Abstract

Pulsed laser nanotexturing of metal films represents an ultra-fast, high-performance and cost-effective processing technology for fabrication of various functional surfaces widely used in plasmonics, biosensing, and photovoltaics. However, this approach usually requires high-NA lenses to focus a laser beam onto a few-micron spot as well as a micropositioning platform to move this spot along the sample surface, which increases the cost of the produced functional surfaces and limits the performance of laser-assisted nanotexturing techniques. In this paper we report on a laser-assisted technology for the fabrication of large-scale nanotextured metal substrates. In our approach, speckle-modulated patterns obtained by passing nanosecond laser pulses through the simplest diffusive object were utilized to cover a thin gold film with closely packed micron-sized structures - nanojets, nanobumps and through holes - previously reported only for single-shot nanoablation with tightly focused laser beams. The presented easy-to-implement technology, being one of the simplest of ever reported, since it requires neither focusing lenses nor micropositioning platforms, was shown to provide a way to pattern millimeter-size areas with the nano-sized jets at an average recording density of 35∙103 nanostructures per square millimeter and an average recording speed of 4.5·103 nanostructures per pulse. The fabricated nanotextured Au substrates were shown to yield spatially uniform surface-enhanced fluorescence signals from the Rhodamine 6G organic dye with an averaged 5.3-fold enhancement factor as compared with non-treated Au surface.

© 2016 Optical Society of America

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References

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    [Crossref] [PubMed]

2016 (2)

N. Inogamov, V. Zhakhovsky, and K. Migdal, “Laser-induced spalling of thin metal film from silica substrate followed by inflation of microbump,” Appl. Phys., A Mater. Sci. Process. 122(4), 1–9 (2016).
[Crossref]

Y. Hashimoto, G. Seniutinas, A. Balčytis, S. Juodkazis, and Y. Nishijima, “Au-Ag-Cu nano-alloys: tailoring of permittivity,” Sci. Rep. 6, 25010 (2016).
[Crossref] [PubMed]

2015 (4)

S. Babar and J. Weaver, “Optical constants of Cu, Ag, and Au revisited,” Appl. Opt. 54(3), 477–481 (2015).
[Crossref]

A. Kuchmizhak, D. Pavlov, O. Vitrik, and Y. Kulchin, “Laser ablative fabrication of nanocrowns and nanojets on the Cu supported film surface using femtosecond laser pulses,” Appl. Surf. Sci. 357, 2378–2384 (2015).
[Crossref]

S. M. Asiala, J. M. Marr, G. Gervinskas, S. Juodkazis, and Z. D. Schultz, “Plasmonic color analysis of Ag-coated black-Si SERS substrate,” Phys. Chem. Chem. Phys. 17(45), 30461–30467 (2015).
[Crossref] [PubMed]

A. A. Kuchmizhak, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, Y. N. Kulchin, O. B. Vitrik, and T. V. Efimov, “Flash-imprinting of intense femtosecond surface plasmons for advanced nanoantenna fabrication,” Opt. Lett. 40(8), 1687–1690 (2015).
[Crossref] [PubMed]

2014 (9)

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Y. Zhang, N. Stokes, B. Jia, S. Fan, and M. Gu, “Towards ultra-thin plasmonic silicon wafer solar cells with minimized efficiency loss,” Sci. Rep. 4, 4939 (2014).
[PubMed]

V. Emel’yanov, D. Zayarniy, A. Ionin, P. Danilov, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and D. Shikunov, “Thermocavitation melt instability and micro-crown formation near the threshold for femtosecond laser spallation of a silicon surface,” JETP Lett. 100(3), 145–149 (2014).
[Crossref]

V. Emel’yanov, D. Zayarniy, A. Ionin, I. Kiseleva, S. Kudryashov, S. Makarov, and A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

A. Kuchmizhak, S. Gurbatov, Y. Kulchin, and O. Vitrik, “Fabrication of porous metal nanoparticles and microbumps by means of nanosecond laser pulses focused through the fiber microaxicon,” Opt. Express 22(16), 19149–19155 (2014).
[Crossref] [PubMed]

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, V. I. Emel’yanov, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Formation of crownlike and related nanostructures on thin supported gold films irradiated by single diffraction-limited nanosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 90(2), 023017 (2014).
[Crossref] [PubMed]

2013 (2)

2012 (1)

2011 (3)

M. R. Jones, K. D. Osberg, R. J. Macfarlane, M. R. Langille, and C. A. Mirkin, “Templated techniques for the synthesis and assembly of plasmonic nanostructures,” Chem. Rev. 111(6), 3736–3827 (2011).
[Crossref] [PubMed]

M. Rycenga, C. M. Cobley, J. Zeng, W. Li, C. H. Moran, Q. Zhang, D. Qin, and Y. Xia, “Controlling the synthesis and assembly of silver nanostructures for plasmonic applications,” Chem. Rev. 111(6), 3669–3712 (2011).
[Crossref] [PubMed]

Y. Zhao and A. Alu, “Manipulating light polarization with ultrathin plasmonic metasurfaces,” Phys. Rev. B 84(20), 205428 (2011).
[Crossref]

2010 (2)

2009 (2)

Y. Nakata, K. Tsuchida, N. Miyanaga, and H. Furusho, “Liquidly process in femtosecond laser processing,” Appl. Surf. Sci. 255(24), 9761–9763 (2009).
[Crossref]

Y. Xia, Y. Xiong, B. Lim, and S. E. Skrabalak, “Shape-controlled synthesis of metal nanocrystals: simple chemistry meets complex physics?” Angew. Chem. Int. Ed. Engl. 48(1), 60–103 (2009).
[Crossref] [PubMed]

2007 (1)

