Abstract

We report on the fabrication and second harmonic generation from a periodically-poled MgO-doped lithium niobate ridge waveguide within the telecommunication L-band. The ridge waveguide is fabricated by carbon ion implantation and the following diamond blade dicing method. A normalized second harmonic conversion efficiency of 20.3%W−1cm−2 was obtained with a total insertion loss of 4.3dB at wavelength of 1612.7nm. Our analysis shows that at least ~70% of the second-order nonlinearity was preserved after the implantation and thermal annealing process.

© 2015 Optical Society of America

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References

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    [Crossref]
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2014 (1)

H. Jin, F. M. Liu, P. Xu, J. L. Xia, M. L. Zhong, Y. Yuan, J. W. Zhou, Y. X. Gong, W. Wang, and S. N. Zhu, “On-chip generation and manipulation of entangled photons based on reconfigurable lithium-niobate waveguide circuits,” Phys. Rev. Lett. 113(10), 103601 (2014).
[Crossref] [PubMed]

2013 (1)

2012 (4)

M. Jubera, J. Villarroel, A. García-Cabañes, M. Carrascosa, J. Olivares, F. Agullo-López, A. Méndez, and J. B. Ramiro, “Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation,” Appl. Phys. B 107(1), 157–162 (2012).
[Crossref]

D. Li, Y. Jiang, Y. J. Ding, I. B. Zotova, and N. S. Prasad, “Approaching single-photon detection in near-infrared region,” Appl. Phys. Lett. 101(14), 141126 (2012).
[Crossref]

Q. Huang, P. Liu, T. Liu, L. Zhang, Y. Zhou, and X. Wang, “Second harmonic generation in periodically poled LiNbO3 waveguides formed by oxygen-ion implantation,” Phys. Status Solidi Rapid Res. Lett. 6(5), 205–207 (2012).
[Crossref]

G. B. Montanari, P. De Nicola, S. Sugliani, A. Menin, A. Parini, A. Nubile, G. Bellanca, M. Chiarini, M. Bianconi, and G. G. Bentini, “Step-index optical waveguide produced by multi-step ion implantation in LiNbO3.,” Opt. Express 20(4), 4444–4453 (2012).
[Crossref] [PubMed]

2011 (2)

N. E. Courjal, B. Guichardaz, G. Ulliac, J. Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, “High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing,” J. Phys. D Appl. Phys. 44(30), 305101 (2011).
[Crossref]

Y. Ren, N. Dong, F. Chen, and D. Jaque, “Swift nitrogen ion irradiated waveguide lasers in Nd:YAG crystal,” Opt. Express 19(6), 5522–5527 (2011).
[Crossref] [PubMed]

2010 (3)

Q. Huang, J. Zhao, P. Liu, J. Guan, and X. Wang, “Refractive index change in ion-implanted LiNbO3 waveguides calculated from lattice damage ratio,” J. Appl. Phys. 108(9), 093103 (2010).
[Crossref]

S. Sugliani, M. Bianconi, G. G. Bentini, M. Chiarini, P. De Nicola, G. B. Montanari, A. Menin, A. Malacarne, and L. Potì, “Refractive index tailoring in congruent lithium niobate by ion implantation,” Nucl. Instrum. Methods B 268(19), 2911–2914 (2010).
[Crossref]

A. Martin, A. Issautier, H. Herrmann, W. Sohler, D. B. Ostrowsky, O. Alibart, and S. Tanzilli, “A polarization entangled photon-pair source based on a type-II PPLN waveguide emitting at a telecom wavelength,” New J. Phys. 12(10), 103005 (2010).
[Crossref]

2009 (2)

F. Chen, “Photonic guiding structures in lithium niobate crystals produced by energetic ion beams,” J. Appl. Phys. 106(8), 081101 (2009).
[Crossref]

L. Wang and Q. M. Lu, “Formation and characterization of a near-stoichiometric LiNbO3 waveguide by MeV oxygen implantation,” Appl. Opt. 48(14), 2619–2624 (2009).
[Crossref] [PubMed]

2007 (3)

B. Vincent, R. Kremer, A. Boudrioua, P. Moretti, Y. C. Zhang, C. C. Hsu, and L. H. Peng, “Green light generation in a periodically poled Zn-doped LiNbO3 planar waveguide fabricated by He+ implantation,” Appl. Phys. B 89(2-3), 235–239 (2007).
[Crossref]

J. Thomas, M. Heinrich, J. Burghoff, S. Nolte, A. Ancona, and A. Tünnermann, “Femtosecond laser-written quasi-phase-matched waveguides in lithium niobate,” Appl. Phys. Lett. 91(15), 151108 (2007).
[Crossref]

H. Hu, R. Ricken, W. Sohler, and R. B. Wehrspohn, “Lithium niobate ridge waveguides fabricated by wet etching,” IEEE Photonics Technol. Lett. 19(6), 417–419 (2007).
[Crossref]

2006 (1)

S. Kurimura, Y. Kato, M. Maruyama, Y. Usui, and H. Nakajima, “Quasi-phase-matched adhered ridge waveguide in LiNbO3,” Appl. Phys. Lett. 89(19), 191123 (2006).
[Crossref]

2005 (1)

W. S. Yang, H. Y. Lee, W. K. Kim, and D. H. Yoon, “Asymmetry ridge structure fabrication and reactive ion etching of LiNbO3,” Opt. Mater. 27(10), 1642–1646 (2005).
[Crossref]

2004 (1)

2003 (1)

M. Iwai, T. Yoshino, S. Yamaguchi, M. Imaeda, N. Pavel, I. Shoji, and T. Taira, “High-power blue generation from a periodically poled MgO:LiNbO3 ridge-type waveguide by frequency doubling of a diode end-pumped Nd:Y3Al5O12 laser,” Appl. Phys. Lett. 83(18), 3659–3661 (2003).
[Crossref]

