Abstract

In this paper, we perform an investigation of terabit-scale data transmission in silicon subwavelength grating (SWG) waveguides for wavelength-division multiplexing (WDM) optical signals. Silicon SWG waveguide is capable of decreasing the light confinement in silicon core by engineering the geometry, leading to relatively lower optical nonlinearity compared to silicon wire waveguide. We demonstrate ultrahigh-bandwidth 2.86 Tb/s data transmission through the fabricated 2-mm-long silicon SWG waveguide over a wide range of launch powers. In the experiment, 75 WDM channels are utilized with each carrying 38.12 Gb/s orthogonal frequency-division multiplexing (OFDM) 16-ary quadrature amplitude modulation (16-QAM) signal. With the benefit of efficient reduction on optical nonlinearity, the optimum launch power is increased by 8 dB in SWG waveguide, indicating higher tolerance to the nonlinear impairments, compared to a silicon wire waveguide with identical length. With the optimum launch power, all 75 channels exhibit bit-error rate (BER) values less than 4e-5 after SWG waveguide transmission. We also evaluate the terabit-scale data transmission performance through four silicon SWG waveguides with different lengths (1 mm, 2 mm, 4 mm and 12 mm). The required optical signal-to-noise ratios (OSNRs) to achieve BER level of 1e-3 are around 15.27, 15.47, 16.66 and 20.38 dB, respectively.

© 2017 Optical Society of America

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2016 (2)

2015 (6)

P. Dong, Y.-K. Chen, T. Gu, L. L. Buhl, D. T. Neilson, and J. H. Sinsky, “Reconfigurable 100 Gb/s silicon photonic network-on-chip [Invited],” J. Opt. Commun. Netw. 7(1), A37–A43 (2015).
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V. Donzella, A. Sherwali, J. Flueckiger, S. M. Grist, S. T. Fard, and L. Chrostowski, “Design and fabrication of SOI micro-ring resonators based on sub-wavelength grating waveguides,” Opt. Express 23(4), 4791–4803 (2015).
[Crossref] [PubMed]

C. Gui, C. Li, Q. Yang, and J. Wang, “Demonstration of terabit-scale data transmission in silicon vertical slot waveguides,” Opt. Express 23(8), 9736–9745 (2015).
[Crossref] [PubMed]

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Z. Zhou, B. Yin, and J. Michel, “On-chip light sources for silicon photonics,” Light Sci. Appl. 4(11), e358 (2015).
[Crossref]

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

2014 (4)

2013 (1)

2012 (1)

2010 (5)

2009 (1)

2008 (1)

B. G. Lee, X. Chen, A. Biberman, X. Liu, I.-W. Hsieh, C.-Y. Chou, J. I. Dadap, F. Xia, W. M. Green, L. Sekaric, Y. A. Vlasov, R. M. Osgood, and K. Bergman, “Ultrahigh-bandwidth silicon photonic nanowire waveguides for on-chip networks,” IEEE Photonics Technol. Lett. 20(6), 398–400 (2008).
[Crossref]

2007 (1)

2005 (2)

D. Dimitropoulos, R. Jhaveri, R. Claps, J. Woo, and B. Jalali, “Lifetime of photogenerated carriers in silicon-on-insulator rib waveguides,” Appl. Phys. Lett. 86(7), 071115 (2005).
[Crossref]

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86(8), 081101 (2005).
[Crossref]

2004 (1)

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Robertson, S. List, I. Young, and K. Cadien, “On-Chip Optical Interconnects,” Intel Tech. Jour. 8(2), 129–141 (2004).

Abeysinghe, D.

Aers, G. C.

Afshar V, S.

Agrawal, G. P.

Alloatti, L.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Alonso-Ramos, C.

J. D. Sarmiento-Merenguel, A. Ortega-Moñux, J.-M. Fédéli, J. G. Wangüemert-Pérez, C. Alonso-Ramos, E. Durán-Valdeiglesias, P. Cheben, Í. Molina-Fernández, and R. Halir, “Controlling leakage losses in subwavelength grating silicon metamaterial waveguides,” Opt. Lett. 41(15), 3443–3446 (2016).
[Crossref] [PubMed]

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Apsel, A. B.

R. K. Dokania and A. B. Apsel, “Analysis of challenges for on-chip optical interconnects,” in Proceedings of the 19th ACM Great Lakes symposium on VLSI (2009), pp. 275–280.
[Crossref]

Asanovic, K.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Assefa, S.

Atabaki, A. H.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Avizienis, R. R.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Baehr-Jones, T.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86(8), 081101 (2005).
[Crossref]

Baks, C. W.

Barnett, B. C.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Robertson, S. List, I. Young, and K. Cadien, “On-Chip Optical Interconnects,” Intel Tech. Jour. 8(2), 129–141 (2004).

Barwicz, T.

Bergman, K.

B. G. Lee, X. Chen, A. Biberman, X. Liu, I.-W. Hsieh, C.-Y. Chou, J. I. Dadap, F. Xia, W. M. Green, L. Sekaric, Y. A. Vlasov, R. M. Osgood, and K. Bergman, “Ultrahigh-bandwidth silicon photonic nanowire waveguides for on-chip networks,” IEEE Photonics Technol. Lett. 20(6), 398–400 (2008).
[Crossref]

Biberman, A.

