Abstract

We have developed a novel micro optical diffusion sensor (MODS) with a newly proposed comb-driven–micro Fresnel mirror (CD–MFM) scanner to detect structural changes in biological samples. By controlling the fringe spacing of the excitation laser beam, we can tune the decay time to obtain quick and precise measurements. In this study, the pre-tilted mirror is rotated by vertical comb-driven actuators; the resulting change in the mirror angle alters the fringe spacing. The validity of the proposed mirror scanner is confirmed in simulations and in an experiment using a fabricated prototype device.

© 2015 Optical Society of America

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  1. M. Kondoh, C. Shiraishi, P. Müller, M. Ahmad, K. Hitomi, E. D. Getzoff, and M. Terazima, “Light-induced conformational changes in full-length arabidopsis thaliana cryptochrome,” J. Mol. Biol. 413(1), 128–137 (2011).
    [Crossref] [PubMed]
  2. J. S. Khan, Y. Imamoto, Y. Yamazaki, M. Kataoka, F. Tokunaga, and M. Terazima, “A biosensor in the time domain based on the diffusion coefficient measurement: intermolecular interaction of an intermediate of photoactive yellow protein,” Anal. Chem. 77(20), 6625–6629 (2005).
    [Crossref] [PubMed]
  3. T. Nada and M. Terazima, “A novel method for study of protein folding kinetics by monitoring diffusion coefficient in time domain,” Biophys. J. 85(3), 1876–1881 (2003).
    [Crossref] [PubMed]
  4. A. Kumar, V. M. Gorti, H. Shang, G. U. Lee, N. K. Yip, and S. T. Wereley, “Optical diffusometry techniques and applications in biological agent detection,” J. Fluids Eng. 130(11), 111401 (2008).
    [Crossref]
  5. E. Ryckeboer, J. Vierendeels, A. Lee, S. Werquin, P. Bienstman, and R. Baets, “Measurement of small molecule diffusion with an optofluidic silicon chip,” Lab Chip 13(22), 4392–4399 (2013).
    [Crossref] [PubMed]
  6. O. Annunziata, D. Buzatu, and J. G. Albright, “Protein diffusion coefficients determined by macroscopic-gradient Rayleigh interferometry and dynamic light scattering,” Langmuir 21(26), 12085–12089 (2005).
    [Crossref] [PubMed]
  7. N. Kanzaki, T. Q. P. Uyeda, and K. Onuma, “Intermolecular interaction of actin revealed by a dynamic light scattering technique,” J. Phys. Chem. B 110(6), 2881–2887 (2006).
    [Crossref] [PubMed]
  8. P. Chakraborty, “Study of cadmium-humic interactions and determination of stability constants of cadmium-humate complexes from their diffusion coefficients obtained by scanned stripping voltammetry and dynamic light scattering techniques,” Anal. Chim. Acta 659(1-2), 137–143 (2010).
    [Crossref] [PubMed]
  9. Z. Petrášek and P. Schwille, “Precise measurement of diffusion coefficients using scanning fluorescence correlation spectroscopy,” Biophys. J. 94(4), 1437–1448 (2008).
    [Crossref] [PubMed]
  10. S. Chattoraj, R. Chowdhury, S. Ghosh, and K. Bhattacharyya, “Heterogeneity in binary mixtures of dimethyl sulfoxide and glycerol: Fluorescence correlation spectroscopy,” J. Chem. Phys. 138(21), 214507 (2013).
    [Crossref] [PubMed]
  11. J. W. Krieger, A. P. Singh, C. S. Garbe, T. Wohland, and J. Langowski, “Dual-color fluorescence cross-correlation spectroscopy on a single plane illumination microscope (SPIM-FCCS),” Opt. Express 22(3), 2358–2375 (2014).
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    [Crossref]
  13. A. Komiya and S. Maruyama, “Precise and short-time measurement method of mass diffusion coefficients,” Exp. Therm. Fluid Sci. 30(6), 535–543 (2006).
    [Crossref]
  14. J. F. Torres, A. Komiya, E. Shoji, J. Okajima, and S. Maruyama, “Development of phase-shifting interferometry for measurement of isothermal diffusion coefficients in binary solutions,” Opt. Lasers Eng. 50(9), 1287–1296 (2012).
    [Crossref]
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    [Crossref] [PubMed]
  16. P. Y. Chiou, A. T. Ohta, and M. C. Wu, “Massively parallel manipulation of single cells and microparticles using optical images,” Nature 436(7049), 370–372 (2005).
    [Crossref] [PubMed]
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    [Crossref]
  18. A. Jamshidi, S. L. Neale, K. Yu, P. J. Pauzauskie, P. J. Schuck, J. K. Valley, H. Y. Hsu, A. T. Ohta, and M. C. Wu, “NanoPen: dynamic, low-power, and light-actuated patterning of nanoparticles,” Nano Lett. 9(8), 2921–2925 (2009).
    [Crossref] [PubMed]
  19. K. Hirallah, I. Ramsis, M. Serry, M. A. Swillam, and S. Sedky, “Spatial beam splitting for fully integrated MEMS interferometer,” Opt. Commun. 295, 249–256 (2013).
  20. T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
    [Crossref]
  21. J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
    [Crossref]

2014 (1)

2013 (6)

R. Horst, P. Stanczak, R. C. Stevens, and K. Wuthrich, “β2-Adrenergic receptor solutions for structural biology analyzed with Microscale NMR diffusion measurements,” Angew. Chem. Int. Ed. 52(1), 331–335 (2013).
[Crossref]