M. K. Miller, K. F. Russell, K. Thompson, R. Alvis, and D. J. Larson, “Review of atom probe FIB-based specimen preparation methods,” Microsc. Microanal. 13(06), 428–436 (2007).
[Crossref] [PubMed]

2006 (1)

Y. Lin, M. Hong, T. Chong, C. Lim, G. Chen, L. Tan, Z. Wang, and L. Shi, “Ultrafast-laser-induced parallel phase-change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

2005 (2)

S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser microfabrication of periodic structures using a microlens array,” Appl. Phys., A Mater. Sci. Process. 80(4), 683–685 (2005).
[Crossref]

J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, and B. Chichkov, “Nanotexturing of gold films by femtosecond laser-induced melt dynamics,” Appl. Phys., A Mater. Sci. Process. 81(2), 325–328 (2005).
[Crossref]

2003 (1)

Y. Nakata, T. Okada, and M. Maeda, “Nano-sized hollow bump array generated by single femtosecond laser pulse,” Jpn. J. Appl. Phys. 42(Part 2, No. 12A), L1452–L1454 (2003).
[Crossref]

Alu, A.

Y. Zhao and A. Alu, “Manipulating light polarization with ultrathin plasmonic metasurfaces,” Phys. Rev. B 84(20), 205428 (2011).
[Crossref]

Alvis, R.

M. K. Miller, K. F. Russell, K. Thompson, R. Alvis, and D. J. Larson, “Review of atom probe FIB-based specimen preparation methods,” Microsc. Microanal. 13(06), 428–436 (2007).
[Crossref] [PubMed]

Asiala, S. M.

S. M. Asiala, J. M. Marr, G. Gervinskas, S. Juodkazis, and Z. D. Schultz, “Plasmonic color analysis of Ag-coated black-Si SERS substrate,” Phys. Chem. Chem. Phys. 17(45), 30461–30467 (2015).
[Crossref] [PubMed]

Babar, S.

Balcytis, A.

Y. Hashimoto, G. Seniutinas, A. Balčytis, S. Juodkazis, and Y. Nishijima, “Au-Ag-Cu nano-alloys: tailoring of permittivity,” Sci. Rep. 6, 25010 (2016).
[Crossref] [PubMed]

Bauer, T.

J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, and B. Chichkov, “Nanotexturing of gold films by femtosecond laser-induced melt dynamics,” Appl. Phys., A Mater. Sci. Process. 81(2), 325–328 (2005).
[Crossref]

Boltasseva, A.

A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar photonics with metasurfaces,” Science 339(6125), 1232009 (2013).
[Crossref] [PubMed]

Cao, Z.

Capasso, F.

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

Chen, G.

Y. Lin, M. Hong, T. Chong, C. Lim, G. Chen, L. Tan, Z. Wang, and L. Shi, “Ultrafast-laser-induced parallel phase-change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

Chichkov, B.

J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, and B. Chichkov, “Nanotexturing of gold films by femtosecond laser-induced melt dynamics,” Appl. Phys., A Mater. Sci. Process. 81(2), 325–328 (2005).
[Crossref]

Chichkov, B. N.

Chong, T.

Y. Lin, M. Hong, T. Chong, C. Lim, G. Chen, L. Tan, Z. Wang, and L. Shi, “Ultrafast-laser-induced parallel phase-change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

Chua, J. K.

Cobley, C. M.

M. Rycenga, C. M. Cobley, J. Zeng, W. Li, C. H. Moran, Q. Zhang, D. Qin, and Y. Xia, “Controlling the synthesis and assembly of silver nanostructures for plasmonic applications,” Chem. Rev. 111(6), 3669–3712 (2011).
[Crossref] [PubMed]

Danilov, P.

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

V. Emel’yanov, D. Zayarniy, A. Ionin, P. Danilov, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and D. Shikunov, “Thermocavitation melt instability and micro-crown formation near the threshold for femtosecond laser spallation of a silicon surface,” JETP Lett. 100(3), 145–149 (2014).
[Crossref]

Drozdova, E.

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Efimov, T. V.

Emel’yanov, V.

V. Emel’yanov, D. Zayarniy, A. Ionin, P. Danilov, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and D. Shikunov, “Thermocavitation melt instability and micro-crown formation near the threshold for femtosecond laser spallation of a silicon surface,” JETP Lett. 100(3), 145–149 (2014).
[Crossref]

V. Emel’yanov, D. Zayarniy, A. Ionin, I. Kiseleva, S. Kudryashov, S. Makarov, and A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Emel’yanov, V. I.

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, V. I. Emel’yanov, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Formation of crownlike and related nanostructures on thin supported gold films irradiated by single diffraction-limited nanosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 90(2), 023017 (2014).
[Crossref] [PubMed]

Fallnich, C.

J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, and B. Chichkov, “Nanotexturing of gold films by femtosecond laser-induced melt dynamics,” Appl. Phys., A Mater. Sci. Process. 81(2), 325–328 (2005).
[Crossref]

Fan, S.

Y. Zhang, N. Stokes, B. Jia, S. Fan, and M. Gu, “Towards ultra-thin plasmonic silicon wafer solar cells with minimized efficiency loss,” Sci. Rep. 4, 4939 (2014).
[PubMed]

Francescato, Y.

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Furusho, H.

Y. Nakata, K. Tsuchida, N. Miyanaga, and H. Furusho, “Liquidly process in femtosecond laser processing,” Appl. Surf. Sci. 255(24), 9761–9763 (2009).
[Crossref]

Gervinskas, G.

S. M. Asiala, J. M. Marr, G. Gervinskas, S. Juodkazis, and Z. D. Schultz, “Plasmonic color analysis of Ag-coated black-Si SERS substrate,” Phys. Chem. Chem. Phys. 17(45), 30461–30467 (2015).
[Crossref] [PubMed]

Giannini, V.

