Abstract

A resonance-enhanced, defect-mediated, ring resonator photodetector has been implemented as a single unit biosensor on a silicon-on-insulator platform, providing a cost effective means of integrating ring resonator sensors with photodetectors for lab-on-chip applications. This method overcomes the challenge of integrating hybrid photodetectors on the chip. The demonstrated responsivity of the photodetector-sensor was 90 mA/W. Devices were characterized using refractive index modified solutions and showed sensitivities of 30 nm/RIU.

© 2014 Optical Society of America

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References

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2014 (2)

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

S. Talebi Fard, V. Donzella, S. A. Schmidt, J. Flueckiger, S. M. Grist, P. Talebi Fard, Y. Wu, R. J. Bojko, E. Kwok, N. A. Jaeger, D. M. Ratner, and L. Chrostowski, “Performance of ultra-thin SOI-based resonators for sensing applications,” Opt. Express 22, 14166–14179 (2014).
[Crossref] [PubMed]

2013 (4)

S. M. Grist, S. A. Schmidt, J. Flueckiger, V. Donzella, W. Shi, S. Talebi Fard, J. T. Kirk, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Silicon photonic micro-disk resonators for label-free biosensing,” Opt. Express 21, 7994–8006 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

R. R. Grote, K. Padmaraju, B. Souhan, J. B. Driscoll, K. Bergman, and R. Osgood, “10 Gb/s error-free operation of all-silicon ion-implanted-waveguide photodiodes at 1.55 μm,” IEEE Photon. Tech. Lett. 25, 67–70 (2013).
[Crossref]

Y. Wang, J. Flueckiger, C. Lin, and L. Chrostowski, “Universal grating coupler design,” Proc. SPIE 8915, 89150Y (2013).
[Crossref]

2012 (8)

L. Virot, L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Baudot, C. Kopp, F. Boeuf, H. Zimmermann, and J. M. Fédéli, “40 Gbit/s germanium waveguide photodetector on silicon,” Proc. SPIE 8431, 84310A (2012).

D. F. Logan, P. Velha, M. Sorel, R. M. De La Rue, P. E. Jessop, and A. P. Knights, “Monitoring and tuning micro-ring properties using defect-enhanced silicon photodiodes at 1550 nm,” IEEE Photon. Tech. Lett. 24, 261–263 (2012).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

J. Ackert, A. Knights, M. Fiorentino, R. Beausoleil, and P. Jessop, “Defect enhanced silicon-on-insulator microdisk photodetector,” Optical Interconnects Conference, IEEE 2012, 76–77 (2012).

O. Scheler, J. T. Kindt, A. J. Qavi, L. Kaplinski, B. Glynn, T. Barry, A. Kurg, and R. C. Bailey, “Label-free, multiplexed detection of bacterial tmRNA using silicon photonic microring resonators,” Biosens. Bioelectron. 36, 56–61 (2012).
[Crossref] [PubMed]

W. W. Shia and R. C. Bailey, “Single domain antibodies for the detection of ricin using silicon photonic microring resonator arrays,” Anal. Chem. 85, 805–810 (2012).
[Crossref] [PubMed]

L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Kopp, H. Zimmermann, and J. M. Fédéli, “Zero-bias 40Gbit/s germanium waveguide photodetector on silicon,” Opt. Express 20, 1096 (2012).
[Crossref] [PubMed]

A. Gassenq, N. Hattasan, L. Cerutti, J. B. Rodriguez, E. Tournié, and G. Roelkens, “Study of evanescently-coupled and grating-assisted GaInAsSb photodiodes integrated on a silicon photonic chip,” Opt. Express 20, 11665–11672 (2012).
[Crossref] [PubMed]

2011 (3)

C. T. DeRose, D. C. Trotter, W. A. Zortman, A. L. Starbuck, M. Fisher, M. R. Watts, and P. S. Davids, “Ultra compact 45 GHz CMOS compatible germanium waveguide photodiode with low dark current,” Opt. Express 19, 24897–24904 (2011).
[Crossref]

J. J. Ackert, M. Fiorentino, D. F. Logan, R. G. Beausoleil, P. E. Jessop, and A. P. Knights, “Silicon-on-insulator microring resonator defect-based photodetector with 3.5-GHz bandwidth,” J. Nanophotonics 5, 059507(2011).
[Crossref]

D. Logan, K. Murray, J. Ackert, P. Velha, M. Sorel, R. M. De La Rue, P. Jessop, and A. Knights, “Analysis of resonance enhancement in defect-mediated silicon micro-ring photodiodes operating at 1550 nm,” J. Optics 13, 125503 (2011).
[Crossref]

2010 (5)

J. Michel, J. Liu, and L. C. Kimerling, “High-performance Ge-on-Si photodetectors,” Nature Photon. 4, 527–534 (2010).
[Crossref]

D. F. Logan, P. Velha, M. Sorel, R. De La Rue, A. P. Knights, and P. E. Jessop, “Defect-enhanced silicon-on-insulator waveguide resonant photodetector with high sensitivity at 1.55 μm,” IEEE Photon. Tech. Lett. 22, 1530–1532 (2010).
[Crossref]

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Quantum Electron. 16, 654–661 (2010).
[Crossref]

M. S. Luchansky, A. L. Washburn, T. A. Martin, M. Iqbal, L. C. Gunn, and R. C. Bailey, “Characterization of the evanescent field profile and bound mass sensitivity of a label-free silicon photonic microring resonator biosensing platform,” Biosens. Bioelectron. 26, 1283–1291 (2010).
[Crossref] [PubMed]

J. Doylend, P. Jessop, and A. Knights, “Silicon photonic resonator-enhanced defect-mediated photodiode for sub-bandgap detection,” Opt. Express 18, 14671–14678 (2010).
[Crossref] [PubMed]

2009 (6)

2007 (2)

J. Brouckaert, G. Roelkens, D. Van Thourhout, and R. Baets, “Compact InAlAs-InGaAs metal-semiconductor-metal photodetectors integrated on silicon-on-insulator waveguides,” IEEE Photon. Tech. Lett. 19, 1484–1486 (2007).
[Crossref]

H. Park, A. W. Fang, R. Jones, O. Cohen, O. Raday, M. N. Sysak, M. J. Paniccia, and J. E. Bowers, “A hybrid AlGaInAs-silicon evanescent waveguide photodetector,” Opt. Express 15, 6044–6052 (2007).
[Crossref] [PubMed]

2006 (2)

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Tech. Lett. 18, 2520–2522 (2006).
[Crossref]

P. J. Foster, J. K. Doylend, P. Mascher, A. P. Knights, and P. G. Coleman, “Optical attenuation in defect-engineered silicon rib waveguides,” J. Appl. Phys. 99, 073101 (2006).
[Crossref]

1997 (1)

V. V. Tuchin, I. L. Maksimova, D. A. Zimnyakov, I. L. Kon, A. H. Mavlyutov, and A. A. Mishin, “Light propagation in tissues with controlled optical properties,” J. Biomed. Opt. 2, 401–417 (1997).
[Crossref] [PubMed]

Ackert, J.

J. Ackert, A. Knights, M. Fiorentino, R. Beausoleil, and P. Jessop, “Defect enhanced silicon-on-insulator microdisk photodetector,” Optical Interconnects Conference, IEEE 2012, 76–77 (2012).

D. Logan, K. Murray, J. Ackert, P. Velha, M. Sorel, R. M. De La Rue, P. Jessop, and A. Knights, “Analysis of resonance enhancement in defect-mediated silicon micro-ring photodiodes operating at 1550 nm,” J. Optics 13, 125503 (2011).
[Crossref]

Ackert, J. J.