S. Chattoraj, R. Chowdhury, S. Ghosh, and K. Bhattacharyya, “Heterogeneity in binary mixtures of dimethyl sulfoxide and glycerol: Fluorescence correlation spectroscopy,” J. Chem. Phys. 138(21), 214507 (2013).
[Crossref] [PubMed]

J. F. Torres, A. Komiya, D. Henry, and S. Maruyama, “Measurement of Soret and Fickian diffusion coefficients by orthogonal phase-shifting interferometry and its application to protein aqueous solutions,” J. Chem. Phys. 139(7), 074203 (2013).
[Crossref] [PubMed]

E. Ryckeboer, J. Vierendeels, A. Lee, S. Werquin, P. Bienstman, and R. Baets, “Measurement of small molecule diffusion with an optofluidic silicon chip,” Lab Chip 13(22), 4392–4399 (2013).
[Crossref] [PubMed]

K. Hirallah, I. Ramsis, M. Serry, M. A. Swillam, and S. Sedky, “Spatial beam splitting for fully integrated MEMS interferometer,” Opt. Commun. 295, 249–256 (2013).

J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
[Crossref]

2012 (2)

T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
[Crossref]

J. F. Torres, A. Komiya, E. Shoji, J. Okajima, and S. Maruyama, “Development of phase-shifting interferometry for measurement of isothermal diffusion coefficients in binary solutions,” Opt. Lasers Eng. 50(9), 1287–1296 (2012).
[Crossref]

2011 (1)

M. Kondoh, C. Shiraishi, P. Müller, M. Ahmad, K. Hitomi, E. D. Getzoff, and M. Terazima, “Light-induced conformational changes in full-length arabidopsis thaliana cryptochrome,” J. Mol. Biol. 413(1), 128–137 (2011).
[Crossref] [PubMed]

2010 (1)

P. Chakraborty, “Study of cadmium-humic interactions and determination of stability constants of cadmium-humate complexes from their diffusion coefficients obtained by scanned stripping voltammetry and dynamic light scattering techniques,” Anal. Chim. Acta 659(1-2), 137–143 (2010).
[Crossref] [PubMed]

2009 (1)

A. Jamshidi, S. L. Neale, K. Yu, P. J. Pauzauskie, P. J. Schuck, J. K. Valley, H. Y. Hsu, A. T. Ohta, and M. C. Wu, “NanoPen: dynamic, low-power, and light-actuated patterning of nanoparticles,” Nano Lett. 9(8), 2921–2925 (2009).
[Crossref] [PubMed]

2008 (2)

Z. Petrášek and P. Schwille, “Precise measurement of diffusion coefficients using scanning fluorescence correlation spectroscopy,” Biophys. J. 94(4), 1437–1448 (2008).
[Crossref] [PubMed]

A. Kumar, V. M. Gorti, H. Shang, G. U. Lee, N. K. Yip, and S. T. Wereley, “Optical diffusometry techniques and applications in biological agent detection,” J. Fluids Eng. 130(11), 111401 (2008).
[Crossref]

2007 (1)

A. T. Ohta, P.-Y. Chiou, T. H. Han, J. C. Liao, U. Bhardwaj, E. R. B. McCabe, F. Yu, R. Sun, and M. C. Wu, “Dynamic cell and microparticle control via optoelectronic tweezers,” J. Microelectromech. Syst. 16(3), 491–499 (2007).
[Crossref]

2006 (2)

A. Komiya and S. Maruyama, “Precise and short-time measurement method of mass diffusion coefficients,” Exp. Therm. Fluid Sci. 30(6), 535–543 (2006).
[Crossref]

N. Kanzaki, T. Q. P. Uyeda, and K. Onuma, “Intermolecular interaction of actin revealed by a dynamic light scattering technique,” J. Phys. Chem. B 110(6), 2881–2887 (2006).
[Crossref] [PubMed]

2005 (3)

J. S. Khan, Y. Imamoto, Y. Yamazaki, M. Kataoka, F. Tokunaga, and M. Terazima, “A biosensor in the time domain based on the diffusion coefficient measurement: intermolecular interaction of an intermediate of photoactive yellow protein,” Anal. Chem. 77(20), 6625–6629 (2005).
[Crossref] [PubMed]

O. Annunziata, D. Buzatu, and J. G. Albright, “Protein diffusion coefficients determined by macroscopic-gradient Rayleigh interferometry and dynamic light scattering,” Langmuir 21(26), 12085–12089 (2005).
[Crossref] [PubMed]

P. Y. Chiou, A. T. Ohta, and M. C. Wu, “Massively parallel manipulation of single cells and microparticles using optical images,” Nature 436(7049), 370–372 (2005).
[Crossref] [PubMed]

2003 (1)

T. Nada and M. Terazima, “A novel method for study of protein folding kinetics by monitoring diffusion coefficient in time domain,” Biophys. J. 85(3), 1876–1881 (2003).
[Crossref] [PubMed]

Ahmad, M.

M. Kondoh, C. Shiraishi, P. Müller, M. Ahmad, K. Hitomi, E. D. Getzoff, and M. Terazima, “Light-induced conformational changes in full-length arabidopsis thaliana cryptochrome,” J. Mol. Biol. 413(1), 128–137 (2011).
[Crossref] [PubMed]

Albright, J. G.

O. Annunziata, D. Buzatu, and J. G. Albright, “Protein diffusion coefficients determined by macroscopic-gradient Rayleigh interferometry and dynamic light scattering,” Langmuir 21(26), 12085–12089 (2005).
[Crossref] [PubMed]

Annunziata, O.