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Gu, M.

Y. Zhang, N. Stokes, B. Jia, S. Fan, and M. Gu, “Towards ultra-thin plasmonic silicon wafer solar cells with minimized efficiency loss,” Sci. Rep. 4, 4939 (2014).
[PubMed]

Gurbatov, S.

Hashimoto, Y.

Y. Hashimoto, G. Seniutinas, A. Balčytis, S. Juodkazis, and Y. Nishijima, “Au-Ag-Cu nano-alloys: tailoring of permittivity,” Sci. Rep. 6, 25010 (2016).
[Crossref] [PubMed]

Hoffmann, J. M.

Hong, M.

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Y. Lin, M. Hong, T. Chong, C. Lim, G. Chen, L. Tan, Z. Wang, and L. Shi, “Ultrafast-laser-induced parallel phase-change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

Inogamov, N.

N. Inogamov, V. Zhakhovsky, and K. Migdal, “Laser-induced spalling of thin metal film from silica substrate followed by inflation of microbump,” Appl. Phys., A Mater. Sci. Process. 122(4), 1–9 (2016).
[Crossref]

Ionin, A.

V. Emel’yanov, D. Zayarniy, A. Ionin, I. Kiseleva, S. Kudryashov, S. Makarov, and A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

V. Emel’yanov, D. Zayarniy, A. Ionin, P. Danilov, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and D. Shikunov, “Thermocavitation melt instability and micro-crown formation near the threshold for femtosecond laser spallation of a silicon surface,” JETP Lett. 100(3), 145–149 (2014).
[Crossref]

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

Ionin, A. A.

A. A. Kuchmizhak, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, Y. N. Kulchin, O. B. Vitrik, and T. V. Efimov, “Flash-imprinting of intense femtosecond surface plasmons for advanced nanoantenna fabrication,” Opt. Lett. 40(8), 1687–1690 (2015).
[Crossref] [PubMed]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, V. I. Emel’yanov, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Formation of crownlike and related nanostructures on thin supported gold films irradiated by single diffraction-limited nanosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 90(2), 023017 (2014).
[Crossref] [PubMed]

Jia, B.

Y. Zhang, N. Stokes, B. Jia, S. Fan, and M. Gu, “Towards ultra-thin plasmonic silicon wafer solar cells with minimized efficiency loss,” Sci. Rep. 4, 4939 (2014).
[PubMed]

Jones, M. R.

M. R. Jones, K. D. Osberg, R. J. Macfarlane, M. R. Langille, and C. A. Mirkin, “Templated techniques for the synthesis and assembly of plasmonic nanostructures,” Chem. Rev. 111(6), 3736–3827 (2011).
[Crossref] [PubMed]

Juodkazis, S.

Y. Hashimoto, G. Seniutinas, A. Balčytis, S. Juodkazis, and Y. Nishijima, “Au-Ag-Cu nano-alloys: tailoring of permittivity,” Sci. Rep. 6, 25010 (2016).
[Crossref] [PubMed]

S. M. Asiala, J. M. Marr, G. Gervinskas, S. Juodkazis, and Z. D. Schultz, “Plasmonic color analysis of Ag-coated black-Si SERS substrate,” Phys. Chem. Chem. Phys. 17(45), 30461–30467 (2015).
[Crossref] [PubMed]

S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser microfabrication of periodic structures using a microlens array,” Appl. Phys., A Mater. Sci. Process. 80(4), 683–685 (2005).
[Crossref]

Kildishev, A. V.

A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar photonics with metasurfaces,” Science 339(6125), 1232009 (2013).
[Crossref] [PubMed]

Kiseleva, I.

V. Emel’yanov, D. Zayarniy, A. Ionin, I. Kiseleva, S. Kudryashov, S. Makarov, and A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Kivshar, Y. S.

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Koch, J.

C. Unger, J. Koch, L. Overmeyer, and B. N. Chichkov, “Time-resolved studies of femtosecond-laser induced melt dynamics,” Opt. Express 20(22), 24864–24872 (2012).
[Crossref] [PubMed]

J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, and B. Chichkov, “Nanotexturing of gold films by femtosecond laser-induced melt dynamics,” Appl. Phys., A Mater. Sci. Process. 81(2), 325–328 (2005).
[Crossref]

Korte, F.

J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, and B. Chichkov, “Nanotexturing of gold films by femtosecond laser-induced melt dynamics,” Appl. Phys., A Mater. Sci. Process. 81(2), 325–328 (2005).
[Crossref]

Kuchmizhak, A.

A. Kuchmizhak, D. Pavlov, O. Vitrik, and Y. Kulchin, “Laser ablative fabrication of nanocrowns and nanojets on the Cu supported film surface using femtosecond laser pulses,” Appl. Surf. Sci. 357, 2378–2384 (2015).
[Crossref]

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

A. Kuchmizhak, S. Gurbatov, Y. Kulchin, and O. Vitrik, “Fabrication of porous metal nanoparticles and microbumps by means of nanosecond laser pulses focused through the fiber microaxicon,” Opt. Express 22(16), 19149–19155 (2014).
[Crossref] [PubMed]

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

Kuchmizhak, A. A.

A. A. Kuchmizhak, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, Y. N. Kulchin, O. B. Vitrik, and T. V. Efimov, “Flash-imprinting of intense femtosecond surface plasmons for advanced nanoantenna fabrication,” Opt. Lett. 40(8), 1687–1690 (2015).
[Crossref] [PubMed]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, V. I. Emel’yanov, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Formation of crownlike and related nanostructures on thin supported gold films irradiated by single diffraction-limited nanosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 90(2), 023017 (2014).
[Crossref] [PubMed]

Kudryashov, S.

