Abstract

In this paper, we present the design, the fabrication and the characterization of an Arrayed Waveguide Grating (AWG) based on a SiGe graded index waveguide platform, operating at 4.5 µm. These devices were specifically designed to work together with an array of Distributed Feedback Bragg Quantum Cascade Lasers (DFB-QCL) emitting at different wavelengths. The AWG enables to combine the different light sources into a single output and the design adopted allows to maximize transmission over the entire spectral range defined by the array of DFB-QCLs.

© 2015 Optical Society of America

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    [Crossref]
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    [Crossref]
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2015 (1)

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

2014 (4)

M. Brun, P. Labeye, G. Grand, J.-M. Hartmann, F. Boulila, M. Carras, and S. Nicoletti, “Low loss SiGe graded index waveguides for mid-IR applications,” Opt. Express 22(1), 508–518 (2014).
[Crossref] [PubMed]

J. Wang, Z. Sheng, L. Li, A. Pang, A. Wu, W. Li, X. Wang, S. Zou, M. Qi, and F. Gan, “Low-loss and low-crosstalk 8 × 8 silicon nanowire AWG routers fabricated with CMOS technology,” Opt. Express 22(8), 9395–9403 (2014).
[Crossref] [PubMed]

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

T. Ye, Y. Fu, L. Qiao, and T. Chu, “Low-crosstalk Si arrayed waveguide grating with parabolic tapers,” Opt. Express 22(26), 31899–31906 (2014).
[Crossref] [PubMed]

2013 (4)

M. Carras, G. Maisons, B. Simozrag, V. Trinite, M. Brun, G. Grand, P. Labeye, and S. Nicoletti, “Monolithic tunable single source in the mid-IR for spectroscopy,” Proc. SPIE 8631, 863113 (2013).
[Crossref]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of Silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[Crossref] [PubMed]

S. Pathak, M. Vanslembrouck, P. Dumon, D. Van Thourhout, and W. Bogaerts, “Optimized silicon AWG with flattened spectral response using an MMI aperture,” J. Lightwave Technol. 31(1), 87–93 (2013).
[Crossref]

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photon.Tech. L. 25(18), 1805–1808 (2013).
[Crossref]

2009 (1)

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

2007 (1)

J. Zhou, N. Q. Ngo, C. Ho, L. Petti, and P. Mormile, “Design of low-loss and low crosstalk arrayed waveguide grating through Fraunhofer diffraction analysis and beam propagation method,” J. Opt. A, Pure Appl. Opt. 9(7), 709–715 (2007).
[Crossref]

2006 (1)

Q. Fang, F. Li, and Y. Liu, “Compact SOI arrayed waveguide grating demultiplexer with broad spectral response,” Opt. Commun. 258(2), 155–158 (2006).
[Crossref]

1999 (1)

A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5(5), 1227–1236 (1999).
[Crossref]

1996 (1)

M. K. Smit and C. Van Dam, “Phasar-based WDM-devices: principles, design and applications,” IEEE J. Sel. Top. Quantum Electron. 2(2), 236–250 (1996).
[Crossref]

Audet, R.

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

Baets, Y.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Belkin, M.

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

Bogaerts, W.

Boulila, F.

Bour, D.

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

Brun, M.

M. Brun, P. Labeye, G. Grand, J.-M. Hartmann, F. Boulila, M. Carras, and S. Nicoletti, “Low loss SiGe graded index waveguides for mid-IR applications,” Opt. Express 22(1), 508–518 (2014).
[Crossref] [PubMed]

M. Carras, G. Maisons, B. Simozrag, V. Trinite, M. Brun, G. Grand, P. Labeye, and S. Nicoletti, “Monolithic tunable single source in the mid-IR for spectroscopy,” Proc. SPIE 8631, 863113 (2013).
[Crossref]

Capasso, F.

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

Carras, M.

