Abstract

In this paper we theoretically prove and experimentally demonstrate a novel approach to eliminate the effects of backscattering in silicon ring resonators. Not only the resonance-splitting can be completely suppressed, but also the unwanted light reflected to the in port and directed to the add port can be dramatically reduced. Ring resonators have become one of the most intensively used integrated optical components for various applications. However, in high-index-contrast platforms like silicon photonics, sidewall roughness induced backscattering imposes limits on the performance of ring resonators. It frequently induces resonance-splitting in through and drop ports. At the same time, there will be unwanted light directed to the add port and reflected to the in port. We show that, by putting an intentional tunable reflector inside the ring to compete with the stochastic backscattering, the ring can work under a normal condition. All resonances can be tuned to be non-split with an improved extinction ratio and there will be significantly less light coming out from the in and the add ports.

© 2017 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Backcoupling manipulation in silicon ring resonators

Ang Li and Wim Bogaerts
Photon. Res. 6(6) 620-629 (2018)

Characterizing and modeling backscattering in silicon microring resonators

G. C. Ballesteros, J. Matres, J. Martí, and C. J. Oton
Opt. Express 19(25) 24980-24985 (2011)

References

  • View by:
  • |
  • |
  • |

  1. V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, “All-optical control of light on a silicon chip,” Nature 431, 1081–1084 (2004).
    [Crossref] [PubMed]
  2. K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15, 7610–7615 (2007).
    [Crossref] [PubMed]
  3. S. Gulde, A. Jebali, and N. Moll, “Optimization of ultrafast all-optical resonator switching,” Opt. Express 13, 9502–9515 (2005).
    [Crossref] [PubMed]
  4. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
    [Crossref] [PubMed]
  5. W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photon. Rev. 6, 47–73 (2012).
    [Crossref]
  6. R. G. Beausoleil, “Large-scale integrated photonics for high-performance interconnects,” J. Emerg. Technol. Comput. Syst. 7, 1–54 (2011).
    [Crossref]
  7. C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
    [Crossref] [PubMed]
  8. F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall soi waveguides,” IEEE Photon. Technol. Lett. 16, 1661–1663 (2004).
    [Crossref]
  9. F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness induced backscattering in optical silicon waveguides,” Phys. Rev. Lett. 104, 1–4 (2010).
    [Crossref]
  10. A. Li, T. Vaerenbergh, P. Heyn, P. Bienstman, and W. Bogaerts, “Backscattering in silicon microring resonators: a quantitative analysis,” Laser Photon. Rev. 10, 420–431 (2016).
    [Crossref]
  11. F. Morichetti, A. Canciamilla, M. Martinelli, A. Samarelli, R. M. De La Rue, M. Sorel, and A. Melloni, “Coherent backscattering in optical microring resonators,” Appl. Phys. Lett. 96, 13–15 (2010).
    [Crossref]
  12. A. Li, Q. Huang, and W. Bogaerts, “Design of a single all-silicon ring resonator with a 150 nm free spectral range and a 100 nm tuning range around 1550 nm,” Photon. Res. 4, 84–92 (2016).
    [Crossref]
  13. S. Werquin, S. Verstuyft, and P. Bienstman, “Integrated interferometric approach to solve microring resonance splitting in biosensor applications,” Opt. Express 21, 16955–16963 (2013).
    [Crossref] [PubMed]
  14. Q. Huang, K. Ma, and S. He, “Experimental demonstration of single mode-splitting in microring with bragg gratings,” IEEE Photon. Technol. Lett. 27, 1402–1405 (2015).
    [Crossref]
  15. A. Arbabi, Y. M. Kang, C.-Y. Lu, E. Chow, and L. L. Goddard, “Realization of a narrowband single wavelength microring mirror,” Appl. Phys. Lett. 99, 091105 (2011).
    [Crossref]
  16. M. Fiers, T. V. Vaerenbergh, K. Caluwaerts, D. V. Ginste, B. Schrauwen, J. Dambre, and P. Bienstman, “Time-domain and frequency-domain modeling of nonlinear optical components at the circuit-level using a node-based approach,” J. Opt. Soc. Am. B 29, 896–900 (2012).
    [Crossref]
  17. P. Dumon, W. Bogaerts, R. Baets, J.-M. Fedeli, and L. Fulbert, “Towards foundry approach for silicon photonics: silicon photonics platform epixfab,” Electron. Lett. 45, 581–582 (2009).
    [Crossref]