2002 (2)

1998 (2)

1997 (1)

1994 (1)

N. Hamelin, G. Lifante, P. J. Chandler, P. D. Townsend, S. Pityana, and A. J. McCaffery, “Second harmonic generation in ion implanted lithium niobate planar waveguides,” J. Mod. Opt. 41(7), 1339–1348 (1994).
[Crossref]

1990 (1)

T. Suhara and H. Nishihara, “Theoretical analysis of waveguide second-harmonic generation phase matched with uniform and chirped gratings,” IEEE J. Quantum Electron. 26(7), 1265–1276 (1990).
[Crossref]

1986 (1)

P. J. Chandler and F. L. Lama, “A new approach to the determination of planar waveguide profiles by means of a non-stationary mode index calculation,” Opt. Acta (Lond.) 33(2), 127–143 (1986).
[Crossref]

1985 (1)

R. Regener and W. Sohler, “Loss in low-finesse Ti:LiNbO3 optical waveguide resonators,” Appl. Phys. B 36(3), 143–147 (1985).
[Crossref]

1976 (1)

Agullo-López, F.

M. Jubera, J. Villarroel, A. García-Cabañes, M. Carrascosa, J. Olivares, F. Agullo-López, A. Méndez, and J. B. Ramiro, “Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation,” Appl. Phys. B 107(1), 157–162 (2012).
[Crossref]

Alibart, O.

A. Martin, A. Issautier, H. Herrmann, W. Sohler, D. B. Ostrowsky, O. Alibart, and S. Tanzilli, “A polarization entangled photon-pair source based on a type-II PPLN waveguide emitting at a telecom wavelength,” New J. Phys. 12(10), 103005 (2010).
[Crossref]

Ancona, A.

J. Thomas, M. Heinrich, J. Burghoff, S. Nolte, A. Ancona, and A. Tünnermann, “Femtosecond laser-written quasi-phase-matched waveguides in lithium niobate,” Appl. Phys. Lett. 91(15), 151108 (2007).
[Crossref]

Astolfi, M.

Bellanca, G.

Bentini, G. G.

Bernal, M.-P.

N. E. Courjal, B. Guichardaz, G. Ulliac, J. Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, “High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing,” J. Phys. D Appl. Phys. 44(30), 305101 (2011).
[Crossref]

Bianconi, M.

Borsetto, M.

Boudrioua, A.

B. Vincent, R. Kremer, A. Boudrioua, P. Moretti, Y. C. Zhang, C. C. Hsu, and L. H. Peng, “Green light generation in a periodically poled Zn-doped LiNbO3 planar waveguide fabricated by He+ implantation,” Appl. Phys. B 89(2-3), 235–239 (2007).
[Crossref]

Burghoff, J.

J. Thomas, M. Heinrich, J. Burghoff, S. Nolte, A. Ancona, and A. Tünnermann, “Femtosecond laser-written quasi-phase-matched waveguides in lithium niobate,” Appl. Phys. Lett. 91(15), 151108 (2007).
[Crossref]

Caccavale, F.

Carrascosa, M.

M. Jubera, J. Villarroel, A. García-Cabañes, M. Carrascosa, J. Olivares, F. Agullo-López, A. Méndez, and J. B. Ramiro, “Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation,” Appl. Phys. B 107(1), 157–162 (2012).
[Crossref]

Chandler, P. J.

N. Hamelin, G. Lifante, P. J. Chandler, P. D. Townsend, S. Pityana, and A. J. McCaffery, “Second harmonic generation in ion implanted lithium niobate planar waveguides,” J. Mod. Opt. 41(7), 1339–1348 (1994).
[Crossref]

P. J. Chandler and F. L. Lama, “A new approach to the determination of planar waveguide profiles by means of a non-stationary mode index calculation,” Opt. Acta (Lond.) 33(2), 127–143 (1986).
[Crossref]

Chen, F.

Chiarini, M.

Chow, Y.

N. Hamelin and Y. Chow, “Guided-type second harmonic generation in ion implanted MgO:LiNbO3,” J. Mod. Opt. 45, 2125–2129 (1998).

Con-sonni, G.

Courjal, N. E.

N. E. Courjal, B. Guichardaz, G. Ulliac, J. Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, “High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing,” J. Phys. D Appl. Phys. 44(30), 305101 (2011).
[Crossref]

De Nicola, P.

Ding, Y. J.

D. Li, Y. Jiang, Y. J. Ding, I. B. Zotova, and N. S. Prasad, “Approaching single-photon detection in near-infrared region,” Appl. Phys. Lett. 101(14), 141126 (2012).
[Crossref]

Dong, N.

Fedorov, V. A.

Fejer, M. M.

Fu, G.

Fujimura, M.

García-Cabañes, A.

M. Jubera, J. Villarroel, A. García-Cabañes, M. Carrascosa, J. Olivares, F. Agullo-López, A. Méndez, and J. B. Ramiro, “Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation,” Appl. Phys. B 107(1), 157–162 (2012).
[Crossref]

Gonella, F.

Gong, Y. X.

H. Jin, F. M. Liu, P. Xu, J. L. Xia, M. L. Zhong, Y. Yuan, J. W. Zhou, Y. X. Gong, W. Wang, and S. N. Zhu, “On-chip generation and manipulation of entangled photons based on reconfigurable lithium-niobate waveguide circuits,” Phys. Rev. Lett. 113(10), 103601 (2014).
[Crossref] [PubMed]

Guan, J.

Q. Huang, J. Zhao, P. Liu, J. Guan, and X. Wang, “Refractive index change in ion-implanted LiNbO3 waveguides calculated from lattice damage ratio,” J. Appl. Phys. 108(9), 093103 (2010).
[Crossref]

Guichardaz, B.