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

V. Emel’yanov, D. Zayarniy, A. Ionin, P. Danilov, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and D. Shikunov, “Thermocavitation melt instability and micro-crown formation near the threshold for femtosecond laser spallation of a silicon surface,” JETP Lett. 100(3), 145–149 (2014).
[Crossref]

V. Emel’yanov, D. Zayarniy, A. Ionin, I. Kiseleva, S. Kudryashov, S. Makarov, and A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

Kudryashov, S. I.

A. A. Kuchmizhak, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, Y. N. Kulchin, O. B. Vitrik, and T. V. Efimov, “Flash-imprinting of intense femtosecond surface plasmons for advanced nanoantenna fabrication,” Opt. Lett. 40(8), 1687–1690 (2015).
[Crossref] [PubMed]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, V. I. Emel’yanov, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Formation of crownlike and related nanostructures on thin supported gold films irradiated by single diffraction-limited nanosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 90(2), 023017 (2014).
[Crossref] [PubMed]

Kulchin, Y.

A. Kuchmizhak, D. Pavlov, O. Vitrik, and Y. Kulchin, “Laser ablative fabrication of nanocrowns and nanojets on the Cu supported film surface using femtosecond laser pulses,” Appl. Surf. Sci. 357, 2378–2384 (2015).
[Crossref]

A. Kuchmizhak, S. Gurbatov, Y. Kulchin, and O. Vitrik, “Fabrication of porous metal nanoparticles and microbumps by means of nanosecond laser pulses focused through the fiber microaxicon,” Opt. Express 22(16), 19149–19155 (2014).
[Crossref] [PubMed]

Kulchin, Y. N.

A. A. Kuchmizhak, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, Y. N. Kulchin, O. B. Vitrik, and T. V. Efimov, “Flash-imprinting of intense femtosecond surface plasmons for advanced nanoantenna fabrication,” Opt. Lett. 40(8), 1687–1690 (2015).
[Crossref] [PubMed]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, V. I. Emel’yanov, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Formation of crownlike and related nanostructures on thin supported gold films irradiated by single diffraction-limited nanosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 90(2), 023017 (2014).
[Crossref] [PubMed]

Kulchin, Yu.

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

Kuznetsov, A. I.

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Lal, A.

Y. Lu and A. Lal, “High-efficiency ordered silicon nano-conical-frustum array solar cells by self-powered parallel electron lithography,” Nano Lett. 10(11), 4651–4656 (2010).
[Crossref] [PubMed]

Langille, M. R.

M. R. Jones, K. D. Osberg, R. J. Macfarlane, M. R. Langille, and C. A. Mirkin, “Templated techniques for the synthesis and assembly of plasmonic nanostructures,” Chem. Rev. 111(6), 3736–3827 (2011).
[Crossref] [PubMed]

Larson, D. J.

M. K. Miller, K. F. Russell, K. Thompson, R. Alvis, and D. J. Larson, “Review of atom probe FIB-based specimen preparation methods,” Microsc. Microanal. 13(06), 428–436 (2007).
[Crossref] [PubMed]

Lei, D. Y.

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Li, W.

M. Rycenga, C. M. Cobley, J. Zeng, W. Li, C. H. Moran, Q. Zhang, D. Qin, and Y. Xia, “Controlling the synthesis and assembly of silver nanostructures for plasmonic applications,” Chem. Rev. 111(6), 3669–3712 (2011).
[Crossref] [PubMed]

Lim, B.

Y. Xia, Y. Xiong, B. Lim, and S. E. Skrabalak, “Shape-controlled synthesis of metal nanocrystals: simple chemistry meets complex physics?” Angew. Chem. Int. Ed. Engl. 48(1), 60–103 (2009).
[Crossref] [PubMed]

Lim, C.

Y. Lin, M. Hong, T. Chong, C. Lim, G. Chen, L. Tan, Z. Wang, and L. Shi, “Ultrafast-laser-induced parallel phase-change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

Lin, Y.

Y. Lin, M. Hong, T. Chong, C. Lim, G. Chen, L. Tan, Z. Wang, and L. Shi, “Ultrafast-laser-induced parallel phase-change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

Lu, Y.

Y. Lu and A. Lal, “High-efficiency ordered silicon nano-conical-frustum array solar cells by self-powered parallel electron lithography,” Nano Lett. 10(11), 4651–4656 (2010).
[Crossref] [PubMed]

Luk’yanchuk, B.

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Macfarlane, R. J.

M. R. Jones, K. D. Osberg, R. J. Macfarlane, M. R. Langille, and C. A. Mirkin, “Templated techniques for the synthesis and assembly of plasmonic nanostructures,” Chem. Rev. 111(6), 3736–3827 (2011).
[Crossref] [PubMed]

Maeda, M.

Y. Nakata, T. Okada, and M. Maeda, “Nano-sized hollow bump array generated by single femtosecond laser pulse,” Jpn. J. Appl. Phys. 42(Part 2, No. 12A), L1452–L1454 (2003).
[Crossref]

Maier, S. A.

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Makarov, S.

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

V. Emel’yanov, D. Zayarniy, A. Ionin, I. Kiseleva, S. Kudryashov, S. Makarov, and A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

V. Emel’yanov, D. Zayarniy, A. Ionin, P. Danilov, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and D. Shikunov, “Thermocavitation melt instability and micro-crown formation near the threshold for femtosecond laser spallation of a silicon surface,” JETP Lett. 100(3), 145–149 (2014).
[Crossref]

Makarov, S. V.

A. A. Kuchmizhak, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, Y. N. Kulchin, O. B. Vitrik, and T. V. Efimov, “Flash-imprinting of intense femtosecond surface plasmons for advanced nanoantenna fabrication,” Opt. Lett. 40(8), 1687–1690 (2015).
[Crossref] [PubMed]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, V. I. Emel’yanov, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Formation of crownlike and related nanostructures on thin supported gold films irradiated by single diffraction-limited nanosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 90(2), 023017 (2014).
[Crossref] [PubMed]

Marr, J. M.

