Abstract

Intracavity high harmonic generation was utilized to generate high average-power coherent radiation at vacuum ultraviolet (vuv) wavelengths. A ytterbium-doped fiber-laser based master-oscillator power-amplifier (MOPA) system with a 10 MHz repetition frequency was developed and used as a driving laser for an external cavity. A series of odd-order harmonic radiations was generated extending down to ∼ 30 nm (41 eV in photon energy). The 7th harmonic radiation generated was centered at 149 nm and had an average output power of up to 0.5 mW. In this way, we developed a sub-mW coherent vuv-laser with a 10 MHz repetition frequency, which, if used as an excitation laser source for photo-electron spectroscopy, could improve the signal count-rate without deterioration of the spectral-resolution caused by space-charge effects.

© 2015 Optical Society of America

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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
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    [Crossref]

2014 (4)

K. Wakui, K. Hayasaka, and T. Ido, “Generation of vacuum ultraviolet radiation by intracavity high-harmonic generation toward state detection of single trapped ions,” App. Phys. B 117, 957–967 (2014).
[Crossref]

H. Carstens, N. Lilienfein, S. Holzberger, C. Jocher, T. Eidam, J. Limpert, A. Tünnermann, J. Weitenberg, D. C. Yost, A. Alghamdi, Z. Alahmed, A. Azzeer, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Megawatt-scale average-power ultrashort pulses in an enhancement cavity,” Opt. Lett. 39, 2595–2598 (2014).
[Crossref] [PubMed]

C. Benko, T. K. Allison, A. Cingöz, L. Hua, F. Labaye, D. C. Yost, and J. Ye, “Extreme ultraviolet radiation with coherence time greater than 1 s,” Nat. Photonics 8, 530–536 (2014).
[Crossref]

I. Pupeza, M. Högner, J. Weitenberg, S. Holzberger, D. Esser, T. Eidam, J. Limpert, A. Tünnermann, E. Fill, and V. S. Yakovlev, “Cavity-enhanced high-harmonic generation with spatially tailored driving fields,” Phys. Rev. Lett. 112, 103902 (2014).
[Crossref] [PubMed]

2013 (5)

2012 (2)

2011 (6)

2010 (1)

2008 (3)

2006 (2)

K. D. Moll, R. J. Jones, and J. Ye, “Output coupling methods for cavity-based high-harmonic generation,” Opt. Express 14, 8189–8197 (2006).
[Crossref] [PubMed]

S. Passlack, S. Mathias, O. Andreyev, D. Mittnacht, M. Aeschlimann, and M. Bauer, “Space charge effects in photoemission with a low repetition, high intensity femtosecond laser source,” J. Appl. Phys. 100, 024912 (2006).
[Crossref]

2005 (2)

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436, 234–237 (2005).
[Crossref] [PubMed]

R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94, 193201 (2005).
[Crossref] [PubMed]

2002 (1)

M. Arita, K. Shimada, H. Namatame, and M. Taniguchi, “High-resolution and low-temperature photoemission spectroscopy at the hisor helical-undulator beamline,” Surf. Rev. Lett. 9, 535–539 (2002).
[Crossref]

1983 (1)

R. Drever, J. L. Hall, F. Kowalski, J. Hough, G. Ford, A. Munley, and H. Ward, “Laser phase and frequency stabilization using an optical resonator,” Appl. Phys. B 31, 97–105 (1983).
[Crossref]

Aeschlimann, M.

S. Passlack, S. Mathias, O. Andreyev, D. Mittnacht, M. Aeschlimann, and M. Bauer, “Space charge effects in photoemission with a low repetition, high intensity femtosecond laser source,” J. Appl. Phys. 100, 024912 (2006).
[Crossref]

Alahmed, Z.

Alahmed, Z. A.

Alghamdi, A.

Allison, T.

T. Allison, A. Cingöz, D. Yost, and J. Ye, “Extreme nonlinear optics in a femtosecond enhancement cavity,” Phys. Rev. Lett. 107, 183903 (2011).
[Crossref] [PubMed]

Allison, T. K.

C. Benko, T. K. Allison, A. Cingöz, L. Hua, F. Labaye, D. C. Yost, and J. Ye, “Extreme ultraviolet radiation with coherence time greater than 1 s,” Nat. Photonics 8, 530–536 (2014).
[Crossref]

A. Cingöz, D. C. Yost, T. K. Allison, A. Ruehl, M. E. Fermann, I. Hartl, and J. Ye, “Direct frequency comb spectroscopy in the extreme ultraviolet,” Nature 482, 68–71 (2012).
[Crossref] [PubMed]

Andreyev, O.

S. Passlack, S. Mathias, O. Andreyev, D. Mittnacht, M. Aeschlimann, and M. Bauer, “Space charge effects in photoemission with a low repetition, high intensity femtosecond laser source,” J. Appl. Phys. 100, 024912 (2006).
[Crossref]

Apolonski, A.