O. Annunziata, D. Buzatu, and J. G. Albright, “Protein diffusion coefficients determined by macroscopic-gradient Rayleigh interferometry and dynamic light scattering,” Langmuir 21(26), 12085–12089 (2005).
[Crossref] [PubMed]

Baets, R.

E. Ryckeboer, J. Vierendeels, A. Lee, S. Werquin, P. Bienstman, and R. Baets, “Measurement of small molecule diffusion with an optofluidic silicon chip,” Lab Chip 13(22), 4392–4399 (2013).
[Crossref] [PubMed]

Bhardwaj, U.

A. T. Ohta, P.-Y. Chiou, T. H. Han, J. C. Liao, U. Bhardwaj, E. R. B. McCabe, F. Yu, R. Sun, and M. C. Wu, “Dynamic cell and microparticle control via optoelectronic tweezers,” J. Microelectromech. Syst. 16(3), 491–499 (2007).
[Crossref]

Bhattacharyya, K.

S. Chattoraj, R. Chowdhury, S. Ghosh, and K. Bhattacharyya, “Heterogeneity in binary mixtures of dimethyl sulfoxide and glycerol: Fluorescence correlation spectroscopy,” J. Chem. Phys. 138(21), 214507 (2013).
[Crossref] [PubMed]

Bienstman, P.

E. Ryckeboer, J. Vierendeels, A. Lee, S. Werquin, P. Bienstman, and R. Baets, “Measurement of small molecule diffusion with an optofluidic silicon chip,” Lab Chip 13(22), 4392–4399 (2013).
[Crossref] [PubMed]

Brunne, J.

J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
[Crossref]

Buzatu, D.

O. Annunziata, D. Buzatu, and J. G. Albright, “Protein diffusion coefficients determined by macroscopic-gradient Rayleigh interferometry and dynamic light scattering,” Langmuir 21(26), 12085–12089 (2005).
[Crossref] [PubMed]

Chakraborty, P.

P. Chakraborty, “Study of cadmium-humic interactions and determination of stability constants of cadmium-humate complexes from their diffusion coefficients obtained by scanned stripping voltammetry and dynamic light scattering techniques,” Anal. Chim. Acta 659(1-2), 137–143 (2010).
[Crossref] [PubMed]

Chattoraj, S.

S. Chattoraj, R. Chowdhury, S. Ghosh, and K. Bhattacharyya, “Heterogeneity in binary mixtures of dimethyl sulfoxide and glycerol: Fluorescence correlation spectroscopy,” J. Chem. Phys. 138(21), 214507 (2013).
[Crossref] [PubMed]

Chiou, P. Y.

P. Y. Chiou, A. T. Ohta, and M. C. Wu, “Massively parallel manipulation of single cells and microparticles using optical images,” Nature 436(7049), 370–372 (2005).
[Crossref] [PubMed]

Chiou, P.-Y.

A. T. Ohta, P.-Y. Chiou, T. H. Han, J. C. Liao, U. Bhardwaj, E. R. B. McCabe, F. Yu, R. Sun, and M. C. Wu, “Dynamic cell and microparticle control via optoelectronic tweezers,” J. Microelectromech. Syst. 16(3), 491–499 (2007).
[Crossref]

Chowdhury, R.

S. Chattoraj, R. Chowdhury, S. Ghosh, and K. Bhattacharyya, “Heterogeneity in binary mixtures of dimethyl sulfoxide and glycerol: Fluorescence correlation spectroscopy,” J. Chem. Phys. 138(21), 214507 (2013).
[Crossref] [PubMed]

Garbe, C. S.

Getzoff, E. D.

M. Kondoh, C. Shiraishi, P. Müller, M. Ahmad, K. Hitomi, E. D. Getzoff, and M. Terazima, “Light-induced conformational changes in full-length arabidopsis thaliana cryptochrome,” J. Mol. Biol. 413(1), 128–137 (2011).
[Crossref] [PubMed]

Ghosh, S.

S. Chattoraj, R. Chowdhury, S. Ghosh, and K. Bhattacharyya, “Heterogeneity in binary mixtures of dimethyl sulfoxide and glycerol: Fluorescence correlation spectroscopy,” J. Chem. Phys. 138(21), 214507 (2013).
[Crossref] [PubMed]

Gorti, V. M.

A. Kumar, V. M. Gorti, H. Shang, G. U. Lee, N. K. Yip, and S. T. Wereley, “Optical diffusometry techniques and applications in biological agent detection,” J. Fluids Eng. 130(11), 111401 (2008).
[Crossref]

Grunwald, R.

J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
[Crossref]

Han, T. H.

A. T. Ohta, P.-Y. Chiou, T. H. Han, J. C. Liao, U. Bhardwaj, E. R. B. McCabe, F. Yu, R. Sun, and M. C. Wu, “Dynamic cell and microparticle control via optoelectronic tweezers,” J. Microelectromech. Syst. 16(3), 491–499 (2007).
[Crossref]

Henry, D.

J. F. Torres, A. Komiya, D. Henry, and S. Maruyama, “Measurement of Soret and Fickian diffusion coefficients by orthogonal phase-shifting interferometry and its application to protein aqueous solutions,” J. Chem. Phys. 139(7), 074203 (2013).
[Crossref] [PubMed]

Hirallah, K.

K. Hirallah, I. Ramsis, M. Serry, M. A. Swillam, and S. Sedky, “Spatial beam splitting for fully integrated MEMS interferometer,” Opt. Commun. 295, 249–256 (2013).

Hitomi, K.

