Abstract

Si and Cu targets were ablated by a capillary-discharge 46.9-nm pumped laser beam, focused by a toroidal mirror at grazing incidence. The peak power density of the focal spot was ~2 × 107 W/cm2. Clear ablation patterns on the surfaces of Si and Cu targets were obtained, with shapes consistent with simulations. A YAG:Ce scintillator (cerium-doped YAG crystal) was used to image the variations of the laser spots. We discuss the shape and damage mechanics of the measured patterns. Melting of the target material was observed in the ablation region on Cu, but not on Si.

© 2015 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Damage to extreme-ultraviolet Sc/Si multilayer mirrors exposed to intense 46.9-nm laser pulses

M. Grisham, G. Vaschenko, C. S. Menoni, J. J. Rocca, Yu. P. Pershyn, E. N. Zubarev, D. L. Voronov, V. A. Sevryukova, V. V. Kondratenko, A. V. Vinogradov, and I. A. Artioukov
Opt. Lett. 29(6) 620-622 (2004)

Damage and ablation of large bandgap dielectrics induced by a 46.9 nm laser beam

A. Ritucci, G. Tomassetti, A. Reale, L. Arrizza, P. Zuppella, L. Reale, L. Palladino, F. Flora, F. Bonfigli, A. Faenov, T. Pikuz, J. Kaiser, J. Nilsen, and A. F. Jankowski
Opt. Lett. 31(1) 68-70 (2006)

Impact of discharge currents on the intensity of 46.9 nm capillary discharge soft X-ray laser

Muhammad Usman Khan, Yongpeng Zhao, Tong Hui, Muhammad Khuram Shahzad, Huaiyu Cui, and Dongdi Zhao
Opt. Express 27(12) 16738-16750 (2019)

References

  • View by:
  • |
  • |
  • |

  1. B. R. Benware, A. Ozols, J. J. Rocca, I. A. Artioukov, V. V. Kondratenko, and A. V. Vinogradov, “Focusing of a tabletop soft-x-ray laser beam and laser ablation,” Opt. Lett. 24(23), 1714–1716 (1999).
    [Crossref] [PubMed]
  2. L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
    [Crossref]
  3. M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
    [Crossref]
  4. H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
    [Crossref]
  5. A. Ritucci, G. Tomassetti, A. Reale, L. Arrizza, P. Zuppella, L. Reale, L. Palladino, F. Flora, F. Bonfigli, A. Faenov, T. Pikuz, J. Kaiser, J. Nilsen, and A. F. Jankowski, “Damage and ablation of large bandgap dielectrics induced by a 46.9 nm laser beam,” Opt. Lett. 31(1), 68–70 (2006).
    [Crossref] [PubMed]
  6. T. Koyama, H. Yumoto, Y. Senba, K. Tono, T. Sato, T. Togashi, Y. Inubushi, T. Katayama, J. Kim, S. Matsuyama, H. Mimura, M. Yabashi, K. Yamauchi, H. Ohashi, and T. Ishikawa, “Investigation of ablation thresholds of optical materials using 1-µm-focusing beam at hard X-ray free electron laser,” Opt. Express 21(13), 15382–15388 (2013).
    [Crossref] [PubMed]
  7. T. Makimura, S. Torii, H. Niino, and K. Murakami, “Silica ablation process induced by focused laser plasma soft x-rays,” in Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, (2012), pp. 82061D.
  8. M. Grisham, G. Vaschenko, C. S. Menoni, J. J. Rocca, Y. P. Pershyn, E. N. Zubarev, D. L. Voronov, V. A. Sevryukova, V. V. Kondratenko, A. V. Vinogradov, and I. A. Artioukov, “Damage to extreme-ultraviolet Sc/Si multilayer mirrors exposed to intense 46.9-nm laser pulses,” Opt. Lett. 29(6), 620–622 (2004).
    [Crossref] [PubMed]
  9. Y. Zhao, M. Mo, Y. Xie, S. Yang, and Q. Wang, “Observation of a saturated soft x-ray laser in a low current capillary discharge,” in Laser & Electro Optics & The Pacific Rim Conference on Laser and Electro-Optics, (2009), pp. 1–2.
    [Crossref]
  10. Y. Zhao, S. Jiang, Y. Xie, D. Yang, S. Teng, D. Chen, and Q. Wang, “Demonstration of soft x-ray laser of Ne-like Ar at 69.8 nm pumped by capillary discharge,” Opt. Lett. 36(17), 3458–3460 (2011).
    [Crossref] [PubMed]
  11. H. Cui, Y. Zhao, S. Jiang, M. Xu, H. Wu, and Q. Wang, “Experiment of Si target ablation with soft X-ray laser operating at a wavelength of 46.9 nm,” Opt. Laser Technol. 46, 20–24 (2013).
    [Crossref]
  12. M. Ishino, A. Y. Faenov, M. Tanaka, S. Tamotsu, N. Hasegawa, M. Nishikino, T. A. Pikuz, T. Kaihori, and T. Kawachi, “Observation of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam,” Appl. Phys., A Mater. Sci. Process. 110(1), 179–188 (2013).
    [Crossref]
  13. S. I. Anisimov and B. S. Luk’yanchuk, “Selected problems of laser ablation theory,” Phys. Usp. 45(3), 293–324 (2002).
    [Crossref]
  14. T. E. Itina, N. Bouflous, J. Hermann, and P. Delaporte, “Nanoparticles and nanostructures formed by laser: What can we learn from the modeling?” Proc. SPIE 8414, 841403 (2011).
  15. H. Wu, N. Zhang, and X. Zhu, “Investigation of the particle size distribution of the ejected material generated during the single femtosecond laser pulse ablation of aluminium,” Appl. Surf. Sci. 317, 167–171 (2014).
    [Crossref]