J. J. Ackert, M. Fiorentino, D. F. Logan, R. G. Beausoleil, P. E. Jessop, and A. P. Knights, “Silicon-on-insulator microring resonator defect-based photodetector with 3.5-GHz bandwidth,” J. Nanophotonics 5, 059507(2011).
[Crossref]

Anderson, A. S.

H. Mukundan, A. S. Anderson, W. K. Grace, K. M. Grace, N. Hartman, J. S. Martinez, and B. I. Swanson, “Waveguide-based biosensors for pathogen detection,” Sensors 9, 5783–5809 (2009).
[Crossref] [PubMed]

Baehr-Jones, T.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Quantum Electron. 16, 654–661 (2010).
[Crossref]

Baets, R.

J. Brouckaert, G. Roelkens, D. Van Thourhout, and R. Baets, “Compact InAlAs-InGaAs metal-semiconductor-metal photodetectors integrated on silicon-on-insulator waveguides,” IEEE Photon. Tech. Lett. 19, 1484–1486 (2007).
[Crossref]

Bailey, R. C.

O. Scheler, J. T. Kindt, A. J. Qavi, L. Kaplinski, B. Glynn, T. Barry, A. Kurg, and R. C. Bailey, “Label-free, multiplexed detection of bacterial tmRNA using silicon photonic microring resonators,” Biosens. Bioelectron. 36, 56–61 (2012).
[Crossref] [PubMed]

W. W. Shia and R. C. Bailey, “Single domain antibodies for the detection of ricin using silicon photonic microring resonator arrays,” Anal. Chem. 85, 805–810 (2012).
[Crossref] [PubMed]

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Quantum Electron. 16, 654–661 (2010).
[Crossref]

M. S. Luchansky, A. L. Washburn, T. A. Martin, M. Iqbal, L. C. Gunn, and R. C. Bailey, “Characterization of the evanescent field profile and bound mass sensitivity of a label-free silicon photonic microring resonator biosensing platform,” Biosens. Bioelectron. 26, 1283–1291 (2010).
[Crossref] [PubMed]

A. L. Washburn, L. C. Gunn, and R. C. Bailey, “Label-free quantitation of a cancer biomarker in complex media using silicon photonic microring resonators,” Anal. Chem. 81, 9499–9506 (2009).
[Crossref] [PubMed]

Barry, T.

O. Scheler, J. T. Kindt, A. J. Qavi, L. Kaplinski, B. Glynn, T. Barry, A. Kurg, and R. C. Bailey, “Label-free, multiplexed detection of bacterial tmRNA using silicon photonic microring resonators,” Biosens. Bioelectron. 36, 56–61 (2012).
[Crossref] [PubMed]

Baudot, C.

L. Virot, L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Baudot, C. Kopp, F. Boeuf, H. Zimmermann, and J. M. Fédéli, “40 Gbit/s germanium waveguide photodetector on silicon,” Proc. SPIE 8431, 84310A (2012).

Beausoleil, R.

J. Ackert, A. Knights, M. Fiorentino, R. Beausoleil, and P. Jessop, “Defect enhanced silicon-on-insulator microdisk photodetector,” Optical Interconnects Conference, IEEE 2012, 76–77 (2012).

Beausoleil, R. G.

J. J. Ackert, M. Fiorentino, D. F. Logan, R. G. Beausoleil, P. E. Jessop, and A. P. Knights, “Silicon-on-insulator microring resonator defect-based photodetector with 3.5-GHz bandwidth,” J. Nanophotonics 5, 059507(2011).
[Crossref]

Bergman, K.

R. R. Grote, K. Padmaraju, B. Souhan, J. B. Driscoll, K. Bergman, and R. Osgood, “10 Gb/s error-free operation of all-silicon ion-implanted-waveguide photodiodes at 1.55 μm,” IEEE Photon. Tech. Lett. 25, 67–70 (2013).
[Crossref]

Boeuf, F.

L. Virot, L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Baudot, C. Kopp, F. Boeuf, H. Zimmermann, and J. M. Fédéli, “40 Gbit/s germanium waveguide photodetector on silicon,” Proc. SPIE 8431, 84310A (2012).

Bojko, R. J.

Bowers, J. E.

Brouckaert, J.

J. Brouckaert, G. Roelkens, D. Van Thourhout, and R. Baets, “Compact InAlAs-InGaAs metal-semiconductor-metal photodetectors integrated on silicon-on-insulator waveguides,” IEEE Photon. Tech. Lett. 19, 1484–1486 (2007).
[Crossref]

Cassan, E.

Cerutti, L.

Cheben, P.

A. Densmore, M. Vachon, D.-X. Xu, S. Janz, R. Ma, Y.-H. Li, G. Lopinski, A. Delâge, J. Lapointe, C. Luebbert, Q. Y. Liu, P. Cheben, and J. H. Schmid, “Silicon photonic wire biosensor array for multiplexed, real-time and label-free molecular detection,” Opt. Lett. 34, 3598–3600 (2009).
[Crossref] [PubMed]

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Tech. Lett. 18, 2520–2522 (2006).
[Crossref]

Cheung, K. C.

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

S. M. Grist, S. A. Schmidt, J. Flueckiger, V. Donzella, W. Shi, S. Talebi Fard, J. T. Kirk, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Silicon photonic micro-disk resonators for label-free biosensing,” Opt. Express 21, 7994–8006 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. Talebi Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted bragg gratings in slot waveguide,” J. Biophotonics (2013).
[Crossref]

Chrostowski, L.

S. Talebi Fard, V. Donzella, S. A. Schmidt, J. Flueckiger, S. M. Grist, P. Talebi Fard, Y. Wu, R. J. Bojko, E. Kwok, N. A. Jaeger, D. M. Ratner, and L. Chrostowski, “Performance of ultra-thin SOI-based resonators for sensing applications,” Opt. Express 22, 14166–14179 (2014).
[Crossref] [PubMed]

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

Y. Wang, J. Flueckiger, C. Lin, and L. Chrostowski, “Universal grating coupler design,” Proc. SPIE 8915, 89150Y (2013).
[Crossref]

S. M. Grist, S. A. Schmidt, J. Flueckiger, V. Donzella, W. Shi, S. Talebi Fard, J. T. Kirk, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Silicon photonic micro-disk resonators for label-free biosensing,” Opt. Express 21, 7994–8006 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. Talebi Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted bragg gratings in slot waveguide,” J. Biophotonics (2013).
[Crossref]

L. Chrostowski and M. Hochberg, Silicon Photonics Design, ISBN: 9781105948749 (2013).

Cohen, O.

Coleman, P. G.

P. J. Foster, J. K. Doylend, P. Mascher, A. P. Knights, and P. G. Coleman, “Optical attenuation in defect-engineered silicon rib waveguides,” J. Appl. Phys. 99, 073101 (2006).
[Crossref]

Crozat, P.

Damlencourt, J.-F.

Davids, P. S.

De La Rue, R.

D. F. Logan, P. Velha, M. Sorel, R. De La Rue, A. P. Knights, and P. E. Jessop, “Defect-enhanced silicon-on-insulator waveguide resonant photodetector with high sensitivity at 1.55 μm,” IEEE Photon. Tech. Lett. 22, 1530–1532 (2010).
[Crossref]

De La Rue, R. M.

D. F. Logan, P. Velha, M. Sorel, R. M. De La Rue, P. E. Jessop, and A. P. Knights, “Monitoring and tuning micro-ring properties using defect-enhanced silicon photodiodes at 1550 nm,” IEEE Photon. Tech. Lett. 24, 261–263 (2012).
[Crossref]

D. Logan, K. Murray, J. Ackert, P. Velha, M. Sorel, R. M. De La Rue, P. Jessop, and A. Knights, “Analysis of resonance enhancement in defect-mediated silicon micro-ring photodiodes operating at 1550 nm,” J. Optics 13, 125503 (2011).
[Crossref]

Delâge, A.