M. Kondoh, C. Shiraishi, P. Müller, M. Ahmad, K. Hitomi, E. D. Getzoff, and M. Terazima, “Light-induced conformational changes in full-length arabidopsis thaliana cryptochrome,” J. Mol. Biol. 413(1), 128–137 (2011).
[Crossref] [PubMed]

Horst, R.

R. Horst, P. Stanczak, R. C. Stevens, and K. Wuthrich, “β2-Adrenergic receptor solutions for structural biology analyzed with Microscale NMR diffusion measurements,” Angew. Chem. Int. Ed. 52(1), 331–335 (2013).
[Crossref]

Hsu, H. Y.

A. Jamshidi, S. L. Neale, K. Yu, P. J. Pauzauskie, P. J. Schuck, J. K. Valley, H. Y. Hsu, A. T. Ohta, and M. C. Wu, “NanoPen: dynamic, low-power, and light-actuated patterning of nanoparticles,” Nano Lett. 9(8), 2921–2925 (2009).
[Crossref] [PubMed]

Imamoto, Y.

J. S. Khan, Y. Imamoto, Y. Yamazaki, M. Kataoka, F. Tokunaga, and M. Terazima, “A biosensor in the time domain based on the diffusion coefficient measurement: intermolecular interaction of an intermediate of photoactive yellow protein,” Anal. Chem. 77(20), 6625–6629 (2005).
[Crossref] [PubMed]

Itani, K.

T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
[Crossref]

Jamshidi, A.

A. Jamshidi, S. L. Neale, K. Yu, P. J. Pauzauskie, P. J. Schuck, J. K. Valley, H. Y. Hsu, A. T. Ohta, and M. C. Wu, “NanoPen: dynamic, low-power, and light-actuated patterning of nanoparticles,” Nano Lett. 9(8), 2921–2925 (2009).
[Crossref] [PubMed]

Kanzaki, N.

N. Kanzaki, T. Q. P. Uyeda, and K. Onuma, “Intermolecular interaction of actin revealed by a dynamic light scattering technique,” J. Phys. Chem. B 110(6), 2881–2887 (2006).
[Crossref] [PubMed]

Kataoka, M.

J. S. Khan, Y. Imamoto, Y. Yamazaki, M. Kataoka, F. Tokunaga, and M. Terazima, “A biosensor in the time domain based on the diffusion coefficient measurement: intermolecular interaction of an intermediate of photoactive yellow protein,” Anal. Chem. 77(20), 6625–6629 (2005).
[Crossref] [PubMed]

Khan, J. S.

J. S. Khan, Y. Imamoto, Y. Yamazaki, M. Kataoka, F. Tokunaga, and M. Terazima, “A biosensor in the time domain based on the diffusion coefficient measurement: intermolecular interaction of an intermediate of photoactive yellow protein,” Anal. Chem. 77(20), 6625–6629 (2005).
[Crossref] [PubMed]

Komiya, A.

J. F. Torres, A. Komiya, D. Henry, and S. Maruyama, “Measurement of Soret and Fickian diffusion coefficients by orthogonal phase-shifting interferometry and its application to protein aqueous solutions,” J. Chem. Phys. 139(7), 074203 (2013).
[Crossref] [PubMed]

J. F. Torres, A. Komiya, E. Shoji, J. Okajima, and S. Maruyama, “Development of phase-shifting interferometry for measurement of isothermal diffusion coefficients in binary solutions,” Opt. Lasers Eng. 50(9), 1287–1296 (2012).
[Crossref]

A. Komiya and S. Maruyama, “Precise and short-time measurement method of mass diffusion coefficients,” Exp. Therm. Fluid Sci. 30(6), 535–543 (2006).
[Crossref]

Kondoh, M.

M. Kondoh, C. Shiraishi, P. Müller, M. Ahmad, K. Hitomi, E. D. Getzoff, and M. Terazima, “Light-induced conformational changes in full-length arabidopsis thaliana cryptochrome,” J. Mol. Biol. 413(1), 128–137 (2011).
[Crossref] [PubMed]

Krieger, J. W.

Kumar, A.

A. Kumar, V. M. Gorti, H. Shang, G. U. Lee, N. K. Yip, and S. T. Wereley, “Optical diffusometry techniques and applications in biological agent detection,” J. Fluids Eng. 130(11), 111401 (2008).
[Crossref]

Langowski, J.

Lee, A.

E. Ryckeboer, J. Vierendeels, A. Lee, S. Werquin, P. Bienstman, and R. Baets, “Measurement of small molecule diffusion with an optofluidic silicon chip,” Lab Chip 13(22), 4392–4399 (2013).
[Crossref] [PubMed]

Lee, G. U.

A. Kumar, V. M. Gorti, H. Shang, G. U. Lee, N. K. Yip, and S. T. Wereley, “Optical diffusometry techniques and applications in biological agent detection,” J. Fluids Eng. 130(11), 111401 (2008).
[Crossref]

Liao, J. C.

A. T. Ohta, P.-Y. Chiou, T. H. Han, J. C. Liao, U. Bhardwaj, E. R. B. McCabe, F. Yu, R. Sun, and M. C. Wu, “Dynamic cell and microparticle control via optoelectronic tweezers,” J. Microelectromech. Syst. 16(3), 491–499 (2007).
[Crossref]

Maruyama, S.