H. Carstens, N. Lilienfein, S. Holzberger, C. Jocher, T. Eidam, J. Limpert, A. Tünnermann, J. Weitenberg, D. C. Yost, A. Alghamdi, Z. Alahmed, A. Azzeer, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Megawatt-scale average-power ultrashort pulses in an enhancement cavity,” Opt. Lett. 39, 2595–2598 (2014).
[Crossref] [PubMed]

H. Carstens, S. Holzberger, J. Kaster, J. Weitenberg, V. Pervak, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Large-mode enhancement cavities,” Opt. Express 21, 11606–11617 (2013).
[Crossref] [PubMed]

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

O. Pronin, V. Pervak, E. Fill, J. Rauschenberger, F. Krausz, and A. Apolonski, “Ultrabroadband efficient intra-cavity xuv output coupler,” Opt. Express 19, 10232–10240 (2011).
[Crossref] [PubMed]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35, 2052–2054 (2010).
[Crossref] [PubMed]

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

Arita, M.

M. Arita, K. Shimada, H. Namatame, and M. Taniguchi, “High-resolution and low-temperature photoemission spectroscopy at the hisor helical-undulator beamline,” Surf. Rev. Lett. 9, 535–539 (2002).
[Crossref]

Azzeer, A.

Azzeer, A. M.

Bauer, M.

S. Passlack, S. Mathias, O. Andreyev, D. Mittnacht, M. Aeschlimann, and M. Bauer, “Space charge effects in photoemission with a low repetition, high intensity femtosecond laser source,” J. Appl. Phys. 100, 024912 (2006).
[Crossref]

Benko, C.

C. Benko, T. K. Allison, A. Cingöz, L. Hua, F. Labaye, D. C. Yost, and J. Ye, “Extreme ultraviolet radiation with coherence time greater than 1 s,” Nat. Photonics 8, 530–536 (2014).
[Crossref]

Bernhardt, B.

Berntsen, M. H.

M. H. Berntsen, O. Götberg, and O. Tjernberg, “An experimental setup for high resolution 10.5 ev laser-based angle-resolved photoelectron spectroscopy using a time-of-flight electron analyzer,” Rev. Sci. Inst. 82, 095113 (2011).
[Crossref]

Bröring, W.

Carlson, D.

Carlson, D. R.

Carstens, H.

Cingöz, A.

C. Benko, T. K. Allison, A. Cingöz, L. Hua, F. Labaye, D. C. Yost, and J. Ye, “Extreme ultraviolet radiation with coherence time greater than 1 s,” Nat. Photonics 8, 530–536 (2014).
[Crossref]

A. Cingöz, D. C. Yost, T. K. Allison, A. Ruehl, M. E. Fermann, I. Hartl, and J. Ye, “Direct frequency comb spectroscopy in the extreme ultraviolet,” Nature 482, 68–71 (2012).
[Crossref] [PubMed]

T. Allison, A. Cingöz, D. Yost, and J. Ye, “Extreme nonlinear optics in a femtosecond enhancement cavity,” Phys. Rev. Lett. 107, 183903 (2011).
[Crossref] [PubMed]

Drever, R.

R. Drever, J. L. Hall, F. Kowalski, J. Hough, G. Ford, A. Munley, and H. Ward, “Laser phase and frequency stabilization using an optical resonator,” Appl. Phys. B 31, 97–105 (1983).
[Crossref]

Eidam, T.

I. Pupeza, M. Högner, J. Weitenberg, S. Holzberger, D. Esser, T. Eidam, J. Limpert, A. Tünnermann, E. Fill, and V. S. Yakovlev, “Cavity-enhanced high-harmonic generation with spatially tailored driving fields,” Phys. Rev. Lett. 112, 103902 (2014).
[Crossref] [PubMed]

H. Carstens, N. Lilienfein, S. Holzberger, C. Jocher, T. Eidam, J. Limpert, A. Tünnermann, J. Weitenberg, D. C. Yost, A. Alghamdi, Z. Alahmed, A. Azzeer, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Megawatt-scale average-power ultrashort pulses in an enhancement cavity,” Opt. Lett. 39, 2595–2598 (2014).
[Crossref] [PubMed]

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35, 2052–2054 (2010).
[Crossref] [PubMed]

Esser, D.

I. Pupeza, M. Högner, J. Weitenberg, S. Holzberger, D. Esser, T. Eidam, J. Limpert, A. Tünnermann, E. Fill, and V. S. Yakovlev, “Cavity-enhanced high-harmonic generation with spatially tailored driving fields,” Phys. Rev. Lett. 112, 103902 (2014).
[Crossref] [PubMed]

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

D. Esser, J. Weitenberg, W. Bröring, I. Pupeza, S. Holzberger, and H.-D. Hoffmann, “Laser-manufactured mirrors for geometrical output couplin of intracavity-generated high harmonics,” Opt. Express 21, 26797–26805 (2013).
[Crossref] [PubMed]

Fermann, M. E.

A. Cingöz, D. C. Yost, T. K. Allison, A. Ruehl, M. E. Fermann, I. Hartl, and J. Ye, “Direct frequency comb spectroscopy in the extreme ultraviolet,” Nature 482, 68–71 (2012).
[Crossref] [PubMed]

Fernandez, A.

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

Fill, E.

