Abstract

We propose and demonstrate a dispersion control technique by combination of different waveguide cross sections in an aluminum nitride micro-ring resonator. Narrow and wide waveguides with normal and anomalous dispersion, respectively, are linked with tapering waveguides and enclosed in a ring resonator to produce a total dispersion near zero. The mode-coupling in multimoded waveguides is also effectively suppressed. This technique provides new degrees of freedom and enhanced flexibility in engineering the dispersion of microcomb resonators.

© 2015 Optical Society of America

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References

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    [Crossref]
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    [Crossref] [PubMed]
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2015 (2)

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

I. S. Grudinin and N. Yu, “Dispersion engineering of crystalline resonators via microstructuring,” Optica 2(3), 221–224 (2015).
[Crossref]

2014 (3)

Y. Liu, Y. Xuan, X. Xue, P.-H. Wang, S. Chen, A. J. Metcalf, J. Wang, D. E. Leaird, M. Qi, and A. M. Weiner, “Investigation of mode coupling in normal-dispersion silicon nitride microresonators for Kerr frequency comb generation,” Optica 1(3), 137–144 (2014).
[Crossref]

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Loncar, “Diamond nonlinear photonics,” Nat. Photonics 8(5), 369–374 (2014).
[Crossref]

W. C. Jiang, J. Zhang, N. G. Usechak, and Q. Lin, “Dispersion engineering of high-Q silicon microresonators via thermal oxidation,” Appl. Phys. Lett. 105(3), 031112 (2014).
[Crossref]

2013 (1)

2012 (3)

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6(6), 369–373 (2012).
[Crossref]

C. Xiong, W. H. P. Pernice, and H. X. Tang, “Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing,” Nano Lett. 12(7), 3562–3568 (2012).
[Crossref] [PubMed]

2011 (3)

W. Liang, A. A. Savchenkov, A. B. Matsko, V. S. Ilchenko, D. Seidel, and L. Maleki, “Generation of near-infrared frequency combs from a MgF₂ whispering gallery mode resonator,” Opt. Lett. 36(12), 2290–2292 (2011).
[Crossref] [PubMed]

N. R. Newbury, “Searching for applications with a fine-tooth comb,” Nat. Photonics 5(4), 186–188 (2011).
[Crossref]

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332(6029), 555–559 (2011).
[Crossref] [PubMed]

2010 (2)

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

L. Razzari, D. Duchesne, M. Ferrera, R. Morandotti, S. Chu, B. E. Little, and D. J. Moss, “CMOS-compatible integrated optical hyper-parametric oscillator,” Nat. Photonics 4(1), 41–45 (2010).
[Crossref]

2009 (2)

2007 (1)

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

2005 (1)

2003 (1)

S. T. Cundiff and J. Ye, “Colloquium: Femtosecond optical frequency combs,” Rev. Mod. Phys. 75(1), 325–342 (2003).
[Crossref]

2002 (1)

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature 416(6877), 233–237 (2002).
[Crossref] [PubMed]

1991 (1)

J. D. Love, W. M. Henry, W. J. Stewart, R. J. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: Adiabaticity criteria,” IEE Proc., J Optoelectron. 138(5), 343–354 (1991).
[Crossref]

1977 (1)

A. F. Milton and W. K. Burns, “Mode coupling in optical waveguide horns,” IEEE J. Quantum Electron. 13(10), 828–835 (1977).
[Crossref]

Arcizet, O.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Black, R. J.

J. D. Love, W. M. Henry, W. J. Stewart, R. J. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: Adiabaticity criteria,” IEE Proc., J Optoelectron. 138(5), 343–354 (1991).
[Crossref]

Brasch, V.

Brehm, M.

Bulu, I.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Loncar, “Diamond nonlinear photonics,” Nat. Photonics 8(5), 369–374 (2014).
[Crossref]

Burns, W. K.

A. F. Milton and W. K. Burns, “Mode coupling in optical waveguide horns,” IEEE J. Quantum Electron. 13(10), 828–835 (1977).
[Crossref]

Cardenas, J.

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

Chen, S.

Chen, T.

H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6(6), 369–373 (2012).
[Crossref]

Chu, S.

L. Razzari, D. Duchesne, M. Ferrera, R. Morandotti, S. Chu, B. E. Little, and D. J. Moss, “CMOS-compatible integrated optical hyper-parametric oscillator,” Nat. Photonics 4(1), 41–45 (2010).
[Crossref]

Cundiff, S. T.

S. T. Cundiff and J. Ye, “Colloquium: Femtosecond optical frequency combs,” Rev. Mod. Phys. 75(1), 325–342 (2003).
[Crossref]

Del’Haye, P.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Deotare, P.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Loncar, “Diamond nonlinear photonics,” Nat. Photonics 8(5), 369–374 (2014).
[Crossref]

Diddams, S. A.