M. Brun, P. Labeye, G. Grand, J.-M. Hartmann, F. Boulila, M. Carras, and S. Nicoletti, “Low loss SiGe graded index waveguides for mid-IR applications,” Opt. Express 22(1), 508–518 (2014).
[Crossref] [PubMed]

M. Carras, G. Maisons, B. Simozrag, V. Trinite, M. Brun, G. Grand, P. Labeye, and S. Nicoletti, “Monolithic tunable single source in the mid-IR for spectroscopy,” Proc. SPIE 8631, 863113 (2013).
[Crossref]

Cerutti, J.-B.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Chen, X.

Chen Hu, B.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Chu, T.

Corzine, S.

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

Dave, U.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Diehl, L.

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

Dominguez Bucio, P. R.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Dumon, P.

Fang, Q.

Q. Fang, F. Li, and Y. Liu, “Compact SOI arrayed waveguide grating demultiplexer with broad spectral response,” Opt. Commun. 258(2), 155–158 (2006).
[Crossref]

Fu, Y.

Gan, F.

Gardes, F. Y.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Gassenq, A.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Gencarelli, B.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Goh, T.

A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5(5), 1227–1236 (1999).
[Crossref]

Grand, G.

M. Brun, P. Labeye, G. Grand, J.-M. Hartmann, F. Boulila, M. Carras, and S. Nicoletti, “Low loss SiGe graded index waveguides for mid-IR applications,” Opt. Express 22(1), 508–518 (2014).
[Crossref] [PubMed]

M. Carras, G. Maisons, B. Simozrag, V. Trinite, M. Brun, G. Grand, P. Labeye, and S. Nicoletti, “Monolithic tunable single source in the mid-IR for spectroscopy,” Proc. SPIE 8631, 863113 (2013).
[Crossref]

Green, W. M. J.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Hartmann, J.-M.

Hattasan, N.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Healy, A. C.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Hens, R.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Ho, C.

J. Zhou, N. Q. Ngo, C. Ho, L. Petti, and P. Mormile, “Design of low-loss and low crosstalk arrayed waveguide grating through Fraunhofer diffraction analysis and beam propagation method,” J. Opt. A, Pure Appl. Opt. 9(7), 709–715 (2007).
[Crossref]

Hufler, G.

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

Kaneko, A.

A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5(5), 1227–1236 (1999).
[Crossref]

Ke Li, M.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Khokhar, C. J.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Kuyken, B.

Kuyken, F.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Labeye, P.

M. Brun, P. Labeye, G. Grand, J.-M. Hartmann, F. Boulila, M. Carras, and S. Nicoletti, “Low loss SiGe graded index waveguides for mid-IR applications,” Opt. Express 22(1), 508–518 (2014).
[Crossref] [PubMed]

M. Carras, G. Maisons, B. Simozrag, V. Trinite, M. Brun, G. Grand, P. Labeye, and S. Nicoletti, “Monolithic tunable single source in the mid-IR for spectroscopy,” Proc. SPIE 8631, 863113 (2013).
[Crossref]

Lee, B. G.

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

Leo, A.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Lepage, G.

Li, F.

Q. Fang, F. Li, and Y. Liu, “Compact SOI arrayed waveguide grating demultiplexer with broad spectral response,” Opt. Commun. 258(2), 155–158 (2006).
[Crossref]

Li, L.

Li, W.

Li Shen, N.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Littlejohns, T.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Liu, Y.

Q. Fang, F. Li, and Y. Liu, “Compact SOI arrayed waveguide grating demultiplexer with broad spectral response,” Opt. Commun. 258(2), 155–158 (2006).
[Crossref]

Loo, J.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Loo, R.

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photon.Tech. L. 25(18), 1805–1808 (2013).
[Crossref]

MacArthur, J.

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

Maisons, G.

M. Carras, G. Maisons, B. Simozrag, V. Trinite, M. Brun, G. Grand, P. Labeye, and S. Nicoletti, “Monolithic tunable single source in the mid-IR for spectroscopy,” Proc. SPIE 8631, 863113 (2013).
[Crossref]

Malik, A.

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photon.Tech. L. 25(18), 1805–1808 (2013).
[Crossref]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of Silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[Crossref] [PubMed]

Malik, M.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Mashanovich,

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Mashanovich, G. Z.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of Silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[Crossref] [PubMed]

Mitchell, S.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Mormile, P.