2014 (1)

H. Wu, N. Zhang, and X. Zhu, “Investigation of the particle size distribution of the ejected material generated during the single femtosecond laser pulse ablation of aluminium,” Appl. Surf. Sci. 317, 167–171 (2014).
[Crossref]

2013 (3)

H. Cui, Y. Zhao, S. Jiang, M. Xu, H. Wu, and Q. Wang, “Experiment of Si target ablation with soft X-ray laser operating at a wavelength of 46.9 nm,” Opt. Laser Technol. 46, 20–24 (2013).
[Crossref]

M. Ishino, A. Y. Faenov, M. Tanaka, S. Tamotsu, N. Hasegawa, M. Nishikino, T. A. Pikuz, T. Kaihori, and T. Kawachi, “Observation of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam,” Appl. Phys., A Mater. Sci. Process. 110(1), 179–188 (2013).
[Crossref]

T. Koyama, H. Yumoto, Y. Senba, K. Tono, T. Sato, T. Togashi, Y. Inubushi, T. Katayama, J. Kim, S. Matsuyama, H. Mimura, M. Yabashi, K. Yamauchi, H. Ohashi, and T. Ishikawa, “Investigation of ablation thresholds of optical materials using 1-µm-focusing beam at hard X-ray free electron laser,” Opt. Express 21(13), 15382–15388 (2013).
[Crossref] [PubMed]

2012 (1)

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

2011 (3)

T. E. Itina, N. Bouflous, J. Hermann, and P. Delaporte, “Nanoparticles and nanostructures formed by laser: What can we learn from the modeling?” Proc. SPIE 8414, 841403 (2011).

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Y. Zhao, S. Jiang, Y. Xie, D. Yang, S. Teng, D. Chen, and Q. Wang, “Demonstration of soft x-ray laser of Ne-like Ar at 69.8 nm pumped by capillary discharge,” Opt. Lett. 36(17), 3458–3460 (2011).
[Crossref] [PubMed]

2006 (1)

2005 (1)

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

2004 (1)

2002 (1)

S. I. Anisimov and B. S. Luk’yanchuk, “Selected problems of laser ablation theory,” Phys. Usp. 45(3), 293–324 (2002).
[Crossref]

1999 (1)

Anderson, E. H.

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

Anisimov, S. I.

S. I. Anisimov and B. S. Luk’yanchuk, “Selected problems of laser ablation theory,” Phys. Usp. 45(3), 293–324 (2002).
[Crossref]

Arrizza, L.

Artioukov, I. A.

Benware, B. R.

Bittner, M.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Bonfigli, F.

Bouflous, N.

T. E. Itina, N. Bouflous, J. Hermann, and P. Delaporte, “Nanoparticles and nanostructures formed by laser: What can we learn from the modeling?” Proc. SPIE 8414, 841403 (2011).

Bravo, H.

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

Chao, W.

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

Chen, D.