I. Pupeza, M. Högner, J. Weitenberg, S. Holzberger, D. Esser, T. Eidam, J. Limpert, A. Tünnermann, E. Fill, and V. S. Yakovlev, “Cavity-enhanced high-harmonic generation with spatially tailored driving fields,” Phys. Rev. Lett. 112, 103902 (2014).
[Crossref] [PubMed]

H. Carstens, N. Lilienfein, S. Holzberger, C. Jocher, T. Eidam, J. Limpert, A. Tünnermann, J. Weitenberg, D. C. Yost, A. Alghamdi, Z. Alahmed, A. Azzeer, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Megawatt-scale average-power ultrashort pulses in an enhancement cavity,” Opt. Lett. 39, 2595–2598 (2014).
[Crossref] [PubMed]

H. Carstens, S. Holzberger, J. Kaster, J. Weitenberg, V. Pervak, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Large-mode enhancement cavities,” Opt. Express 21, 11606–11617 (2013).
[Crossref] [PubMed]

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

B. Bernhardt, A. Ozawa, A. Vernaleken, I. Pupeza, J. Kaster, Y. Kobayashi, R. Holzwarth, E. Fill, F. Krausz, T. W. Hänsch, and T. Udem, “Vacuum ultraviolet frequency combs generated by a femtosecond enhancement cavity in the visible,” Opt. Lett. 37, 503–505 (2012).
[Crossref] [PubMed]

O. Pronin, V. Pervak, E. Fill, J. Rauschenberger, F. Krausz, and A. Apolonski, “Ultrabroadband efficient intra-cavity xuv output coupler,” Opt. Express 19, 10232–10240 (2011).
[Crossref] [PubMed]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35, 2052–2054 (2010).
[Crossref] [PubMed]

Fill, E. E.

Ford, G.

R. Drever, J. L. Hall, F. Kowalski, J. Hough, G. Ford, A. Munley, and H. Ward, “Laser phase and frequency stabilization using an optical resonator,” Appl. Phys. B 31, 97–105 (1983).
[Crossref]

Gohle, C.

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436, 234–237 (2005).
[Crossref] [PubMed]

Götberg, O.

M. H. Berntsen, O. Götberg, and O. Tjernberg, “An experimental setup for high resolution 10.5 ev laser-based angle-resolved photoelectron spectroscopy using a time-of-flight electron analyzer,” Rev. Sci. Inst. 82, 095113 (2011).
[Crossref]

Gotlibovych, I.

Graf, R.

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

Hall, J. L.

R. Drever, J. L. Hall, F. Kowalski, J. Hough, G. Ford, A. Munley, and H. Ward, “Laser phase and frequency stabilization using an optical resonator,” Appl. Phys. B 31, 97–105 (1983).
[Crossref]

Hänsch, T. W.

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

B. Bernhardt, A. Ozawa, A. Vernaleken, I. Pupeza, J. Kaster, Y. Kobayashi, R. Holzwarth, E. Fill, F. Krausz, T. W. Hänsch, and T. Udem, “Vacuum ultraviolet frequency combs generated by a femtosecond enhancement cavity in the visible,” Opt. Lett. 37, 503–505 (2012).
[Crossref] [PubMed]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35, 2052–2054 (2010).
[Crossref] [PubMed]

A. Ozawa, A. Vernaleken, W. Schneider, I. Gotlibovych, T. Udem, and T. W. Hänsch, “Non-collinear high harmonic generation: a promising outcoupling method for cavity-assisted xuv generation,” Opt. Express 16, 6233–6239 (2008).
[Crossref] [PubMed]

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436, 234–237 (2005).
[Crossref] [PubMed]

Hartl, I.

A. Cingöz, D. C. Yost, T. K. Allison, A. Ruehl, M. E. Fermann, I. Hartl, and J. Ye, “Direct frequency comb spectroscopy in the extreme ultraviolet,” Nature 482, 68–71 (2012).
[Crossref] [PubMed]

Hayasaka, K.

K. Wakui, K. Hayasaka, and T. Ido, “Generation of vacuum ultraviolet radiation by intracavity high-harmonic generation toward state detection of single trapped ions,” App. Phys. B 117, 957–967 (2014).
[Crossref]

Herrmann, M.

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436, 234–237 (2005).
[Crossref] [PubMed]

Hirayama, N.

Hoffmann, H.-D.

Högner, M.

I. Pupeza, M. Högner, J. Weitenberg, S. Holzberger, D. Esser, T. Eidam, J. Limpert, A. Tünnermann, E. Fill, and V. S. Yakovlev, “Cavity-enhanced high-harmonic generation with spatially tailored driving fields,” Phys. Rev. Lett. 112, 103902 (2014).
[Crossref] [PubMed]

Holzberger, S.