A. Densmore, M. Vachon, D.-X. Xu, S. Janz, R. Ma, Y.-H. Li, G. Lopinski, A. Delâge, J. Lapointe, C. Luebbert, Q. Y. Liu, P. Cheben, and J. H. Schmid, “Silicon photonic wire biosensor array for multiplexed, real-time and label-free molecular detection,” Opt. Lett. 34, 3598–3600 (2009).
[Crossref] [PubMed]

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Tech. Lett. 18, 2520–2522 (2006).
[Crossref]

Densmore, A.

A. Densmore, M. Vachon, D.-X. Xu, S. Janz, R. Ma, Y.-H. Li, G. Lopinski, A. Delâge, J. Lapointe, C. Luebbert, Q. Y. Liu, P. Cheben, and J. H. Schmid, “Silicon photonic wire biosensor array for multiplexed, real-time and label-free molecular detection,” Opt. Lett. 34, 3598–3600 (2009).
[Crossref] [PubMed]

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Tech. Lett. 18, 2520–2522 (2006).
[Crossref]

DeRose, C. T.

Doerfler, M.

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. Talebi Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted bragg gratings in slot waveguide,” J. Biophotonics (2013).
[Crossref]

Donzella, V.

S. Talebi Fard, V. Donzella, S. A. Schmidt, J. Flueckiger, S. M. Grist, P. Talebi Fard, Y. Wu, R. J. Bojko, E. Kwok, N. A. Jaeger, D. M. Ratner, and L. Chrostowski, “Performance of ultra-thin SOI-based resonators for sensing applications,” Opt. Express 22, 14166–14179 (2014).
[Crossref] [PubMed]

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

S. M. Grist, S. A. Schmidt, J. Flueckiger, V. Donzella, W. Shi, S. Talebi Fard, J. T. Kirk, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Silicon photonic micro-disk resonators for label-free biosensing,” Opt. Express 21, 7994–8006 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

Doylend, J.

Doylend, J. K.

P. J. Foster, J. K. Doylend, P. Mascher, A. P. Knights, and P. G. Coleman, “Optical attenuation in defect-engineered silicon rib waveguides,” J. Appl. Phys. 99, 073101 (2006).
[Crossref]

Driscoll, J. B.

R. R. Grote, K. Padmaraju, B. Souhan, J. B. Driscoll, K. Bergman, and R. Osgood, “10 Gb/s error-free operation of all-silicon ion-implanted-waveguide photodiodes at 1.55 μm,” IEEE Photon. Tech. Lett. 25, 67–70 (2013).
[Crossref]

Fang, A. W.

Fédéli, J. M.

L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Kopp, H. Zimmermann, and J. M. Fédéli, “Zero-bias 40Gbit/s germanium waveguide photodetector on silicon,” Opt. Express 20, 1096 (2012).
[Crossref] [PubMed]

L. Virot, L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Baudot, C. Kopp, F. Boeuf, H. Zimmermann, and J. M. Fédéli, “40 Gbit/s germanium waveguide photodetector on silicon,” Proc. SPIE 8431, 84310A (2012).

Fédéli, J.-M.

Fiorentino, M.

J. Ackert, A. Knights, M. Fiorentino, R. Beausoleil, and P. Jessop, “Defect enhanced silicon-on-insulator microdisk photodetector,” Optical Interconnects Conference, IEEE 2012, 76–77 (2012).

J. J. Ackert, M. Fiorentino, D. F. Logan, R. G. Beausoleil, P. E. Jessop, and A. P. Knights, “Silicon-on-insulator microring resonator defect-based photodetector with 3.5-GHz bandwidth,” J. Nanophotonics 5, 059507(2011).
[Crossref]

Fisher, M.

Flueckiger, J.

S. Talebi Fard, V. Donzella, S. A. Schmidt, J. Flueckiger, S. M. Grist, P. Talebi Fard, Y. Wu, R. J. Bojko, E. Kwok, N. A. Jaeger, D. M. Ratner, and L. Chrostowski, “Performance of ultra-thin SOI-based resonators for sensing applications,” Opt. Express 22, 14166–14179 (2014).
[Crossref] [PubMed]

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

Y. Wang, J. Flueckiger, C. Lin, and L. Chrostowski, “Universal grating coupler design,” Proc. SPIE 8915, 89150Y (2013).
[Crossref]

S. M. Grist, S. A. Schmidt, J. Flueckiger, V. Donzella, W. Shi, S. Talebi Fard, J. T. Kirk, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Silicon photonic micro-disk resonators for label-free biosensing,” Opt. Express 21, 7994–8006 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. Talebi Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted bragg gratings in slot waveguide,” J. Biophotonics (2013).
[Crossref]

Foster, P. J.

P. J. Foster, J. K. Doylend, P. Mascher, A. P. Knights, and P. G. Coleman, “Optical attenuation in defect-engineered silicon rib waveguides,” J. Appl. Phys. 99, 073101 (2006).
[Crossref]

Gassenq, A.

Geis, M.

Gleeson, M. A.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Quantum Electron. 16, 654–661 (2010).
[Crossref]

Glynn, B.

O. Scheler, J. T. Kindt, A. J. Qavi, L. Kaplinski, B. Glynn, T. Barry, A. Kurg, and R. C. Bailey, “Label-free, multiplexed detection of bacterial tmRNA using silicon photonic microring resonators,” Biosens. Bioelectron. 36, 56–61 (2012).
[Crossref] [PubMed]

Grace, K. M.

H. Mukundan, A. S. Anderson, W. K. Grace, K. M. Grace, N. Hartman, J. S. Martinez, and B. I. Swanson, “Waveguide-based biosensors for pathogen detection,” Sensors 9, 5783–5809 (2009).
[Crossref] [PubMed]

Grace, W. K.

H. Mukundan, A. S. Anderson, W. K. Grace, K. M. Grace, N. Hartman, J. S. Martinez, and B. I. Swanson, “Waveguide-based biosensors for pathogen detection,” Sensors 9, 5783–5809 (2009).
[Crossref] [PubMed]

Grein, M.

Grist, S.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. Talebi Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted bragg gratings in slot waveguide,” J. Biophotonics (2013).
[Crossref]

Grist, S. M.

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

S. Talebi Fard, V. Donzella, S. A. Schmidt, J. Flueckiger, S. M. Grist, P. Talebi Fard, Y. Wu, R. J. Bojko, E. Kwok, N. A. Jaeger, D. M. Ratner, and L. Chrostowski, “Performance of ultra-thin SOI-based resonators for sensing applications,” Opt. Express 22, 14166–14179 (2014).
[Crossref] [PubMed]

S. M. Grist, S. A. Schmidt, J. Flueckiger, V. Donzella, W. Shi, S. Talebi Fard, J. T. Kirk, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Silicon photonic micro-disk resonators for label-free biosensing,” Opt. Express 21, 7994–8006 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

Grote, R. R.

R. R. Grote, K. Padmaraju, B. Souhan, J. B. Driscoll, K. Bergman, and R. Osgood, “10 Gb/s error-free operation of all-silicon ion-implanted-waveguide photodiodes at 1.55 μm,” IEEE Photon. Tech. Lett. 25, 67–70 (2013).
[Crossref]

Gunn, L. C.