N. E. Courjal, B. Guichardaz, G. Ulliac, J. Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, “High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing,” J. Phys. D Appl. Phys. 44(30), 305101 (2011).
[Crossref]

Hamelin, N.

N. Hamelin and Y. Chow, “Guided-type second harmonic generation in ion implanted MgO:LiNbO3,” J. Mod. Opt. 45, 2125–2129 (1998).

N. Hamelin, G. Lifante, P. J. Chandler, P. D. Townsend, S. Pityana, and A. J. McCaffery, “Second harmonic generation in ion implanted lithium niobate planar waveguides,” J. Mod. Opt. 41(7), 1339–1348 (1994).
[Crossref]

Heidrich, P. F.

Heinrich, M.

J. Thomas, M. Heinrich, J. Burghoff, S. Nolte, A. Ancona, and A. Tünnermann, “Femtosecond laser-written quasi-phase-matched waveguides in lithium niobate,” Appl. Phys. Lett. 91(15), 151108 (2007).
[Crossref]

Herrmann, H.

A. Martin, A. Issautier, H. Herrmann, W. Sohler, D. B. Ostrowsky, O. Alibart, and S. Tanzilli, “A polarization entangled photon-pair source based on a type-II PPLN waveguide emitting at a telecom wavelength,” New J. Phys. 12(10), 103005 (2010).
[Crossref]

Hsu, C. C.

B. Vincent, R. Kremer, A. Boudrioua, P. Moretti, Y. C. Zhang, C. C. Hsu, and L. H. Peng, “Green light generation in a periodically poled Zn-doped LiNbO3 planar waveguide fabricated by He+ implantation,” Appl. Phys. B 89(2-3), 235–239 (2007).
[Crossref]

Hu, H.

H. Hu, R. Ricken, W. Sohler, and R. B. Wehrspohn, “Lithium niobate ridge waveguides fabricated by wet etching,” IEEE Photonics Technol. Lett. 19(6), 417–419 (2007).
[Crossref]

Huang, Q.

Q. Huang, P. Liu, T. Liu, L. Zhang, Y. Zhou, and X. Wang, “Second harmonic generation in periodically poled LiNbO3 waveguides formed by oxygen-ion implantation,” Phys. Status Solidi Rapid Res. Lett. 6(5), 205–207 (2012).
[Crossref]

Q. Huang, J. Zhao, P. Liu, J. Guan, and X. Wang, “Refractive index change in ion-implanted LiNbO3 waveguides calculated from lattice damage ratio,” J. Appl. Phys. 108(9), 093103 (2010).
[Crossref]

Imaeda, M.

M. Iwai, T. Yoshino, S. Yamaguchi, M. Imaeda, N. Pavel, I. Shoji, and T. Taira, “High-power blue generation from a periodically poled MgO:LiNbO3 ridge-type waveguide by frequency doubling of a diode end-pumped Nd:Y3Al5O12 laser,” Appl. Phys. Lett. 83(18), 3659–3661 (2003).
[Crossref]

Issautier, A.

A. Martin, A. Issautier, H. Herrmann, W. Sohler, D. B. Ostrowsky, O. Alibart, and S. Tanzilli, “A polarization entangled photon-pair source based on a type-II PPLN waveguide emitting at a telecom wavelength,” New J. Phys. 12(10), 103005 (2010).
[Crossref]

Ito, R.

Iwai, M.

M. Iwai, T. Yoshino, S. Yamaguchi, M. Imaeda, N. Pavel, I. Shoji, and T. Taira, “High-power blue generation from a periodically poled MgO:LiNbO3 ridge-type waveguide by frequency doubling of a diode end-pumped Nd:Y3Al5O12 laser,” Appl. Phys. Lett. 83(18), 3659–3661 (2003).
[Crossref]

Jaque, D.

Jiang, Y.

D. Li, Y. Jiang, Y. J. Ding, I. B. Zotova, and N. S. Prasad, “Approaching single-photon detection in near-infrared region,” Appl. Phys. Lett. 101(14), 141126 (2012).
[Crossref]

Jin, H.

H. Jin, F. M. Liu, P. Xu, J. L. Xia, M. L. Zhong, Y. Yuan, J. W. Zhou, Y. X. Gong, W. Wang, and S. N. Zhu, “On-chip generation and manipulation of entangled photons based on reconfigurable lithium-niobate waveguide circuits,” Phys. Rev. Lett. 113(10), 103601 (2014).
[Crossref] [PubMed]

Jubera, M.

M. Jubera, J. Villarroel, A. García-Cabañes, M. Carrascosa, J. Olivares, F. Agullo-López, A. Méndez, and J. B. Ramiro, “Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation,” Appl. Phys. B 107(1), 157–162 (2012).
[Crossref]

Kato, Y.

S. Kurimura, Y. Kato, M. Maruyama, Y. Usui, and H. Nakajima, “Quasi-phase-matched adhered ridge waveguide in LiNbO3,” Appl. Phys. Lett. 89(19), 191123 (2006).
[Crossref]

Kim, W. K.

W. S. Yang, H. Y. Lee, W. K. Kim, and D. H. Yoon, “Asymmetry ridge structure fabrication and reactive ion etching of LiNbO3,” Opt. Mater. 27(10), 1642–1646 (2005).
[Crossref]

Kitamoto, A.

Kondo, T.

Korkishko, Y. N.

Kremer, R.

B. Vincent, R. Kremer, A. Boudrioua, P. Moretti, Y. C. Zhang, C. C. Hsu, and L. H. Peng, “Green light generation in a periodically poled Zn-doped LiNbO3 planar waveguide fabricated by He+ implantation,” Appl. Phys. B 89(2-3), 235–239 (2007).
[Crossref]

Kurimura, S.