2016 (2)

A. Li, T. Vaerenbergh, P. Heyn, P. Bienstman, and W. Bogaerts, “Backscattering in silicon microring resonators: a quantitative analysis,” Laser Photon. Rev. 10, 420–431 (2016).
[Crossref]

A. Li, Q. Huang, and W. Bogaerts, “Design of a single all-silicon ring resonator with a 150 nm free spectral range and a 100 nm tuning range around 1550 nm,” Photon. Res. 4, 84–92 (2016).
[Crossref]

2015 (2)

Q. Huang, K. Ma, and S. He, “Experimental demonstration of single mode-splitting in microring with bragg gratings,” IEEE Photon. Technol. Lett. 27, 1402–1405 (2015).
[Crossref]

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

2013 (1)

2012 (2)

M. Fiers, T. V. Vaerenbergh, K. Caluwaerts, D. V. Ginste, B. Schrauwen, J. Dambre, and P. Bienstman, “Time-domain and frequency-domain modeling of nonlinear optical components at the circuit-level using a node-based approach,” J. Opt. Soc. Am. B 29, 896–900 (2012).
[Crossref]

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photon. Rev. 6, 47–73 (2012).
[Crossref]

2011 (2)

R. G. Beausoleil, “Large-scale integrated photonics for high-performance interconnects,” J. Emerg. Technol. Comput. Syst. 7, 1–54 (2011).
[Crossref]

A. Arbabi, Y. M. Kang, C.-Y. Lu, E. Chow, and L. L. Goddard, “Realization of a narrowband single wavelength microring mirror,” Appl. Phys. Lett. 99, 091105 (2011).
[Crossref]

2010 (2)

F. Morichetti, A. Canciamilla, M. Martinelli, A. Samarelli, R. M. De La Rue, M. Sorel, and A. Melloni, “Coherent backscattering in optical microring resonators,” Appl. Phys. Lett. 96, 13–15 (2010).
[Crossref]

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness induced backscattering in optical silicon waveguides,” Phys. Rev. Lett. 104, 1–4 (2010).
[Crossref]

2009 (1)

P. Dumon, W. Bogaerts, R. Baets, J.-M. Fedeli, and L. Fulbert, “Towards foundry approach for silicon photonics: silicon photonics platform epixfab,” Electron. Lett. 45, 581–582 (2009).
[Crossref]

2007 (1)

2005 (2)

S. Gulde, A. Jebali, and N. Moll, “Optimization of ultrafast all-optical resonator switching,” Opt. Express 13, 9502–9515 (2005).
[Crossref] [PubMed]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[Crossref] [PubMed]

2004 (2)

V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, “All-optical control of light on a silicon chip,” Nature 431, 1081–1084 (2004).
[Crossref] [PubMed]

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall soi waveguides,” IEEE Photon. Technol. Lett. 16, 1661–1663 (2004).
[Crossref]

Alloatti, L.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Almeida, V. R.

V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, “All-optical control of light on a silicon chip,” Nature 431, 1081–1084 (2004).
[Crossref] [PubMed]

Arbabi, A.

A. Arbabi, Y. M. Kang, C.-Y. Lu, E. Chow, and L. L. Goddard, “Realization of a narrowband single wavelength microring mirror,” Appl. Phys. Lett. 99, 091105 (2011).
[Crossref]

Asanovic, K.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Atabaki, A. H.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Avizienis, R. R.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Baets, R.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photon. Rev. 6, 47–73 (2012).
[Crossref]

P. Dumon, W. Bogaerts, R. Baets, J.-M. Fedeli, and L. Fulbert, “Towards foundry approach for silicon photonics: silicon photonics platform epixfab,” Electron. Lett. 45, 581–582 (2009).
[Crossref]

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15, 7610–7615 (2007).
[Crossref] [PubMed]

Barrios, C. A.