M. S. Luchansky, A. L. Washburn, T. A. Martin, M. Iqbal, L. C. Gunn, and R. C. Bailey, “Characterization of the evanescent field profile and bound mass sensitivity of a label-free silicon photonic microring resonator biosensing platform,” Biosens. Bioelectron. 26, 1283–1291 (2010).
[Crossref] [PubMed]

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Quantum Electron. 16, 654–661 (2010).
[Crossref]

A. L. Washburn, L. C. Gunn, and R. C. Bailey, “Label-free quantitation of a cancer biomarker in complex media using silicon photonic microring resonators,” Anal. Chem. 81, 9499–9506 (2009).
[Crossref] [PubMed]

Gunn, W. G.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Quantum Electron. 16, 654–661 (2010).
[Crossref]

Hartman, N.

H. Mukundan, A. S. Anderson, W. K. Grace, K. M. Grace, N. Hartman, J. S. Martinez, and B. I. Swanson, “Waveguide-based biosensors for pathogen detection,” Sensors 9, 5783–5809 (2009).
[Crossref] [PubMed]

Hartmann, J. M.

L. Virot, L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Baudot, C. Kopp, F. Boeuf, H. Zimmermann, and J. M. Fédéli, “40 Gbit/s germanium waveguide photodetector on silicon,” Proc. SPIE 8431, 84310A (2012).

L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Kopp, H. Zimmermann, and J. M. Fédéli, “Zero-bias 40Gbit/s germanium waveguide photodetector on silicon,” Opt. Express 20, 1096 (2012).
[Crossref] [PubMed]

Hattasan, N.

Hochberg, M.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Quantum Electron. 16, 654–661 (2010).
[Crossref]

L. Chrostowski and M. Hochberg, Silicon Photonics Design, ISBN: 9781105948749 (2013).

Iqbal, M.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Quantum Electron. 16, 654–661 (2010).
[Crossref]

M. S. Luchansky, A. L. Washburn, T. A. Martin, M. Iqbal, L. C. Gunn, and R. C. Bailey, “Characterization of the evanescent field profile and bound mass sensitivity of a label-free silicon photonic microring resonator biosensing platform,” Biosens. Bioelectron. 26, 1283–1291 (2010).
[Crossref] [PubMed]

Jaeger, N. A.

Jaeger, N. A. F.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

Janz, S.

A. Densmore, M. Vachon, D.-X. Xu, S. Janz, R. Ma, Y.-H. Li, G. Lopinski, A. Delâge, J. Lapointe, C. Luebbert, Q. Y. Liu, P. Cheben, and J. H. Schmid, “Silicon photonic wire biosensor array for multiplexed, real-time and label-free molecular detection,” Opt. Lett. 34, 3598–3600 (2009).
[Crossref] [PubMed]

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Tech. Lett. 18, 2520–2522 (2006).
[Crossref]

Jessop, P.

J. Ackert, A. Knights, M. Fiorentino, R. Beausoleil, and P. Jessop, “Defect enhanced silicon-on-insulator microdisk photodetector,” Optical Interconnects Conference, IEEE 2012, 76–77 (2012).

D. Logan, K. Murray, J. Ackert, P. Velha, M. Sorel, R. M. De La Rue, P. Jessop, and A. Knights, “Analysis of resonance enhancement in defect-mediated silicon micro-ring photodiodes operating at 1550 nm,” J. Optics 13, 125503 (2011).
[Crossref]

J. Doylend, P. Jessop, and A. Knights, “Silicon photonic resonator-enhanced defect-mediated photodiode for sub-bandgap detection,” Opt. Express 18, 14671–14678 (2010).
[Crossref] [PubMed]

Jessop, P. E.

D. F. Logan, P. Velha, M. Sorel, R. M. De La Rue, P. E. Jessop, and A. P. Knights, “Monitoring and tuning micro-ring properties using defect-enhanced silicon photodiodes at 1550 nm,” IEEE Photon. Tech. Lett. 24, 261–263 (2012).
[Crossref]

J. J. Ackert, M. Fiorentino, D. F. Logan, R. G. Beausoleil, P. E. Jessop, and A. P. Knights, “Silicon-on-insulator microring resonator defect-based photodetector with 3.5-GHz bandwidth,” J. Nanophotonics 5, 059507(2011).
[Crossref]

D. F. Logan, P. Velha, M. Sorel, R. De La Rue, A. P. Knights, and P. E. Jessop, “Defect-enhanced silicon-on-insulator waveguide resonant photodetector with high sensitivity at 1.55 μm,” IEEE Photon. Tech. Lett. 22, 1530–1532 (2010).
[Crossref]

D. F. Logan, P. E. Jessop, and A. P. Knights, “Modeling defect enhanced detection at 1550 nm in integrated silicon waveguide photodetectors,” J. Lightwave Tech. 27, 930–937 (2009).
[Crossref]

Jones, R.

Kaplinski, L.

O. Scheler, J. T. Kindt, A. J. Qavi, L. Kaplinski, B. Glynn, T. Barry, A. Kurg, and R. C. Bailey, “Label-free, multiplexed detection of bacterial tmRNA using silicon photonic microring resonators,” Biosens. Bioelectron. 36, 56–61 (2012).
[Crossref] [PubMed]

Khumwan, P.

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

Kimerling, L. C.

J. Michel, J. Liu, and L. C. Kimerling, “High-performance Ge-on-Si photodetectors,” Nature Photon. 4, 527–534 (2010).
[Crossref]

Kindt, J. T.

O. Scheler, J. T. Kindt, A. J. Qavi, L. Kaplinski, B. Glynn, T. Barry, A. Kurg, and R. C. Bailey, “Label-free, multiplexed detection of bacterial tmRNA using silicon photonic microring resonators,” Biosens. Bioelectron. 36, 56–61 (2012).
[Crossref] [PubMed]

Kirk, J.

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. Talebi Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted bragg gratings in slot waveguide,” J. Biophotonics (2013).
[Crossref]

Kirk, J. T.

Knights, A.

J. Ackert, A. Knights, M. Fiorentino, R. Beausoleil, and P. Jessop, “Defect enhanced silicon-on-insulator microdisk photodetector,” Optical Interconnects Conference, IEEE 2012, 76–77 (2012).

D. Logan, K. Murray, J. Ackert, P. Velha, M. Sorel, R. M. De La Rue, P. Jessop, and A. Knights, “Analysis of resonance enhancement in defect-mediated silicon micro-ring photodiodes operating at 1550 nm,” J. Optics 13, 125503 (2011).
[Crossref]

J. Doylend, P. Jessop, and A. Knights, “Silicon photonic resonator-enhanced defect-mediated photodiode for sub-bandgap detection,” Opt. Express 18, 14671–14678 (2010).
[Crossref] [PubMed]

Knights, A. P.

D. F. Logan, P. Velha, M. Sorel, R. M. De La Rue, P. E. Jessop, and A. P. Knights, “Monitoring and tuning micro-ring properties using defect-enhanced silicon photodiodes at 1550 nm,” IEEE Photon. Tech. Lett. 24, 261–263 (2012).
[Crossref]

J. J. Ackert, M. Fiorentino, D. F. Logan, R. G. Beausoleil, P. E. Jessop, and A. P. Knights, “Silicon-on-insulator microring resonator defect-based photodetector with 3.5-GHz bandwidth,” J. Nanophotonics 5, 059507(2011).
[Crossref]

D. F. Logan, P. Velha, M. Sorel, R. De La Rue, A. P. Knights, and P. E. Jessop, “Defect-enhanced silicon-on-insulator waveguide resonant photodetector with high sensitivity at 1.55 μm,” IEEE Photon. Tech. Lett. 22, 1530–1532 (2010).
[Crossref]

D. F. Logan, P. E. Jessop, and A. P. Knights, “Modeling defect enhanced detection at 1550 nm in integrated silicon waveguide photodetectors,” J. Lightwave Tech. 27, 930–937 (2009).
[Crossref]

P. J. Foster, J. K. Doylend, P. Mascher, A. P. Knights, and P. G. Coleman, “Optical attenuation in defect-engineered silicon rib waveguides,” J. Appl. Phys. 99, 073101 (2006).
[Crossref]

Kon, I. L.