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332(6029), 555–559 (2011).
[Crossref] [PubMed]

Duchesne, D.

L. Razzari, D. Duchesne, M. Ferrera, R. Morandotti, S. Chu, B. E. Little, and D. J. Moss, “CMOS-compatible integrated optical hyper-parametric oscillator,” Nat. Photonics 4(1), 41–45 (2010).
[Crossref]

Fain, R.

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

Ferrera, M.

L. Razzari, D. Duchesne, M. Ferrera, R. Morandotti, S. Chu, B. E. Little, and D. J. Moss, “CMOS-compatible integrated optical hyper-parametric oscillator,” Nat. Photonics 4(1), 41–45 (2010).
[Crossref]

Fong, K. Y.

Foster, M. A.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Gaeta, A. L.

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Gondarenko, A.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Gonthier, F.

J. D. Love, W. M. Henry, W. J. Stewart, R. J. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: Adiabaticity criteria,” IEE Proc., J Optoelectron. 138(5), 343–354 (1991).
[Crossref]

Griffith, A. G.

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

Grudinin, I. S.

Hänsch, T. W.

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature 416(6877), 233–237 (2002).
[Crossref] [PubMed]

Hartinger, K.

Hausmann, B. J. M.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Loncar, “Diamond nonlinear photonics,” Nat. Photonics 8(5), 369–374 (2014).
[Crossref]

Henry, W. M.

J. D. Love, W. M. Henry, W. J. Stewart, R. J. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: Adiabaticity criteria,” IEE Proc., J Optoelectron. 138(5), 343–354 (1991).
[Crossref]

Herr, T.

Holzwarth, R.

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332(6029), 555–559 (2011).
[Crossref] [PubMed]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature 416(6877), 233–237 (2002).
[Crossref] [PubMed]

Ilchenko, V. S.

Jeon, S.

H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6(6), 369–373 (2012).
[Crossref]

Jiang, W. C.

W. C. Jiang, J. Zhang, N. G. Usechak, and Q. Lin, “Dispersion engineering of high-Q silicon microresonators via thermal oxidation,” Appl. Phys. Lett. 105(3), 031112 (2014).
[Crossref]

Jung, H.

Keilmann, F.

Kippenberg, T. J.

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332(6029), 555–559 (2011).
[Crossref] [PubMed]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Lacroix, S.

J. D. Love, W. M. Henry, W. J. Stewart, R. J. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: Adiabaticity criteria,” IEE Proc., J Optoelectron. 138(5), 343–354 (1991).
[Crossref]

Lau, R. K. W.

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

Leaird, D. E.

Lee, H.

H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6(6), 369–373 (2012).
[Crossref]

Lee, Y. H. D.

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

Levy, J. S.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Li, J.

H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6(6), 369–373 (2012).
[Crossref]

Liang, W.

Lin, Q.

W. C. Jiang, J. Zhang, N. G. Usechak, and Q. Lin, “Dispersion engineering of high-Q silicon microresonators via thermal oxidation,” Appl. Phys. Lett. 105(3), 031112 (2014).
[Crossref]

Lipson, M.

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Little, B. E.

L. Razzari, D. Duchesne, M. Ferrera, R. Morandotti, S. Chu, B. E. Little, and D. J. Moss, “CMOS-compatible integrated optical hyper-parametric oscillator,” Nat. Photonics 4(1), 41–45 (2010).
[Crossref]

Liu, H.-C.

Liu, Y.

Loncar, M.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Loncar, “Diamond nonlinear photonics,” Nat. Photonics 8(5), 369–374 (2014).
[Crossref]

Love, J. D.

J. D. Love, W. M. Henry, W. J. Stewart, R. J. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: Adiabaticity criteria,” IEE Proc., J Optoelectron. 138(5), 343–354 (1991).
[Crossref]

Maleki, L.

Matsko, A. B.

Metcalf, A. J.

Milton, A. F.

A. F. Milton and W. K. Burns, “Mode coupling in optical waveguide horns,” IEEE J. Quantum Electron. 13(10), 828–835 (1977).
[Crossref]

Mohanty, A.

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

Morandotti, R.

L. Razzari, D. Duchesne, M. Ferrera, R. Morandotti, S. Chu, B. E. Little, and D. J. Moss, “CMOS-compatible integrated optical hyper-parametric oscillator,” Nat. Photonics 4(1), 41–45 (2010).
[Crossref]

Moss, D. J.

L. Razzari, D. Duchesne, M. Ferrera, R. Morandotti, S. Chu, B. E. Little, and D. J. Moss, “CMOS-compatible integrated optical hyper-parametric oscillator,” Nat. Photonics 4(1), 41–45 (2010).
[Crossref]

Newbury, N. R.