Chvostova, D.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Cui, H.

H. Cui, Y. Zhao, S. Jiang, M. Xu, H. Wu, and Q. Wang, “Experiment of Si target ablation with soft X-ray laser operating at a wavelength of 46.9 nm,” Opt. Laser Technol. 46, 20–24 (2013).
[Crossref]

Delaporte, P.

T. E. Itina, N. Bouflous, J. Hermann, and P. Delaporte, “Nanoparticles and nanostructures formed by laser: What can we learn from the modeling?” Proc. SPIE 8414, 841403 (2011).

Faenov, A.

Faenov, A. Y.

M. Ishino, A. Y. Faenov, M. Tanaka, S. Tamotsu, N. Hasegawa, M. Nishikino, T. A. Pikuz, T. Kaihori, and T. Kawachi, “Observation of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam,” Appl. Phys., A Mater. Sci. Process. 110(1), 179–188 (2013).
[Crossref]

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Flora, F.

Fortov, V. E.

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Grisham, M.

Grisham, M. E.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Hasegawa, N.

M. Ishino, A. Y. Faenov, M. Tanaka, S. Tamotsu, N. Hasegawa, M. Nishikino, T. A. Pikuz, T. Kaihori, and T. Kawachi, “Observation of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam,” Appl. Phys., A Mater. Sci. Process. 110(1), 179–188 (2013).
[Crossref]

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Hermann, J.

T. E. Itina, N. Bouflous, J. Hermann, and P. Delaporte, “Nanoparticles and nanostructures formed by laser: What can we learn from the modeling?” Proc. SPIE 8414, 841403 (2011).

Imazono, T.

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Inogamov, N. A.

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Inubushi, Y.

Ishikawa, T.

Ishino, M.

M. Ishino, A. Y. Faenov, M. Tanaka, S. Tamotsu, N. Hasegawa, M. Nishikino, T. A. Pikuz, T. Kaihori, and T. Kawachi, “Observation of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam,” Appl. Phys., A Mater. Sci. Process. 110(1), 179–188 (2013).
[Crossref]

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Itina, T. E.

T. E. Itina, N. Bouflous, J. Hermann, and P. Delaporte, “Nanoparticles and nanostructures formed by laser: What can we learn from the modeling?” Proc. SPIE 8414, 841403 (2011).

Jankowski, A. F.

Jiang, S.

H. Cui, Y. Zhao, S. Jiang, M. Xu, H. Wu, and Q. Wang, “Experiment of Si target ablation with soft X-ray laser operating at a wavelength of 46.9 nm,” Opt. Laser Technol. 46, 20–24 (2013).
[Crossref]

Y. Zhao, S. Jiang, Y. Xie, D. Yang, S. Teng, D. Chen, and Q. Wang, “Demonstration of soft x-ray laser of Ne-like Ar at 69.8 nm pumped by capillary discharge,” Opt. Lett. 36(17), 3458–3460 (2011).
[Crossref] [PubMed]

Juha, L.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Kaihori, T.

M. Ishino, A. Y. Faenov, M. Tanaka, S. Tamotsu, N. Hasegawa, M. Nishikino, T. A. Pikuz, T. Kaihori, and T. Kawachi, “Observation of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam,” Appl. Phys., A Mater. Sci. Process. 110(1), 179–188 (2013).
[Crossref]

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Kaiser, J.

Katayama, T.

Kawachi, T.

M. Ishino, A. Y. Faenov, M. Tanaka, S. Tamotsu, N. Hasegawa, M. Nishikino, T. A. Pikuz, T. Kaihori, and T. Kawachi, “Observation of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam,” Appl. Phys., A Mater. Sci. Process. 110(1), 179–188 (2013).
[Crossref]

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Khohlov, V. A.

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Kim, J.

Kondratenko, V. V.

Koyama, T.

Krasa, J.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Krzywinski, J.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Luk’yanchuk, B. S.

S. I. Anisimov and B. S. Luk’yanchuk, “Selected problems of laser ablation theory,” Phys. Usp. 45(3), 293–324 (2002).
[Crossref]

Makimura, T.

T. Makimura, S. Torii, H. Niino, and K. Murakami, “Silica ablation process induced by focused laser plasma soft x-rays,” in Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, (2012), pp. 82061D.

Marconi, M. C.

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

Matsuyama, S.

Menoni, C. S.