V. V. Tuchin, I. L. Maksimova, D. A. Zimnyakov, I. L. Kon, A. H. Mavlyutov, and A. A. Mishin, “Light propagation in tissues with controlled optical properties,” J. Biomed. Opt. 2, 401–417 (1997).
[Crossref] [PubMed]

Kopp, C.

L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Kopp, H. Zimmermann, and J. M. Fédéli, “Zero-bias 40Gbit/s germanium waveguide photodetector on silicon,” Opt. Express 20, 1096 (2012).
[Crossref] [PubMed]

L. Virot, L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Baudot, C. Kopp, F. Boeuf, H. Zimmermann, and J. M. Fédéli, “40 Gbit/s germanium waveguide photodetector on silicon,” Proc. SPIE 8431, 84310A (2012).

Kulik, P.

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

Kurg, A.

O. Scheler, J. T. Kindt, A. J. Qavi, L. Kaplinski, B. Glynn, T. Barry, A. Kurg, and R. C. Bailey, “Label-free, multiplexed detection of bacterial tmRNA using silicon photonic microring resonators,” Biosens. Bioelectron. 36, 56–61 (2012).
[Crossref] [PubMed]

Kwok, E.

Lamontagne, B.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Tech. Lett. 18, 2520–2522 (2006).
[Crossref]

Lapointe, J.

A. Densmore, M. Vachon, D.-X. Xu, S. Janz, R. Ma, Y.-H. Li, G. Lopinski, A. Delâge, J. Lapointe, C. Luebbert, Q. Y. Liu, P. Cheben, and J. H. Schmid, “Silicon photonic wire biosensor array for multiplexed, real-time and label-free molecular detection,” Opt. Lett. 34, 3598–3600 (2009).
[Crossref] [PubMed]

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Tech. Lett. 18, 2520–2522 (2006).
[Crossref]

Laval, S.

Lecunff, Y.

Lennon, D.

Li, Y.-H.

Liang, Z.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

Lin, C.

Y. Wang, J. Flueckiger, C. Lin, and L. Chrostowski, “Universal grating coupler design,” Proc. SPIE 8915, 89150Y (2013).
[Crossref]

Liu, J.

J. Michel, J. Liu, and L. C. Kimerling, “High-performance Ge-on-Si photodetectors,” Nature Photon. 4, 527–534 (2010).
[Crossref]

Liu, Q. Y.

Logan, D.

D. Logan, K. Murray, J. Ackert, P. Velha, M. Sorel, R. M. De La Rue, P. Jessop, and A. Knights, “Analysis of resonance enhancement in defect-mediated silicon micro-ring photodiodes operating at 1550 nm,” J. Optics 13, 125503 (2011).
[Crossref]

Logan, D. F.

D. F. Logan, P. Velha, M. Sorel, R. M. De La Rue, P. E. Jessop, and A. P. Knights, “Monitoring and tuning micro-ring properties using defect-enhanced silicon photodiodes at 1550 nm,” IEEE Photon. Tech. Lett. 24, 261–263 (2012).
[Crossref]

J. J. Ackert, M. Fiorentino, D. F. Logan, R. G. Beausoleil, P. E. Jessop, and A. P. Knights, “Silicon-on-insulator microring resonator defect-based photodetector with 3.5-GHz bandwidth,” J. Nanophotonics 5, 059507(2011).
[Crossref]

D. F. Logan, P. Velha, M. Sorel, R. De La Rue, A. P. Knights, and P. E. Jessop, “Defect-enhanced silicon-on-insulator waveguide resonant photodetector with high sensitivity at 1.55 μm,” IEEE Photon. Tech. Lett. 22, 1530–1532 (2010).
[Crossref]

D. F. Logan, P. E. Jessop, and A. P. Knights, “Modeling defect enhanced detection at 1550 nm in integrated silicon waveguide photodetectors,” J. Lightwave Tech. 27, 930–937 (2009).
[Crossref]

Lopinski, G.

Luchansky, M. S.

M. S. Luchansky, A. L. Washburn, T. A. Martin, M. Iqbal, L. C. Gunn, and R. C. Bailey, “Characterization of the evanescent field profile and bound mass sensitivity of a label-free silicon photonic microring resonator biosensing platform,” Biosens. Bioelectron. 26, 1283–1291 (2010).
[Crossref] [PubMed]

Luebbert, C.

Lyszczarz, T.

Ma, R.

Maksimova, I. L.

V. V. Tuchin, I. L. Maksimova, D. A. Zimnyakov, I. L. Kon, A. H. Mavlyutov, and A. A. Mishin, “Light propagation in tissues with controlled optical properties,” J. Biomed. Opt. 2, 401–417 (1997).
[Crossref] [PubMed]

Marris-Morini, D.

Martin, T. A.

M. S. Luchansky, A. L. Washburn, T. A. Martin, M. Iqbal, L. C. Gunn, and R. C. Bailey, “Characterization of the evanescent field profile and bound mass sensitivity of a label-free silicon photonic microring resonator biosensing platform,” Biosens. Bioelectron. 26, 1283–1291 (2010).
[Crossref] [PubMed]

Martinez, J. S.

H. Mukundan, A. S. Anderson, W. K. Grace, K. M. Grace, N. Hartman, J. S. Martinez, and B. I. Swanson, “Waveguide-based biosensors for pathogen detection,” Sensors 9, 5783–5809 (2009).
[Crossref] [PubMed]

Mascher, P.

P. J. Foster, J. K. Doylend, P. Mascher, A. P. Knights, and P. G. Coleman, “Optical attenuation in defect-engineered silicon rib waveguides,” J. Appl. Phys. 99, 073101 (2006).
[Crossref]

Mavlyutov, A. H.

V. V. Tuchin, I. L. Maksimova, D. A. Zimnyakov, I. L. Kon, A. H. Mavlyutov, and A. A. Mishin, “Light propagation in tissues with controlled optical properties,” J. Biomed. Opt. 2, 401–417 (1997).
[Crossref] [PubMed]

Michel, J.

J. Michel, J. Liu, and L. C. Kimerling, “High-performance Ge-on-Si photodetectors,” Nature Photon. 4, 527–534 (2010).
[Crossref]

Millspaugh, A.

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

Mishin, A. A.

V. V. Tuchin, I. L. Maksimova, D. A. Zimnyakov, I. L. Kon, A. H. Mavlyutov, and A. A. Mishin, “Light propagation in tissues with controlled optical properties,” J. Biomed. Opt. 2, 401–417 (1997).
[Crossref] [PubMed]

Mukundan, H.

H. Mukundan, A. S. Anderson, W. K. Grace, K. M. Grace, N. Hartman, J. S. Martinez, and B. I. Swanson, “Waveguide-based biosensors for pathogen detection,” Sensors 9, 5783–5809 (2009).
[Crossref] [PubMed]

Murray, K.

D. Logan, K. Murray, J. Ackert, P. Velha, M. Sorel, R. M. De La Rue, P. Jessop, and A. Knights, “Analysis of resonance enhancement in defect-mediated silicon micro-ring photodiodes operating at 1550 nm,” J. Optics 13, 125503 (2011).
[Crossref]

Nie, B.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

Osgood, R.

