Abstract

For large optical elements which are tested by many sub-apertures, it takes too much time for a sub-aperture stitching algorithm to get the stitching result. To solve this problem, we propose a fast sub-aperture stitching algorithm to quickly compensate for piston, tilt, and defocus errors. Moreover, the new algorithm is easy to understand and program. We use partial derivatives of measurement data to separately solve piston, tilt, and defocus errors. First, we show that the new algorithm has a lower time complexity than the currently used algorithm. Although simulation results indicate that the accuracy of the new algorithm is lower than the current algorithm in all 20 simulations, our experimental results validate the algorithm and show it is sufficiently accurate for general use.

© 2015 Optical Society of Korea

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