J. Zhou, N. Q. Ngo, C. Ho, L. Petti, and P. Mormile, “Design of low-loss and low crosstalk arrayed waveguide grating through Fraunhofer diffraction analysis and beam propagation method,” J. Opt. A, Pure Appl. Opt. 9(7), 709–715 (2007).
[Crossref]

Muneeb, E.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Muneeb, M.

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of Silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[Crossref] [PubMed]

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photon.Tech. L. 25(18), 1805–1808 (2013).
[Crossref]

Nedeljkovic, G.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Nedeljkovic, J.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Nedeljkovic, M.

Ngo, N. Q.

J. Zhou, N. Q. Ngo, C. Ho, L. Petti, and P. Mormile, “Design of low-loss and low crosstalk arrayed waveguide grating through Fraunhofer diffraction analysis and beam propagation method,” J. Opt. A, Pure Appl. Opt. 9(7), 709–715 (2007).
[Crossref]

Nicoletti, S.

M. Brun, P. Labeye, G. Grand, J.-M. Hartmann, F. Boulila, M. Carras, and S. Nicoletti, “Low loss SiGe graded index waveguides for mid-IR applications,” Opt. Express 22(1), 508–518 (2014).
[Crossref] [PubMed]

M. Carras, G. Maisons, B. Simozrag, V. Trinite, M. Brun, G. Grand, P. Labeye, and S. Nicoletti, “Monolithic tunable single source in the mid-IR for spectroscopy,” Proc. SPIE 8631, 863113 (2013).
[Crossref]

Ogawa, I.

A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5(5), 1227–1236 (1999).
[Crossref]

Osgood,

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Pang, A.

Passaro, C. G.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Pathak, S.

Peacock,

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Petti, L.

J. Zhou, N. Q. Ngo, C. Ho, L. Petti, and P. Mormile, “Design of low-loss and low crosstalk arrayed waveguide grating through Fraunhofer diffraction analysis and beam propagation method,” J. Opt. A, Pure Appl. Opt. 9(7), 709–715 (2007).
[Crossref]

Pflugl, C.

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

Qi, M.

Qiao, L.

Reed, G. T.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Reynolds,

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Rodriguez, E.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Roelkens, G.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of Silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[Crossref] [PubMed]

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photon.Tech. L. 25(18), 1805–1808 (2013).
[Crossref]

Ryckeboer, D.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Ryckeboer, E.

Sanchez, S.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Sheng, Z.

Shimura, F.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Shimura, Y.

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photon.Tech. L. 25(18), 1805–1808 (2013).
[Crossref]

Simozrag, B.

M. Carras, G. Maisons, B. Simozrag, V. Trinite, M. Brun, G. Grand, P. Labeye, and S. Nicoletti, “Monolithic tunable single source in the mid-IR for spectroscopy,” Proc. SPIE 8631, 863113 (2013).
[Crossref]

Smit, M. K.

M. K. Smit and C. Van Dam, “Phasar-based WDM-devices: principles, design and applications,” IEEE J. Sel. Top. Quantum Electron. 2(2), 236–250 (1996).
[Crossref]

Soler Penades, A. Z.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Stankovic, R.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Tanaka, T.

A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5(5), 1227–1236 (1999).
[Crossref]

Thomson, D. J.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Topley, S. A.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Tournie,

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Trinite, V.

M. Carras, G. Maisons, B. Simozrag, V. Trinite, M. Brun, G. Grand, P. Labeye, and S. Nicoletti, “Monolithic tunable single source in the mid-IR for spectroscopy,” Proc. SPIE 8631, 863113 (2013).
[Crossref]

Troia, V. M. N.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Uvin, R.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Van Campenhout, J.

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, “Demonstration of Silicon-on-insulator mid-infrared spectrometers operating at 3.8 μm,” Opt. Express 21(10), 11659–11669 (2013).
[Crossref] [PubMed]

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photon.Tech. L. 25(18), 1805–1808 (2013).
[Crossref]

Van Campenhout, L.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Van Dam, C.