R. R. Grote, K. Padmaraju, B. Souhan, J. B. Driscoll, K. Bergman, and R. Osgood, “10 Gb/s error-free operation of all-silicon ion-implanted-waveguide photodiodes at 1.55 μm,” IEEE Photon. Tech. Lett. 25, 67–70 (2013).
[Crossref]

Osmond, J.

Ouellet, E.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

Padmaraju, K.

R. R. Grote, K. Padmaraju, B. Souhan, J. B. Driscoll, K. Bergman, and R. Osgood, “10 Gb/s error-free operation of all-silicon ion-implanted-waveguide photodiodes at 1.55 μm,” IEEE Photon. Tech. Lett. 25, 67–70 (2013).
[Crossref]

Paniccia, M. J.

Park, H.

Polzer, A.

L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Kopp, H. Zimmermann, and J. M. Fédéli, “Zero-bias 40Gbit/s germanium waveguide photodetector on silicon,” Opt. Express 20, 1096 (2012).
[Crossref] [PubMed]

L. Virot, L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Baudot, C. Kopp, F. Boeuf, H. Zimmermann, and J. M. Fédéli, “40 Gbit/s germanium waveguide photodetector on silicon,” Proc. SPIE 8431, 84310A (2012).

Post, E.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Tech. Lett. 18, 2520–2522 (2006).
[Crossref]

Qavi, A. J.

O. Scheler, J. T. Kindt, A. J. Qavi, L. Kaplinski, B. Glynn, T. Barry, A. Kurg, and R. C. Bailey, “Label-free, multiplexed detection of bacterial tmRNA using silicon photonic microring resonators,” Biosens. Bioelectron. 36, 56–61 (2012).
[Crossref] [PubMed]

Raday, O.

Ratner, D.

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

Ratner, D. M.

S. Talebi Fard, V. Donzella, S. A. Schmidt, J. Flueckiger, S. M. Grist, P. Talebi Fard, Y. Wu, R. J. Bojko, E. Kwok, N. A. Jaeger, D. M. Ratner, and L. Chrostowski, “Performance of ultra-thin SOI-based resonators for sensing applications,” Opt. Express 22, 14166–14179 (2014).
[Crossref] [PubMed]

S. M. Grist, S. A. Schmidt, J. Flueckiger, V. Donzella, W. Shi, S. Talebi Fard, J. T. Kirk, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Silicon photonic micro-disk resonators for label-free biosensing,” Opt. Express 21, 7994–8006 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. Talebi Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted bragg gratings in slot waveguide,” J. Biophotonics (2013).
[Crossref]

Rodriguez, J. B.

Roelkens, G.

A. Gassenq, N. Hattasan, L. Cerutti, J. B. Rodriguez, E. Tournié, and G. Roelkens, “Study of evanescently-coupled and grating-assisted GaInAsSb photodiodes integrated on a silicon photonic chip,” Opt. Express 20, 11665–11672 (2012).
[Crossref] [PubMed]

J. Brouckaert, G. Roelkens, D. Van Thourhout, and R. Baets, “Compact InAlAs-InGaAs metal-semiconductor-metal photodetectors integrated on silicon-on-insulator waveguides,” IEEE Photon. Tech. Lett. 19, 1484–1486 (2007).
[Crossref]

Scheler, O.

O. Scheler, J. T. Kindt, A. J. Qavi, L. Kaplinski, B. Glynn, T. Barry, A. Kurg, and R. C. Bailey, “Label-free, multiplexed detection of bacterial tmRNA using silicon photonic microring resonators,” Biosens. Bioelectron. 36, 56–61 (2012).
[Crossref] [PubMed]

Schmid, J.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Tech. Lett. 18, 2520–2522 (2006).
[Crossref]

Schmid, J. H.

Schmidt, S.

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. Talebi Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted bragg gratings in slot waveguide,” J. Biophotonics (2013).
[Crossref]

Schmidt, S. A.

S. Talebi Fard, V. Donzella, S. A. Schmidt, J. Flueckiger, S. M. Grist, P. Talebi Fard, Y. Wu, R. J. Bojko, E. Kwok, N. A. Jaeger, D. M. Ratner, and L. Chrostowski, “Performance of ultra-thin SOI-based resonators for sensing applications,” Opt. Express 22, 14166–14179 (2014).
[Crossref] [PubMed]

S. M. Grist, S. A. Schmidt, J. Flueckiger, V. Donzella, W. Shi, S. Talebi Fard, J. T. Kirk, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Silicon photonic micro-disk resonators for label-free biosensing,” Opt. Express 21, 7994–8006 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

Sherwali, A.

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

Shi, W.

S. M. Grist, S. A. Schmidt, J. Flueckiger, V. Donzella, W. Shi, S. Talebi Fard, J. T. Kirk, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Silicon photonic micro-disk resonators for label-free biosensing,” Opt. Express 21, 7994–8006 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

Shia, W. W.

W. W. Shia and R. C. Bailey, “Single domain antibodies for the detection of ricin using silicon photonic microring resonator arrays,” Anal. Chem. 85, 805–810 (2012).
[Crossref] [PubMed]

Sorel, M.

D. F. Logan, P. Velha, M. Sorel, R. M. De La Rue, P. E. Jessop, and A. P. Knights, “Monitoring and tuning micro-ring properties using defect-enhanced silicon photodiodes at 1550 nm,” IEEE Photon. Tech. Lett. 24, 261–263 (2012).
[Crossref]

D. Logan, K. Murray, J. Ackert, P. Velha, M. Sorel, R. M. De La Rue, P. Jessop, and A. Knights, “Analysis of resonance enhancement in defect-mediated silicon micro-ring photodiodes operating at 1550 nm,” J. Optics 13, 125503 (2011).
[Crossref]

D. F. Logan, P. Velha, M. Sorel, R. De La Rue, A. P. Knights, and P. E. Jessop, “Defect-enhanced silicon-on-insulator waveguide resonant photodetector with high sensitivity at 1.55 μm,” IEEE Photon. Tech. Lett. 22, 1530–1532 (2010).
[Crossref]

Souhan, B.

R. R. Grote, K. Padmaraju, B. Souhan, J. B. Driscoll, K. Bergman, and R. Osgood, “10 Gb/s error-free operation of all-silicon ion-implanted-waveguide photodiodes at 1.55 μm,” IEEE Photon. Tech. Lett. 25, 67–70 (2013).
[Crossref]

Spaugh, B.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Quantum Electron. 16, 654–661 (2010).
[Crossref]

Spector, S.

Starbuck, A. L.

Swanson, B. I.

H. Mukundan, A. S. Anderson, W. K. Grace, K. M. Grace, N. Hartman, J. S. Martinez, and B. I. Swanson, “Waveguide-based biosensors for pathogen detection,” Sensors 9, 5783–5809 (2009).
[Crossref] [PubMed]

Sysak, M. N.

Talebi Fard, P.

Talebi Fard, S.

S. Talebi Fard, V. Donzella, S. A. Schmidt, J. Flueckiger, S. M. Grist, P. Talebi Fard, Y. Wu, R. J. Bojko, E. Kwok, N. A. Jaeger, D. M. Ratner, and L. Chrostowski, “Performance of ultra-thin SOI-based resonators for sensing applications,” Opt. Express 22, 14166–14179 (2014).
[Crossref] [PubMed]

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

S. M. Grist, S. A. Schmidt, J. Flueckiger, V. Donzella, W. Shi, S. Talebi Fard, J. T. Kirk, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Silicon photonic micro-disk resonators for label-free biosensing,” Opt. Express 21, 7994–8006 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. Talebi Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted bragg gratings in slot waveguide,” J. Biophotonics (2013).
[Crossref]

Thompson, E. R.