S. M. Asiala, J. M. Marr, G. Gervinskas, S. Juodkazis, and Z. D. Schultz, “Plasmonic color analysis of Ag-coated black-Si SERS substrate,” Phys. Chem. Chem. Phys. 17(45), 30461–30467 (2015).
[Crossref] [PubMed]

Matsuo, S.

S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser microfabrication of periodic structures using a microlens array,” Appl. Phys., A Mater. Sci. Process. 80(4), 683–685 (2005).
[Crossref]

Migdal, K.

N. Inogamov, V. Zhakhovsky, and K. Migdal, “Laser-induced spalling of thin metal film from silica substrate followed by inflation of microbump,” Appl. Phys., A Mater. Sci. Process. 122(4), 1–9 (2016).
[Crossref]

Miller, M. K.

M. K. Miller, K. F. Russell, K. Thompson, R. Alvis, and D. J. Larson, “Review of atom probe FIB-based specimen preparation methods,” Microsc. Microanal. 13(06), 428–436 (2007).
[Crossref] [PubMed]

Mirkin, C. A.

M. R. Jones, K. D. Osberg, R. J. Macfarlane, M. R. Langille, and C. A. Mirkin, “Templated techniques for the synthesis and assembly of plasmonic nanostructures,” Chem. Rev. 111(6), 3736–3827 (2011).
[Crossref] [PubMed]

Miroshnichenko, A. E.

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Misawa, H.

S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser microfabrication of periodic structures using a microlens array,” Appl. Phys., A Mater. Sci. Process. 80(4), 683–685 (2005).
[Crossref]

Miyanaga, N.

Y. Nakata, K. Tsuchida, N. Miyanaga, and H. Furusho, “Liquidly process in femtosecond laser processing,” Appl. Surf. Sci. 255(24), 9761–9763 (2009).
[Crossref]

Moran, C. H.

M. Rycenga, C. M. Cobley, J. Zeng, W. Li, C. H. Moran, Q. Zhang, D. Qin, and Y. Xia, “Controlling the synthesis and assembly of silver nanostructures for plasmonic applications,” Chem. Rev. 111(6), 3669–3712 (2011).
[Crossref] [PubMed]

Murukeshan, V. M.

Nakata, Y.

Y. Nakata, K. Tsuchida, N. Miyanaga, and H. Furusho, “Liquidly process in femtosecond laser processing,” Appl. Surf. Sci. 255(24), 9761–9763 (2009).
[Crossref]

Y. Nakata, T. Okada, and M. Maeda, “Nano-sized hollow bump array generated by single femtosecond laser pulse,” Jpn. J. Appl. Phys. 42(Part 2, No. 12A), L1452–L1454 (2003).
[Crossref]

Nepomnyashchii, A.

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

Nishijima, Y.

Y. Hashimoto, G. Seniutinas, A. Balčytis, S. Juodkazis, and Y. Nishijima, “Au-Ag-Cu nano-alloys: tailoring of permittivity,” Sci. Rep. 6, 25010 (2016).
[Crossref] [PubMed]

Odinokov, S.

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Okada, T.

Y. Nakata, T. Okada, and M. Maeda, “Nano-sized hollow bump array generated by single femtosecond laser pulse,” Jpn. J. Appl. Phys. 42(Part 2, No. 12A), L1452–L1454 (2003).
[Crossref]

Osberg, K. D.

M. R. Jones, K. D. Osberg, R. J. Macfarlane, M. R. Langille, and C. A. Mirkin, “Templated techniques for the synthesis and assembly of plasmonic nanostructures,” Chem. Rev. 111(6), 3736–3827 (2011).
[Crossref] [PubMed]

Ostendorf, A.

J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, and B. Chichkov, “Nanotexturing of gold films by femtosecond laser-induced melt dynamics,” Appl. Phys., A Mater. Sci. Process. 81(2), 325–328 (2005).
[Crossref]

Overmeyer, L.

Pavlov, D.

A. Kuchmizhak, D. Pavlov, O. Vitrik, and Y. Kulchin, “Laser ablative fabrication of nanocrowns and nanojets on the Cu supported film surface using femtosecond laser pulses,” Appl. Surf. Sci. 357, 2378–2384 (2015).
[Crossref]

Qin, D.

M. Rycenga, C. M. Cobley, J. Zeng, W. Li, C. H. Moran, Q. Zhang, D. Qin, and Y. Xia, “Controlling the synthesis and assembly of silver nanostructures for plasmonic applications,” Chem. Rev. 111(6), 3669–3712 (2011).
[Crossref] [PubMed]

Rahmani, M.

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Reininghaus, M.

Rudenko, A.

V. Emel’yanov, D. Zayarniy, A. Ionin, I. Kiseleva, S. Kudryashov, S. Makarov, and A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

V. Emel’yanov, D. Zayarniy, A. Ionin, P. Danilov, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and D. Shikunov, “Thermocavitation melt instability and micro-crown formation near the threshold for femtosecond laser spallation of a silicon surface,” JETP Lett. 100(3), 145–149 (2014).
[Crossref]

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

Rudenko, A. A.

Russell, K. F.

M. K. Miller, K. F. Russell, K. Thompson, R. Alvis, and D. J. Larson, “Review of atom probe FIB-based specimen preparation methods,” Microsc. Microanal. 13(06), 428–436 (2007).
[Crossref] [PubMed]

Rycenga, M.