I. Pupeza, M. Högner, J. Weitenberg, S. Holzberger, D. Esser, T. Eidam, J. Limpert, A. Tünnermann, E. Fill, and V. S. Yakovlev, “Cavity-enhanced high-harmonic generation with spatially tailored driving fields,” Phys. Rev. Lett. 112, 103902 (2014).
[Crossref] [PubMed]

H. Carstens, N. Lilienfein, S. Holzberger, C. Jocher, T. Eidam, J. Limpert, A. Tünnermann, J. Weitenberg, D. C. Yost, A. Alghamdi, Z. Alahmed, A. Azzeer, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Megawatt-scale average-power ultrashort pulses in an enhancement cavity,” Opt. Lett. 39, 2595–2598 (2014).
[Crossref] [PubMed]

D. Esser, J. Weitenberg, W. Bröring, I. Pupeza, S. Holzberger, and H.-D. Hoffmann, “Laser-manufactured mirrors for geometrical output couplin of intracavity-generated high harmonics,” Opt. Express 21, 26797–26805 (2013).
[Crossref] [PubMed]

H. Carstens, S. Holzberger, J. Kaster, J. Weitenberg, V. Pervak, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Large-mode enhancement cavities,” Opt. Express 21, 11606–11617 (2013).
[Crossref] [PubMed]

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

Holzwarth, R.

B. Bernhardt, A. Ozawa, A. Vernaleken, I. Pupeza, J. Kaster, Y. Kobayashi, R. Holzwarth, E. Fill, F. Krausz, T. W. Hänsch, and T. Udem, “Vacuum ultraviolet frequency combs generated by a femtosecond enhancement cavity in the visible,” Opt. Lett. 37, 503–505 (2012).
[Crossref] [PubMed]

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436, 234–237 (2005).
[Crossref] [PubMed]

Hough, J.

R. Drever, J. L. Hall, F. Kowalski, J. Hough, G. Ford, A. Munley, and H. Ward, “Laser phase and frequency stabilization using an optical resonator,” Appl. Phys. B 31, 97–105 (1983).
[Crossref]

Hua, L.

C. Benko, T. K. Allison, A. Cingöz, L. Hua, F. Labaye, D. C. Yost, and J. Ye, “Extreme ultraviolet radiation with coherence time greater than 1 s,” Nat. Photonics 8, 530–536 (2014).
[Crossref]

Ido, T.

K. Wakui, K. Hayasaka, and T. Ido, “Generation of vacuum ultraviolet radiation by intracavity high-harmonic generation toward state detection of single trapped ions,” App. Phys. B 117, 957–967 (2014).
[Crossref]

Jocher, C.

Jones, R.

Jones, R. J.

Kaster, J.

Kobayashi, Y.

Kowalski, F.

R. Drever, J. L. Hall, F. Kowalski, J. Hough, G. Ford, A. Munley, and H. Ward, “Laser phase and frequency stabilization using an optical resonator,” Appl. Phys. B 31, 97–105 (1983).
[Crossref]

Krausz, F.

H. Carstens, N. Lilienfein, S. Holzberger, C. Jocher, T. Eidam, J. Limpert, A. Tünnermann, J. Weitenberg, D. C. Yost, A. Alghamdi, Z. Alahmed, A. Azzeer, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Megawatt-scale average-power ultrashort pulses in an enhancement cavity,” Opt. Lett. 39, 2595–2598 (2014).
[Crossref] [PubMed]

H. Carstens, S. Holzberger, J. Kaster, J. Weitenberg, V. Pervak, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Large-mode enhancement cavities,” Opt. Express 21, 11606–11617 (2013).
[Crossref] [PubMed]

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

B. Bernhardt, A. Ozawa, A. Vernaleken, I. Pupeza, J. Kaster, Y. Kobayashi, R. Holzwarth, E. Fill, F. Krausz, T. W. Hänsch, and T. Udem, “Vacuum ultraviolet frequency combs generated by a femtosecond enhancement cavity in the visible,” Opt. Lett. 37, 503–505 (2012).
[Crossref] [PubMed]

O. Pronin, V. Pervak, E. Fill, J. Rauschenberger, F. Krausz, and A. Apolonski, “Ultrabroadband efficient intra-cavity xuv output coupler,” Opt. Express 19, 10232–10240 (2011).
[Crossref] [PubMed]

I. Pupeza, E. E. Fill, and F. Krausz, “Low-loss vis/ir-xuv beam splitter for high-power applications,” Opt. Express 19, 12108–12118 (2011).
[Crossref] [PubMed]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35, 2052–2054 (2010).
[Crossref] [PubMed]

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436, 234–237 (2005).
[Crossref] [PubMed]

Kuramoto, Y.

Labaye, F.

C. Benko, T. K. Allison, A. Cingöz, L. Hua, F. Labaye, D. C. Yost, and J. Ye, “Extreme ultraviolet radiation with coherence time greater than 1 s,” Nat. Photonics 8, 530–536 (2014).
[Crossref]

Lee, J.

Lilienfein, N.

Limpert, J.

H. Carstens, N. Lilienfein, S. Holzberger, C. Jocher, T. Eidam, J. Limpert, A. Tünnermann, J. Weitenberg, D. C. Yost, A. Alghamdi, Z. Alahmed, A. Azzeer, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Megawatt-scale average-power ultrashort pulses in an enhancement cavity,” Opt. Lett. 39, 2595–2598 (2014).
[Crossref] [PubMed]

I. Pupeza, M. Högner, J. Weitenberg, S. Holzberger, D. Esser, T. Eidam, J. Limpert, A. Tünnermann, E. Fill, and V. S. Yakovlev, “Cavity-enhanced high-harmonic generation with spatially tailored driving fields,” Phys. Rev. Lett. 112, 103902 (2014).
[Crossref] [PubMed]

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35, 2052–2054 (2010).
[Crossref] [PubMed]

Mathias, S.