B. G. Lee, X. Chen, A. Biberman, X. Liu, I.-W. Hsieh, C.-Y. Chou, J. I. Dadap, F. Xia, W. M. Green, L. Sekaric, Y. A. Vlasov, R. M. Osgood, and K. Bergman, “Ultrahigh-bandwidth silicon photonic nanowire waveguides for on-chip networks,” IEEE Photonics Technol. Lett. 20(6), 398–400 (2008).
[Crossref]

Block, B. A.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Robertson, S. List, I. Young, and K. Cadien, “On-Chip Optical Interconnects,” Intel Tech. Jour. 8(2), 129–141 (2004).

Bock, P. J.

Buhl, L. L.

Cadien, K.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Robertson, S. List, I. Young, and K. Cadien, “On-Chip Optical Interconnects,” Intel Tech. Jour. 8(2), 129–141 (2004).

Cheben, P.

Chen, A.

Chen, L. R.

Chen, X.

B. G. Lee, X. Chen, A. Biberman, X. Liu, I.-W. Hsieh, C.-Y. Chou, J. I. Dadap, F. Xia, W. M. Green, L. Sekaric, Y. A. Vlasov, R. M. Osgood, and K. Bergman, “Ultrahigh-bandwidth silicon photonic nanowire waveguides for on-chip networks,” IEEE Photonics Technol. Lett. 20(6), 398–400 (2008).
[Crossref]

Chen, Y. H.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Chen, Y.-K.

Chou, C.-Y.

B. G. Lee, X. Chen, A. Biberman, X. Liu, I.-W. Hsieh, C.-Y. Chou, J. I. Dadap, F. Xia, W. M. Green, L. Sekaric, Y. A. Vlasov, R. M. Osgood, and K. Bergman, “Ultrahigh-bandwidth silicon photonic nanowire waveguides for on-chip networks,” IEEE Photonics Technol. Lett. 20(6), 398–400 (2008).
[Crossref]

Chrostowski, L.

Claps, R.

D. Dimitropoulos, R. Jhaveri, R. Claps, J. Woo, and B. Jalali, “Lifetime of photogenerated carriers in silicon-on-insulator rib waveguides,” Appl. Phys. Lett. 86(7), 071115 (2005).
[Crossref]

Cook, H. M.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Dadap, J. I.

B. G. Lee, X. Chen, A. Biberman, X. Liu, I.-W. Hsieh, C.-Y. Chou, J. I. Dadap, F. Xia, W. M. Green, L. Sekaric, Y. A. Vlasov, R. M. Osgood, and K. Bergman, “Ultrahigh-bandwidth silicon photonic nanowire waveguides for on-chip networks,” IEEE Photonics Technol. Lett. 20(6), 398–400 (2008).
[Crossref]

Delâge, A.

Densmore, A.

Dimitropoulos, D.

D. Dimitropoulos, R. Jhaveri, R. Claps, J. Woo, and B. Jalali, “Lifetime of photogenerated carriers in silicon-on-insulator rib waveguides,” Appl. Phys. Lett. 86(7), 071115 (2005).
[Crossref]

Ding, Y.

Dokania, R. K.

R. K. Dokania and A. B. Apsel, “Analysis of challenges for on-chip optical interconnects,” in Proceedings of the 19th ACM Great Lakes symposium on VLSI (2009), pp. 275–280.
[Crossref]

Dong, P.

Donnelly, C.

Donzella, V.

Durán-Valdeiglesias, E.

Fard, S. T.

Fédéli, J.-M.

Flueckiger, J.

Foster, M. A.

Gaeta, A. L.

Gardes, F. Y.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[Crossref]

Georgas, M. S.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
[Crossref] [PubMed]

Glesk, I.

Green, W. M.

B. G. Lee, X. Chen, A. Biberman, X. Liu, I.-W. Hsieh, C.-Y. Chou, J. I. Dadap, F. Xia, W. M. Green, L. Sekaric, Y. A. Vlasov, R. M. Osgood, and K. Bergman, “Ultrahigh-bandwidth silicon photonic nanowire waveguides for on-chip networks,” IEEE Photonics Technol. Lett. 20(6), 398–400 (2008).
[Crossref]

Green, W. M. J.

Grist, S. M.

Gu, T.

Gui, C.

Halir, R.

J. D. Sarmiento-Merenguel, A. Ortega-Moñux, J.-M. Fédéli, J. G. Wangüemert-Pérez, C. Alonso-Ramos, E. Durán-Valdeiglesias, P. Cheben, Í. Molina-Fernández, and R. Halir, “Controlling leakage losses in subwavelength grating silicon metamaterial waveguides,” Opt. Lett. 41(15), 3443–3446 (2016).
[Crossref] [PubMed]

R. Halir, P. J. Bock, P. Cheben, A. Ortega-Moñux, C. Alonso-Ramos, J. H. Schmid, J. Lapointe, D.-X. Xu, J. G. Wangüemert-Pérez, Í. Molina-Fernández, and S. Janz, “Waveguide sub-wavelength structures: a review of principles and applications,” Laser Photonics Rev. 9(1), 25–49 (2015).
[Crossref]

Hall, T. J.

