Barsotti, G. de Vito, C. Filippeschi, B. Mazzolai, V. Piazza, M. Labardi, V. Mattoli, and G. Ciofani, “Two-Photon Lithography of 3D Nanocomposite Piezoelectric Scaffolds for Cell Stimulation,” ACS Appl. Mater. Interfaces 7(46), 25574–25579 (2015).
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Mertz, P.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Michler, P.

M. Sartison, S. L. Portalupi, T. Gissibl, M. Jetter, H. Giessen, and P. Michler, “Combining in-situ lithography with 3D printed solid immersion lenses for single quantum dot spectroscopy,” Sci. Rep. 7, 39916 (2017).
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L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
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Missey, M.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Mitchell, M.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Modi, N.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Morris, T. M.

Murthy, S.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Osenbach, J.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Pavinski, D.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Piazza, V.

A. Marino, J. Barsotti, G. de Vito, C. Filippeschi, B. Mazzolai, V. Piazza, M. Labardi, V. Mattoli, and G. Ciofani, “Two-Photon Lithography of 3D Nanocomposite Piezoelectric Scaffolds for Cell Stimulation,” ACS Appl. Mater. Interfaces 7(46), 25574–25579 (2015).
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Piskarskas, A.

M. Malinauskas, M. Farsari, A. Piskarskas, and S. Juodkazis, “Ultrafast laser nanostructuring of photopolymers: A decade of advances,” Phys. Rep. 533(1), 1–31 (2013).
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Pleumeekers, J.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Portalupi, S. L.

M. Sartison, S. L. Portalupi, T. Gissibl, M. Jetter, H. Giessen, and P. Michler, “Combining in-situ lithography with 3D printed solid immersion lenses for single quantum dot spectroscopy,” Sci. Rep. 7, 39916 (2017).
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Qin, L.

Quirrenbach, A.

Rahn, J. T.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Rarity, J.

G. Williams, M. Hunt, B. Boehm, A. May, M. Taverne, D. Ho, S. Giblin, D. E. Read, J. Rarity, R. Allenspach, and S. Ladak, “Two-photon lithography for 3D magnetic nanostructure fabrication,” Nano Res. 11(2), 845–854 (2018).
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Read, D. E.

G. Williams, M. Hunt, B. Boehm, A. May, M. Taverne, D. Ho, S. Giblin, D. E. Read, J. Rarity, R. Allenspach, and S. Ladak, “Two-photon lithography for 3D magnetic nanostructure fabrication,” Nano Res. 11(2), 845–854 (2018).
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Reffle, M.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Reitzenstein, S.

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
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Richter, A.

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
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Ristok, S.

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
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Rodt, S.

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
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Salvatore, R.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Samra, P.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Santos, R.

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
[Crossref]

Sartison, M.

M. Sartison, S. L. Portalupi, T. Gissibl, M. Jetter, H. Giessen, and P. Michler, “Combining in-situ lithography with 3D printed solid immersion lenses for single quantum dot spectroscopy,” Sci. Rep. 7, 39916 (2017).
[Crossref] [PubMed]

Schlehahn, A.

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
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Schmogrow, R.

Scott, R. P.

S. J. B. Yoo, B. Guan, and R. P. Scott, “Heterogeneous 2D/3D photonic integrated Microsystems,” Microsystems Nanoengineering 2(1), 16030 (2016).
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Sittel, W.

S. W. Kettlitz, S. Valouch, W. Sittel, and U. Lemmer, “Flexible planar microfluidic chip employing a light emitting diode and a PIN-photodiode for portable flow cytometers,” Lab Chip 12(1), 197–203 (2012).
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Smowton, P. M.

Srocka, N.

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
[Crossref] [PubMed]

Strittmatter, A.

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
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Studenkov, P.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
[Crossref]

Sun, H.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Sun, H. B.

Tang, J.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Taverne, M.

G. Williams, M. Hunt, B. Boehm, A. May, M. Taverne, D. Ho, S. Giblin, D. E. Read, J. Rarity, R. Allenspach, and S. Ladak, “Two-photon lithography for 3D magnetic nanostructure fabrication,” Nano Res. 11(2), 845–854 (2018).
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Thiele, S.

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
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T. Gissibl, S. Thiele, A. Herkommer, and H. Giessen, “Two-photon direct laser writing of ultracompact multi-lens objectives,” Nat. Photonics 10(8), 554–560 (2016).
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Thijs, P. J. A.