S. Kurimura, Y. Kato, M. Maruyama, Y. Usui, and H. Nakajima, “Quasi-phase-matched adhered ridge waveguide in LiNbO3,” Appl. Phys. Lett. 89(19), 191123 (2006).
[Crossref]

Kurz, J. R.

Lama, F. L.

P. J. Chandler and F. L. Lama, “A new approach to the determination of planar waveguide profiles by means of a non-stationary mode index calculation,” Opt. Acta (Lond.) 33(2), 127–143 (1986).
[Crossref]

Lee, H. Y.

W. S. Yang, H. Y. Lee, W. K. Kim, and D. H. Yoon, “Asymmetry ridge structure fabrication and reactive ion etching of LiNbO3,” Opt. Mater. 27(10), 1642–1646 (2005).
[Crossref]

Li, D.

D. Li, Y. Jiang, Y. J. Ding, I. B. Zotova, and N. S. Prasad, “Approaching single-photon detection in near-infrared region,” Appl. Phys. Lett. 101(14), 141126 (2012).
[Crossref]

Li, S. L.

Lifante, G.

N. Hamelin, G. Lifante, P. J. Chandler, P. D. Townsend, S. Pityana, and A. J. McCaffery, “Second harmonic generation in ion implanted lithium niobate planar waveguides,” J. Mod. Opt. 41(7), 1339–1348 (1994).
[Crossref]

Liu, F. M.

H. Jin, F. M. Liu, P. Xu, J. L. Xia, M. L. Zhong, Y. Yuan, J. W. Zhou, Y. X. Gong, W. Wang, and S. N. Zhu, “On-chip generation and manipulation of entangled photons based on reconfigurable lithium-niobate waveguide circuits,” Phys. Rev. Lett. 113(10), 103601 (2014).
[Crossref] [PubMed]

Liu, P.

Q. Huang, P. Liu, T. Liu, L. Zhang, Y. Zhou, and X. Wang, “Second harmonic generation in periodically poled LiNbO3 waveguides formed by oxygen-ion implantation,” Phys. Status Solidi Rapid Res. Lett. 6(5), 205–207 (2012).
[Crossref]

Q. Huang, J. Zhao, P. Liu, J. Guan, and X. Wang, “Refractive index change in ion-implanted LiNbO3 waveguides calculated from lattice damage ratio,” J. Appl. Phys. 108(9), 093103 (2010).
[Crossref]

Liu, T.

Q. Huang, P. Liu, T. Liu, L. Zhang, Y. Zhou, and X. Wang, “Second harmonic generation in periodically poled LiNbO3 waveguides formed by oxygen-ion implantation,” Phys. Status Solidi Rapid Res. Lett. 6(5), 205–207 (2012).
[Crossref]

Longone, R.

Lu, H.-H.

N. E. Courjal, B. Guichardaz, G. Ulliac, J. Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, “High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing,” J. Phys. D Appl. Phys. 44(30), 305101 (2011).
[Crossref]

Lu, Q. M.

Ma, H. J.

Malacarne, A.

S. Sugliani, M. Bianconi, G. G. Bentini, M. Chiarini, P. De Nicola, G. B. Montanari, A. Menin, A. Malacarne, and L. Potì, “Refractive index tailoring in congruent lithium niobate by ion implantation,” Nucl. Instrum. Methods B 268(19), 2911–2914 (2010).
[Crossref]

Martin, A.

A. Martin, A. Issautier, H. Herrmann, W. Sohler, D. B. Ostrowsky, O. Alibart, and S. Tanzilli, “A polarization entangled photon-pair source based on a type-II PPLN waveguide emitting at a telecom wavelength,” New J. Phys. 12(10), 103005 (2010).
[Crossref]

Maruyama, M.

S. Kurimura, Y. Kato, M. Maruyama, Y. Usui, and H. Nakajima, “Quasi-phase-matched adhered ridge waveguide in LiNbO3,” Appl. Phys. Lett. 89(19), 191123 (2006).
[Crossref]

McCaffery, A. J.

N. Hamelin, G. Lifante, P. J. Chandler, P. D. Townsend, S. Pityana, and A. J. McCaffery, “Second harmonic generation in ion implanted lithium niobate planar waveguides,” J. Mod. Opt. 41(7), 1339–1348 (1994).
[Crossref]

Méndez, A.

M. Jubera, J. Villarroel, A. García-Cabañes, M. Carrascosa, J. Olivares, F. Agullo-López, A. Méndez, and J. B. Ramiro, “Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation,” Appl. Phys. B 107(1), 157–162 (2012).
[Crossref]

Menin, A.

Meroni, A.

Montanari, G. B.

Moretti, P.

B. Vincent, R. Kremer, A. Boudrioua, P. Moretti, Y. C. Zhang, C. C. Hsu, and L. H. Peng, “Green light generation in a periodically poled Zn-doped LiNbO3 planar waveguide fabricated by He+ implantation,” Appl. Phys. B 89(2-3), 235–239 (2007).
[Crossref]

Morozova, T. M.

Nakajima, H.

S. Kurimura, Y. Kato, M. Maruyama, Y. Usui, and H. Nakajima, “Quasi-phase-matched adhered ridge waveguide in LiNbO3,” Appl. Phys. Lett. 89(19), 191123 (2006).
[Crossref]

Nie, R.

Nishihara, H.

T. Suhara and H. Nishihara, “Theoretical analysis of waveguide second-harmonic generation phase matched with uniform and chirped gratings,” IEEE J. Quantum Electron. 26(7), 1265–1276 (1990).
[Crossref]

Nolte, S.

J. Thomas, M. Heinrich, J. Burghoff, S. Nolte, A. Ancona, and A. Tünnermann, “Femtosecond laser-written quasi-phase-matched waveguides in lithium niobate,” Appl. Phys. Lett. 91(15), 151108 (2007).
[Crossref]

Nubile, A.

Olivares, J.

