Abstract

This paper discusses features of the monitoring of the topology-formation error of angular dials, rasters, or multidigit code disks. It is shown that, when the fabrication accuracy of these items is monitored in the transillumination regime, existing angle-measuring machines are susceptible to perturbing action due to the nonideal nature of the transparent media of the test object. This article discusses the possibility of using repeated transmission of the probe beam through a transparent medium to implement a measurement process that is invariant to the nonideal properties of the optical substrate.

© 2018 Optical Society of America

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