M. Rycenga, C. M. Cobley, J. Zeng, W. Li, C. H. Moran, Q. Zhang, D. Qin, and Y. Xia, “Controlling the synthesis and assembly of silver nanostructures for plasmonic applications,” Chem. Rev. 111(6), 3669–3712 (2011).
[Crossref] [PubMed]

Samokhin, A.

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

Savchuk, A.

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

Schultz, Z. D.

S. M. Asiala, J. M. Marr, G. Gervinskas, S. Juodkazis, and Z. D. Schultz, “Plasmonic color analysis of Ag-coated black-Si SERS substrate,” Phys. Chem. Chem. Phys. 17(45), 30461–30467 (2015).
[Crossref] [PubMed]

Seniutinas, G.

Y. Hashimoto, G. Seniutinas, A. Balčytis, S. Juodkazis, and Y. Nishijima, “Au-Ag-Cu nano-alloys: tailoring of permittivity,” Sci. Rep. 6, 25010 (2016).
[Crossref] [PubMed]

Shalaev, V. M.

A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar photonics with metasurfaces,” Science 339(6125), 1232009 (2013).
[Crossref] [PubMed]

Shi, L.

Y. Lin, M. Hong, T. Chong, C. Lim, G. Chen, L. Tan, Z. Wang, and L. Shi, “Ultrafast-laser-induced parallel phase-change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

Shikunov, D.

V. Emel’yanov, D. Zayarniy, A. Ionin, P. Danilov, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and D. Shikunov, “Thermocavitation melt instability and micro-crown formation near the threshold for femtosecond laser spallation of a silicon surface,” JETP Lett. 100(3), 145–149 (2014).
[Crossref]

Skrabalak, S. E.

Y. Xia, Y. Xiong, B. Lim, and S. E. Skrabalak, “Shape-controlled synthesis of metal nanocrystals: simple chemistry meets complex physics?” Angew. Chem. Int. Ed. Engl. 48(1), 60–103 (2009).
[Crossref] [PubMed]

Sreekanth, K. V.

Stokes, N.

Y. Zhang, N. Stokes, B. Jia, S. Fan, and M. Gu, “Towards ultra-thin plasmonic silicon wafer solar cells with minimized efficiency loss,” Sci. Rep. 4, 4939 (2014).
[PubMed]

Tan, L.

Y. Lin, M. Hong, T. Chong, C. Lim, G. Chen, L. Tan, Z. Wang, and L. Shi, “Ultrafast-laser-induced parallel phase-change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

Taubner, T.

Thompson, K.

M. K. Miller, K. F. Russell, K. Thompson, R. Alvis, and D. J. Larson, “Review of atom probe FIB-based specimen preparation methods,” Microsc. Microanal. 13(06), 428–436 (2007).
[Crossref] [PubMed]

Tribelsky, M. I.

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Tsuchida, K.

Y. Nakata, K. Tsuchida, N. Miyanaga, and H. Furusho, “Liquidly process in femtosecond laser processing,” Appl. Surf. Sci. 255(24), 9761–9763 (2009).
[Crossref]

Unger, C.

Vitrik, O.

A. Kuchmizhak, D. Pavlov, O. Vitrik, and Y. Kulchin, “Laser ablative fabrication of nanocrowns and nanojets on the Cu supported film surface using femtosecond laser pulses,” Appl. Surf. Sci. 357, 2378–2384 (2015).
[Crossref]

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

A. Kuchmizhak, S. Gurbatov, Y. Kulchin, and O. Vitrik, “Fabrication of porous metal nanoparticles and microbumps by means of nanosecond laser pulses focused through the fiber microaxicon,” Opt. Express 22(16), 19149–19155 (2014).
[Crossref] [PubMed]

Vitrik, O. B.

A. A. Kuchmizhak, A. A. Ionin, S. I. Kudryashov, S. V. Makarov, A. A. Rudenko, Y. N. Kulchin, O. B. Vitrik, and T. V. Efimov, “Flash-imprinting of intense femtosecond surface plasmons for advanced nanoantenna fabrication,” Opt. Lett. 40(8), 1687–1690 (2015).
[Crossref] [PubMed]

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, V. I. Emel’yanov, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Formation of crownlike and related nanostructures on thin supported gold films irradiated by single diffraction-limited nanosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 90(2), 023017 (2014).
[Crossref] [PubMed]

Wang, Z.

Y. Lin, M. Hong, T. Chong, C. Lim, G. Chen, L. Tan, Z. Wang, and L. Shi, “Ultrafast-laser-induced parallel phase-change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

Weaver, J.

Wortmann, D.

Xia, Y.

M. Rycenga, C. M. Cobley, J. Zeng, W. Li, C. H. Moran, Q. Zhang, D. Qin, and Y. Xia, “Controlling the synthesis and assembly of silver nanostructures for plasmonic applications,” Chem. Rev. 111(6), 3669–3712 (2011).
[Crossref] [PubMed]

Y. Xia, Y. Xiong, B. Lim, and S. E. Skrabalak, “Shape-controlled synthesis of metal nanocrystals: simple chemistry meets complex physics?” Angew. Chem. Int. Ed. Engl. 48(1), 60–103 (2009).
[Crossref] [PubMed]

Xiong, Y.

Y. Xia, Y. Xiong, B. Lim, and S. E. Skrabalak, “Shape-controlled synthesis of metal nanocrystals: simple chemistry meets complex physics?” Angew. Chem. Int. Ed. Engl. 48(1), 60–103 (2009).
[Crossref] [PubMed]

Yu, N.

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

Yurovskikh, V.

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

V. Emel’yanov, D. Zayarniy, A. Ionin, P. Danilov, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and D. Shikunov, “Thermocavitation melt instability and micro-crown formation near the threshold for femtosecond laser spallation of a silicon surface,” JETP Lett. 100(3), 145–149 (2014).
[Crossref]

Zayarniy, D.