M. K. Smit and C. Van Dam, “Phasar-based WDM-devices: principles, design and applications,” IEEE J. Sel. Top. Quantum Electron. 2(2), 236–250 (1996).
[Crossref]

Van Thourhout, D.

Vanslembrouck, M.

Verheyen, P.

Vincent, R.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Wang, J.

Wang, X.

Wang, Z.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Wilson,

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Wu, A.

Xia Chen, M.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Xiaoping Liu, R.

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

Yamada, H.

A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5(5), 1227–1236 (1999).
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Ye, T.

Youfang Hu,

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Yun Wang, B.

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

Zhang, H.

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

Zhou, J.

J. Zhou, N. Q. Ngo, C. Ho, L. Petti, and P. Mormile, “Design of low-loss and low crosstalk arrayed waveguide grating through Fraunhofer diffraction analysis and beam propagation method,” J. Opt. A, Pure Appl. Opt. 9(7), 709–715 (2007).
[Crossref]

Zou, S.

IEEE J. Quantum Electron. (1)

B. G. Lee, M. Belkin, C. Pflugl, L. Diehl, H. Zhang, R. Audet, J. MacArthur, D. Bour, S. Corzine, G. Hufler, and F. Capasso, “DFB quantum cascade laser arrays,” IEEE J. Quantum Electron. 45(5), 554–565 (2009).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (4)

G. Roelkens, U. Dave, A. Gassenq, N. Hattasan, B. Chen Hu, F. Kuyken, A. Leo, M. Malik, E. Muneeb, D. Ryckeboer, S. Sanchez, R. Uvin, Z. Wang, R. Hens, Y. Baets, F. Shimura, B. Gencarelli, R. Vincent, J. Loo, L. Van Campenhout, J.-B. Cerutti, E. Rodriguez, Tournie, M. Xia Chen, G. Nedeljkovic, Mashanovich, N. Li Shen, A. C. Healy, Peacock, R. Xiaoping Liu, Osgood, and W. M. J. Green, “Silicon-based photonic integration beyond the telecommunication wavelength range,” IEEE J. Sel. Top. Quantum Electron. 20(4), 394–404 (2014).
[Crossref]

G. Z. Mashanovich, F. Y. Gardes, D. J. Thomson, Youfang Hu, M. Ke Li, J. Nedeljkovic, A. Z. Soler Penades, C. J. Khokhar, S. Mitchell, R. Stankovic, S. A. Topley, Reynolds, B. Yun Wang, V. M. N. Troia, C. G. Passaro, T. Littlejohns, P. R. Dominguez Bucio, Wilson, and G. T. Reed, “Silicon photonic waveguides and devices for near- and mid-IR applications,” IEEE J. Sel. Top. Quantum Electron. 21(4), 8200112 (2015).
[Crossref]

M. K. Smit and C. Van Dam, “Phasar-based WDM-devices: principles, design and applications,” IEEE J. Sel. Top. Quantum Electron. 2(2), 236–250 (1996).
[Crossref]

A. Kaneko, T. Goh, H. Yamada, T. Tanaka, and I. Ogawa, “Design and applications of silica-based planar lightwave circuits,” IEEE J. Sel. Top. Quantum Electron. 5(5), 1227–1236 (1999).
[Crossref]

IEEE Photon.Tech. L. (1)

A. Malik, M. Muneeb, S. Pathak, Y. Shimura, J. Van Campenhout, R. Loo, and G. Roelkens, “Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers,” IEEE Photon.Tech. L. 25(18), 1805–1808 (2013).
[Crossref]

J. Lightwave Technol. (1)

J. Opt. A, Pure Appl. Opt. (1)

J. Zhou, N. Q. Ngo, C. Ho, L. Petti, and P. Mormile, “Design of low-loss and low crosstalk arrayed waveguide grating through Fraunhofer diffraction analysis and beam propagation method,” J. Opt. A, Pure Appl. Opt. 9(7), 709–715 (2007).
[Crossref]

Opt. Commun. (1)

Q. Fang, F. Li, and Y. Liu, “Compact SOI arrayed waveguide grating demultiplexer with broad spectral response,” Opt. Commun. 258(2), 155–158 (2006).
[Crossref]