M. Jubera, J. Villarroel, A. García-Cabañes, M. Carrascosa, J. Olivares, F. Agullo-López, A. Méndez, and J. B. Ramiro, “Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation,” Appl. Phys. B 107(1), 157–162 (2012).
[Crossref]

Ostrowsky, D. B.

A. Martin, A. Issautier, H. Herrmann, W. Sohler, D. B. Ostrowsky, O. Alibart, and S. Tanzilli, “A polarization entangled photon-pair source based on a type-II PPLN waveguide emitting at a telecom wavelength,” New J. Phys. 12(10), 103005 (2010).
[Crossref]

Parameswaran, K. R.

Parini, A.

Pavel, N.

M. Iwai, T. Yoshino, S. Yamaguchi, M. Imaeda, N. Pavel, I. Shoji, and T. Taira, “High-power blue generation from a periodically poled MgO:LiNbO3 ridge-type waveguide by frequency doubling of a diode end-pumped Nd:Y3Al5O12 laser,” Appl. Phys. Lett. 83(18), 3659–3661 (2003).
[Crossref]

Peng, L. H.

B. Vincent, R. Kremer, A. Boudrioua, P. Moretti, Y. C. Zhang, C. C. Hsu, and L. H. Peng, “Green light generation in a periodically poled Zn-doped LiNbO3 planar waveguide fabricated by He+ implantation,” Appl. Phys. B 89(2-3), 235–239 (2007).
[Crossref]

Pityana, S.

N. Hamelin, G. Lifante, P. J. Chandler, P. D. Townsend, S. Pityana, and A. J. McCaffery, “Second harmonic generation in ion implanted lithium niobate planar waveguides,” J. Mod. Opt. 41(7), 1339–1348 (1994).
[Crossref]

Potì, L.

S. Sugliani, M. Bianconi, G. G. Bentini, M. Chiarini, P. De Nicola, G. B. Montanari, A. Menin, A. Malacarne, and L. Potì, “Refractive index tailoring in congruent lithium niobate by ion implantation,” Nucl. Instrum. Methods B 268(19), 2911–2914 (2010).
[Crossref]

Prasad, N. S.

D. Li, Y. Jiang, Y. J. Ding, I. B. Zotova, and N. S. Prasad, “Approaching single-photon detection in near-infrared region,” Appl. Phys. Lett. 101(14), 141126 (2012).
[Crossref]

Ramiro, J. B.

M. Jubera, J. Villarroel, A. García-Cabañes, M. Carrascosa, J. Olivares, F. Agullo-López, A. Méndez, and J. B. Ramiro, “Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation,” Appl. Phys. B 107(1), 157–162 (2012).
[Crossref]

Rauch, J. Y.

N. E. Courjal, B. Guichardaz, G. Ulliac, J. Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, “High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing,” J. Phys. D Appl. Phys. 44(30), 305101 (2011).
[Crossref]

Regener, R.

R. Regener and W. Sohler, “Loss in low-finesse Ti:LiNbO3 optical waveguide resonators,” Appl. Phys. B 36(3), 143–147 (1985).
[Crossref]

Ren, Y.

Ricken, R.

H. Hu, R. Ricken, W. Sohler, and R. B. Wehrspohn, “Lithium niobate ridge waveguides fabricated by wet etching,” IEEE Photonics Technol. Lett. 19(6), 417–419 (2007).
[Crossref]

Roussev, R. V.

Route, R. K.

Sadani, B.

N. E. Courjal, B. Guichardaz, G. Ulliac, J. Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, “High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing,” J. Phys. D Appl. Phys. 44(30), 305101 (2011).
[Crossref]

Segato, F.

Shen, D. Y.

Shirane, M.

Shoji, I.

M. Iwai, T. Yoshino, S. Yamaguchi, M. Imaeda, N. Pavel, I. Shoji, and T. Taira, “High-power blue generation from a periodically poled MgO:LiNbO3 ridge-type waveguide by frequency doubling of a diode end-pumped Nd:Y3Al5O12 laser,” Appl. Phys. Lett. 83(18), 3659–3661 (2003).
[Crossref]

I. Shoji, T. Kondo, A. Kitamoto, M. Shirane, and R. Ito, “Absolute scale of second-order nonlinear-optical coefficients,” J. Opt. Soc. Am. B 14(9), 2268–2294 (1997).
[Crossref]

Sohler, W.

A. Martin, A. Issautier, H. Herrmann, W. Sohler, D. B. Ostrowsky, O. Alibart, and S. Tanzilli, “A polarization entangled photon-pair source based on a type-II PPLN waveguide emitting at a telecom wavelength,” New J. Phys. 12(10), 103005 (2010).
[Crossref]

H. Hu, R. Ricken, W. Sohler, and R. B. Wehrspohn, “Lithium niobate ridge waveguides fabricated by wet etching,” IEEE Photonics Technol. Lett. 19(6), 417–419 (2007).
[Crossref]

R. Regener and W. Sohler, “Loss in low-finesse Ti:LiNbO3 optical waveguide resonators,” Appl. Phys. B 36(3), 143–147 (1985).
[Crossref]

Sugliani, S.

Suhara, T.

T. Suhara and H. Nishihara, “Theoretical analysis of waveguide second-harmonic generation phase matched with uniform and chirped gratings,” IEEE J. Quantum Electron. 26(7), 1265–1276 (1990).
[Crossref]

Taira, T.

M. Iwai, T. Yoshino, S. Yamaguchi, M. Imaeda, N. Pavel, I. Shoji, and T. Taira, “High-power blue generation from a periodically poled MgO:LiNbO3 ridge-type waveguide by frequency doubling of a diode end-pumped Nd:Y3Al5O12 laser,” Appl. Phys. Lett. 83(18), 3659–3661 (2003).
[Crossref]

Tanzilli, S.