N. R. Newbury, “Searching for applications with a fine-tooth comb,” Nat. Photonics 5(4), 186–188 (2011).
[Crossref]

Okawachi, Y.

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

Painter, O.

H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6(6), 369–373 (2012).
[Crossref]

Pernice, W. H. P.

C. Xiong, W. H. P. Pernice, and H. X. Tang, “Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing,” Nano Lett. 12(7), 3562–3568 (2012).
[Crossref] [PubMed]

Phare, C. T.

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

Poitras, C. B.

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

Qi, M.

Razzari, L.

L. Razzari, D. Duchesne, M. Ferrera, R. Morandotti, S. Chu, B. E. Little, and D. J. Moss, “CMOS-compatible integrated optical hyper-parametric oscillator,” Nat. Photonics 4(1), 41–45 (2010).
[Crossref]

Riemensberger, J.

Savchenkov, A. A.

Schliesser, A.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

A. Schliesser, M. Brehm, F. Keilmann, and D. van der Weide, “Frequency-comb infrared spectrometer for rapid, remote chemical sensing,” Opt. Express 13(22), 9029–9038 (2005).
[Crossref] [PubMed]

Seidel, D.

Stewart, W. J.

J. D. Love, W. M. Henry, W. J. Stewart, R. J. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: Adiabaticity criteria,” IEE Proc., J Optoelectron. 138(5), 343–354 (1991).
[Crossref]

Sun, X.

Tang, H. X.

H. Jung, C. Xiong, K. Y. Fong, X. Zhang, and H. X. Tang, “Optical frequency comb generation from aluminum nitride microring resonator,” Opt. Lett. 38(15), 2810–2813 (2013).
[Crossref] [PubMed]

C. Xiong, W. H. P. Pernice, and H. X. Tang, “Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing,” Nano Lett. 12(7), 3562–3568 (2012).
[Crossref] [PubMed]

Turner-Foster, A. C.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Udem, T.

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature 416(6877), 233–237 (2002).
[Crossref] [PubMed]

Usechak, N. G.

W. C. Jiang, J. Zhang, N. G. Usechak, and Q. Lin, “Dispersion engineering of high-Q silicon microresonators via thermal oxidation,” Appl. Phys. Lett. 105(3), 031112 (2014).
[Crossref]

Vahala, K. J.

H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6(6), 369–373 (2012).
[Crossref]

van der Weide, D.

Venkataraman, V.

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Loncar, “Diamond nonlinear photonics,” Nat. Photonics 8(5), 369–374 (2014).
[Crossref]

Wang, J.

Wang, P.-H.

Weiner, A. M.

Wilken, T.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Xiong, C.

H. Jung, C. Xiong, K. Y. Fong, X. Zhang, and H. X. Tang, “Optical frequency comb generation from aluminum nitride microring resonator,” Opt. Lett. 38(15), 2810–2813 (2013).
[Crossref] [PubMed]

C. Xiong, W. H. P. Pernice, and H. X. Tang, “Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing,” Nano Lett. 12(7), 3562–3568 (2012).
[Crossref] [PubMed]

Xuan, Y.

Xue, X.

Yang, K. Y.

H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6(6), 369–373 (2012).
[Crossref]

Yariv, A.

Ye, J.

S. T. Cundiff and J. Ye, “Colloquium: Femtosecond optical frequency combs,” Rev. Mod. Phys. 75(1), 325–342 (2003).
[Crossref]

Yu, M.

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

Yu, N.

Zhang, J.

W. C. Jiang, J. Zhang, N. G. Usechak, and Q. Lin, “Dispersion engineering of high-Q silicon microresonators via thermal oxidation,” Appl. Phys. Lett. 105(3), 031112 (2014).
[Crossref]

Zhang, X.

Appl. Phys. Lett. (1)

W. C. Jiang, J. Zhang, N. G. Usechak, and Q. Lin, “Dispersion engineering of high-Q silicon microresonators via thermal oxidation,” Appl. Phys. Lett. 105(3), 031112 (2014).
[Crossref]

IEE Proc., J Optoelectron. (1)

J. D. Love, W. M. Henry, W. J. Stewart, R. J. Black, S. Lacroix, and F. Gonthier, “Tapered single-mode fibres and devices. Part 1: Adiabaticity criteria,” IEE Proc., J Optoelectron. 138(5), 343–354 (1991).
[Crossref]

IEEE J. Quantum Electron. (1)

A. F. Milton and W. K. Burns, “Mode coupling in optical waveguide horns,” IEEE J. Quantum Electron. 13(10), 828–835 (1977).
[Crossref]