J. F. Torres, A. Komiya, D. Henry, and S. Maruyama, “Measurement of Soret and Fickian diffusion coefficients by orthogonal phase-shifting interferometry and its application to protein aqueous solutions,” J. Chem. Phys. 139(7), 074203 (2013).
[Crossref] [PubMed]

J. F. Torres, A. Komiya, E. Shoji, J. Okajima, and S. Maruyama, “Development of phase-shifting interferometry for measurement of isothermal diffusion coefficients in binary solutions,” Opt. Lasers Eng. 50(9), 1287–1296 (2012).
[Crossref]

A. Komiya and S. Maruyama, “Precise and short-time measurement method of mass diffusion coefficients,” Exp. Therm. Fluid Sci. 30(6), 535–543 (2006).
[Crossref]

McCabe, E. R. B.

A. T. Ohta, P.-Y. Chiou, T. H. Han, J. C. Liao, U. Bhardwaj, E. R. B. McCabe, F. Yu, R. Sun, and M. C. Wu, “Dynamic cell and microparticle control via optoelectronic tweezers,” J. Microelectromech. Syst. 16(3), 491–499 (2007).
[Crossref]

Müller, P.

M. Kondoh, C. Shiraishi, P. Müller, M. Ahmad, K. Hitomi, E. D. Getzoff, and M. Terazima, “Light-induced conformational changes in full-length arabidopsis thaliana cryptochrome,” J. Mol. Biol. 413(1), 128–137 (2011).
[Crossref] [PubMed]

Nada, T.

T. Nada and M. Terazima, “A novel method for study of protein folding kinetics by monitoring diffusion coefficient in time domain,” Biophys. J. 85(3), 1876–1881 (2003).
[Crossref] [PubMed]

Nagasaka, Y.

T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
[Crossref]

Neale, S. L.

A. Jamshidi, S. L. Neale, K. Yu, P. J. Pauzauskie, P. J. Schuck, J. K. Valley, H. Y. Hsu, A. T. Ohta, and M. C. Wu, “NanoPen: dynamic, low-power, and light-actuated patterning of nanoparticles,” Nano Lett. 9(8), 2921–2925 (2009).
[Crossref] [PubMed]

Ohta, A. T.

A. Jamshidi, S. L. Neale, K. Yu, P. J. Pauzauskie, P. J. Schuck, J. K. Valley, H. Y. Hsu, A. T. Ohta, and M. C. Wu, “NanoPen: dynamic, low-power, and light-actuated patterning of nanoparticles,” Nano Lett. 9(8), 2921–2925 (2009).
[Crossref] [PubMed]

A. T. Ohta, P.-Y. Chiou, T. H. Han, J. C. Liao, U. Bhardwaj, E. R. B. McCabe, F. Yu, R. Sun, and M. C. Wu, “Dynamic cell and microparticle control via optoelectronic tweezers,” J. Microelectromech. Syst. 16(3), 491–499 (2007).
[Crossref]

P. Y. Chiou, A. T. Ohta, and M. C. Wu, “Massively parallel manipulation of single cells and microparticles using optical images,” Nature 436(7049), 370–372 (2005).
[Crossref] [PubMed]

Oka, T.

T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
[Crossref]

Okajima, J.

J. F. Torres, A. Komiya, E. Shoji, J. Okajima, and S. Maruyama, “Development of phase-shifting interferometry for measurement of isothermal diffusion coefficients in binary solutions,” Opt. Lasers Eng. 50(9), 1287–1296 (2012).
[Crossref]

Onuma, K.

N. Kanzaki, T. Q. P. Uyeda, and K. Onuma, “Intermolecular interaction of actin revealed by a dynamic light scattering technique,” J. Phys. Chem. B 110(6), 2881–2887 (2006).
[Crossref] [PubMed]

Pauzauskie, P. J.

A. Jamshidi, S. L. Neale, K. Yu, P. J. Pauzauskie, P. J. Schuck, J. K. Valley, H. Y. Hsu, A. T. Ohta, and M. C. Wu, “NanoPen: dynamic, low-power, and light-actuated patterning of nanoparticles,” Nano Lett. 9(8), 2921–2925 (2009).
[Crossref] [PubMed]

Petrášek, Z.

Z. Petrášek and P. Schwille, “Precise measurement of diffusion coefficients using scanning fluorescence correlation spectroscopy,” Biophys. J. 94(4), 1437–1448 (2008).
[Crossref] [PubMed]

Ramsis, I.

K. Hirallah, I. Ramsis, M. Serry, M. A. Swillam, and S. Sedky, “Spatial beam splitting for fully integrated MEMS interferometer,” Opt. Commun. 295, 249–256 (2013).

Ryckeboer, E.

E. Ryckeboer, J. Vierendeels, A. Lee, S. Werquin, P. Bienstman, and R. Baets, “Measurement of small molecule diffusion with an optofluidic silicon chip,” Lab Chip 13(22), 4392–4399 (2013).
[Crossref] [PubMed]

Schuck, P. J.

A. Jamshidi, S. L. Neale, K. Yu, P. J. Pauzauskie, P. J. Schuck, J. K. Valley, H. Y. Hsu, A. T. Ohta, and M. C. Wu, “NanoPen: dynamic, low-power, and light-actuated patterning of nanoparticles,” Nano Lett. 9(8), 2921–2925 (2009).
[Crossref] [PubMed]

Schwille, P.

Z. Petrášek and P. Schwille, “Precise measurement of diffusion coefficients using scanning fluorescence correlation spectroscopy,” Biophys. J. 94(4), 1437–1448 (2008).
[Crossref] [PubMed]

Sedky, S.

K. Hirallah, I. Ramsis, M. Serry, M. A. Swillam, and S. Sedky, “Spatial beam splitting for fully integrated MEMS interferometer,” Opt. Commun. 295, 249–256 (2013).

Serry, M.