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

Tournié, E.

Trotter, D. C.

Tuchin, V. V.

V. V. Tuchin, I. L. Maksimova, D. A. Zimnyakov, I. L. Kon, A. H. Mavlyutov, and A. A. Mishin, “Light propagation in tissues with controlled optical properties,” J. Biomed. Opt. 2, 401–417 (1997).
[Crossref] [PubMed]

Tybor, F.

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Quantum Electron. 16, 654–661 (2010).
[Crossref]

Vachon, M.

Van Thourhout, D.

J. Brouckaert, G. Roelkens, D. Van Thourhout, and R. Baets, “Compact InAlAs-InGaAs metal-semiconductor-metal photodetectors integrated on silicon-on-insulator waveguides,” IEEE Photon. Tech. Lett. 19, 1484–1486 (2007).
[Crossref]

Velha, P.

D. F. Logan, P. Velha, M. Sorel, R. M. De La Rue, P. E. Jessop, and A. P. Knights, “Monitoring and tuning micro-ring properties using defect-enhanced silicon photodiodes at 1550 nm,” IEEE Photon. Tech. Lett. 24, 261–263 (2012).
[Crossref]

D. Logan, K. Murray, J. Ackert, P. Velha, M. Sorel, R. M. De La Rue, P. Jessop, and A. Knights, “Analysis of resonance enhancement in defect-mediated silicon micro-ring photodiodes operating at 1550 nm,” J. Optics 13, 125503 (2011).
[Crossref]

D. F. Logan, P. Velha, M. Sorel, R. De La Rue, A. P. Knights, and P. E. Jessop, “Defect-enhanced silicon-on-insulator waveguide resonant photodetector with high sensitivity at 1.55 μm,” IEEE Photon. Tech. Lett. 22, 1530–1532 (2010).
[Crossref]

Virot, L.

L. Virot, L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Baudot, C. Kopp, F. Boeuf, H. Zimmermann, and J. M. Fédéli, “40 Gbit/s germanium waveguide photodetector on silicon,” Proc. SPIE 8431, 84310A (2012).

Vivien, L.

Waldron, P.

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Tech. Lett. 18, 2520–2522 (2006).
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S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

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S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. Talebi Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted bragg gratings in slot waveguide,” J. Biophotonics (2013).
[Crossref]

Wang, Y.

Y. Wang, J. Flueckiger, C. Lin, and L. Chrostowski, “Universal grating coupler design,” Proc. SPIE 8915, 89150Y (2013).
[Crossref]

Washburn, A. L.

M. S. Luchansky, A. L. Washburn, T. A. Martin, M. Iqbal, L. C. Gunn, and R. C. Bailey, “Characterization of the evanescent field profile and bound mass sensitivity of a label-free silicon photonic microring resonator biosensing platform,” Biosens. Bioelectron. 26, 1283–1291 (2010).
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A. L. Washburn, L. C. Gunn, and R. C. Bailey, “Label-free quantitation of a cancer biomarker in complex media using silicon photonic microring resonators,” Anal. Chem. 81, 9499–9506 (2009).
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Watts, M. R.

Webb, M.

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
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Wu, W.

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

Wu, Y.

Xu, D.-X.

A. Densmore, M. Vachon, D.-X. Xu, S. Janz, R. Ma, Y.-H. Li, G. Lopinski, A. Delâge, J. Lapointe, C. Luebbert, Q. Y. Liu, P. Cheben, and J. H. Schmid, “Silicon photonic wire biosensor array for multiplexed, real-time and label-free molecular detection,” Opt. Lett. 34, 3598–3600 (2009).
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A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Tech. Lett. 18, 2520–2522 (2006).
[Crossref]

Yoon, J.

Yun, H.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

Zimmermann, H.

L. Virot, L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Baudot, C. Kopp, F. Boeuf, H. Zimmermann, and J. M. Fédéli, “40 Gbit/s germanium waveguide photodetector on silicon,” Proc. SPIE 8431, 84310A (2012).

L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Kopp, H. Zimmermann, and J. M. Fédéli, “Zero-bias 40Gbit/s germanium waveguide photodetector on silicon,” Opt. Express 20, 1096 (2012).
[Crossref] [PubMed]

Zimnyakov, D. A.

V. V. Tuchin, I. L. Maksimova, D. A. Zimnyakov, I. L. Kon, A. H. Mavlyutov, and A. A. Mishin, “Light propagation in tissues with controlled optical properties,” J. Biomed. Opt. 2, 401–417 (1997).
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Zortman, W. A.

Anal. Chem. (2)

A. L. Washburn, L. C. Gunn, and R. C. Bailey, “Label-free quantitation of a cancer biomarker in complex media using silicon photonic microring resonators,” Anal. Chem. 81, 9499–9506 (2009).
[Crossref] [PubMed]

W. W. Shia and R. C. Bailey, “Single domain antibodies for the detection of ricin using silicon photonic microring resonator arrays,” Anal. Chem. 85, 805–810 (2012).
[Crossref] [PubMed]

Biosens. Bioelectron. (2)

M. S. Luchansky, A. L. Washburn, T. A. Martin, M. Iqbal, L. C. Gunn, and R. C. Bailey, “Characterization of the evanescent field profile and bound mass sensitivity of a label-free silicon photonic microring resonator biosensing platform,” Biosens. Bioelectron. 26, 1283–1291 (2010).
[Crossref] [PubMed]

O. Scheler, J. T. Kindt, A. J. Qavi, L. Kaplinski, B. Glynn, T. Barry, A. Kurg, and R. C. Bailey, “Label-free, multiplexed detection of bacterial tmRNA using silicon photonic microring resonators,” Biosens. Bioelectron. 36, 56–61 (2012).
[Crossref] [PubMed]

IEEE J. Quantum Electron. (1)

M. Iqbal, M. A. Gleeson, B. Spaugh, F. Tybor, W. G. Gunn, M. Hochberg, T. Baehr-Jones, R. C. Bailey, and L. C. Gunn, “Label-free biosensor arrays based on silicon ring resonators and high-speed optical scanning instrumentation,” IEEE J. Quantum Electron. 16, 654–661 (2010).
[Crossref]

IEEE Photon. Tech. Lett. (5)

J. Brouckaert, G. Roelkens, D. Van Thourhout, and R. Baets, “Compact InAlAs-InGaAs metal-semiconductor-metal photodetectors integrated on silicon-on-insulator waveguides,” IEEE Photon. Tech. Lett. 19, 1484–1486 (2007).
[Crossref]

D. F. Logan, P. Velha, M. Sorel, R. M. De La Rue, P. E. Jessop, and A. P. Knights, “Monitoring and tuning micro-ring properties using defect-enhanced silicon photodiodes at 1550 nm,” IEEE Photon. Tech. Lett. 24, 261–263 (2012).
[Crossref]

D. F. Logan, P. Velha, M. Sorel, R. De La Rue, A. P. Knights, and P. E. Jessop, “Defect-enhanced silicon-on-insulator waveguide resonant photodetector with high sensitivity at 1.55 μm,” IEEE Photon. Tech. Lett. 22, 1530–1532 (2010).
[Crossref]

R. R. Grote, K. Padmaraju, B. Souhan, J. B. Driscoll, K. Bergman, and R. Osgood, “10 Gb/s error-free operation of all-silicon ion-implanted-waveguide photodiodes at 1.55 μm,” IEEE Photon. Tech. Lett. 25, 67–70 (2013).
[Crossref]

A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photon. Tech. Lett. 18, 2520–2522 (2006).
[Crossref]