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

M. Grisham, G. Vaschenko, C. S. Menoni, J. J. Rocca, Y. P. Pershyn, E. N. Zubarev, D. L. Voronov, V. A. Sevryukova, V. V. Kondratenko, A. V. Vinogradov, and I. A. Artioukov, “Damage to extreme-ultraviolet Sc/Si multilayer mirrors exposed to intense 46.9-nm laser pulses,” Opt. Lett. 29(6), 620–622 (2004).
[Crossref] [PubMed]

Mimura, H.

Mo, M.

Y. Zhao, M. Mo, Y. Xie, S. Yang, and Q. Wang, “Observation of a saturated soft x-ray laser in a low current capillary discharge,” in Laser & Electro Optics & The Pacific Rim Conference on Laser and Electro-Optics, (2009), pp. 1–2.
[Crossref]

Murakami, K.

T. Makimura, S. Torii, H. Niino, and K. Murakami, “Silica ablation process induced by focused laser plasma soft x-rays,” in Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, (2012), pp. 82061D.

Niino, H.

T. Makimura, S. Torii, H. Niino, and K. Murakami, “Silica ablation process induced by focused laser plasma soft x-rays,” in Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, (2012), pp. 82061D.

Nilsen, J.

Nishikino, M.

M. Ishino, A. Y. Faenov, M. Tanaka, S. Tamotsu, N. Hasegawa, M. Nishikino, T. A. Pikuz, T. Kaihori, and T. Kawachi, “Observation of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam,” Appl. Phys., A Mater. Sci. Process. 110(1), 179–188 (2013).
[Crossref]

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Ochi, Y.

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Ohashi, H.

Ohba, T.

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Otcenasek, Z.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Ozols, A.

Palladino, L.

Pelka, J. B.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Pershyn, Y. P.

Pientka, Z.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Pikuz, T.

Pikuz, T. A.

M. Ishino, A. Y. Faenov, M. Tanaka, S. Tamotsu, N. Hasegawa, M. Nishikino, T. A. Pikuz, T. Kaihori, and T. Kawachi, “Observation of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam,” Appl. Phys., A Mater. Sci. Process. 110(1), 179–188 (2013).
[Crossref]

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Prag, A. R.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Reale, A.

Reale, L.

Ritucci, A.

Rocca, J. J.

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

M. Grisham, G. Vaschenko, C. S. Menoni, J. J. Rocca, Y. P. Pershyn, E. N. Zubarev, D. L. Voronov, V. A. Sevryukova, V. V. Kondratenko, A. V. Vinogradov, and I. A. Artioukov, “Damage to extreme-ultraviolet Sc/Si multilayer mirrors exposed to intense 46.9-nm laser pulses,” Opt. Lett. 29(6), 620–622 (2004).
[Crossref] [PubMed]

B. R. Benware, A. Ozols, J. J. Rocca, I. A. Artioukov, V. V. Kondratenko, and A. V. Vinogradov, “Focusing of a tabletop soft-x-ray laser beam and laser ablation,” Opt. Lett. 24(23), 1714–1716 (1999).
[Crossref] [PubMed]

Sato, T.

Senba, Y.

Sevryukova, V. A.

Shepelev, V. V.

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Skobelev, I. Y.

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Szapiro, B. T.

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

Tamotsu, S.

M. Ishino, A. Y. Faenov, M. Tanaka, S. Tamotsu, N. Hasegawa, M. Nishikino, T. A. Pikuz, T. Kaihori, and T. Kawachi, “Observation of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam,” Appl. Phys., A Mater. Sci. Process. 110(1), 179–188 (2013).
[Crossref]

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Tanaka, M.

M. Ishino, A. Y. Faenov, M. Tanaka, S. Tamotsu, N. Hasegawa, M. Nishikino, T. A. Pikuz, T. Kaihori, and T. Kawachi, “Observation of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam,” Appl. Phys., A Mater. Sci. Process. 110(1), 179–188 (2013).
[Crossref]

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Teng, S.

Togashi, T.

Tomassetti, G.

Tono, K.

Torii, S.

T. Makimura, S. Torii, H. Niino, and K. Murakami, “Silica ablation process induced by focused laser plasma soft x-rays,” in Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, (2012), pp. 82061D.