K. Hirallah, I. Ramsis, M. Serry, M. A. Swillam, and S. Sedky, “Spatial beam splitting for fully integrated MEMS interferometer,” Opt. Commun. 295, 249–256 (2013).

Shang, H.

A. Kumar, V. M. Gorti, H. Shang, G. U. Lee, N. K. Yip, and S. T. Wereley, “Optical diffusometry techniques and applications in biological agent detection,” J. Fluids Eng. 130(11), 111401 (2008).
[Crossref]

Shiraishi, C.

M. Kondoh, C. Shiraishi, P. Müller, M. Ahmad, K. Hitomi, E. D. Getzoff, and M. Terazima, “Light-induced conformational changes in full-length arabidopsis thaliana cryptochrome,” J. Mol. Biol. 413(1), 128–137 (2011).
[Crossref] [PubMed]

Shoji, E.

J. F. Torres, A. Komiya, E. Shoji, J. Okajima, and S. Maruyama, “Development of phase-shifting interferometry for measurement of isothermal diffusion coefficients in binary solutions,” Opt. Lasers Eng. 50(9), 1287–1296 (2012).
[Crossref]

Singh, A. P.

Stanczak, P.

R. Horst, P. Stanczak, R. C. Stevens, and K. Wuthrich, “β2-Adrenergic receptor solutions for structural biology analyzed with Microscale NMR diffusion measurements,” Angew. Chem. Int. Ed. 52(1), 331–335 (2013).
[Crossref]

Stevens, R. C.

R. Horst, P. Stanczak, R. C. Stevens, and K. Wuthrich, “β2-Adrenergic receptor solutions for structural biology analyzed with Microscale NMR diffusion measurements,” Angew. Chem. Int. Ed. 52(1), 331–335 (2013).
[Crossref]

Sun, R.

A. T. Ohta, P.-Y. Chiou, T. H. Han, J. C. Liao, U. Bhardwaj, E. R. B. McCabe, F. Yu, R. Sun, and M. C. Wu, “Dynamic cell and microparticle control via optoelectronic tweezers,” J. Microelectromech. Syst. 16(3), 491–499 (2007).
[Crossref]

Swillam, M. A.

K. Hirallah, I. Ramsis, M. Serry, M. A. Swillam, and S. Sedky, “Spatial beam splitting for fully integrated MEMS interferometer,” Opt. Commun. 295, 249–256 (2013).

Taguchi, Y.

T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
[Crossref]

Terazima, M.

M. Kondoh, C. Shiraishi, P. Müller, M. Ahmad, K. Hitomi, E. D. Getzoff, and M. Terazima, “Light-induced conformational changes in full-length arabidopsis thaliana cryptochrome,” J. Mol. Biol. 413(1), 128–137 (2011).
[Crossref] [PubMed]

J. S. Khan, Y. Imamoto, Y. Yamazaki, M. Kataoka, F. Tokunaga, and M. Terazima, “A biosensor in the time domain based on the diffusion coefficient measurement: intermolecular interaction of an intermediate of photoactive yellow protein,” Anal. Chem. 77(20), 6625–6629 (2005).
[Crossref] [PubMed]

T. Nada and M. Terazima, “A novel method for study of protein folding kinetics by monitoring diffusion coefficient in time domain,” Biophys. J. 85(3), 1876–1881 (2003).
[Crossref] [PubMed]

Tokunaga, F.

J. S. Khan, Y. Imamoto, Y. Yamazaki, M. Kataoka, F. Tokunaga, and M. Terazima, “A biosensor in the time domain based on the diffusion coefficient measurement: intermolecular interaction of an intermediate of photoactive yellow protein,” Anal. Chem. 77(20), 6625–6629 (2005).
[Crossref] [PubMed]

Torres, J. F.

J. F. Torres, A. Komiya, D. Henry, and S. Maruyama, “Measurement of Soret and Fickian diffusion coefficients by orthogonal phase-shifting interferometry and its application to protein aqueous solutions,” J. Chem. Phys. 139(7), 074203 (2013).
[Crossref] [PubMed]

J. F. Torres, A. Komiya, E. Shoji, J. Okajima, and S. Maruyama, “Development of phase-shifting interferometry for measurement of isothermal diffusion coefficients in binary solutions,” Opt. Lasers Eng. 50(9), 1287–1296 (2012).
[Crossref]

Uyeda, T. Q. P.

N. Kanzaki, T. Q. P. Uyeda, and K. Onuma, “Intermolecular interaction of actin revealed by a dynamic light scattering technique,” J. Phys. Chem. B 110(6), 2881–2887 (2006).
[Crossref] [PubMed]

Valley, J. K.

A. Jamshidi, S. L. Neale, K. Yu, P. J. Pauzauskie, P. J. Schuck, J. K. Valley, H. Y. Hsu, A. T. Ohta, and M. C. Wu, “NanoPen: dynamic, low-power, and light-actuated patterning of nanoparticles,” Nano Lett. 9(8), 2921–2925 (2009).
[Crossref] [PubMed]

Vierendeels, J.

E. Ryckeboer, J. Vierendeels, A. Lee, S. Werquin, P. Bienstman, and R. Baets, “Measurement of small molecule diffusion with an optofluidic silicon chip,” Lab Chip 13(22), 4392–4399 (2013).
[Crossref] [PubMed]

Wallrabe, U.

J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
[Crossref]

Wapler, M. C.

J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
[Crossref]

Wereley, S. T.

A. Kumar, V. M. Gorti, H. Shang, G. U. Lee, N. K. Yip, and S. T. Wereley, “Optical diffusometry techniques and applications in biological agent detection,” J. Fluids Eng. 130(11), 111401 (2008).
[Crossref]

Werquin, S.