S. Passlack, S. Mathias, O. Andreyev, D. Mittnacht, M. Aeschlimann, and M. Bauer, “Space charge effects in photoemission with a low repetition, high intensity femtosecond laser source,” J. Appl. Phys. 100, 024912 (2006).
[Crossref]

Mittnacht, D.

S. Passlack, S. Mathias, O. Andreyev, D. Mittnacht, M. Aeschlimann, and M. Bauer, “Space charge effects in photoemission with a low repetition, high intensity femtosecond laser source,” J. Appl. Phys. 100, 024912 (2006).
[Crossref]

Moll, K. D.

K. D. Moll, R. J. Jones, and J. Ye, “Output coupling methods for cavity-based high-harmonic generation,” Opt. Express 14, 8189–8197 (2006).
[Crossref] [PubMed]

R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94, 193201 (2005).
[Crossref] [PubMed]

Mongelli, J.

Munley, A.

R. Drever, J. L. Hall, F. Kowalski, J. Hough, G. Ford, A. Munley, and H. Ward, “Laser phase and frequency stabilization using an optical resonator,” Appl. Phys. B 31, 97–105 (1983).
[Crossref]

Namatame, H.

M. Arita, K. Shimada, H. Namatame, and M. Taniguchi, “High-resolution and low-temperature photoemission spectroscopy at the hisor helical-undulator beamline,” Surf. Rev. Lett. 9, 535–539 (2002).
[Crossref]

Ozawa, A.

A. Ozawa and Y. Kobayashi, “VUV frequency-comb spectroscopy of atomic xenon,” Phys. Rev. A 87, 022507 (2013).
[Crossref]

Y. Kobayashi, N. Hirayama, A. Ozawa, T. Sukegawa, T. Seki, Y. Kuramoto, and S. Watanabe, “10-Mhz, yb-fiber chirped-pulse amplifier system with large-scale transmission gratings,” Opt. Express 21, 12865–12873 (2013).
[Crossref] [PubMed]

B. Bernhardt, A. Ozawa, A. Vernaleken, I. Pupeza, J. Kaster, Y. Kobayashi, R. Holzwarth, E. Fill, F. Krausz, T. W. Hänsch, and T. Udem, “Vacuum ultraviolet frequency combs generated by a femtosecond enhancement cavity in the visible,” Opt. Lett. 37, 503–505 (2012).
[Crossref] [PubMed]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35, 2052–2054 (2010).
[Crossref] [PubMed]

A. Ozawa, A. Vernaleken, W. Schneider, I. Gotlibovych, T. Udem, and T. W. Hänsch, “Non-collinear high harmonic generation: a promising outcoupling method for cavity-assisted xuv generation,” Opt. Express 16, 6233–6239 (2008).
[Crossref] [PubMed]

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

Passlack, S.

S. Passlack, S. Mathias, O. Andreyev, D. Mittnacht, M. Aeschlimann, and M. Bauer, “Space charge effects in photoemission with a low repetition, high intensity femtosecond laser source,” J. Appl. Phys. 100, 024912 (2006).
[Crossref]

Pervak, V.

Pronin, O.

Pupeza, I.

I. Pupeza, M. Högner, J. Weitenberg, S. Holzberger, D. Esser, T. Eidam, J. Limpert, A. Tünnermann, E. Fill, and V. S. Yakovlev, “Cavity-enhanced high-harmonic generation with spatially tailored driving fields,” Phys. Rev. Lett. 112, 103902 (2014).
[Crossref] [PubMed]

H. Carstens, N. Lilienfein, S. Holzberger, C. Jocher, T. Eidam, J. Limpert, A. Tünnermann, J. Weitenberg, D. C. Yost, A. Alghamdi, Z. Alahmed, A. Azzeer, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Megawatt-scale average-power ultrashort pulses in an enhancement cavity,” Opt. Lett. 39, 2595–2598 (2014).
[Crossref] [PubMed]

H. Carstens, S. Holzberger, J. Kaster, J. Weitenberg, V. Pervak, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Large-mode enhancement cavities,” Opt. Express 21, 11606–11617 (2013).
[Crossref] [PubMed]

D. Esser, J. Weitenberg, W. Bröring, I. Pupeza, S. Holzberger, and H.-D. Hoffmann, “Laser-manufactured mirrors for geometrical output couplin of intracavity-generated high harmonics,” Opt. Express 21, 26797–26805 (2013).
[Crossref] [PubMed]

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

B. Bernhardt, A. Ozawa, A. Vernaleken, I. Pupeza, J. Kaster, Y. Kobayashi, R. Holzwarth, E. Fill, F. Krausz, T. W. Hänsch, and T. Udem, “Vacuum ultraviolet frequency combs generated by a femtosecond enhancement cavity in the visible,” Opt. Lett. 37, 503–505 (2012).
[Crossref] [PubMed]

I. Pupeza, E. E. Fill, and F. Krausz, “Low-loss vis/ir-xuv beam splitter for high-power applications,” Opt. Express 19, 12108–12118 (2011).
[Crossref] [PubMed]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35, 2052–2054 (2010).
[Crossref] [PubMed]

Rauschenberger, J.

