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Localized in situ cladding annealing for post-fabrication trimming of silicon photonic integrated circuits

Steven Spector, Jeffrey M. Knecht, and Paul W. Juodawlkis

Open Access Open Access

Abstract

We report the use of localized annealing via in situ heaters to induce a semi-permanent change in the refractive index of the cladding in ring resonator filters. When compared to other methods for post-fabrication trimming, this method has the advantage that no additional equipment, other than a supply of electrical power, is necessary to cause the index change. Two cladding materials were used: hydrogen silsesquioxane (HSQ) for samples that were externally annealed, and PECVD oxide for samples that were annealed with in situ heaters. The resonant wavelengths could be adjusted by as much as 3.0 nm and 1.7 nm for the HSQ and PECVD cladded filters, respectively. The trimming of a 5 channel, single ring filter bank, and a single, double ring filter is demonstrated.

© 2016 Optical Society of America

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Figures (6)
Fig. 1
Fig. 1 The bake induced change in the resonant wavelengths of HSQ coated ring resonators. The left axis indicates the measured shift in resonance. The right axis shows an estimate of the index change in the HSQ required for the change in resonant wavelength.

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Fig. 2
Fig. 2 Sketch and SEM image of filter with two coupled rings. This image was taken after the rings and heaters were exposed, just prior to the application of the PECVD oxide. A pair of heaters surround the sides of each ring.

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Fig. 3
Fig. 3 The induced change in the resonant wavelengths of low temperature PECVD oxide coated ring resonators. The changes in resonant wavelengths were induced by in situ heaters using the amount of power shown. The measurements were made with the heaters off. Note the y scale is reversed, and that the shifts in resonant wavelengths were negative.

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Fig. 4
Fig. 4 An example of an 5 channel filter bank measured (a) before and (b) after trimming. Shown is the through port data for the filter bank. The resonance wavelengths are shown by the local minima. Before trimming, the spacing of the resonant frequencies is random. b) After trimming, the resonant frequencies are equally spaced by 0.8 nm. Shown in (c) is a diagram of the 5 channel filter bank.

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Fig. 5
Fig. 5 Trimming of a filter channel with two coupled rings. (a) Shows the drop port transmission, so both ring resonances are visible. One ring can be adjusted independent of the other. In this example, the initial resonance wavelength of one ring is at 1543.4 nm. After the maximum practical adjustment, the resonance of that ring shifts to 1541.7 nm, with no observable effect on the resonant wavelength of the adjacent ring at 1543 nm. (b) The adjacent ring is then brought into co-resonance with the first ring at 1541.7 nm.

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Fig. 6
Fig. 6 The stability of the trimming. After a day of storage the resonant wavelength of each ring begins to shift back to its initial wavelength. Storing the sample with a desiccant reduces this shift.

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Tables (1)

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Table 1 Temperature-induced changes of refractive indices of cladding materials.

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