A. Martin, A. Issautier, H. Herrmann, W. Sohler, D. B. Ostrowsky, O. Alibart, and S. Tanzilli, “A polarization entangled photon-pair source based on a type-II PPLN waveguide emitting at a telecom wavelength,” New J. Phys. 12(10), 103005 (2010).
[Crossref]

Thomas, J.

J. Thomas, M. Heinrich, J. Burghoff, S. Nolte, A. Ancona, and A. Tünnermann, “Femtosecond laser-written quasi-phase-matched waveguides in lithium niobate,” Appl. Phys. Lett. 91(15), 151108 (2007).
[Crossref]

Townsend, P. D.

N. Hamelin, G. Lifante, P. J. Chandler, P. D. Townsend, S. Pityana, and A. J. McCaffery, “Second harmonic generation in ion implanted lithium niobate planar waveguides,” J. Mod. Opt. 41(7), 1339–1348 (1994).
[Crossref]

Tünnermann, A.

J. Thomas, M. Heinrich, J. Burghoff, S. Nolte, A. Ancona, and A. Tünnermann, “Femtosecond laser-written quasi-phase-matched waveguides in lithium niobate,” Appl. Phys. Lett. 91(15), 151108 (2007).
[Crossref]

Ulliac, G.

N. E. Courjal, B. Guichardaz, G. Ulliac, J. Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, “High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing,” J. Phys. D Appl. Phys. 44(30), 305101 (2011).
[Crossref]

Usui, Y.

S. Kurimura, Y. Kato, M. Maruyama, Y. Usui, and H. Nakajima, “Quasi-phase-matched adhered ridge waveguide in LiNbO3,” Appl. Phys. Lett. 89(19), 191123 (2006).
[Crossref]

Vergani, P.

Villarroel, J.

M. Jubera, J. Villarroel, A. García-Cabañes, M. Carrascosa, J. Olivares, F. Agullo-López, A. Méndez, and J. B. Ramiro, “Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation,” Appl. Phys. B 107(1), 157–162 (2012).
[Crossref]

Vincent, B.

B. Vincent, R. Kremer, A. Boudrioua, P. Moretti, Y. C. Zhang, C. C. Hsu, and L. H. Peng, “Green light generation in a periodically poled Zn-doped LiNbO3 planar waveguide fabricated by He+ implantation,” Appl. Phys. B 89(2-3), 235–239 (2007).
[Crossref]

Wang, K. M.

Wang, L.

Wang, W.

H. Jin, F. M. Liu, P. Xu, J. L. Xia, M. L. Zhong, Y. Yuan, J. W. Zhou, Y. X. Gong, W. Wang, and S. N. Zhu, “On-chip generation and manipulation of entangled photons based on reconfigurable lithium-niobate waveguide circuits,” Phys. Rev. Lett. 113(10), 103601 (2014).
[Crossref] [PubMed]

Wang, X.

Q. Huang, P. Liu, T. Liu, L. Zhang, Y. Zhou, and X. Wang, “Second harmonic generation in periodically poled LiNbO3 waveguides formed by oxygen-ion implantation,” Phys. Status Solidi Rapid Res. Lett. 6(5), 205–207 (2012).
[Crossref]

Q. Huang, J. Zhao, P. Liu, J. Guan, and X. Wang, “Refractive index change in ion-implanted LiNbO3 waveguides calculated from lattice damage ratio,” J. Appl. Phys. 108(9), 093103 (2010).
[Crossref]

Wang, X. L.

Wehrspohn, R. B.

H. Hu, R. Ricken, W. Sohler, and R. B. Wehrspohn, “Lithium niobate ridge waveguides fabricated by wet etching,” IEEE Photonics Technol. Lett. 19(6), 417–419 (2007).
[Crossref]

White, J. M.

Xia, J. L.

H. Jin, F. M. Liu, P. Xu, J. L. Xia, M. L. Zhong, Y. Yuan, J. W. Zhou, Y. X. Gong, W. Wang, and S. N. Zhu, “On-chip generation and manipulation of entangled photons based on reconfigurable lithium-niobate waveguide circuits,” Phys. Rev. Lett. 113(10), 103601 (2014).
[Crossref] [PubMed]

Xu, P.

H. Jin, F. M. Liu, P. Xu, J. L. Xia, M. L. Zhong, Y. Yuan, J. W. Zhou, Y. X. Gong, W. Wang, and S. N. Zhu, “On-chip generation and manipulation of entangled photons based on reconfigurable lithium-niobate waveguide circuits,” Phys. Rev. Lett. 113(10), 103601 (2014).
[Crossref] [PubMed]

Yamaguchi, S.

M. Iwai, T. Yoshino, S. Yamaguchi, M. Imaeda, N. Pavel, I. Shoji, and T. Taira, “High-power blue generation from a periodically poled MgO:LiNbO3 ridge-type waveguide by frequency doubling of a diode end-pumped Nd:Y3Al5O12 laser,” Appl. Phys. Lett. 83(18), 3659–3661 (2003).
[Crossref]

Yang, W. S.

W. S. Yang, H. Y. Lee, W. K. Kim, and D. H. Yoon, “Asymmetry ridge structure fabrication and reactive ion etching of LiNbO3,” Opt. Mater. 27(10), 1642–1646 (2005).
[Crossref]

Yoon, D. H.

W. S. Yang, H. Y. Lee, W. K. Kim, and D. H. Yoon, “Asymmetry ridge structure fabrication and reactive ion etching of LiNbO3,” Opt. Mater. 27(10), 1642–1646 (2005).
[Crossref]

Yoshino, T.

M. Iwai, T. Yoshino, S. Yamaguchi, M. Imaeda, N. Pavel, I. Shoji, and T. Taira, “High-power blue generation from a periodically poled MgO:LiNbO3 ridge-type waveguide by frequency doubling of a diode end-pumped Nd:Y3Al5O12 laser,” Appl. Phys. Lett. 83(18), 3659–3661 (2003).
[Crossref]

Yuan, Y.