V. Emel’yanov, D. Zayarniy, A. Ionin, P. Danilov, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and D. Shikunov, “Thermocavitation melt instability and micro-crown formation near the threshold for femtosecond laser spallation of a silicon surface,” JETP Lett. 100(3), 145–149 (2014).
[Crossref]

V. Emel’yanov, D. Zayarniy, A. Ionin, I. Kiseleva, S. Kudryashov, S. Makarov, and A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Zayarnyi, D.

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

Zeng, J.

M. Rycenga, C. M. Cobley, J. Zeng, W. Li, C. H. Moran, Q. Zhang, D. Qin, and Y. Xia, “Controlling the synthesis and assembly of silver nanostructures for plasmonic applications,” Chem. Rev. 111(6), 3669–3712 (2011).
[Crossref] [PubMed]

Zhakhovsky, V.

N. Inogamov, V. Zhakhovsky, and K. Migdal, “Laser-induced spalling of thin metal film from silica substrate followed by inflation of microbump,” Appl. Phys., A Mater. Sci. Process. 122(4), 1–9 (2016).
[Crossref]

Zhang, Q.

M. Rycenga, C. M. Cobley, J. Zeng, W. Li, C. H. Moran, Q. Zhang, D. Qin, and Y. Xia, “Controlling the synthesis and assembly of silver nanostructures for plasmonic applications,” Chem. Rev. 111(6), 3669–3712 (2011).
[Crossref] [PubMed]

Zhang, Y.

Y. Zhang, N. Stokes, B. Jia, S. Fan, and M. Gu, “Towards ultra-thin plasmonic silicon wafer solar cells with minimized efficiency loss,” Sci. Rep. 4, 4939 (2014).
[PubMed]

Zhao, Y.

Y. Zhao and A. Alu, “Manipulating light polarization with ultrathin plasmonic metasurfaces,” Phys. Rev. B 84(20), 205428 (2011).
[Crossref]

Angew. Chem. Int. Ed. Engl. (1)

Y. Xia, Y. Xiong, B. Lim, and S. E. Skrabalak, “Shape-controlled synthesis of metal nanocrystals: simple chemistry meets complex physics?” Angew. Chem. Int. Ed. Engl. 48(1), 60–103 (2009).
[Crossref] [PubMed]

Appl. Opt. (2)

Appl. Phys. Lett. (1)

Y. Lin, M. Hong, T. Chong, C. Lim, G. Chen, L. Tan, Z. Wang, and L. Shi, “Ultrafast-laser-induced parallel phase-change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

Appl. Phys., A Mater. Sci. Process. (3)

N. Inogamov, V. Zhakhovsky, and K. Migdal, “Laser-induced spalling of thin metal film from silica substrate followed by inflation of microbump,” Appl. Phys., A Mater. Sci. Process. 122(4), 1–9 (2016).
[Crossref]

S. Matsuo, S. Juodkazis, and H. Misawa, “Femtosecond laser microfabrication of periodic structures using a microlens array,” Appl. Phys., A Mater. Sci. Process. 80(4), 683–685 (2005).
[Crossref]

J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, and B. Chichkov, “Nanotexturing of gold films by femtosecond laser-induced melt dynamics,” Appl. Phys., A Mater. Sci. Process. 81(2), 325–328 (2005).
[Crossref]

Appl. Surf. Sci. (2)

Y. Nakata, K. Tsuchida, N. Miyanaga, and H. Furusho, “Liquidly process in femtosecond laser processing,” Appl. Surf. Sci. 255(24), 9761–9763 (2009).
[Crossref]

A. Kuchmizhak, D. Pavlov, O. Vitrik, and Y. Kulchin, “Laser ablative fabrication of nanocrowns and nanojets on the Cu supported film surface using femtosecond laser pulses,” Appl. Surf. Sci. 357, 2378–2384 (2015).
[Crossref]

Chem. Rev. (2)

M. R. Jones, K. D. Osberg, R. J. Macfarlane, M. R. Langille, and C. A. Mirkin, “Templated techniques for the synthesis and assembly of plasmonic nanostructures,” Chem. Rev. 111(6), 3736–3827 (2011).
[Crossref] [PubMed]

M. Rycenga, C. M. Cobley, J. Zeng, W. Li, C. H. Moran, Q. Zhang, D. Qin, and Y. Xia, “Controlling the synthesis and assembly of silver nanostructures for plasmonic applications,” Chem. Rev. 111(6), 3669–3712 (2011).
[Crossref] [PubMed]

JETP Lett. (2)

V. Emel’yanov, D. Zayarniy, A. Ionin, P. Danilov, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and D. Shikunov, “Thermocavitation melt instability and micro-crown formation near the threshold for femtosecond laser spallation of a silicon surface,” JETP Lett. 100(3), 145–149 (2014).
[Crossref]

V. Emel’yanov, D. Zayarniy, A. Ionin, I. Kiseleva, S. Kudryashov, S. Makarov, and A. Rudenko, “Nanoscale hydrodynamic instability in a molten thin gold film induced by femtosecond laser ablation,” JETP Lett. 99(9), 518–522 (2014).
[Crossref]

Jpn. J. Appl. Phys. (1)

Y. Nakata, T. Okada, and M. Maeda, “Nano-sized hollow bump array generated by single femtosecond laser pulse,” Jpn. J. Appl. Phys. 42(Part 2, No. 12A), L1452–L1454 (2003).
[Crossref]

Microsc. Microanal. (1)

M. K. Miller, K. F. Russell, K. Thompson, R. Alvis, and D. J. Larson, “Review of atom probe FIB-based specimen preparation methods,” Microsc. Microanal. 13(06), 428–436 (2007).
[Crossref] [PubMed]

Nano Lett. (1)