V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, “All-optical control of light on a silicon chip,” Nature 431, 1081–1084 (2004).
[Crossref] [PubMed]

Bartolozzi, I.

Beausoleil, R. G.

R. G. Beausoleil, “Large-scale integrated photonics for high-performance interconnects,” J. Emerg. Technol. Comput. Syst. 7, 1–54 (2011).
[Crossref]

Bienstman, P.

Bogaerts, W.

A. Li, Q. Huang, and W. Bogaerts, “Design of a single all-silicon ring resonator with a 150 nm free spectral range and a 100 nm tuning range around 1550 nm,” Photon. Res. 4, 84–92 (2016).
[Crossref]

A. Li, T. Vaerenbergh, P. Heyn, P. Bienstman, and W. Bogaerts, “Backscattering in silicon microring resonators: a quantitative analysis,” Laser Photon. Rev. 10, 420–431 (2016).
[Crossref]

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photon. Rev. 6, 47–73 (2012).
[Crossref]

P. Dumon, W. Bogaerts, R. Baets, J.-M. Fedeli, and L. Fulbert, “Towards foundry approach for silicon photonics: silicon photonics platform epixfab,” Electron. Lett. 45, 581–582 (2009).
[Crossref]

Caluwaerts, K.

Canciamilla, A.

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness induced backscattering in optical silicon waveguides,” Phys. Rev. Lett. 104, 1–4 (2010).
[Crossref]

F. Morichetti, A. Canciamilla, M. Martinelli, A. Samarelli, R. M. De La Rue, M. Sorel, and A. Melloni, “Coherent backscattering in optical microring resonators,” Appl. Phys. Lett. 96, 13–15 (2010).
[Crossref]

Cassan, E.

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall soi waveguides,” IEEE Photon. Technol. Lett. 16, 1661–1663 (2004).
[Crossref]

Chen, Y.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Chow, E.

A. Arbabi, Y. M. Kang, C.-Y. Lu, E. Chow, and L. L. Goddard, “Realization of a narrowband single wavelength microring mirror,” Appl. Phys. Lett. 99, 091105 (2011).
[Crossref]

Claes, T.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photon. Rev. 6, 47–73 (2012).
[Crossref]

Cook, H. M.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Dambre, J.

De Heyn, P.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photon. Rev. 6, 47–73 (2012).
[Crossref]

De La Rue, R. M.

F. Morichetti, A. Canciamilla, M. Martinelli, A. Samarelli, R. M. De La Rue, M. Sorel, and A. Melloni, “Coherent backscattering in optical microring resonators,” Appl. Phys. Lett. 96, 13–15 (2010).
[Crossref]

De Vos, K.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photon. Rev. 6, 47–73 (2012).
[Crossref]

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15, 7610–7615 (2007).
[Crossref] [PubMed]

Dumon, P.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photon. Rev. 6, 47–73 (2012).
[Crossref]

P. Dumon, W. Bogaerts, R. Baets, J.-M. Fedeli, and L. Fulbert, “Towards foundry approach for silicon photonics: silicon photonics platform epixfab,” Electron. Lett. 45, 581–582 (2009).
[Crossref]

Fedeli, J.-M.

P. Dumon, W. Bogaerts, R. Baets, J.-M. Fedeli, and L. Fulbert, “Towards foundry approach for silicon photonics: silicon photonics platform epixfab,” Electron. Lett. 45, 581–582 (2009).
[Crossref]

Ferrari, C.

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness induced backscattering in optical silicon waveguides,” Phys. Rev. Lett. 104, 1–4 (2010).
[Crossref]

Fiers, M.

Fulbert, L.

P. Dumon, W. Bogaerts, R. Baets, J.-M. Fedeli, and L. Fulbert, “Towards foundry approach for silicon photonics: silicon photonics platform epixfab,” Electron. Lett. 45, 581–582 (2009).
[Crossref]

Georgas, M. S.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Ginste, D. V.