E. Ryckeboer, J. Vierendeels, A. Lee, S. Werquin, P. Bienstman, and R. Baets, “Measurement of small molecule diffusion with an optofluidic silicon chip,” Lab Chip 13(22), 4392–4399 (2013).
[Crossref] [PubMed]

Wohland, T.

Wu, M. C.

A. Jamshidi, S. L. Neale, K. Yu, P. J. Pauzauskie, P. J. Schuck, J. K. Valley, H. Y. Hsu, A. T. Ohta, and M. C. Wu, “NanoPen: dynamic, low-power, and light-actuated patterning of nanoparticles,” Nano Lett. 9(8), 2921–2925 (2009).
[Crossref] [PubMed]

A. T. Ohta, P.-Y. Chiou, T. H. Han, J. C. Liao, U. Bhardwaj, E. R. B. McCabe, F. Yu, R. Sun, and M. C. Wu, “Dynamic cell and microparticle control via optoelectronic tweezers,” J. Microelectromech. Syst. 16(3), 491–499 (2007).
[Crossref]

P. Y. Chiou, A. T. Ohta, and M. C. Wu, “Massively parallel manipulation of single cells and microparticles using optical images,” Nature 436(7049), 370–372 (2005).
[Crossref] [PubMed]

Wuthrich, K.

R. Horst, P. Stanczak, R. C. Stevens, and K. Wuthrich, “β2-Adrenergic receptor solutions for structural biology analyzed with Microscale NMR diffusion measurements,” Angew. Chem. Int. Ed. 52(1), 331–335 (2013).
[Crossref]

Yamazaki, Y.

J. S. Khan, Y. Imamoto, Y. Yamazaki, M. Kataoka, F. Tokunaga, and M. Terazima, “A biosensor in the time domain based on the diffusion coefficient measurement: intermolecular interaction of an intermediate of photoactive yellow protein,” Anal. Chem. 77(20), 6625–6629 (2005).
[Crossref] [PubMed]

Yip, N. K.

A. Kumar, V. M. Gorti, H. Shang, G. U. Lee, N. K. Yip, and S. T. Wereley, “Optical diffusometry techniques and applications in biological agent detection,” J. Fluids Eng. 130(11), 111401 (2008).
[Crossref]

Yu, F.

A. T. Ohta, P.-Y. Chiou, T. H. Han, J. C. Liao, U. Bhardwaj, E. R. B. McCabe, F. Yu, R. Sun, and M. C. Wu, “Dynamic cell and microparticle control via optoelectronic tweezers,” J. Microelectromech. Syst. 16(3), 491–499 (2007).
[Crossref]

Yu, K.

A. Jamshidi, S. L. Neale, K. Yu, P. J. Pauzauskie, P. J. Schuck, J. K. Valley, H. Y. Hsu, A. T. Ohta, and M. C. Wu, “NanoPen: dynamic, low-power, and light-actuated patterning of nanoparticles,” Nano Lett. 9(8), 2921–2925 (2009).
[Crossref] [PubMed]

Anal. Chem. (1)

J. S. Khan, Y. Imamoto, Y. Yamazaki, M. Kataoka, F. Tokunaga, and M. Terazima, “A biosensor in the time domain based on the diffusion coefficient measurement: intermolecular interaction of an intermediate of photoactive yellow protein,” Anal. Chem. 77(20), 6625–6629 (2005).
[Crossref] [PubMed]

Anal. Chim. Acta (1)

P. Chakraborty, “Study of cadmium-humic interactions and determination of stability constants of cadmium-humate complexes from their diffusion coefficients obtained by scanned stripping voltammetry and dynamic light scattering techniques,” Anal. Chim. Acta 659(1-2), 137–143 (2010).
[Crossref] [PubMed]

Angew. Chem. Int. Ed. (1)

R. Horst, P. Stanczak, R. C. Stevens, and K. Wuthrich, “β2-Adrenergic receptor solutions for structural biology analyzed with Microscale NMR diffusion measurements,” Angew. Chem. Int. Ed. 52(1), 331–335 (2013).
[Crossref]

Biophys. J. (2)

Z. Petrášek and P. Schwille, “Precise measurement of diffusion coefficients using scanning fluorescence correlation spectroscopy,” Biophys. J. 94(4), 1437–1448 (2008).
[Crossref] [PubMed]

T. Nada and M. Terazima, “A novel method for study of protein folding kinetics by monitoring diffusion coefficient in time domain,” Biophys. J. 85(3), 1876–1881 (2003).
[Crossref] [PubMed]

Exp. Therm. Fluid Sci. (1)

A. Komiya and S. Maruyama, “Precise and short-time measurement method of mass diffusion coefficients,” Exp. Therm. Fluid Sci. 30(6), 535–543 (2006).
[Crossref]

J. Chem. Phys. (2)

J. F. Torres, A. Komiya, D. Henry, and S. Maruyama, “Measurement of Soret and Fickian diffusion coefficients by orthogonal phase-shifting interferometry and its application to protein aqueous solutions,” J. Chem. Phys. 139(7), 074203 (2013).
[Crossref] [PubMed]

S. Chattoraj, R. Chowdhury, S. Ghosh, and K. Bhattacharyya, “Heterogeneity in binary mixtures of dimethyl sulfoxide and glycerol: Fluorescence correlation spectroscopy,” J. Chem. Phys. 138(21), 214507 (2013).
[Crossref] [PubMed]