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

O. Pronin, V. Pervak, E. Fill, J. Rauschenberger, F. Krausz, and A. Apolonski, “Ultrabroadband efficient intra-cavity xuv output coupler,” Opt. Express 19, 10232–10240 (2011).
[Crossref] [PubMed]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35, 2052–2054 (2010).
[Crossref] [PubMed]

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436, 234–237 (2005).
[Crossref] [PubMed]

Ruehl, A.

A. Cingöz, D. C. Yost, T. K. Allison, A. Ruehl, M. E. Fermann, I. Hartl, and J. Ye, “Direct frequency comb spectroscopy in the extreme ultraviolet,” Nature 482, 68–71 (2012).
[Crossref] [PubMed]

Rußbüldt, P.

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

Schibli, T.

Schneider, W.

Schuessler, H. A.

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436, 234–237 (2005).
[Crossref] [PubMed]

Seki, T.

Shimada, K.

M. Arita, K. Shimada, H. Namatame, and M. Taniguchi, “High-resolution and low-temperature photoemission spectroscopy at the hisor helical-undulator beamline,” Surf. Rev. Lett. 9, 535–539 (2002).
[Crossref]

Sukegawa, T.

Taniguchi, M.

M. Arita, K. Shimada, H. Namatame, and M. Taniguchi, “High-resolution and low-temperature photoemission spectroscopy at the hisor helical-undulator beamline,” Surf. Rev. Lett. 9, 535–539 (2002).
[Crossref]

Thorpe, M. J.

R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94, 193201 (2005).
[Crossref] [PubMed]

Tjernberg, O.

M. H. Berntsen, O. Götberg, and O. Tjernberg, “An experimental setup for high resolution 10.5 ev laser-based angle-resolved photoelectron spectroscopy using a time-of-flight electron analyzer,” Rev. Sci. Inst. 82, 095113 (2011).
[Crossref]

Tünnermann, A.

I. Pupeza, M. Högner, J. Weitenberg, S. Holzberger, D. Esser, T. Eidam, J. Limpert, A. Tünnermann, E. Fill, and V. S. Yakovlev, “Cavity-enhanced high-harmonic generation with spatially tailored driving fields,” Phys. Rev. Lett. 112, 103902 (2014).
[Crossref] [PubMed]

H. Carstens, N. Lilienfein, S. Holzberger, C. Jocher, T. Eidam, J. Limpert, A. Tünnermann, J. Weitenberg, D. C. Yost, A. Alghamdi, Z. Alahmed, A. Azzeer, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Megawatt-scale average-power ultrashort pulses in an enhancement cavity,” Opt. Lett. 39, 2595–2598 (2014).
[Crossref] [PubMed]

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35, 2052–2054 (2010).
[Crossref] [PubMed]

Udem, T.

Udem, Th.

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

Vernaleken, A.

Wakui, K.

K. Wakui, K. Hayasaka, and T. Ido, “Generation of vacuum ultraviolet radiation by intracavity high-harmonic generation toward state detection of single trapped ions,” App. Phys. B 117, 957–967 (2014).
[Crossref]

Walker, D.

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

Ward, H.

R. Drever, J. L. Hall, F. Kowalski, J. Hough, G. Ford, A. Munley, and H. Ward, “Laser phase and frequency stabilization using an optical resonator,” Appl. Phys. B 31, 97–105 (1983).
[Crossref]

Watanabe, S.

Weitenberg, J.

H. Carstens, N. Lilienfein, S. Holzberger, C. Jocher, T. Eidam, J. Limpert, A. Tünnermann, J. Weitenberg, D. C. Yost, A. Alghamdi, Z. Alahmed, A. Azzeer, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Megawatt-scale average-power ultrashort pulses in an enhancement cavity,” Opt. Lett. 39, 2595–2598 (2014).
[Crossref] [PubMed]

I. Pupeza, M. Högner, J. Weitenberg, S. Holzberger, D. Esser, T. Eidam, J. Limpert, A. Tünnermann, E. Fill, and V. S. Yakovlev, “Cavity-enhanced high-harmonic generation with spatially tailored driving fields,” Phys. Rev. Lett. 112, 103902 (2014).
[Crossref] [PubMed]

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

D. Esser, J. Weitenberg, W. Bröring, I. Pupeza, S. Holzberger, and H.-D. Hoffmann, “Laser-manufactured mirrors for geometrical output couplin of intracavity-generated high harmonics,” Opt. Express 21, 26797–26805 (2013).
[Crossref] [PubMed]

H. Carstens, S. Holzberger, J. Kaster, J. Weitenberg, V. Pervak, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Large-mode enhancement cavities,” Opt. Express 21, 11606–11617 (2013).
[Crossref] [PubMed]

Wright, E.

Yakovlev, V. S.

I. Pupeza, M. Högner, J. Weitenberg, S. Holzberger, D. Esser, T. Eidam, J. Limpert, A. Tünnermann, E. Fill, and V. S. Yakovlev, “Cavity-enhanced high-harmonic generation with spatially tailored driving fields,” Phys. Rev. Lett. 112, 103902 (2014).
[Crossref] [PubMed]

Ye, J.