H. Jin, F. M. Liu, P. Xu, J. L. Xia, M. L. Zhong, Y. Yuan, J. W. Zhou, Y. X. Gong, W. Wang, and S. N. Zhu, “On-chip generation and manipulation of entangled photons based on reconfigurable lithium-niobate waveguide circuits,” Phys. Rev. Lett. 113(10), 103601 (2014).
[Crossref] [PubMed]

Zhang, L.

Q. Huang, P. Liu, T. Liu, L. Zhang, Y. Zhou, and X. Wang, “Second harmonic generation in periodically poled LiNbO3 waveguides formed by oxygen-ion implantation,” Phys. Status Solidi Rapid Res. Lett. 6(5), 205–207 (2012).
[Crossref]

Zhang, Y. C.

B. Vincent, R. Kremer, A. Boudrioua, P. Moretti, Y. C. Zhang, C. C. Hsu, and L. H. Peng, “Green light generation in a periodically poled Zn-doped LiNbO3 planar waveguide fabricated by He+ implantation,” Appl. Phys. B 89(2-3), 235–239 (2007).
[Crossref]

Zhao, J.

Q. Huang, J. Zhao, P. Liu, J. Guan, and X. Wang, “Refractive index change in ion-implanted LiNbO3 waveguides calculated from lattice damage ratio,” J. Appl. Phys. 108(9), 093103 (2010).
[Crossref]

Zhong, M. L.

H. Jin, F. M. Liu, P. Xu, J. L. Xia, M. L. Zhong, Y. Yuan, J. W. Zhou, Y. X. Gong, W. Wang, and S. N. Zhu, “On-chip generation and manipulation of entangled photons based on reconfigurable lithium-niobate waveguide circuits,” Phys. Rev. Lett. 113(10), 103601 (2014).
[Crossref] [PubMed]

Zhou, J. W.

H. Jin, F. M. Liu, P. Xu, J. L. Xia, M. L. Zhong, Y. Yuan, J. W. Zhou, Y. X. Gong, W. Wang, and S. N. Zhu, “On-chip generation and manipulation of entangled photons based on reconfigurable lithium-niobate waveguide circuits,” Phys. Rev. Lett. 113(10), 103601 (2014).
[Crossref] [PubMed]

Zhou, Y.

Q. Huang, P. Liu, T. Liu, L. Zhang, Y. Zhou, and X. Wang, “Second harmonic generation in periodically poled LiNbO3 waveguides formed by oxygen-ion implantation,” Phys. Status Solidi Rapid Res. Lett. 6(5), 205–207 (2012).
[Crossref]

Zhu, S. N.

H. Jin, F. M. Liu, P. Xu, J. L. Xia, M. L. Zhong, Y. Yuan, J. W. Zhou, Y. X. Gong, W. Wang, and S. N. Zhu, “On-chip generation and manipulation of entangled photons based on reconfigurable lithium-niobate waveguide circuits,” Phys. Rev. Lett. 113(10), 103601 (2014).
[Crossref] [PubMed]

Zotova, I. B.

D. Li, Y. Jiang, Y. J. Ding, I. B. Zotova, and N. S. Prasad, “Approaching single-photon detection in near-infrared region,” Appl. Phys. Lett. 101(14), 141126 (2012).
[Crossref]

Appl. Opt. (2)

Appl. Phys. B (3)

R. Regener and W. Sohler, “Loss in low-finesse Ti:LiNbO3 optical waveguide resonators,” Appl. Phys. B 36(3), 143–147 (1985).
[Crossref]

M. Jubera, J. Villarroel, A. García-Cabañes, M. Carrascosa, J. Olivares, F. Agullo-López, A. Méndez, and J. B. Ramiro, “Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation,” Appl. Phys. B 107(1), 157–162 (2012).
[Crossref]

B. Vincent, R. Kremer, A. Boudrioua, P. Moretti, Y. C. Zhang, C. C. Hsu, and L. H. Peng, “Green light generation in a periodically poled Zn-doped LiNbO3 planar waveguide fabricated by He+ implantation,” Appl. Phys. B 89(2-3), 235–239 (2007).
[Crossref]

Appl. Phys. Lett. (4)

M. Iwai, T. Yoshino, S. Yamaguchi, M. Imaeda, N. Pavel, I. Shoji, and T. Taira, “High-power blue generation from a periodically poled MgO:LiNbO3 ridge-type waveguide by frequency doubling of a diode end-pumped Nd:Y3Al5O12 laser,” Appl. Phys. Lett. 83(18), 3659–3661 (2003).
[Crossref]

S. Kurimura, Y. Kato, M. Maruyama, Y. Usui, and H. Nakajima, “Quasi-phase-matched adhered ridge waveguide in LiNbO3,” Appl. Phys. Lett. 89(19), 191123 (2006).
[Crossref]

D. Li, Y. Jiang, Y. J. Ding, I. B. Zotova, and N. S. Prasad, “Approaching single-photon detection in near-infrared region,” Appl. Phys. Lett. 101(14), 141126 (2012).
[Crossref]

J. Thomas, M. Heinrich, J. Burghoff, S. Nolte, A. Ancona, and A. Tünnermann, “Femtosecond laser-written quasi-phase-matched waveguides in lithium niobate,” Appl. Phys. Lett. 91(15), 151108 (2007).
[Crossref]

IEEE J. Quantum Electron. (1)

T. Suhara and H. Nishihara, “Theoretical analysis of waveguide second-harmonic generation phase matched with uniform and chirped gratings,” IEEE J. Quantum Electron. 26(7), 1265–1276 (1990).
[Crossref]