J. Appl. Phys. (1)

P. J. Foster, J. K. Doylend, P. Mascher, A. P. Knights, and P. G. Coleman, “Optical attenuation in defect-engineered silicon rib waveguides,” J. Appl. Phys. 99, 073101 (2006).
[Crossref]

J. Biomed. Opt. (1)

V. V. Tuchin, I. L. Maksimova, D. A. Zimnyakov, I. L. Kon, A. H. Mavlyutov, and A. A. Mishin, “Light propagation in tissues with controlled optical properties,” J. Biomed. Opt. 2, 401–417 (1997).
[Crossref] [PubMed]

J. Lightwave Tech. (1)

D. F. Logan, P. E. Jessop, and A. P. Knights, “Modeling defect enhanced detection at 1550 nm in integrated silicon waveguide photodetectors,” J. Lightwave Tech. 27, 930–937 (2009).
[Crossref]

J. Nanophotonics (1)

J. J. Ackert, M. Fiorentino, D. F. Logan, R. G. Beausoleil, P. E. Jessop, and A. P. Knights, “Silicon-on-insulator microring resonator defect-based photodetector with 3.5-GHz bandwidth,” J. Nanophotonics 5, 059507(2011).
[Crossref]

J. Optics (1)

D. Logan, K. Murray, J. Ackert, P. Velha, M. Sorel, R. M. De La Rue, P. Jessop, and A. Knights, “Analysis of resonance enhancement in defect-mediated silicon micro-ring photodiodes operating at 1550 nm,” J. Optics 13, 125503 (2011).
[Crossref]

Nature Photon. (1)

J. Michel, J. Liu, and L. C. Kimerling, “High-performance Ge-on-Si photodetectors,” Nature Photon. 4, 527–534 (2010).
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Opt. Express (9)

H. Park, A. W. Fang, R. Jones, O. Cohen, O. Raday, M. N. Sysak, M. J. Paniccia, and J. E. Bowers, “A hybrid AlGaInAs-silicon evanescent waveguide photodetector,” Opt. Express 15, 6044–6052 (2007).
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M. Geis, S. Spector, M. Grein, J. Yoon, D. Lennon, and T. Lyszczarz, “Silicon waveguide infrared photodiodes with >35 GHz bandwidth and phototransistors with 50 AW−1 response,” Opt. Express 17, 5193–5204 (2009).
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L. Vivien, J. Osmond, J.-M. Fédéli, D. Marris-Morini, P. Crozat, J.-F. Damlencourt, E. Cassan, Y. Lecunff, and S. Laval, “42 GHz PIN germanium photodetector integrated in a silicon-on-insulator waveguide,” Opt. Express 17, 6252–6257 (2009).
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J. Doylend, P. Jessop, and A. Knights, “Silicon photonic resonator-enhanced defect-mediated photodiode for sub-bandgap detection,” Opt. Express 18, 14671–14678 (2010).
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C. T. DeRose, D. C. Trotter, W. A. Zortman, A. L. Starbuck, M. Fisher, M. R. Watts, and P. S. Davids, “Ultra compact 45 GHz CMOS compatible germanium waveguide photodiode with low dark current,” Opt. Express 19, 24897–24904 (2011).
[Crossref]

L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Kopp, H. Zimmermann, and J. M. Fédéli, “Zero-bias 40Gbit/s germanium waveguide photodetector on silicon,” Opt. Express 20, 1096 (2012).
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A. Gassenq, N. Hattasan, L. Cerutti, J. B. Rodriguez, E. Tournié, and G. Roelkens, “Study of evanescently-coupled and grating-assisted GaInAsSb photodiodes integrated on a silicon photonic chip,” Opt. Express 20, 11665–11672 (2012).
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S. M. Grist, S. A. Schmidt, J. Flueckiger, V. Donzella, W. Shi, S. Talebi Fard, J. T. Kirk, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Silicon photonic micro-disk resonators for label-free biosensing,” Opt. Express 21, 7994–8006 (2013).
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S. Talebi Fard, V. Donzella, S. A. Schmidt, J. Flueckiger, S. M. Grist, P. Talebi Fard, Y. Wu, R. J. Bojko, E. Kwok, N. A. Jaeger, D. M. Ratner, and L. Chrostowski, “Performance of ultra-thin SOI-based resonators for sensing applications,” Opt. Express 22, 14166–14179 (2014).
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Opt. Lett. (1)

Optical Interconnects Conference, IEEE (1)

J. Ackert, A. Knights, M. Fiorentino, R. Beausoleil, and P. Jessop, “Defect enhanced silicon-on-insulator microdisk photodetector,” Optical Interconnects Conference, IEEE 2012, 76–77 (2012).

Proc. SPIE (3)

Y. Wang, J. Flueckiger, C. Lin, and L. Chrostowski, “Universal grating coupler design,” Proc. SPIE 8915, 89150Y (2013).
[Crossref]

L. Virot, L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Baudot, C. Kopp, F. Boeuf, H. Zimmermann, and J. M. Fédéli, “40 Gbit/s germanium waveguide photodetector on silicon,” Proc. SPIE 8431, 84310A (2012).

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

Proc. SPIE, Biosensing and Nanomedicine VII (1)

S. Schmidt, J. Flueckiger, W. Wu, S. M. Grist, S. Talebi Fard, V. Donzella, P. Khumwan, E. R. Thompson, Q. Wang, P. Kulik, X. Wang, A. Sherwali, J. Kirk, K. C. Cheung, L. Chrostowski, and D. Ratner, “Improving the performance of silicon photonic rings, disks, and bragg gratings for use in label-free biosensing,” Proc. SPIE, Biosensing and Nanomedicine VII 9166, 91660M (2014).
[Crossref]

Proc. SPIE, Silicon Photonics VIII (1)

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE, Silicon Photonics VIII 8629, 862909 (2013).
[Crossref]

Sensors (1)

H. Mukundan, A. S. Anderson, W. K. Grace, K. M. Grace, N. Hartman, J. S. Martinez, and B. I. Swanson, “Waveguide-based biosensors for pathogen detection,” Sensors 9, 5783–5809 (2009).
[Crossref] [PubMed]

Other (2)

L. Chrostowski and M. Hochberg, Silicon Photonics Design, ISBN: 9781105948749 (2013).

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. Talebi Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted bragg gratings in slot waveguide,” J. Biophotonics (2013).
[Crossref]

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Figures (6)

Fig. 1
Fig. 1 Schematic representations of proposed designs for biosensing: a) a defect-mediated ring resonator photodetector-sensor; b) a defect-mediated disk resonator photodetector-sensor; and c) a defect-mediated Bragg grating photodetector-sensor. The region of the detector with defects is highlighted in bold cyan. The remaining waveguide is shown in beige.
Fig. 2
Fig. 2 Schematic of detector cross-section
Fig. 3
Fig. 3 a) Schematic representation of design A (where the metal contact passes above the coupling region of the ring) ; b) Microscopic picture of design A; c) Schematic representation of design B (where the highly-doped silicon wire passes through the waveguide); d) Microscopic picture of design B. In Figs (a) and (c), the gray overlay indicates where the cladding oxide was removed.
Fig. 4
Fig. 4 IV curves for designs A and B.
Fig. 5
Fig. 5 Measured electrical and optical responses of our implanted detector resonator sensors: a) Design A, and b) Design B.
Fig. 6
Fig. 6 a) Normalized electrical response of photodetector-sensor design A when exposed to various salt solution concentrations. b) Resonant wavelength shift as a function of the change in refractive index of the solution, for design A. The slope of the best fit line, defined as the sensitivity, is approximately 30 nm/RIU.

Tables (1)

Tables Icon

Table 1 Summary of the performances of designs A and B

Metrics