C. Benko, T. K. Allison, A. Cingöz, L. Hua, F. Labaye, D. C. Yost, and J. Ye, “Extreme ultraviolet radiation with coherence time greater than 1 s,” Nat. Photonics 8, 530–536 (2014).
[Crossref]

A. Cingöz, D. C. Yost, T. K. Allison, A. Ruehl, M. E. Fermann, I. Hartl, and J. Ye, “Direct frequency comb spectroscopy in the extreme ultraviolet,” Nature 482, 68–71 (2012).
[Crossref] [PubMed]

T. Allison, A. Cingöz, D. Yost, and J. Ye, “Extreme nonlinear optics in a femtosecond enhancement cavity,” Phys. Rev. Lett. 107, 183903 (2011).
[Crossref] [PubMed]

D. Yost, T. Schibli, and J. Ye, “Efficient output coupling of intracavity high-harmonic generation,” Opt. Lett. 33, 1099–1101 (2008).
[Crossref] [PubMed]

K. D. Moll, R. J. Jones, and J. Ye, “Output coupling methods for cavity-based high-harmonic generation,” Opt. Express 14, 8189–8197 (2006).
[Crossref] [PubMed]

R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94, 193201 (2005).
[Crossref] [PubMed]

Yost, D.

T. Allison, A. Cingöz, D. Yost, and J. Ye, “Extreme nonlinear optics in a femtosecond enhancement cavity,” Phys. Rev. Lett. 107, 183903 (2011).
[Crossref] [PubMed]

D. Yost, T. Schibli, and J. Ye, “Efficient output coupling of intracavity high-harmonic generation,” Opt. Lett. 33, 1099–1101 (2008).
[Crossref] [PubMed]

Yost, D. C.

C. Benko, T. K. Allison, A. Cingöz, L. Hua, F. Labaye, D. C. Yost, and J. Ye, “Extreme ultraviolet radiation with coherence time greater than 1 s,” Nat. Photonics 8, 530–536 (2014).
[Crossref]

H. Carstens, N. Lilienfein, S. Holzberger, C. Jocher, T. Eidam, J. Limpert, A. Tünnermann, J. Weitenberg, D. C. Yost, A. Alghamdi, Z. Alahmed, A. Azzeer, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Megawatt-scale average-power ultrashort pulses in an enhancement cavity,” Opt. Lett. 39, 2595–2598 (2014).
[Crossref] [PubMed]

A. Cingöz, D. C. Yost, T. K. Allison, A. Ruehl, M. E. Fermann, I. Hartl, and J. Ye, “Direct frequency comb spectroscopy in the extreme ultraviolet,” Nature 482, 68–71 (2012).
[Crossref] [PubMed]

App. Phys. B (1)

K. Wakui, K. Hayasaka, and T. Ido, “Generation of vacuum ultraviolet radiation by intracavity high-harmonic generation toward state detection of single trapped ions,” App. Phys. B 117, 957–967 (2014).
[Crossref]

Appl. Phys. B (1)

R. Drever, J. L. Hall, F. Kowalski, J. Hough, G. Ford, A. Munley, and H. Ward, “Laser phase and frequency stabilization using an optical resonator,” Appl. Phys. B 31, 97–105 (1983).
[Crossref]

J. Appl. Phys. (1)

S. Passlack, S. Mathias, O. Andreyev, D. Mittnacht, M. Aeschlimann, and M. Bauer, “Space charge effects in photoemission with a low repetition, high intensity femtosecond laser source,” J. Appl. Phys. 100, 024912 (2006).
[Crossref]

Nat. Photonics (2)

I. Pupeza, S. Holzberger, T. Eidam, H. Carstens, D. Esser, J. Weitenberg, P. Rußbüldt, J. Rauschenberger, J. Limpert, Th. Udem, A. Tünnermann, T. W. Hänsch, A. Apolonski, F. Krausz, and E. Fill, “Compact high-repetition-rate source of coherent 100 ev radiation,” Nat. Photonics 7, 608–612 (2013).
[Crossref]

C. Benko, T. K. Allison, A. Cingöz, L. Hua, F. Labaye, D. C. Yost, and J. Ye, “Extreme ultraviolet radiation with coherence time greater than 1 s,” Nat. Photonics 8, 530–536 (2014).
[Crossref]

Nature (2)

A. Cingöz, D. C. Yost, T. K. Allison, A. Ruehl, M. E. Fermann, I. Hartl, and J. Ye, “Direct frequency comb spectroscopy in the extreme ultraviolet,” Nature 482, 68–71 (2012).
[Crossref] [PubMed]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436, 234–237 (2005).
[Crossref] [PubMed]

Opt. Express (8)

J. Lee, D. R. Carlson, and R. J. Jones, “Optimizing intracavity high harmonic generation for xuv fs frequency combs,” Opt. Express 19, 23315–23326 (2011).
[Crossref] [PubMed]

H. Carstens, S. Holzberger, J. Kaster, J. Weitenberg, V. Pervak, A. Apolonski, E. Fill, F. Krausz, and I. Pupeza, “Large-mode enhancement cavities,” Opt. Express 21, 11606–11617 (2013).
[Crossref] [PubMed]