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B. G. Lee, X. Chen, A. Biberman, X. Liu, I.-W. Hsieh, C.-Y. Chou, J. I. Dadap, F. Xia, W. M. Green, L. Sekaric, Y. A. Vlasov, R. M. Osgood, and K. Bergman, “Ultrahigh-bandwidth silicon photonic nanowire waveguides for on-chip networks,” IEEE Photonics Technol. Lett. 20(6), 398–400 (2008).
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Salem, R.

Sarmiento-Merenguel, J. D.

Scherer, A.

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Schow, C. L.

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Szep, A.

Talebi Fard, S.

Tan, D. T.

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G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
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Vlasov, Y. A.

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B. G. Lee, X. Chen, A. Biberman, X. Liu, I.-W. Hsieh, C.-Y. Chou, J. I. Dadap, F. Xia, W. M. Green, L. Sekaric, Y. A. Vlasov, R. M. Osgood, and K. Bergman, “Ultrahigh-bandwidth silicon photonic nanowire waveguides for on-chip networks,” IEEE Photonics Technol. Lett. 20(6), 398–400 (2008).
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C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. H. Chen, K. Asanović, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528(7583), 534–538 (2015).
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T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86(8), 081101 (2005).
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D. Dimitropoulos, R. Jhaveri, R. Claps, J. Woo, and B. Jalali, “Lifetime of photogenerated carriers in silicon-on-insulator rib waveguides,” Appl. Phys. Lett. 86(7), 071115 (2005).
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B. G. Lee, X. Chen, A. Biberman, X. Liu, I.-W. Hsieh, C.-Y. Chou, J. I. Dadap, F. Xia, W. M. Green, L. Sekaric, Y. A. Vlasov, R. M. Osgood, and K. Bergman, “Ultrahigh-bandwidth silicon photonic nanowire waveguides for on-chip networks,” IEEE Photonics Technol. Lett. 20(6), 398–400 (2008).
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Young, I.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Robertson, S. List, I. Young, and K. Cadien, “On-Chip Optical Interconnects,” Intel Tech. Jour. 8(2), 129–141 (2004).

Yun, H.

Zhang, F.

Zheng, J.-F.

M. J. Kobrinsky, B. A. Block, J.-F. Zheng, B. C. Barnett, E. Mohammed, M. Reshotko, F. Robertson, S. List, I. Young, and K. Cadien, “On-Chip Optical Interconnects,” Intel Tech. Jour. 8(2), 129–141 (2004).

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T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86(8), 081101 (2005).
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Figures (7)

Fig. 1
Fig. 1 (a) Schematic diagram of the silicon SWG waveguide structure. (b) Mode converter. (c) Simulated field propagating along the SWG waveguide. (d)-(e) Mode profiles of the SWG and wire waveguides, respectively.
Fig. 2
Fig. 2 (a) Normalized optical power in silicon (Psi) and SU-8 polymer regions (Psu8) and (b) effective nonlinear coefficients of the wire waveguide and SWG waveguide at the silicon segment, respectively.
Fig. 3
Fig. 3 SEM images of the fabricated device: (a) SWG waveguide and (b) mode converter between SWG and wire waveguides.
Fig. 4
Fig. 4 (a) Experimental setup for terabit-scale 75 WDM OFDM 16-QAM signal transmission. PMOC: polarization maintaining optical coupler, PC: polarization controller. (b)-(c) are measured optical spectra of the generated carriers and modulated signals, respectively.
Fig. 5
Fig. 5 (a) BER performances versus launch power for signal transmission through the 2-mm-long wire and SWG waveguides. (b) RF spectrum of the received OFDM 16-QAM signal after demodulation.
Fig. 6
Fig. 6 (a) Measured BER performances for all 75 WDM channels. (b) Output spectrum of the 2.86 Tb/s OFDM 16-QAM signal after SWG waveguide transmission. (c) BER versus received OSNR at three different wavelength channels.
Fig. 7
Fig. 7 (a) BER performances versus received OSNR and (b) constellations around BER level of 1e-3 for the data transmission through 1-mm (SWG 1), 2-mm (SWG 2), 4-mm (SWG 3), and 12-mm-long (SWG 4) silicon SWG waveguides, respectively.

Equations (4)

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γ = 2 π λ n 2 ¯ A e f f ,
A e f f = | ( e v × h v * ) x ^ d A | 2 | ( e v × h v * ) x ^ | 2 d A ,
n 2 ¯ = 1 Z 0 2 n 2 ( y,z ) n 2 ( y,z ) ( 2 | e v | 4 + | e v 2 | 2 ) d A 3 | ( e v × h v * ) x ^ | 2 d A .
N m = 1 2 D m Re { ( e v × h v * ) x ^ } d A 1 2 D t o t Re { ( e v × h v * ) x ^ } d A ,

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