Ullschmied, J.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Vaschenko, G.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

M. Grisham, G. Vaschenko, C. S. Menoni, J. J. Rocca, Y. P. Pershyn, E. N. Zubarev, D. L. Voronov, V. A. Sevryukova, V. V. Kondratenko, A. V. Vinogradov, and I. A. Artioukov, “Damage to extreme-ultraviolet Sc/Si multilayer mirrors exposed to intense 46.9-nm laser pulses,” Opt. Lett. 29(6), 620–622 (2004).
[Crossref] [PubMed]

Vinogradov, A. V.

Voronov, D. L.

Wachulak, P. W.

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

Wang, Q.

H. Cui, Y. Zhao, S. Jiang, M. Xu, H. Wu, and Q. Wang, “Experiment of Si target ablation with soft X-ray laser operating at a wavelength of 46.9 nm,” Opt. Laser Technol. 46, 20–24 (2013).
[Crossref]

Y. Zhao, S. Jiang, Y. Xie, D. Yang, S. Teng, D. Chen, and Q. Wang, “Demonstration of soft x-ray laser of Ne-like Ar at 69.8 nm pumped by capillary discharge,” Opt. Lett. 36(17), 3458–3460 (2011).
[Crossref] [PubMed]

Y. Zhao, M. Mo, Y. Xie, S. Yang, and Q. Wang, “Observation of a saturated soft x-ray laser in a low current capillary discharge,” in Laser & Electro Optics & The Pacific Rim Conference on Laser and Electro-Optics, (2009), pp. 1–2.
[Crossref]

Wawro, A.

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Wu, H.

H. Wu, N. Zhang, and X. Zhu, “Investigation of the particle size distribution of the ejected material generated during the single femtosecond laser pulse ablation of aluminium,” Appl. Surf. Sci. 317, 167–171 (2014).
[Crossref]

H. Cui, Y. Zhao, S. Jiang, M. Xu, H. Wu, and Q. Wang, “Experiment of Si target ablation with soft X-ray laser operating at a wavelength of 46.9 nm,” Opt. Laser Technol. 46, 20–24 (2013).
[Crossref]

Xie, Y.

Y. Zhao, S. Jiang, Y. Xie, D. Yang, S. Teng, D. Chen, and Q. Wang, “Demonstration of soft x-ray laser of Ne-like Ar at 69.8 nm pumped by capillary discharge,” Opt. Lett. 36(17), 3458–3460 (2011).
[Crossref] [PubMed]

Y. Zhao, M. Mo, Y. Xie, S. Yang, and Q. Wang, “Observation of a saturated soft x-ray laser in a low current capillary discharge,” in Laser & Electro Optics & The Pacific Rim Conference on Laser and Electro-Optics, (2009), pp. 1–2.
[Crossref]

Xu, M.

H. Cui, Y. Zhao, S. Jiang, M. Xu, H. Wu, and Q. Wang, “Experiment of Si target ablation with soft X-ray laser operating at a wavelength of 46.9 nm,” Opt. Laser Technol. 46, 20–24 (2013).
[Crossref]

Yabashi, M.

Yamauchi, K.

Yang, D.

Yang, S.

Y. Zhao, M. Mo, Y. Xie, S. Yang, and Q. Wang, “Observation of a saturated soft x-ray laser in a low current capillary discharge,” in Laser & Electro Optics & The Pacific Rim Conference on Laser and Electro-Optics, (2009), pp. 1–2.
[Crossref]

Yumoto, H.

Zhakhovsky, V. V.

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Zhang, N.

H. Wu, N. Zhang, and X. Zhu, “Investigation of the particle size distribution of the ejected material generated during the single femtosecond laser pulse ablation of aluminium,” Appl. Surf. Sci. 317, 167–171 (2014).
[Crossref]

Zhao, Y.

H. Cui, Y. Zhao, S. Jiang, M. Xu, H. Wu, and Q. Wang, “Experiment of Si target ablation with soft X-ray laser operating at a wavelength of 46.9 nm,” Opt. Laser Technol. 46, 20–24 (2013).
[Crossref]

Y. Zhao, S. Jiang, Y. Xie, D. Yang, S. Teng, D. Chen, and Q. Wang, “Demonstration of soft x-ray laser of Ne-like Ar at 69.8 nm pumped by capillary discharge,” Opt. Lett. 36(17), 3458–3460 (2011).
[Crossref] [PubMed]

Y. Zhao, M. Mo, Y. Xie, S. Yang, and Q. Wang, “Observation of a saturated soft x-ray laser in a low current capillary discharge,” in Laser & Electro Optics & The Pacific Rim Conference on Laser and Electro-Optics, (2009), pp. 1–2.
[Crossref]

Zhu, X.