Opt. Express (4)

Proc. SPIE (1)

M. Carras, G. Maisons, B. Simozrag, V. Trinite, M. Brun, G. Grand, P. Labeye, and S. Nicoletti, “Monolithic tunable single source in the mid-IR for spectroscopy,” Proc. SPIE 8631, 863113 (2013).
[Crossref]

Other (4)

R. Guenther, Modern Optics (Wiley & Sons, 1990), Chap. 9, pp. 336–343.

Kayoun, Etude du couplage entre éléments monomodes. Application au couplage fibre-laser semi-conducteur et fibre-guide d'onde optique intégrée (Ph.D. Dissertation, Université de Nice, 1981).

P. Barritault, M. Brun, P. Labeye, O. Lartigue, J-M. Hartmann and S. Nicoletti, CEA-LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, FRANCE are preparing a manuscript to be called “Mlines characterization of the refractive index profile of SiGe gradient waveguides over mid IR range.”

A. W. Snyder and J. D. Love, Optical Waveguide Theory (Chapman & Hall, 1983).

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Figures (11)

Fig. 1
Fig. 1 (a) Sketch of an AWG. Principle of operation in the de-multiplexing way. (b) Sketch of the waveguide stack. (c) Mode profile (|Ey|/|Ey(0,0)|) calculated in a single mode waveguide. The physical dimensions of the core are presented in the superimposed white box. (d) X (black) and Y (blue) cross sections of the field. Dashed lines are Gaussian fits with X and Y waists values of 2.1 µm and 1.7 µm respectively.
Fig. 2
Fig. 2 (a) Typical spectral response of an AWG calculated with the Gaussian diffraction theory. (b) Definition of useful parameters for characterization of the AWG (see text for further details).
Fig. 3
Fig. 3 Cross section of Ey (BPM calculation) and fit by a two Gaussian function.
Fig. 4
Fig. 4 (a) Influence of the MMI coupler on the entire spectral response of the AWG. (b) Influence of the MMI coupler on the efficiency of the AWG according to the parameters defined in Fig. 2(b).
Fig. 5
Fig. 5 (a) and (b) 3D SEM pictures of the AWG structures before encapsulation. (a) Details of the waveguide routing toward the AWG entrance. (b) Details of the exit waveguides with MMI structures at the AWG exit port. (c) Cross-sectional SEM picture of the AWG showing the core of the waveguides and in perspective, the waveguide itself after encapsulation by a thick Si epitaxial layer. (d) Cross section of the SiGe waveguide core. Intensity grading in the vertical direction is related to Ge concentration variations.
Fig. 6
Fig. 6 Experimental setup used to characterize the AWGs (see details in the text).
Fig. 7
Fig. 7 Example of five raw transmission spectra obtained for an injection in the central input of an AWG. The reference spectrum is obtained for an injection in the reference waveguide.
Fig. 8
Fig. 8 Measured wavenumbers, at the outputs of AWG2, versus target wavenumbers. The nine plots correspond to the FP-QCL injection in each of the nine inputs of AWG2.
Fig. 9
Fig. 9 (a) Averaged value of the wavenumber shift (calculated from Fig. 8) for the nine inputs of AWG2 and linear fit <Δνmeasured> = 1.005<Δνtarget> + 10.68 (R2 = 0.9995). (b) Influence of the chromatic dispersion (AWG1: dispersion not corrected, AWG2: dispersion corrected) for an injection in Δνinput = 11.8 cm−1.
Fig. 10
Fig. 10 Normalized spectra measured for 3 outputs of each AWG. (a) AWG2: dispersion corrected. (b) AWG3: dispersion corrected + taper. Measurements of cross talk and central transmission are superimposed.
Fig. 11
Fig. 11 (a) AWG3: dispersion corrected + taper. (b) AWG4: dispersion corrected + taper + MMI. (c) AWG4: normalized spectra from the 5 outputs (2267 – 2280 cm−1) when the FP-QCL is injected in inputs Δνinput = 0 cm−1 (green), −11.8 cm−1 (red) and −29.4 cm−1 (blue).

Tables (1)

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Table 1 AWG Configurations

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