Goddard, L. L.

A. Arbabi, Y. M. Kang, C.-Y. Lu, E. Chow, and L. L. Goddard, “Realization of a narrowband single wavelength microring mirror,” Appl. Phys. Lett. 99, 091105 (2011).
[Crossref]

Grillot, F.

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall soi waveguides,” IEEE Photon. Technol. Lett. 16, 1661–1663 (2004).
[Crossref]

Gulde, S.

He, S.

Q. Huang, K. Ma, and S. He, “Experimental demonstration of single mode-splitting in microring with bragg gratings,” IEEE Photon. Technol. Lett. 27, 1402–1405 (2015).
[Crossref]

Heyn, P.

A. Li, T. Vaerenbergh, P. Heyn, P. Bienstman, and W. Bogaerts, “Backscattering in silicon microring resonators: a quantitative analysis,” Laser Photon. Rev. 10, 420–431 (2016).
[Crossref]

Huang, Q.

A. Li, Q. Huang, and W. Bogaerts, “Design of a single all-silicon ring resonator with a 150 nm free spectral range and a 100 nm tuning range around 1550 nm,” Photon. Res. 4, 84–92 (2016).
[Crossref]

Q. Huang, K. Ma, and S. He, “Experimental demonstration of single mode-splitting in microring with bragg gratings,” IEEE Photon. Technol. Lett. 27, 1402–1405 (2015).
[Crossref]

Jebali, A.

Kang, Y. M.

A. Arbabi, Y. M. Kang, C.-Y. Lu, E. Chow, and L. L. Goddard, “Realization of a narrowband single wavelength microring mirror,” Appl. Phys. Lett. 99, 091105 (2011).
[Crossref]

Kumar, R.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Kumar Selvaraja, S.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photon. Rev. 6, 47–73 (2012).
[Crossref]

Laval, S.

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall soi waveguides,” IEEE Photon. Technol. Lett. 16, 1661–1663 (2004).
[Crossref]

Lee, Y.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Leu, J. C.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Li, A.

A. Li, T. Vaerenbergh, P. Heyn, P. Bienstman, and W. Bogaerts, “Backscattering in silicon microring resonators: a quantitative analysis,” Laser Photon. Rev. 10, 420–431 (2016).
[Crossref]

A. Li, Q. Huang, and W. Bogaerts, “Design of a single all-silicon ring resonator with a 150 nm free spectral range and a 100 nm tuning range around 1550 nm,” Photon. Res. 4, 84–92 (2016).
[Crossref]

Lin, S.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Lipson, M.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[Crossref] [PubMed]

V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, “All-optical control of light on a silicon chip,” Nature 431, 1081–1084 (2004).
[Crossref] [PubMed]

Lu, C.-Y.

A. Arbabi, Y. M. Kang, C.-Y. Lu, E. Chow, and L. L. Goddard, “Realization of a narrowband single wavelength microring mirror,” Appl. Phys. Lett. 99, 091105 (2011).
[Crossref]

Ma, K.

Q. Huang, K. Ma, and S. He, “Experimental demonstration of single mode-splitting in microring with bragg gratings,” IEEE Photon. Technol. Lett. 27, 1402–1405 (2015).
[Crossref]

Martinelli, M.

F. Morichetti, A. Canciamilla, M. Martinelli, A. Samarelli, R. M. De La Rue, M. Sorel, and A. Melloni, “Coherent backscattering in optical microring resonators,” Appl. Phys. Lett. 96, 13–15 (2010).
[Crossref]

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness induced backscattering in optical silicon waveguides,” Phys. Rev. Lett. 104, 1–4 (2010).
[Crossref]

Melloni, A.

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness induced backscattering in optical silicon waveguides,” Phys. Rev. Lett. 104, 1–4 (2010).
[Crossref]

F. Morichetti, A. Canciamilla, M. Martinelli, A. Samarelli, R. M. De La Rue, M. Sorel, and A. Melloni, “Coherent backscattering in optical microring resonators,” Appl. Phys. Lett. 96, 13–15 (2010).
[Crossref]

Moll, N.