H. Wu, N. Zhang, and X. Zhu, “Investigation of the particle size distribution of the ejected material generated during the single femtosecond laser pulse ablation of aluminium,” Appl. Surf. Sci. 317, 167–171 (2014).
[Crossref]

Zubarev, E. N.

Zuppella, P.

Appl. Phys. Lett. (1)

L. Juha, M. Bittner, D. Chvostova, J. Krasa, Z. Otcenasek, A. R. Prag, J. Ullschmied, Z. Pientka, J. Krzywinski, J. B. Pelka, A. Wawro, M. E. Grisham, G. Vaschenko, C. S. Menoni, and J. J. Rocca, “Ablation of organic polymers by 46.9-nm-laser radiation,” Appl. Phys. Lett. 86(3), 034109 (2005).
[Crossref]

Appl. Phys., A Mater. Sci. Process. (1)

M. Ishino, A. Y. Faenov, M. Tanaka, S. Tamotsu, N. Hasegawa, M. Nishikino, T. A. Pikuz, T. Kaihori, and T. Kawachi, “Observation of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam,” Appl. Phys., A Mater. Sci. Process. 110(1), 179–188 (2013).
[Crossref]

Appl. Surf. Sci. (1)

H. Wu, N. Zhang, and X. Zhu, “Investigation of the particle size distribution of the ejected material generated during the single femtosecond laser pulse ablation of aluminium,” Appl. Surf. Sci. 317, 167–171 (2014).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (1)

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

J. Appl. Phys. (1)

M. Ishino, A. Y. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Y. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, and T. Kawachi, “Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse,” J. Appl. Phys. 109(1), 013504 (2011).
[Crossref]

Opt. Express (1)

Opt. Laser Technol. (1)

H. Cui, Y. Zhao, S. Jiang, M. Xu, H. Wu, and Q. Wang, “Experiment of Si target ablation with soft X-ray laser operating at a wavelength of 46.9 nm,” Opt. Laser Technol. 46, 20–24 (2013).
[Crossref]

Opt. Lett. (4)

Phys. Usp. (1)

S. I. Anisimov and B. S. Luk’yanchuk, “Selected problems of laser ablation theory,” Phys. Usp. 45(3), 293–324 (2002).
[Crossref]

Proc. SPIE (1)

T. E. Itina, N. Bouflous, J. Hermann, and P. Delaporte, “Nanoparticles and nanostructures formed by laser: What can we learn from the modeling?” Proc. SPIE 8414, 841403 (2011).

Other (2)

Y. Zhao, M. Mo, Y. Xie, S. Yang, and Q. Wang, “Observation of a saturated soft x-ray laser in a low current capillary discharge,” in Laser & Electro Optics & The Pacific Rim Conference on Laser and Electro-Optics, (2009), pp. 1–2.
[Crossref]

T. Makimura, S. Torii, H. Niino, and K. Murakami, “Silica ablation process induced by focused laser plasma soft x-rays,” in Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, (2012), pp. 82061D.

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (11)

Fig. 1
Fig. 1 Beam path scheme.
Fig. 2
Fig. 2 The real and simulated laser beams and the background light: (a) Laser beam; (b) Background light; (c) Simulated light source spot.
Fig. 3
Fig. 3 Simulated focal spot.
Fig. 4
Fig. 4 Intensity patterns observed on the scintillator (left) and the corresponding ZEMAX simulations (right): (a) 3cm upstream from the focal plane; (b) at the focal plane; (c) 3cm downstream from the focal plane.
Fig. 5
Fig. 5 Ablation patterns on a Si target.
Fig. 6
Fig. 6 Ablation patterns with different laser shots.
Fig. 7
Fig. 7 Depth distribution in the ablated region.
Fig. 8
Fig. 8 The phase distribution over the same region as Fig. 7.
Fig. 9
Fig. 9 Ablation pattern on a Cu target.
Fig. 10
Fig. 10 Magnified SEM image showing (a) a melted region on the Cu surface and (b) the energy spectrum indicating the component of the Cu surface.
Fig. 11
Fig. 11 Crater-like features resulting from the vaporization of the Cu target.

Metrics