Y. Lu and A. Lal, “High-efficiency ordered silicon nano-conical-frustum array solar cells by self-powered parallel electron lithography,” Nano Lett. 10(11), 4651–4656 (2010).
[Crossref] [PubMed]

Nat. Mater. (1)

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

Opt. Express (3)

Opt. Lett. (1)

Phys. Chem. Chem. Phys. (1)

S. M. Asiala, J. M. Marr, G. Gervinskas, S. Juodkazis, and Z. D. Schultz, “Plasmonic color analysis of Ag-coated black-Si SERS substrate,” Phys. Chem. Chem. Phys. 17(45), 30461–30467 (2015).
[Crossref] [PubMed]

Phys. Rev. B (1)

Y. Zhao and A. Alu, “Manipulating light polarization with ultrathin plasmonic metasurfaces,” Phys. Rev. B 84(20), 205428 (2011).
[Crossref]

Phys. Rev. E Stat. Nonlin. Soft Matter Phys. (1)

Y. N. Kulchin, O. B. Vitrik, A. A. Kuchmizhak, V. I. Emel’yanov, A. A. Ionin, S. I. Kudryashov, and S. V. Makarov, “Formation of crownlike and related nanostructures on thin supported gold films irradiated by single diffraction-limited nanosecond laser pulses,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 90(2), 023017 (2014).
[Crossref] [PubMed]

Quantum Electron. (1)

P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, Yu. Kulchin, O. Vitrik, A. Kuchmizhak, S. Odinokov, and E. Drozdova, “Mechanisms of formation of sub-and micrometre-scale holes in thin metal films by single nano-and femtosecond laser pulses,” Quantum Electron. 44(6), 540–546 (2014).
[Crossref]

Sci. Rep. (2)

Y. Hashimoto, G. Seniutinas, A. Balčytis, S. Juodkazis, and Y. Nishijima, “Au-Ag-Cu nano-alloys: tailoring of permittivity,” Sci. Rep. 6, 25010 (2016).
[Crossref] [PubMed]

Y. Zhang, N. Stokes, B. Jia, S. Fan, and M. Gu, “Towards ultra-thin plasmonic silicon wafer solar cells with minimized efficiency loss,” Sci. Rep. 4, 4939 (2014).
[PubMed]

Science (1)

A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar photonics with metasurfaces,” Science 339(6125), 1232009 (2013).
[Crossref] [PubMed]

Small (1)

M. Rahmani, A. E. Miroshnichenko, D. Y. Lei, B. Luk’yanchuk, M. I. Tribelsky, A. I. Kuznetsov, Y. S. Kivshar, Y. Francescato, V. Giannini, M. Hong, and S. A. Maier, “Beyond the hybridization effects in plasmonic nanoclusters: diffraction-induced enhanced absorption and scattering,” Small 10(3), 576–583 (2014).
[Crossref] [PubMed]

Sov. Phys. JETP (1)

Yu. Kulchin, O. Vitrik, A. Kuchmizhak, A. Savchuk, A. Nepomnyashchii, P. Danilov, D. Zayarnyi, A. Ionin, S. Kudryashov, S. Makarov, A. Rudenko, V. Yurovskikh, and A. Samokhin, “Formation of nanobumps and nanoholes in thin metal films by strongly focused nanosecond laser pulses,” Sov. Phys. JETP 119(1), 15–23 (2014).
[Crossref]

Other (1)

J. Goodman, Speckle phenomena in optics: theory and applications (Roberts and Company Publishers, 2007).

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Figures (3)

Fig. 1
Fig. 1 Experimental details. a) Schematic of the speckle-modulated laser nanotexturing procedure. Insets show the typical laser intensity distribution before the diffusor (I) and speckle-pattern formed in the sample plane after passing laser radiation through the diffusor (II). The scale bars in the insets are not equal for better displaying; b) Detection scheme for photoluminescence enhancement study.
Fig. 2
Fig. 2 Side-view SEM images (at an angle of 40°) of the 75-nm thick gold film surface irradiated by a single speckle-modulated laser pulse at pulse energy of 15 mJ (a) and 7.5 mJ (b). Insets shows correspondent color-coded energy distributions in the speckle-modulated pattern with their z-axis reflecting the thesholds required to produce through hole (I) and nanojet (II). Scale bars in the insets correspond to 1 µm; c) SEM images of the 75-nm Au film surface irradiated by twenty consequent speckle-modulated laser pulses at pulse energy of 7.5 mJ. Inset III demonstrates photograph of the large-scale nanotextured area of Au film (scale bar corresponds to 1 cm); d) SEM images of the main types of structures obtained by speckle-field nanopatterning (1-5) and by single-shot nanoablation with tightly focused beams (6-9) (Scale bars correspond to 1 µm); e) Dark-field optical image of the nanotextured area section marked with a blue square in Fig. 2a. White contours illustrate the actual size and shape of the though holes, while the white arrows indicate nanojets position.
Fig. 3
Fig. 3 a) Dark-field optical image of the nanotextured Au film surface patterned with closely packed nanojets at N = 20 and E = 7.5 mJ; b) Normalized dark-field back-scattering spectra measured from three randomly chosen 20-μm-diameter areas marked with grey circles in Fig. 3a. Inset - the same spectra from three randomly chosen areas of a smaller size with their dark-field optical images presented in the insets I, II, III (scale bars correspond to 1 µm); c) Corresponding PL image of the Rh6G layer covering the nanotextured area; d) PL spectra measured from the 20-μm-diameter areas marked with grey circles in Fig. 3(c) (curves A,B,C). PL spectrtum from the Rh6G overlayer covering non-treated metal film surface of the same size (curve D) is presented for comparison. Inset shows enhancement factor EFPL versus pulse number N applied.

Equations (1)

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E th =Eln( N sp N str ).

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