Morichetti, F.

F. Morichetti, A. Canciamilla, M. Martinelli, A. Samarelli, R. M. De La Rue, M. Sorel, and A. Melloni, “Coherent backscattering in optical microring resonators,” Appl. Phys. Lett. 96, 13–15 (2010).
[Crossref]

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness induced backscattering in optical silicon waveguides,” Phys. Rev. Lett. 104, 1–4 (2010).
[Crossref]

Moss, B. R.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Orcutt, J. S.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Ou, A. J.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Panepucci, R. R.

V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, “All-optical control of light on a silicon chip,” Nature 431, 1081–1084 (2004).
[Crossref] [PubMed]

Pascal, D.

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall soi waveguides,” IEEE Photon. Technol. Lett. 16, 1661–1663 (2004).
[Crossref]

Pavanello, F.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Popovic, M. A.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[Crossref] [PubMed]

Ram, R. J.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Samarelli, A.

F. Morichetti, A. Canciamilla, M. Martinelli, A. Samarelli, R. M. De La Rue, M. Sorel, and A. Melloni, “Coherent backscattering in optical microring resonators,” Appl. Phys. Lett. 96, 13–15 (2010).
[Crossref]

Schacht, E.

Schmidt, B.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[Crossref] [PubMed]

Schrauwen, B.

Shainline, J. M.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Sorel, M.

F. Morichetti, A. Canciamilla, M. Martinelli, A. Samarelli, R. M. De La Rue, M. Sorel, and A. Melloni, “Coherent backscattering in optical microring resonators,” Appl. Phys. Lett. 96, 13–15 (2010).
[Crossref]

Stojanovic, V. M.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Sun, C.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Torregiani, M.

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness induced backscattering in optical silicon waveguides,” Phys. Rev. Lett. 104, 1–4 (2010).
[Crossref]

Vaerenbergh, T.

A. Li, T. Vaerenbergh, P. Heyn, P. Bienstman, and W. Bogaerts, “Backscattering in silicon microring resonators: a quantitative analysis,” Laser Photon. Rev. 10, 420–431 (2016).
[Crossref]

Vaerenbergh, T. V.

Van Thourhout, D.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photon. Rev. 6, 47–73 (2012).
[Crossref]

Van Vaerenbergh, T.

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photon. Rev. 6, 47–73 (2012).
[Crossref]

Verstuyft, S.

Vivien, L.

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall soi waveguides,” IEEE Photon. Technol. Lett. 16, 1661–1663 (2004).
[Crossref]

Wade, M. T.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Waterman, A. S.

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Werquin, S.

Xu, Q.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[Crossref] [PubMed]

Appl. Phys. Lett. (2)

F. Morichetti, A. Canciamilla, M. Martinelli, A. Samarelli, R. M. De La Rue, M. Sorel, and A. Melloni, “Coherent backscattering in optical microring resonators,” Appl. Phys. Lett. 96, 13–15 (2010).
[Crossref]

A. Arbabi, Y. M. Kang, C.-Y. Lu, E. Chow, and L. L. Goddard, “Realization of a narrowband single wavelength microring mirror,” Appl. Phys. Lett. 99, 091105 (2011).
[Crossref]

Electron. Lett. (1)

P. Dumon, W. Bogaerts, R. Baets, J.-M. Fedeli, and L. Fulbert, “Towards foundry approach for silicon photonics: silicon photonics platform epixfab,” Electron. Lett. 45, 581–582 (2009).
[Crossref]

IEEE Photon. Technol. Lett. (2)

Q. Huang, K. Ma, and S. He, “Experimental demonstration of single mode-splitting in microring with bragg gratings,” IEEE Photon. Technol. Lett. 27, 1402–1405 (2015).
[Crossref]

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall soi waveguides,” IEEE Photon. Technol. Lett. 16, 1661–1663 (2004).
[Crossref]