Y. Kobayashi, N. Hirayama, A. Ozawa, T. Sukegawa, T. Seki, Y. Kuramoto, and S. Watanabe, “10-Mhz, yb-fiber chirped-pulse amplifier system with large-scale transmission gratings,” Opt. Express 21, 12865–12873 (2013).
[Crossref] [PubMed]

A. Ozawa, A. Vernaleken, W. Schneider, I. Gotlibovych, T. Udem, and T. W. Hänsch, “Non-collinear high harmonic generation: a promising outcoupling method for cavity-assisted xuv generation,” Opt. Express 16, 6233–6239 (2008).
[Crossref] [PubMed]

D. Esser, J. Weitenberg, W. Bröring, I. Pupeza, S. Holzberger, and H.-D. Hoffmann, “Laser-manufactured mirrors for geometrical output couplin of intracavity-generated high harmonics,” Opt. Express 21, 26797–26805 (2013).
[Crossref] [PubMed]

K. D. Moll, R. J. Jones, and J. Ye, “Output coupling methods for cavity-based high-harmonic generation,” Opt. Express 14, 8189–8197 (2006).
[Crossref] [PubMed]

I. Pupeza, E. E. Fill, and F. Krausz, “Low-loss vis/ir-xuv beam splitter for high-power applications,” Opt. Express 19, 12108–12118 (2011).
[Crossref] [PubMed]

O. Pronin, V. Pervak, E. Fill, J. Rauschenberger, F. Krausz, and A. Apolonski, “Ultrabroadband efficient intra-cavity xuv output coupler,” Opt. Express 19, 10232–10240 (2011).
[Crossref] [PubMed]

Opt. Lett. (5)

Phys. Rev. A (1)

A. Ozawa and Y. Kobayashi, “VUV frequency-comb spectroscopy of atomic xenon,” Phys. Rev. A 87, 022507 (2013).
[Crossref]

Phys. Rev. Lett. (4)

R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94, 193201 (2005).
[Crossref] [PubMed]

A. Ozawa, J. Rauschenberger, C. Gohle, M. Herrmann, D. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and Th. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100, 253901 (2008).
[Crossref] [PubMed]

T. Allison, A. Cingöz, D. Yost, and J. Ye, “Extreme nonlinear optics in a femtosecond enhancement cavity,” Phys. Rev. Lett. 107, 183903 (2011).
[Crossref] [PubMed]

I. Pupeza, M. Högner, J. Weitenberg, S. Holzberger, D. Esser, T. Eidam, J. Limpert, A. Tünnermann, E. Fill, and V. S. Yakovlev, “Cavity-enhanced high-harmonic generation with spatially tailored driving fields,” Phys. Rev. Lett. 112, 103902 (2014).
[Crossref] [PubMed]

Rev. Sci. Inst. (1)

M. H. Berntsen, O. Götberg, and O. Tjernberg, “An experimental setup for high resolution 10.5 ev laser-based angle-resolved photoelectron spectroscopy using a time-of-flight electron analyzer,” Rev. Sci. Inst. 82, 095113 (2011).
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Surf. Rev. Lett. (1)

M. Arita, K. Shimada, H. Namatame, and M. Taniguchi, “High-resolution and low-temperature photoemission spectroscopy at the hisor helical-undulator beamline,” Surf. Rev. Lett. 9, 535–539 (2002).
[Crossref]

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Figures (6)

Fig. 1
Fig. 1 Schematics of the experimental setup for intracavity high harmonic generation at 10 MHz repetition frequency. The seed laser for the external cavity was a Yb-doped fiber-laser based master-oscillator power-amplifier (MOPA) system. The external cavity consisted of four mirrors and had an optical path length of 30 m in vacuum to achieve 10 MHz of repetition frequency. See text for details.
Fig. 2
Fig. 2 Typical temporal pulse shape of the amplifier output. The FWHM pulse duration was 200 fs.
Fig. 3
Fig. 3 Photographs of the external cavity at the focus when HHG was performed with xenon (a), krypton (b) and argon (c) gases. The bright spots and flashes correspond to plasma fluorescence.
Fig. 4
Fig. 4 The image recorded by digital camera of the fluorescent plate when HHG was performed with xenon (a), krypton (b) and argon(c) gases.
Fig. 5
Fig. 5 The spectra of outcoupled high harmonic radiation obtained from the images of the fluorescent plate shown in Fig. 4. Xenon (a), krypton (b) and argon (c) were the gases used for HHG. It can be seen that the cutoff energy grows with decreasing gas atomic weight. The 7th harmonic radiation appears particularly strong due to enhanced outcoupling efficiency for that wavelength. Harmonic orders as high as the 35th were obtained, which corresponds to ∼30 nm in wavelength. It should be noted that the spectra, as well as the fluorescent plate images, feature higher order diffraction contributions. The first row (from the top) of black dots and their drop-down lines indicate the expected wavelengths of the first order diffraction. The second and third rows correspond to the wavelength positions of the second and third orders, respectively.
Fig. 6
Fig. 6 Time-trace of the average output power of the 7th harmonic radiation. ∼0.2 mW of output power was sustained for over >15 min. The fast fluctuation of the output power was mainly due to the drift of carrier-envelope-offset frequency of the seed laser system.

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