J. Fluids Eng. (1)

A. Kumar, V. M. Gorti, H. Shang, G. U. Lee, N. K. Yip, and S. T. Wereley, “Optical diffusometry techniques and applications in biological agent detection,” J. Fluids Eng. 130(11), 111401 (2008).
[Crossref]

J. Microelectromech. Syst. (2)

A. T. Ohta, P.-Y. Chiou, T. H. Han, J. C. Liao, U. Bhardwaj, E. R. B. McCabe, F. Yu, R. Sun, and M. C. Wu, “Dynamic cell and microparticle control via optoelectronic tweezers,” J. Microelectromech. Syst. 16(3), 491–499 (2007).
[Crossref]

T. Oka, K. Itani, Y. Taguchi, and Y. Nagasaka, “Development of interferometric excitation device for micro optical diffusion sensor using laser-induced dielectrophoresis,” J. Microelectromech. Syst. 21(2), 324–330 (2012).
[Crossref]

J. Micromech. Microeng. (1)

J. Brunne, M. C. Wapler, R. Grunwald, and U. Wallrabe, “A tunable piezoelectric Fresnel mirror for high-speed lineshaping,” J. Micromech. Microeng. 23(11), 115002 (2013).
[Crossref]

J. Mol. Biol. (1)

M. Kondoh, C. Shiraishi, P. Müller, M. Ahmad, K. Hitomi, E. D. Getzoff, and M. Terazima, “Light-induced conformational changes in full-length arabidopsis thaliana cryptochrome,” J. Mol. Biol. 413(1), 128–137 (2011).
[Crossref] [PubMed]

J. Phys. Chem. B (1)

N. Kanzaki, T. Q. P. Uyeda, and K. Onuma, “Intermolecular interaction of actin revealed by a dynamic light scattering technique,” J. Phys. Chem. B 110(6), 2881–2887 (2006).
[Crossref] [PubMed]

Lab Chip (1)

E. Ryckeboer, J. Vierendeels, A. Lee, S. Werquin, P. Bienstman, and R. Baets, “Measurement of small molecule diffusion with an optofluidic silicon chip,” Lab Chip 13(22), 4392–4399 (2013).
[Crossref] [PubMed]

Langmuir (1)

O. Annunziata, D. Buzatu, and J. G. Albright, “Protein diffusion coefficients determined by macroscopic-gradient Rayleigh interferometry and dynamic light scattering,” Langmuir 21(26), 12085–12089 (2005).
[Crossref] [PubMed]

Nano Lett. (1)

A. Jamshidi, S. L. Neale, K. Yu, P. J. Pauzauskie, P. J. Schuck, J. K. Valley, H. Y. Hsu, A. T. Ohta, and M. C. Wu, “NanoPen: dynamic, low-power, and light-actuated patterning of nanoparticles,” Nano Lett. 9(8), 2921–2925 (2009).
[Crossref] [PubMed]

Nature (1)

P. Y. Chiou, A. T. Ohta, and M. C. Wu, “Massively parallel manipulation of single cells and microparticles using optical images,” Nature 436(7049), 370–372 (2005).
[Crossref] [PubMed]

Opt. Commun. (1)

K. Hirallah, I. Ramsis, M. Serry, M. A. Swillam, and S. Sedky, “Spatial beam splitting for fully integrated MEMS interferometer,” Opt. Commun. 295, 249–256 (2013).

Opt. Express (1)

Opt. Lasers Eng. (1)

J. F. Torres, A. Komiya, E. Shoji, J. Okajima, and S. Maruyama, “Development of phase-shifting interferometry for measurement of isothermal diffusion coefficients in binary solutions,” Opt. Lasers Eng. 50(9), 1287–1296 (2012).
[Crossref]

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Figures (8)

Fig. 1
Fig. 1 Schematic of comb-driven micro Fresnel mirror (CD–MFM). (a) V-shaped mirror can generate an interference fringe pattern. (b) Enlarged view of CD–MFM. Comb electrodes generate an electrostatic force to rotate the mirror.
Fig. 2
Fig. 2 Mechanical design dependence of mirror angle of CD–MFM. (a) Mirror angle depends on the stiffness of the torsion spring. (b) Mirror angle vs. voltage for two lengths of the comb teeth.
Fig. 3
Fig. 3 Analytical results of CD–MFM. (a) Initial displacement of V-shaped mirror. (b) Mirror displacement with 150 V between the comb drive. The images are enlarged 5 times along the z-axis.
Fig. 4
Fig. 4 SEM image of the fabricated CD–MFM. The V-shaped mirror is successfully formed and no stiction occurs between the comb electrodes.
Fig. 5
Fig. 5 Fringe pattern generated by CD–MFM. (a) Image obtained by beam profiler. (b) Optical intensity distribution. The fringe exhibits clear contrast, and its visibility was calculated as 0.86.
Fig. 6
Fig. 6 Angular shifts of CD–MFM as functions of applied voltages. The mirror angle of the CD–MFM is appropriately driven by the applied voltage. The experimental and simulated angular shifts are consistent.
Fig. 7
Fig. 7 Bench top apparatus for a preliminary experimental trial of CD–MFM. The excitation laser (YAG) is split into two beams by the CD–MFM. These beams intersect on the photoconductive layer of the DEP cell. The probe laser beam is diffracted by the concentration distribution of the sample in the DEP cell. The intensity change of the diffracted light is detected by the photodiode.
Fig. 8
Fig. 8 Temporal intensity changes of diffracted light. High-speed measurements were achieved by changing the fringe spacing.

Tables (1)

Tables Icon

Table 1 Measurement conditions

Metrics