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
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Thoma, A.

S. Fischbach, A. Schlehahn, A. Thoma, N. Srocka, T. Gissibl, S. Ristok, S. Thiele, A. Kaganskiy, A. Strittmatter, T. Heindel, S. Rodt, A. Herkommer, H. Giessen, and S. Reitzenstein, “Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source,” ACS Photonics 4(6), 1327–1332 (2017).
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Thomas, R.

Tian, Z. N.

Tsai, H.-S.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Vallaitis, T.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Valouch, S.

S. W. Kettlitz, S. Valouch, W. Sittel, and U. Lemmer, “Flexible planar microfluidic chip employing a light emitting diode and a PIN-photodiode for portable flow cytometers,” Lab Chip 12(1), 197–203 (2012).
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Wang, L.-J.

Welch, D.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Williams, G.

G. Williams, M. Hunt, B. Boehm, A. May, M. Taverne, D. Ho, S. Giblin, D. E. Read, J. Rarity, R. Allenspach, and S. Ladak, “Two-photon lithography for 3D magnetic nanostructure fabrication,” Nano Res. 11(2), 845–854 (2018).
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Wu, K.-T.

F. Kish, V. Lal, P. Evans, S. W. Corzine, M. Ziari, T. Butrie, M. Reffle, H.-S. Tsai, A. Dentai, J. Pleumeekers, M. Missey, M. Fisher, S. Murthy, R. Salvatore, P. Samra, S. Demars, N. Kim, A. James, A. Hosseini, P. Studenkov, M. Lauermann, R. Going, M. Lu, J. Zhang, J. Tang, J. Bostak, T. Vallaitis, M. Kuntz, D. Pavinski, A. Karanicolas, B. Behnia, D. Engel, O. Khayam, N. Modi, M. R. Chitgarha, P. Mertz, W. Ko, R. Maher, J. Osenbach, J. T. Rahn, H. Sun, K.-T. Wu, M. Mitchell, and D. Welch, “System-on-Chip Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 6100120 (2018).
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Yao, W.

L. M. Augustin, R. Santos, E. den Haan, S. Kleijn, P. J. A. Thijs, S. Latkowski, D. Zhao, W. Yao, J. Bolk, H. Ambrosius, S. Mingaleev, A. Richter, A. Bakker, and T. Korthorst, “InP-Based Generic Foundry Platform for Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 24(1), 1–10 (2018).
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Yap, P. H.

X. J. Liang, A. Q. Liu, C. S. Lim, T. C. Ayi, and P. H. Yap, “Determining refractive index of single living cell using an integrated microchip,” Sens. Actuators A Phys. 133(2), 349–354 (2007).
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Yoo, S. J. B.

S. J. B. Yoo, B. Guan, and R. P. Scott, “Heterogeneous 2D/3D photonic integrated Microsystems,” Microsystems Nanoengineering 2(1), 16030 (2016).
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Zhang, J.

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Figures (4)

Fig. 1
Fig. 1 (a) Schematic diagram of an astigmatic micro-lens design defined by parabolic surface functions. (b) Schema of micro-lenses coupled across a 100-micron wide air-filled channel. (c) Sequential simulation of coupling between lasers with micro-lenses, showing the transformation of an elliptically divergent emitting laser beam into a collimated spot that is focused onto a receiving laser by the second lens. The color line with dot indicates the light path.
Fig. 2
Fig. 2 (a) SEM image of a 20 μm deep trench that was etched into the GaAs substrate between monolithically integrated ridge lasers, to accommodate the 3D micro-lenses. (b) Optical microscopy image of the integrated ridge lasers with facets buried inside mico-lenses.
Fig. 3
Fig. 3 SEM images of 3D lenses, fabricated using different exposure power scaling (PS) factors, showing a) under exposure of lower half of lens due to shadowing PS = 0.35, and b) pockmarks on the upper surface from vaporization of the resist during over exposure PS = 0.5.
Fig. 4
Fig. 4 Light – current characteristics of coupled lasers with micro-lenses (black triangles and green circles) and those without (open blue circles and open red squares). The relative coupling efficiency of the coupled lasers with and without lenses was calculated from the ratio of the gradients of the L-I curves. In each case, the gradients were extracted from the above threshold region of the L-I curve using a straight line fit (solid colored lines.) Inset, far-field distributions for the vertical (orange squares) and horizontal (purple circles) used to determine the fast and slow axis divergence of the ridge lasers, which informed the simulations in Fig. 1.

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