Nano Lett. (1)

C. Xiong, W. H. P. Pernice, and H. X. Tang, “Low-Loss, Silicon Integrated, Aluminum Nitride Photonic Circuits and Their Use for Electro-Optic Signal Processing,” Nano Lett. 12(7), 3562–3568 (2012).
[Crossref] [PubMed]

Nat. Commun. (1)

A. G. Griffith, R. K. W. Lau, J. Cardenas, Y. Okawachi, A. Mohanty, R. Fain, Y. H. D. Lee, M. Yu, C. T. Phare, C. B. Poitras, A. L. Gaeta, and M. Lipson, “Silicon-chip mid-infrared frequency comb generation,” Nat. Commun. 6, 6299 (2015).
[Crossref] [PubMed]

Nat. Photonics (5)

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

N. R. Newbury, “Searching for applications with a fine-tooth comb,” Nat. Photonics 5(4), 186–188 (2011).
[Crossref]

B. J. M. Hausmann, I. Bulu, V. Venkataraman, P. Deotare, and M. Loncar, “Diamond nonlinear photonics,” Nat. Photonics 8(5), 369–374 (2014).
[Crossref]

L. Razzari, D. Duchesne, M. Ferrera, R. Morandotti, S. Chu, B. E. Little, and D. J. Moss, “CMOS-compatible integrated optical hyper-parametric oscillator,” Nat. Photonics 4(1), 41–45 (2010).
[Crossref]

H. Lee, T. Chen, J. Li, K. Y. Yang, S. Jeon, O. Painter, and K. J. Vahala, “Chemically etched ultrahigh-Q wedge-resonator on a silicon chip,” Nat. Photonics 6(6), 369–373 (2012).
[Crossref]

Nature (2)

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature 416(6877), 233–237 (2002).
[Crossref] [PubMed]

Opt. Express (2)

Opt. Lett. (4)

Optica (2)

Rev. Mod. Phys. (1)

S. T. Cundiff and J. Ye, “Colloquium: Femtosecond optical frequency combs,” Rev. Mod. Phys. 75(1), 325–342 (2003).
[Crossref]

Science (1)

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332(6029), 555–559 (2011).
[Crossref] [PubMed]

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Figures (4)

Fig. 1
Fig. 1 A schematic of a multi-segment resonator that employs waveguides of different cross-sections for dispersion compensation (not to scale). The red and blue curves are the light of longer and shorter wavelengths, respectively. The length of the arrows represent the speed of light for each wavelength in different waveguide sections. Mode profiles in narrow and wide waveguides are also sketched.
Fig. 2
Fig. 2 (a) The measurement setup. CW, continuous wave; FPC, fiber polarization controller; DUT, device under test; PD, photo diode. (b) A portion of the transmission spectrum measured using the wavemeter. (c) Zoom of the spectrum near 1551 nm and 1578 nm wavelength indicating different FSRs due to uncompensated dispersion.
Fig. 3
Fig. 3 The measured FSR and dispersion of AlN resonators of varying cross-sectional configurations fabricated from 700 nm-thick thin films. (a) FSR measured from a ring resonator with a uniform, trapezoidal cross-section. The left inset is an SEM image of the cross section, and the right inset is the corresponding mode power profile. (b) FSR taken from a resonator with wider cross section (top width: 700nm). (c) FSR measured in a ring resonator containing waveguides with two cross sections. Inset shows the layout of the micro-resonator: the left (red) part of the resonator has a 350 nm top width, and they are tapered up to the right (blue) part which has a 700 nm top width. (d) The simulated dispersion curve and measured dispersion value for single-width (red and blue) and multi-width (black) resonators. The length of each single-width waveguide and tapering between them are considered through Eq. (1).
Fig. 4
Fig. 4 Measured FSR and dispersion for waveguides fabricated from 800 nm-thick AlN films with their SEM images and mode profiles. (a) The measured FSR from a resonator of 500 nm-wide at the top of the trapezoid has a normal dispersion. (b) Anomalous dispersion measured from a waveguide of 1200 nm-width. Blue points are for the fundamental TE mode, and the cyan points are for the second order TE mode. (c) The near-zero dispersion is obtained by combining waveguides with two cross sections, 800 nm × 500 nm and 800 nm × 1200 nm. (d) Simulated dispersion curves showing simultaneous zeroing of the dispersion at 775 nm and 1550 nm wavelengths (blue) by combining 800 nm × 400 nm (black) and 800 nm × 700 nm waveguides (red).

Equations (2)

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D ¯ (λ)= 1 C resonator D(λ,s)ds
D ¯ ( λ i )= L 1 D 1 ( λ i )+ L 2 D 2 ( λ i )+ L 3 D 3 ( λ i )+ C

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