IEEE Photonics Technol. Lett. (1)

H. Hu, R. Ricken, W. Sohler, and R. B. Wehrspohn, “Lithium niobate ridge waveguides fabricated by wet etching,” IEEE Photonics Technol. Lett. 19(6), 417–419 (2007).
[Crossref]

J. Appl. Phys. (2)

F. Chen, “Photonic guiding structures in lithium niobate crystals produced by energetic ion beams,” J. Appl. Phys. 106(8), 081101 (2009).
[Crossref]

Q. Huang, J. Zhao, P. Liu, J. Guan, and X. Wang, “Refractive index change in ion-implanted LiNbO3 waveguides calculated from lattice damage ratio,” J. Appl. Phys. 108(9), 093103 (2010).
[Crossref]

J. Lightwave Technol. (1)

J. Mod. Opt. (2)

N. Hamelin and Y. Chow, “Guided-type second harmonic generation in ion implanted MgO:LiNbO3,” J. Mod. Opt. 45, 2125–2129 (1998).

N. Hamelin, G. Lifante, P. J. Chandler, P. D. Townsend, S. Pityana, and A. J. McCaffery, “Second harmonic generation in ion implanted lithium niobate planar waveguides,” J. Mod. Opt. 41(7), 1339–1348 (1994).
[Crossref]

J. Opt. Soc. Am. A (1)

J. Opt. Soc. Am. B (1)

J. Phys. D Appl. Phys. (1)

N. E. Courjal, B. Guichardaz, G. Ulliac, J. Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, “High aspect ratio lithium niobate ridge waveguides fabricated by optical grade dicing,” J. Phys. D Appl. Phys. 44(30), 305101 (2011).
[Crossref]

New J. Phys. (1)

A. Martin, A. Issautier, H. Herrmann, W. Sohler, D. B. Ostrowsky, O. Alibart, and S. Tanzilli, “A polarization entangled photon-pair source based on a type-II PPLN waveguide emitting at a telecom wavelength,” New J. Phys. 12(10), 103005 (2010).
[Crossref]

Nucl. Instrum. Methods B (1)

S. Sugliani, M. Bianconi, G. G. Bentini, M. Chiarini, P. De Nicola, G. B. Montanari, A. Menin, A. Malacarne, and L. Potì, “Refractive index tailoring in congruent lithium niobate by ion implantation,” Nucl. Instrum. Methods B 268(19), 2911–2914 (2010).
[Crossref]

Opt. Acta (Lond.) (1)

P. J. Chandler and F. L. Lama, “A new approach to the determination of planar waveguide profiles by means of a non-stationary mode index calculation,” Opt. Acta (Lond.) 33(2), 127–143 (1986).
[Crossref]

Opt. Express (3)

Opt. Lett. (2)

Opt. Mater. (1)

W. S. Yang, H. Y. Lee, W. K. Kim, and D. H. Yoon, “Asymmetry ridge structure fabrication and reactive ion etching of LiNbO3,” Opt. Mater. 27(10), 1642–1646 (2005).
[Crossref]

Phys. Rev. Lett. (1)

H. Jin, F. M. Liu, P. Xu, J. L. Xia, M. L. Zhong, Y. Yuan, J. W. Zhou, Y. X. Gong, W. Wang, and S. N. Zhu, “On-chip generation and manipulation of entangled photons based on reconfigurable lithium-niobate waveguide circuits,” Phys. Rev. Lett. 113(10), 103601 (2014).
[Crossref] [PubMed]

Phys. Status Solidi Rapid Res. Lett. (1)

Q. Huang, P. Liu, T. Liu, L. Zhang, Y. Zhou, and X. Wang, “Second harmonic generation in periodically poled LiNbO3 waveguides formed by oxygen-ion implantation,” Phys. Status Solidi Rapid Res. Lett. 6(5), 205–207 (2012).
[Crossref]

Other (2)

J. F. Ziegler, J. P. Biersack, and U. Littmark, “Stopping and Range of Ions in Matter,” http://www.srim.org/ , (2008).

R. W. Boyd, Nonlinear Optics, 3rd ed. (Academic Press, 2007).

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Figures (5)

Fig. 1
Fig. 1 Schematic plot of procedure for (a) C+ implantation and (b) optical-grade dicing.
Fig. 2
Fig. 2 Simulated damage profile ED(z) (blue) and extraordinary index profile Δn632.8(z) (red) of the as-implanted planar waveguide.
Fig. 3
Fig. 3 Calculated phase-matching conditions for ridge waveguides with a height of 10μm, width w and a refractive index profile according to Eq. (1). (a) Grating period Λ for a waveguide with w = 16μm as a function of factor f. (b) The same data for f = 0.91 but with varying width w.
Fig. 4
Fig. 4 Fabry-Perot interferences of transmitted power of waveguide WG16.
Fig. 5
Fig. 5 (a) Experimental SHG tuning curve (red dots) compared with theoretical QPM sinc curve (blue dots); (b) measured second harmonic power (blue circles) vs. pump power of wavelength 1612.7 nm. The inset shows the output mode profile of the SHG wave.

Equations (5)

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n ( λ , z ) = n s u b ( λ ) + f n s u b ( λ ) n s u b ( 632.8 nm ) Δ n 632.8 ( z ) .
α = 4.34 dB L ( ln R ln ( ( 1 1 K 2 ) / K ) ) with K = I max I min I max + I min
d A 1 d z = 2 i ω 1 2 d e f f 2 k 1 c 2 S e f f A 2 A 1 * e i Δ k z α 1 A 1 2 ,
d A 2 d z = 2 i ω 2 2 d e f f 2 k 1 c 2 S e f f A 1 A 1 * e i Δ k z α 2 A 2 2 ,
S e f f = [ E 2 N o r E 1 N o r E 1 N o r d x d y ] 2 ,

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