J. Emerg. Technol. Comput. Syst. (1)

R. G. Beausoleil, “Large-scale integrated photonics for high-performance interconnects,” J. Emerg. Technol. Comput. Syst. 7, 1–54 (2011).
[Crossref]

J. Opt. Soc. Am. B (1)

Laser Photon. Rev. (2)

A. Li, T. Vaerenbergh, P. Heyn, P. Bienstman, and W. Bogaerts, “Backscattering in silicon microring resonators: a quantitative analysis,” Laser Photon. Rev. 10, 420–431 (2016).
[Crossref]

W. Bogaerts, P. De Heyn, T. Van Vaerenbergh, K. De Vos, S. Kumar Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. Van Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photon. Rev. 6, 47–73 (2012).
[Crossref]

Nature (3)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435, 325–327 (2005).
[Crossref] [PubMed]

V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, “All-optical control of light on a silicon chip,” Nature 431, 1081–1084 (2004).
[Crossref] [PubMed]

C. Sun, M. T. Wade, Y. Lee, J. S. Orcutt, L. Alloatti, M. S. Georgas, A. S. Waterman, J. M. Shainline, R. R. Avizienis, S. Lin, B. R. Moss, R. Kumar, F. Pavanello, A. H. Atabaki, H. M. Cook, A. J. Ou, J. C. Leu, Y. Chen, K. Asanovic, R. J. Ram, M. A. Popović, and V. M. Stojanović, “Single-chip microprocessor that communicates directly using light,” Nature 528, 534–538 (2015).
[Crossref] [PubMed]

Opt. Express (3)

Photon. Res. (1)

Phys. Rev. Lett. (1)

F. Morichetti, A. Canciamilla, C. Ferrari, M. Torregiani, A. Melloni, and M. Martinelli, “Roughness induced backscattering in optical silicon waveguides,” Phys. Rev. Lett. 104, 1–4 (2010).
[Crossref]

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (7)

Fig. 1
Fig. 1 (a) shows a brief schematic for a ring resonator with backscattering, which is modelled by a lumped reflector.(b) gives the simulated spectra of such a ring resonator to demonstrate the effects of backscattering in the circuit. Note the clear resonance splitting in through and drop port, and the high transmission in add port and in port.
Fig. 2
Fig. 2 Schematics of the ring with a reflector and the reflector itself, respectively.
Fig. 3
Fig. 3 Simulated reflection spectrum of the tunable reflector. (a) ΔL = 0 produces a flat spectrum. (b) ΔL = 50 shows a strong, periodic wavelength dependence oscillating between 0 and 100%. (c) Adding 0.5π phase shift in one arm can generate a change in reflectivity from 0 to 100%. Blue and red corresponds with an ideal directional coupler case and a realistic directional coupler case, respectively. The reflection does not reach 100% because of the small propagation loss of the waveguides which is taken into account. (d) shows the reflector with a phase shifter used to simulate the tunability.
Fig. 4
Fig. 4 Simulated through port spectrum of a ring circuit with only backscattering and other parasitics in the circuit, including reflections and backcoupling at the directional couplers (a), and with both backscattering and tunable reflector (b) and (c). It shows clearly how the resonance shape evolves with phase shift. (d) gives the brief schematic of the device with a phase shifter.
Fig. 5
Fig. 5 (a) gives the overall view of the devices fabricated after heater processing. (b) presents a zoomed view of one specific device.
Fig. 6
Fig. 6 Two measured spectra of simple ring resonators (without reflectors) on the same chip, located close to the ring resonator with tunable reflector. Both rings, which have different coupling conditions, show clear resonance-splitting in most resonance peaks.
Fig. 7
Fig. 7 Experimental measurements of compensated backscattering. (a) demonstrates the control of all the resonances. (b) gives a zoomed-in view about how the resonance shapes evolve from clearly split to non-split. (c) shows the same compensation for the output at the drop port, while (d) and (e) show how our device can suppress the unwanted output from add and in port.

Metrics